DE69405002D1 - Verfahren zur herstellung von diamant- und diamantartigen beschichtungen - Google Patents

Verfahren zur herstellung von diamant- und diamantartigen beschichtungen

Info

Publication number
DE69405002D1
DE69405002D1 DE69405002T DE69405002T DE69405002D1 DE 69405002 D1 DE69405002 D1 DE 69405002D1 DE 69405002 T DE69405002 T DE 69405002T DE 69405002 T DE69405002 T DE 69405002T DE 69405002 D1 DE69405002 D1 DE 69405002D1
Authority
DE
Germany
Prior art keywords
diamond
coatings
producing
producing diamond
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69405002T
Other languages
English (en)
Other versions
DE69405002T2 (de
Inventor
Pavel P Kulik
Eugenia Zorina
Vladimir Ivanov
John Gay
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OPA OVERSEAS PUBLISHERS ASS AM
Original Assignee
OPA OVERSEAS PUBLISHERS ASS AM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OPA OVERSEAS PUBLISHERS ASS AM filed Critical OPA OVERSEAS PUBLISHERS ASS AM
Application granted granted Critical
Publication of DE69405002D1 publication Critical patent/DE69405002D1/de
Publication of DE69405002T2 publication Critical patent/DE69405002T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • C23C16/276—Diamond only using plasma jets
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/10—Heating of the reaction chamber or the substrate
    • C30B25/105—Heating of the reaction chamber or the substrate by irradiation or electric discharge
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/04—Diamond
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S427/00—Coating processes
    • Y10S427/103—Diamond-like carbon coating, i.e. DLC
    • Y10S427/106—Utilizing plasma, e.g. corona, glow discharge, cold plasma

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
DE69405002T 1993-09-23 1994-09-21 Verfahren zur herstellung von diamant- und diamantartigen beschichtungen Expired - Fee Related DE69405002T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB9319627A GB2282390B (en) 1993-09-23 1993-09-23 Method for obtaining diamond and diamond-like films
PCT/EP1994/003160 WO1995008657A1 (en) 1993-09-23 1994-09-21 Method for obtaining diamond and diamond-like films

Publications (2)

Publication Number Publication Date
DE69405002D1 true DE69405002D1 (de) 1997-09-18
DE69405002T2 DE69405002T2 (de) 1997-12-11

Family

ID=10742398

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69405002T Expired - Fee Related DE69405002T2 (de) 1993-09-23 1994-09-21 Verfahren zur herstellung von diamant- und diamantartigen beschichtungen

Country Status (5)

Country Link
US (1) US5667852A (de)
EP (1) EP0720665B1 (de)
DE (1) DE69405002T2 (de)
GB (1) GB2282390B (de)
WO (1) WO1995008657A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6592839B2 (en) * 1991-11-25 2003-07-15 The University Of Chicago Tailoring nanocrystalline diamond film properties
US20100297391A1 (en) * 2004-02-25 2010-11-25 General Nanotechnoloy Llc Diamond capsules and methods of manufacture
US7309446B1 (en) * 2004-02-25 2007-12-18 Metadigm Llc Methods of manufacturing diamond capsules
US9470485B1 (en) 2004-03-29 2016-10-18 Victor B. Kley Molded plastic cartridge with extended flash tube, sub-sonic cartridges, and user identification for firearms and site sensing fire control
US7939367B1 (en) * 2008-12-18 2011-05-10 Crystallume Corporation Method for growing an adherent diamond layer atop an interlayer bonded to a compound semiconductor substrate
US9921017B1 (en) 2013-03-15 2018-03-20 Victor B. Kley User identification for weapons and site sensing fire control

