DE69303149D1 - Meniskusbeschichtungsverfahren - Google Patents
MeniskusbeschichtungsverfahrenInfo
- Publication number
- DE69303149D1 DE69303149D1 DE69303149T DE69303149T DE69303149D1 DE 69303149 D1 DE69303149 D1 DE 69303149D1 DE 69303149 T DE69303149 T DE 69303149T DE 69303149 T DE69303149 T DE 69303149T DE 69303149 D1 DE69303149 D1 DE 69303149D1
- Authority
- DE
- Germany
- Prior art keywords
- coating process
- meniscus coating
- meniscus
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
- B05C9/02—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material to surfaces by single means not covered by groups B05C1/00 - B05C7/00, whether or not also using other means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/28—Processes for applying liquids or other fluent materials performed by transfer from the surfaces of elements carrying the liquid or other fluent material, e.g. brushes, pads, rollers
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/993,315 US5270079A (en) | 1992-12-18 | 1992-12-18 | Methods of meniscus coating |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69303149D1 true DE69303149D1 (de) | 1996-07-18 |
DE69303149T2 DE69303149T2 (de) | 1997-01-30 |
Family
ID=25539377
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69303149T Expired - Fee Related DE69303149T2 (de) | 1992-12-18 | 1993-12-17 | Meniskusbeschichtungsverfahren |
Country Status (6)
Country | Link |
---|---|
US (1) | US5270079A (de) |
EP (1) | EP0603007B1 (de) |
JP (1) | JP2987797B2 (de) |
CA (1) | CA2111795C (de) |
DE (1) | DE69303149T2 (de) |
MX (1) | MX9308187A (de) |
Families Citing this family (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5358750A (en) * | 1990-12-14 | 1994-10-25 | Scapa Group Plc | Industrial fabrics |
US5650196A (en) * | 1993-05-05 | 1997-07-22 | Steag Microtech Gmbh | Device for coating substrates in semiconductor production |
JP2798503B2 (ja) * | 1993-05-27 | 1998-09-17 | 大日本印刷株式会社 | 液塗布方法および塗布装置 |
US5688324A (en) * | 1994-07-15 | 1997-11-18 | Dainippon Screen Mfg. Co., Ltd. | Apparatus for coating substrate |
US5545440A (en) * | 1994-12-05 | 1996-08-13 | At&T Global Information Solutions Company (Aka Ncr Corporation) | Method and apparatus for polymer coating of substrates |
US5601655A (en) * | 1995-02-14 | 1997-02-11 | Bok; Hendrik F. | Method of cleaning substrates |
US5902399A (en) * | 1995-07-27 | 1999-05-11 | Micron Technology, Inc. | Method and apparatus for improved coating of a semiconductor wafer |
US5935653A (en) * | 1996-01-18 | 1999-08-10 | Micron Technology, Inc. | Methods for coating a substrate |
US6117294A (en) | 1996-01-19 | 2000-09-12 | Micron Technology, Inc. | Black matrix material and methods related thereto |
US5900273A (en) * | 1996-01-19 | 1999-05-04 | Micron Technology, Inc. | Method for coating a substrate covered with a plurality of spacer members |
US5762773A (en) * | 1996-01-19 | 1998-06-09 | Micron Display Technology, Inc. | Method and system for manufacture of field emission display |
US5858459A (en) | 1996-02-22 | 1999-01-12 | Micron Technology, Inc. | Cassette invertor apparatus and method |
US5695833A (en) * | 1996-06-12 | 1997-12-09 | Bok; Hendrik F. | Method for uniform film coating of substrates |
US6039059A (en) | 1996-09-30 | 2000-03-21 | Verteq, Inc. | Wafer cleaning system |
TW418116B (en) * | 1997-11-04 | 2001-01-11 | Matsushita Electric Ind Co Ltd | Water-repellent coating and coating device |
US5869219A (en) * | 1997-11-05 | 1999-02-09 | Taiwan Semiconductor Manufacturing Co. Ltd. | Method for depositing a polyimide film |
CA2270807A1 (en) | 1999-05-03 | 2000-11-03 | Ibm Canada Limited-Ibm Canada Limitee | Closed chamber method and apparatus for the coating of liquid films |
US6593690B1 (en) * | 1999-09-03 | 2003-07-15 | 3M Innovative Properties Company | Large area organic electronic devices having conducting polymer buffer layers and methods of making same |
US7122126B1 (en) * | 2000-09-28 | 2006-10-17 | Materials And Technologies Corporation | Wet processing using a fluid meniscus, apparatus and method |
JP2001113214A (ja) * | 1999-10-19 | 2001-04-24 | Casio Comput Co Ltd | 薄膜の形成方法、及び形成装置 |
US6528117B2 (en) | 2001-01-19 | 2003-03-04 | Paul Lewis | Method for coating a substance on one side of a substrate using a single miniscus |
DE10139923A1 (de) * | 2001-08-14 | 2003-03-06 | Inductotherm Coating Equipment | Verfahren und Vorrichtung zum schmelzflüssigen Beschichten |
