DE69308859T3 - Verfahren und Vorrichtung zur Herstellung einer Kunststoffolie mit einer dielektrischen Schicht - Google Patents
Verfahren und Vorrichtung zur Herstellung einer Kunststoffolie mit einer dielektrischen SchichtInfo
- Publication number
- DE69308859T3 DE69308859T3 DE1993608859 DE69308859T DE69308859T3 DE 69308859 T3 DE69308859 T3 DE 69308859T3 DE 1993608859 DE1993608859 DE 1993608859 DE 69308859 T DE69308859 T DE 69308859T DE 69308859 T3 DE69308859 T3 DE 69308859T3
- Authority
- DE
- Germany
- Prior art keywords
- producing
- dielectric layer
- plastic film
- plastic
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/081—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/10—Glass or silica
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP19930830451 EP0656430B2 (de) | 1993-11-09 | 1993-11-09 | Verfahren und Vorrichtung zur gleichzeitigen Beschichtung von Kunststoffsubstraten mit Metalloxyden |
Publications (3)
Publication Number | Publication Date |
---|---|
DE69308859D1 DE69308859D1 (de) | 1997-04-17 |
DE69308859T2 DE69308859T2 (de) | 1997-07-24 |
DE69308859T3 true DE69308859T3 (de) | 2000-11-02 |
Family
ID=8215247
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE1993608859 Expired - Fee Related DE69308859T3 (de) | 1993-11-09 | 1993-11-09 | Verfahren und Vorrichtung zur Herstellung einer Kunststoffolie mit einer dielektrischen Schicht |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP0656430B2 (de) |
DE (1) | DE69308859T3 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT1277813B1 (it) * | 1995-02-01 | 1997-11-12 | Galileo Vacuum Tec Spa | Procedimento perfezionato per la co-deposizione di ossidi metallici su un film plastico, relativo impianto e prodotto ottenuto |
US8057856B2 (en) * | 2004-03-15 | 2011-11-15 | Ifire Ip Corporation | Method for gettering oxygen and water during vacuum deposition of sulfide films |
US20060269656A1 (en) * | 2005-05-26 | 2006-11-30 | Eastman Kodak Company | Reducing contamination in OLED processing systems |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB990288A (en) * | 1961-09-05 | 1965-04-28 | Ibm | Improved method of depositing silicon monoxide films |
JPS58167767A (ja) * | 1982-03-26 | 1983-10-04 | Clarion Co Ltd | 薄膜形成方法 |
JP2612602B2 (ja) * | 1987-12-17 | 1997-05-21 | 東洋インキ製造 株式会社 | 連続蒸着フィルムの製造方法および装置 |
CA2040638A1 (en) * | 1990-04-20 | 1991-10-21 | Gedeon I. Deak | Barrier materials useful for packaging |
DE4113221A1 (de) * | 1991-04-23 | 1992-10-29 | Leybold Ag | Flexible, transparente polymerfolien |
EP0549528A1 (de) * | 1991-12-20 | 1993-06-30 | Alusuisse-Lonza Services Ag | Verfahren zur Herstellung von Substraten enthaltend eine Überzugsschicht |
-
1993
- 1993-11-09 DE DE1993608859 patent/DE69308859T3/de not_active Expired - Fee Related
- 1993-11-09 EP EP19930830451 patent/EP0656430B2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69308859D1 (de) | 1997-04-17 |
EP0656430A1 (de) | 1995-06-07 |
EP0656430B2 (de) | 2000-01-12 |
EP0656430B1 (de) | 1997-03-12 |
DE69308859T2 (de) | 1997-07-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8363 | Opposition against the patent | ||
8366 | Restricted maintained after opposition proceedings | ||
8332 | No legal effect for de | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: GALILEO VACUUM SYSTEMS S.R.L., PRATO, IT |
|
8339 | Ceased/non-payment of the annual fee |