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4645977A (en) * 1984-08-31 1987-02-24 Matsushita Electric Industrial Co., Ltd. Plasma CVD apparatus and method for forming a diamond like carbon film
JPH0622719B2 (ja) * 1985-05-13 1994-03-30 小野田セメント株式会社 複ト−チ型プラズマ溶射方法及びその装置
JPS63107898A (ja) * 1986-10-23 1988-05-12 Natl Inst For Res In Inorg Mater プラズマを用いるダイヤモンドの合成法
DE3884653T2 (de) * 1987-04-03 1994-02-03 Fujitsu Ltd Verfahren und Vorrichtung zur Gasphasenabscheidung von Diamant.
US5094878A (en) * 1989-06-21 1992-03-10 Nippon Soken, Inc. Process for forming diamond film
JPH03111577A (ja) * 1989-09-26 1991-05-13 Idemitsu Petrochem Co Ltd マイクロ波プラズマ発生装置およびそれを利用するダイヤモンド膜の製造方法
US5260106A (en) * 1990-08-03 1993-11-09 Fujitsu Limited Method for forming diamond films by plasma jet CVD
JP2938552B2 (ja) * 1990-10-17 1999-08-23 富士通株式会社 コーティング膜の製造方法およびコーティング膜の製造装置
JP3166226B2 (ja) * 1991-07-10 2001-05-14 住友電気工業株式会社 ダイヤモンドの製造法及び製造装置

Also Published As

Publication number Publication date
WO1995008657A1 (en) 1995-03-30
GB2282390A (en) 1995-04-05
US5667852A (en) 1997-09-16
EP0720665A1 (de) 1996-07-10
EP0720665B1 (de) 1997-08-13
GB2282390B (en) 1997-04-30
GB9319627D0 (en) 1993-11-10
DE69405002T2 (de) 1997-12-11

Similar Documents

Publication Publication Date Title
DE69702610D1 (de) Verfahren zur herstellung von hydroxylapatit-beschichtungen
DE59403587D1 (de) Beschichtungsmaterial und Verfahren zur Herstellung funktioneller Beschichtungen
DE69426870D1 (de) Verfahren zur herstellung von aminochinolinen
DE69723724D1 (de) Verfahren zur herstellung von polyurethan-peo-heparin-beschichtungen
DE69628441D1 (de) Verfahren zur herstellung von beschichteten kunststoffoberflächen
DE69407734D1 (de) Verfahren zur Herstellung diamantartiger Beschichtungen
DE69418851D1 (de) Verfahren zur Herstellung von Befestigungsvorrichtungen
DE69308587D1 (de) Verfahren zur herstellung von durchsichtigen säure-ätzungsbesändigen beschichtungssystemen
DE69428124D1 (de) Verfahren zur herstellung von perhalofluorierten butanen
DE69701129D1 (de) VERFAHREN ZUR HERSTELLUNG VON Ti 1-xAlxN BESCHICHTUNGEN
DE69604712D1 (de) Alpha-Aluminiumoxid und Verfahren zur dessen Herstellung
DE69618022D1 (de) Verfahren zur Herstellung von Schleifmitteln
ATE178586T1 (de) Verfahren zur herstellung von n-aryl- und n- hetarylhydroxylaminen
DE59406740D1 (de) Verfahren zur herstellung von polytetrahydrofuran
DE59305905D1 (de) Verfahren zur herstellung von n-alkanoyl-polyhydroxyalkylaminen
DE69613964D1 (de) Verfahren zur herstellung von pentafluoroethan und tetrafluorochloroethan
DE59603938D1 (de) Verfahren zur Herstellung von Ajoen
DE69428880D1 (de) Verfahren zur herstellung beschichteter teilchen
DE69414253D1 (de) Verfahren zur herstellung von oximin
DE69424948D1 (de) Verfahren zur herstellung von fluorierten propanen und pentanen
DE59402555D1 (de) Verfahren zur herstellung von epoxysiloxanen
DE69327650D1 (de) Verfahren zur herstellung von chlordioxid
DE69712602D1 (de) Verfahren zur herstellung von tensiden
DE69408873D1 (de) Verfahren zur herstellung von carbamaten
DE59401406D1 (de) Verfahren zur herstellung von naphtalocyaninen

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee