DE69305258D1 - Verfahren zur Herstellung einer Vorrichtung zur Feldemission - Google Patents
Verfahren zur Herstellung einer Vorrichtung zur FeldemissionInfo
- Publication number
- DE69305258D1 DE69305258D1 DE69305258T DE69305258T DE69305258D1 DE 69305258 D1 DE69305258 D1 DE 69305258D1 DE 69305258 T DE69305258 T DE 69305258T DE 69305258 T DE69305258 T DE 69305258T DE 69305258 D1 DE69305258 D1 DE 69305258D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing
- field emission
- emission device
- field
- emission
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
- H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2209/00—Apparatus and processes for manufacture of discharge tubes
- H01J2209/02—Manufacture of cathodes
- H01J2209/022—Cold cathodes
- H01J2209/0223—Field emission cathodes
- H01J2209/0226—Sharpening or resharpening of emitting point or edge
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Cold Cathode And The Manufacture (AREA)
- Local Oxidation Of Silicon (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/908,200 US5269877A (en) | 1992-07-02 | 1992-07-02 | Field emission structure and method of forming same |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69305258D1 true DE69305258D1 (de) | 1996-11-14 |
DE69305258T2 DE69305258T2 (de) | 1997-03-13 |
Family
ID=25425354
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69305258T Expired - Lifetime DE69305258T2 (de) | 1992-07-02 | 1993-06-29 | Verfahren zur Herstellung einer Vorrichtung zur Feldemission |
Country Status (4)
Country | Link |
---|---|
US (1) | US5269877A (de) |
EP (1) | EP0578428B1 (de) |
JP (1) | JP3464500B2 (de) |
DE (1) | DE69305258T2 (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5532177A (en) * | 1993-07-07 | 1996-07-02 | Micron Display Technology | Method for forming electron emitters |
US6187604B1 (en) * | 1994-09-16 | 2001-02-13 | Micron Technology, Inc. | Method of making field emitters using porous silicon |
AU4145196A (en) * | 1994-11-04 | 1996-05-31 | Micron Display Technology, Inc. | Method for sharpening emitter sites using low temperature oxidation processes |
US5780347A (en) * | 1996-05-20 | 1998-07-14 | Kapoor; Ashok K. | Method of forming polysilicon local interconnects |
GB2378570B (en) * | 2001-08-11 | 2005-11-16 | Univ Dundee | Improved field emission backplate |
GB2378569B (en) * | 2001-08-11 | 2006-03-22 | Univ Dundee | Improved field emission backplate |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5472959A (en) * | 1977-11-24 | 1979-06-11 | Hitachi Ltd | Formation method of electrode of semiconductor device |
US4375643A (en) * | 1980-02-14 | 1983-03-01 | Xerox Corporation | Application of grown oxide bumper insulators to a high-speed VLSI SASMESFET |
US4878900A (en) * | 1988-07-27 | 1989-11-07 | Sundt Thoralf M | Surgical probe and suction device |
-
1992
- 1992-07-02 US US07/908,200 patent/US5269877A/en not_active Expired - Lifetime
-
1993
- 1993-06-18 JP JP14814593A patent/JP3464500B2/ja not_active Expired - Fee Related
- 1993-06-29 DE DE69305258T patent/DE69305258T2/de not_active Expired - Lifetime
- 1993-06-29 EP EP93305103A patent/EP0578428B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US5269877A (en) | 1993-12-14 |
JPH0689655A (ja) | 1994-03-29 |
DE69305258T2 (de) | 1997-03-13 |
EP0578428A1 (de) | 1994-01-12 |
JP3464500B2 (ja) | 2003-11-10 |
EP0578428B1 (de) | 1996-10-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8320 | Willingness to grant licences declared (paragraph 23) |