DE69228681T2 - Submicron tip arrangement with opposite tips - Google Patents
Submicron tip arrangement with opposite tipsInfo
- Publication number
- DE69228681T2 DE69228681T2 DE69228681T DE69228681T DE69228681T2 DE 69228681 T2 DE69228681 T2 DE 69228681T2 DE 69228681 T DE69228681 T DE 69228681T DE 69228681 T DE69228681 T DE 69228681T DE 69228681 T2 DE69228681 T2 DE 69228681T2
- Authority
- DE
- Germany
- Prior art keywords
- tips
- substrate
- tip arrangement
- fabricated
- tip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 abstract 3
- 239000013078 crystal Substances 0.000 abstract 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/002—Electrostatic motors
- H02N1/006—Electrostatic motors of the gap-closing type
- H02N1/008—Laterally driven motors, e.g. of the comb-drive type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q20/00—Monitoring the movement or position of the probe
- G01Q20/04—Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
- G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/874—Probe tip array
Landscapes
- General Health & Medical Sciences (AREA)
- Radiology & Medical Imaging (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Analytical Chemistry (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Pressure Sensors (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
Self-aligned, opposed, nanometer dimension tips (12, 22) are fabricated in pairs, one of each pair being located on a movable (24) single crystal beam, with the beam being movable in three dimensions with respect to a substrate (18) carrying the other tip (12) of a pair. Motion of one tip with respect to the other is controlled or sensed by transducers (120, 122, 124, 126) formed on the supporting beams (62, 64). Spring means (76, 80, 86, 88) in each beam allow axial motion of the beam. The tips (12, 22) and beams (62, 64) are fabricated from single crystal silicon substrate (18) and the tips (12, 22) may be electrically isolated from the substrate (18) by fabricating insulating segments (40, 54) in the beam structure.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US69939091A | 1991-05-14 | 1991-05-14 | |
US07/868,138 US5235187A (en) | 1991-05-14 | 1992-04-14 | Methods of fabricating integrated, aligned tunneling tip pairs |
PCT/US1992/003917 WO1992020842A1 (en) | 1991-05-14 | 1992-05-12 | Methods of fabricating integrated, aligned tunneling tip pairs |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69228681D1 DE69228681D1 (en) | 1999-04-22 |
DE69228681T2 true DE69228681T2 (en) | 1999-07-22 |
Family
ID=27106409
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69228681T Expired - Fee Related DE69228681T2 (en) | 1991-05-14 | 1992-05-12 | Submicron tip arrangement with opposite tips |
DE69233641T Expired - Fee Related DE69233641T2 (en) | 1991-05-14 | 1992-05-12 | Manufacturing method for integrated aligned tunnel tip pairs |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69233641T Expired - Fee Related DE69233641T2 (en) | 1991-05-14 | 1992-05-12 | Manufacturing method for integrated aligned tunnel tip pairs |
Country Status (6)
Country | Link |
---|---|
US (2) | US5235187A (en) |
EP (2) | EP0584233B1 (en) |
JP (1) | JPH06507718A (en) |
AT (2) | ATE334477T1 (en) |
DE (2) | DE69228681T2 (en) |
WO (1) | WO1992020842A1 (en) |
Families Citing this family (95)
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US5684301A (en) * | 1994-04-28 | 1997-11-04 | The United States Of America As Represented By The Secretary Of Commerce | Monocrystalline test structures, and use for calibrating instruments |
JP3896158B2 (en) * | 1993-02-04 | 2007-03-22 | コーネル・リサーチ・ファウンデーション・インコーポレイテッド | Microstructure and single mask, single crystal process for its manufacture |
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US7571638B1 (en) * | 2005-05-10 | 2009-08-11 | Kley Victor B | Tool tips with scanning probe microscopy and/or atomic force microscopy applications |
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US9778572B1 (en) | 2013-03-15 | 2017-10-03 | Victor B. Kley | In-plane scanning probe microscopy tips and tools for wafers and substrates with diverse designs on one wafer or substrate |
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CH1494868A4 (en) * | 1968-10-08 | 1971-03-15 | Proctor Ets | |
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-
1992
- 1992-04-14 US US07/868,138 patent/US5235187A/en not_active Expired - Lifetime
- 1992-05-12 DE DE69228681T patent/DE69228681T2/en not_active Expired - Fee Related
- 1992-05-12 EP EP92912228A patent/EP0584233B1/en not_active Expired - Lifetime
- 1992-05-12 WO PCT/US1992/003917 patent/WO1992020842A1/en active IP Right Grant
- 1992-05-12 EP EP98116809A patent/EP0907076B1/en not_active Expired - Lifetime
- 1992-05-12 AT AT98116809T patent/ATE334477T1/en not_active IP Right Cessation
- 1992-05-12 AT AT92912228T patent/ATE177875T1/en active
- 1992-05-12 DE DE69233641T patent/DE69233641T2/en not_active Expired - Fee Related
- 1992-05-12 JP JP5500128A patent/JPH06507718A/en active Pending
-
1993
- 1993-06-15 US US08/076,906 patent/US5449903A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
WO1992020842A1 (en) | 1992-11-26 |
DE69233641T2 (en) | 2007-08-09 |
DE69228681D1 (en) | 1999-04-22 |
ATE177875T1 (en) | 1999-04-15 |
US5449903A (en) | 1995-09-12 |
EP0584233A1 (en) | 1994-03-02 |
EP0907076A2 (en) | 1999-04-07 |
US5235187A (en) | 1993-08-10 |
EP0907076B1 (en) | 2006-07-26 |
EP0584233B1 (en) | 1999-03-17 |
DE69233641D1 (en) | 2006-09-07 |
ATE334477T1 (en) | 2006-08-15 |
EP0584233A4 (en) | 1996-10-02 |
EP0907076A3 (en) | 2000-10-04 |
JPH06507718A (en) | 1994-09-01 |
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