DE69305758D1 - Akustische Oberflächenwellenanordnung - Google Patents

Akustische Oberflächenwellenanordnung

Info

Publication number: DE69305758D1
Authority: DE; Germany
Prior art keywords: acoustic wave; surface acoustic; wave arrangement; arrangement; wave
Prior art date: 1992-02-21
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

DE69305758T

Other languages

English (en)

Other versions

DE69305758T2 (de

Inventor

Hideaki Nakahata

Shinichi Shikata

Akihiro Hachigo

Naoji Fujimori

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Seiko Epson Corp

Original Assignee

Sumitomo Electric Industries Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1992-02-21

Filing date

1993-02-17

Publication date

1996-12-12

1993-02-17 Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd

1996-12-12 Publication of DE69305758D1 publication Critical patent/DE69305758D1/de

1997-03-13 Application granted granted Critical

1997-03-13 Publication of DE69305758T2 publication Critical patent/DE69305758T2/de

2013-02-18 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Links

Classifications

- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02582—Characteristics of substrate, e.g. cutting angles of diamond substrates

Landscapes

Physics & Mathematics (AREA)
Acoustics & Sound (AREA)
Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

DE69305758T 1992-02-21 1993-02-17 Akustische Oberflächenwellenanordnung Expired - Lifetime DE69305758T2 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP03475492A JP3225495B2 (ja)	1992-02-21	1992-02-21	表面弾性波素子及びその製造方法

Publications (2)

Publication Number	Publication Date
DE69305758D1 true DE69305758D1 (de)	1996-12-12
DE69305758T2 DE69305758T2 (de)	1997-03-13

Family

ID=12423111

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE69305758T Expired - Lifetime DE69305758T2 (de)	1992-02-21	1993-02-17	Akustische Oberflächenwellenanordnung

Country Status (4)

Country	Link
US (1)	US5294858A (de)
EP (1)	EP0556811B1 (de)
JP (1)	JP3225495B2 (de)
DE (1)	DE69305758T2 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP3205976B2 (ja) *	1992-09-14	2001-09-04	住友電気工業株式会社	表面弾性波素子
TW241397B (de) *	1993-01-14	1995-02-21	Murata Manufacturing Co
JP3163606B2 (ja) *	1993-01-29	2001-05-08	住友電気工業株式会社	表面弾性波素子
FR2714200B1 (fr) *	1993-11-25	1996-12-27	Fujitsu Ltd	Dispositif à onde acoustique de surface et son procédé de fabrication.
JP3318920B2 (ja) *	1994-05-10	2002-08-26	住友電気工業株式会社	表面弾性波素子
JP3282645B2 (ja) *	1994-06-16	2002-05-20	住友電気工業株式会社	表面弾性波素子
US5576589A (en) *	1994-10-13	1996-11-19	Kobe Steel Usa, Inc.	Diamond surface acoustic wave devices
US6134264A (en) *	1995-02-01	2000-10-17	Hitachi, Ltd.	Spread spectrum communication device and communication system
US5959389A (en) *	1995-08-08	1999-09-28	Sumitomo Electronic Industries, Ltd.	Diamond-ZnO surface acoustic wave device
US5783896A (en) *	1995-08-08	1998-07-21	Sumitomo Electric Industries, Ltd.	Diamond-Zn0 surface acoustic wave device
JP3205981B2 (ja) *	1995-09-29	2001-09-04	住友電気工業株式会社	表面弾性波素子
US5880552A (en) *	1997-05-27	1999-03-09	The United States Of America As Represented By The Secretary Of The Navy	Diamond or diamond like carbon coated chemical sensors and a method of making same
US6697418B1 (en) *	2000-04-26	2004-02-24	Hitachi, Ltd.	Spread spectrum communication device and communication system
JP3941502B2 (ja) *	1999-10-15	2007-07-04	セイコーエプソン株式会社	表面弾性波素子
JP2003101360A (ja) *	2001-09-19	2003-04-04	Murata Mfg Co Ltd	弾性表面波素子の電極パターン形成方法
US6797643B2 (en) *	2002-10-23	2004-09-28	Applied Materials Inc.	Plasma enhanced CVD low k carbon-doped silicon oxide film deposition using VHF-RF power
US6932092B2 (en) *	2002-11-22	2005-08-23	Applied Materials, Inc.	Method for cleaning plasma enhanced chemical vapor deposition chamber using very high frequency energy
WO2011067893A1 (ja) *	2009-12-04	2011-06-09	パナソニック株式会社	基板およびその製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS6420714A (en) *	1987-07-16	1989-01-24	Murata Manufacturing Co	Surface acoustic wave device
US4952832A (en) *	1989-10-24	1990-08-28	Sumitomo Electric Industries, Ltd.	Surface acoustic wave device
JP2885349B2 (ja) *	1989-12-26	1999-04-19	住友電気工業株式会社	表面弾性波素子

1992
- 1992-02-21 JP JP03475492A patent/JP3225495B2/ja not_active Expired - Fee Related
1993
- 1993-02-17 DE DE69305758T patent/DE69305758T2/de not_active Expired - Lifetime
- 1993-02-17 EP EP93102493A patent/EP0556811B1/de not_active Expired - Lifetime
- 1993-02-18 US US08/019,136 patent/US5294858A/en not_active Expired - Lifetime

Also Published As

Publication number	Publication date
US5294858A (en)	1994-03-15
JP3225495B2 (ja)	2001-11-05
JPH05235683A (ja)	1993-09-10
EP0556811B1 (de)	1996-11-06
EP0556811A1 (de)	1993-08-25
DE69305758T2 (de)	1997-03-13

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Legal Events

Date	Code	Title	Description
1997-12-04	8364	No opposition during term of opposition
2003-06-18	8328	Change in the person/name/address of the agent	Representative=s name: GROSSE, BOCKHORNI, SCHUMACHER, 81476 MUENCHEN
2004-09-23	8327	Change in the person/name/address of the patent owner	Owner name: SEIKO EPSON CORP., TOKIO/TOKYO, JP
2008-05-15	8328	Change in the person/name/address of the agent	Representative=s name: GROSSE, SCHUMACHER, KNAUER, VON HIRSCHHAUSEN, 8033
2013-02-19	R071	Expiry of right	Ref document number: 556811 Country of ref document: EP