US7943526B2 (en) | 2004-03-22 | 2011-05-17 | Rena Sondermaschinen Gmbh | Process for the wet-chemical treatment of one side of silicon wafers |
TWI352628B (en) * | 2006-07-21 | 2011-11-21 | Akrion Technologies Inc | Nozzle for use in the megasonic cleaning of substr |
JP2008036536A (ja) * | 2006-08-07 | 2008-02-21 | Nippon Densan Corp | 撥油剤溶液の塗布方法 |
JP2010507226A (ja) * | 2006-10-16 | 2010-03-04 | マテリアルズ・アンド・テクノロジーズ・コーポレーション | 流体メニスカスを使う湿式処理装置および方法 |
DE102007033226A1 (de) | 2007-07-17 | 2009-01-22 | Kosub, Johann | Aerodynamisches Schleuderverfahren zum Auftragen von flüssigen Schichten |
CA2716131A1 (en) * | 2008-02-22 | 2009-08-27 | Materials And Technologies Corporation | Single-sided high throughput wet etching and wet processing apparatus and method |
EP2397230B1 (de) * | 2009-02-16 | 2014-10-01 | Osaka University | Vorrichtung zur herstellung eines partikelfilms und verfahren zur herstellung eines partikelfilms |
WO2011003039A2 (en) * | 2009-07-02 | 2011-01-06 | Dexcom, Inc. | Analyte sensors and methods of manufacturing same |
JP5444300B2 (ja) | 2011-09-26 | 2014-03-19 | 株式会社東芝 | 塗布装置 |
KR20150058860A (ko) * | 2013-11-21 | 2015-05-29 | 한국기계연구원 | 대면적기판 나노입자 코팅장치 |
JP6272138B2 (ja) * | 2014-05-22 | 2018-01-31 | 東京エレクトロン株式会社 | 塗布処理装置 |
JP5897749B1 (ja) * | 2015-03-18 | 2016-03-30 | 株式会社東芝 | 塗布方法および塗布装置 |
JP6239548B2 (ja) | 2015-03-18 | 2017-11-29 | 株式会社東芝 | 塗布装置及び塗布方法 |
DE102016210883A1 (de) | 2016-06-17 | 2017-12-21 | Singulus Technologies Ag | Vorrichtung und Verfahren zur Behandlung von Substraten unter Verwendung einer Auflagerolle mit porösem Material |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1289507A (en) * | 1917-12-06 | 1918-12-31 | Barrett Co | Method and apparatus for treating coated roofing materials. |
BE555735A (de) * | 1956-03-12 | |||
US3294576A (en) * | 1963-01-14 | 1966-12-27 | First Safe Deposit Nat Bank Of | Method of producing printed circuit structures |
US3429741A (en) * | 1965-06-11 | 1969-02-25 | Eastman Kodak Co | Method of coating using a bead coater |
US3367791A (en) * | 1966-07-11 | 1968-02-06 | Addressograph Multigraph | Liquid development of electrostatic images |
US3589975A (en) * | 1967-03-23 | 1971-06-29 | Reynolds Metals Co | Composite sheet of plastic and metallic material and method of making the same |
US3473955A (en) * | 1967-05-05 | 1969-10-21 | Eastman Kodak Co | Coating process |
US3535157A (en) * | 1967-12-18 | 1970-10-20 | Shipley Co | Method of coating printed circuit board having through-holes |
GB1246749A (en) * | 1968-08-22 | 1971-09-15 | Asahi Glass Co Ltd | Method of and apparatus for coating glass surfaces |
US4004045A (en) * | 1974-08-09 | 1977-01-18 | Stelter Manfred K | Method for fluid film application |
US4082868A (en) * | 1976-03-18 | 1978-04-04 | Armco Steel Corporation | Method for continuously contact-coating one side only of a ferrous base metal strip with a molten coating metal |
US4154193A (en) * | 1976-11-16 | 1979-05-15 | Tokyo Shibaura Electric Co., Ltd. | Glass frit mixture coating apparatus |
US4370356A (en) * | 1981-05-20 | 1983-01-25 | Integrated Technologies, Inc. | Method of meniscus coating |
US4676404A (en) * | 1983-10-17 | 1987-06-30 | Nippon Zeon Co., Ltd. | Method and apparatus for feeding drug liquid from hermetic returnable can |
DE69020634T2 (de) * | 1989-04-21 | 1996-04-04 | Idemitsu Kosan Co | Herstellungsverfahren für ein mit einem Film aus flüssigkristallinem Material überzogenes Substrat sowie Verfahren und Gerät zur Herstellung einer optischen Vorrichtung mit einem Flüssigkristall. |
-
1992
- 1992-12-18 US US07/993,315 patent/US5270079A/en not_active Expired - Lifetime
-
1993
- 1993-12-17 CA CA002111795A patent/CA2111795C/en not_active Expired - Fee Related
- 1993-12-17 MX MX9308187A patent/MX9308187A/es not_active IP Right Cessation
- 1993-12-17 JP JP5343309A patent/JP2987797B2/ja not_active Expired - Fee Related
- 1993-12-17 DE DE69303149T patent/DE69303149T2/de not_active Expired - Fee Related
- 1993-12-17 EP EP93310251A patent/EP0603007B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH06206027A (ja) | 1994-07-26 |
EP0603007A1 (de) | 1994-06-22 |
CA2111795C (en) | 1999-12-07 |
MX9308187A (es) | 1995-01-31 |
EP0603007B1 (de) | 1996-06-12 |
JP2987797B2 (ja) | 1999-12-06 |
DE69303149T2 (de) | 1997-01-30 |
CA2111795A1 (en) | 1994-06-19 |
US5270079A (en) | 1993-12-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |