DE69228562T2 - Verfahren zur herstellung von aluminiumnitridpulver - Google Patents

Verfahren zur herstellung von aluminiumnitridpulver

Info

Publication number
DE69228562T2
DE69228562T2 DE69228562T DE69228562T DE69228562T2 DE 69228562 T2 DE69228562 T2 DE 69228562T2 DE 69228562 T DE69228562 T DE 69228562T DE 69228562 T DE69228562 T DE 69228562T DE 69228562 T2 DE69228562 T2 DE 69228562T2
Authority
DE
Germany
Prior art keywords
aluminum nitride
nitride powder
producing aluminum
producing
powder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69228562T
Other languages
English (en)
Other versions
DE69228562D1 (de
Inventor
Alan Weimer
Gene Cochran
John Henley
Glenn Eisman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dow Chemical Co
Original Assignee
Dow Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dow Chemical Co filed Critical Dow Chemical Co
Publication of DE69228562D1 publication Critical patent/DE69228562D1/de
Application granted granted Critical
Publication of DE69228562T2 publication Critical patent/DE69228562T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/072—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with aluminium
    • C01B21/0728—After-treatment, e.g. grinding, purification
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/072—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with aluminium
    • C01B21/0722—Preparation by direct nitridation of aluminium
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/072—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with aluminium
    • C01B21/0726—Preparation by carboreductive nitridation
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/0615—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with transition metals other than titanium, zirconium or hafnium
    • C01B21/0617—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with transition metals other than titanium, zirconium or hafnium with vanadium, niobium or tantalum
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/064—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with boron
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/076—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with titanium or zirconium or hafnium
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/12—Surface area

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Products (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
DE69228562T 1992-01-10 1992-12-09 Verfahren zur herstellung von aluminiumnitridpulver Expired - Fee Related DE69228562T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/819,425 US5219804A (en) 1992-01-10 1992-01-10 Process for preparing ultrafine aluminum nitride powder
PCT/US1992/010574 WO1993014027A2 (en) 1992-01-10 1992-12-09 Process for preparing ultrafine aluminum nitride powder

Publications (2)

Publication Number Publication Date
DE69228562D1 DE69228562D1 (de) 1999-04-08
DE69228562T2 true DE69228562T2 (de) 1999-11-11

Family

ID=25228124

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69228562T Expired - Fee Related DE69228562T2 (de) 1992-01-10 1992-12-09 Verfahren zur herstellung von aluminiumnitridpulver

Country Status (6)

Country Link
US (1) US5219804A (de)
EP (1) EP0620803B1 (de)
JP (1) JPH08508000A (de)
CA (1) CA2126343A1 (de)
DE (1) DE69228562T2 (de)
WO (1) WO1993014027A2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102019211921A1 (de) * 2019-08-08 2021-02-11 Schmid Silicon Technology Gmbh Verfahren und Vorrichtung zur Erzeugung siliziumhaltiger Materialien

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5279808A (en) * 1992-12-17 1994-01-18 United Technologies Corporation Metal nitride powders
FR2710048B1 (fr) * 1993-09-17 1995-11-03 Atochem Elf Sa Procédé de préparation en continu de nitrure d'aluminium par carbonitruration d'alumine.
US5525320A (en) * 1994-07-11 1996-06-11 University Of Cincinnati Process for aluminum nitride powder production
FR2722492B1 (fr) * 1994-07-12 1997-03-14 Sumitomo Chemical Co Poudre de nitrure d'aluminium et corps fritte et composition de resine la contenant
US6344271B1 (en) 1998-11-06 2002-02-05 Nanoenergy Corporation Materials and products using nanostructured non-stoichiometric substances
US5939151A (en) * 1996-10-25 1999-08-17 Iowa State University Research Foundation, Inc. Method and apparatus for reactive plasma atomization
US5984997A (en) * 1997-08-29 1999-11-16 Nanomaterials Research Corporation Combustion of emulsions: A method and process for producing fine powders
JP3228924B2 (ja) * 2000-01-21 2001-11-12 イビデン株式会社 半導体製造・検査装置用セラミックヒータ
JP4729180B2 (ja) * 2001-02-02 2011-07-20 株式会社茨木研究所 窒化アルミニウムの製造方法
JP4578009B2 (ja) * 2001-03-16 2010-11-10 東洋アルミニウム株式会社 窒素含有無機化合物の製造方法
JP4545357B2 (ja) * 2001-07-23 2010-09-15 電気化学工業株式会社 窒化アルミニウム粉末の製造方法
JP3891076B2 (ja) * 2001-11-13 2007-03-07 株式会社茨木研究所 窒化アルミニウムの製造方法
GB2445218B (en) * 2006-09-21 2011-05-25 Smith International Atomic layer deposition nanocoating on cutting tool powder materials

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1279586A (fr) * 1959-12-22 1961-12-22 Deutsche Edelstahlwerke Ag Procédé de fabrication de nitrure d'aluminium résistant à l'humidité et profilés obtenus avec ce nitrure
GB2127709A (en) * 1982-10-06 1984-04-18 Univ Edinburgh Manufacture of aluminium nitride
JPS60175537A (ja) * 1984-02-22 1985-09-09 Toyota Motor Corp セラミツク超微粒子の製造方法
JPS6168311A (ja) * 1984-09-10 1986-04-08 Chugai Ro Kogyo Kaisha Ltd 窒化アルミニウム粉未の製造方法およびその装置
JPS61275472A (ja) * 1985-05-29 1986-12-05 三菱レイヨン株式会社 導電性繊維の製法
JPH0737664B2 (ja) * 1985-07-16 1995-04-26 東洋アルミニウム株式会社 窒化アルミニウムの製造方法
FR2596745B1 (fr) * 1986-04-03 1991-06-07 Atochem Poudres pour ceramiques en carbures et nitrures metalliques par reduction carbothermique et leur procede de fabrication
US4790986A (en) * 1986-10-15 1988-12-13 Stemcor Corporation Method and apparatus to produce a hot fluidizing gas
DE3644057A1 (de) * 1986-12-22 1988-06-30 Vaw Ver Aluminium Werke Ag Verfahren und vorrichtung zur thermischen und/oder reduzierenden behandlung von festen, koernigen und/oder agglomerierten einsatzmaterialien
JPS63195102A (ja) * 1987-02-09 1988-08-12 Showa Alum Corp 窒化アルミニウム粉末の連続的製造方法及び装置
JPS63221842A (ja) * 1987-03-11 1988-09-14 Nippon Steel Corp 金属粉体、金属化合物粉体およびセラミツクス粉体の製造方法および装置
JPS63277503A (ja) * 1987-05-08 1988-11-15 Showa Alum Corp 高純度窒化アルミニウム粉末の連続的製造方法及び装置
JPS63297206A (ja) * 1987-05-28 1988-12-05 Toyo Alum Kk 窒化アルミニウムの製造方法
US4877759A (en) * 1987-05-29 1989-10-31 Regents Of The University Of California One step process for producing dense aluminum nitride and composites thereof
US5110565A (en) * 1988-02-05 1992-05-05 The Dow Chemical Company Apparatus for producing uniform, fine ceramic powder
JPH01226709A (ja) * 1988-03-08 1989-09-11 Showa Alum Corp 高純度窒化アルミニウム紛末の製造方法
JPH01308812A (ja) * 1988-06-06 1989-12-13 Showa Alum Corp 窒化アルミニウム粉末の連続的製造方法及び装置
JPH01308813A (ja) * 1988-06-06 1989-12-13 Showa Alum Corp 窒化アルミニウム粉末の製造方法及び装置
JPH0226811A (ja) * 1988-07-12 1990-01-29 Showa Alum Corp 高純度窒化アルミニウム粉末の製造方法
JPH0226812A (ja) * 1988-07-12 1990-01-29 Showa Alum Corp 高純度窒化アルミニウム粉末の製造方法
JPH02283604A (ja) * 1989-04-24 1990-11-21 Showa Alum Corp 窒化アルミニウム粉末の連続的製造方法及び装置
JPH02283605A (ja) * 1989-04-24 1990-11-21 Showa Alum Corp 窒化アルミニウム粉末の連続的製造方法及び装置
JPH03109268A (ja) * 1989-09-22 1991-05-09 Babcock Hitachi Kk 焼結用粉体、その粉体調整方法及び装置
US5126121A (en) * 1991-05-03 1992-06-30 The Dow Chemical Company Process for preparing aluminum nitride powder via controlled combustion nitridation

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102019211921A1 (de) * 2019-08-08 2021-02-11 Schmid Silicon Technology Gmbh Verfahren und Vorrichtung zur Erzeugung siliziumhaltiger Materialien

Also Published As

Publication number Publication date
DE69228562D1 (de) 1999-04-08
WO1993014027A2 (en) 1993-07-22
US5219804A (en) 1993-06-15
EP0620803A1 (de) 1994-10-26
EP0620803B1 (de) 1999-03-03
WO1993014027A3 (en) 1993-10-14
JPH08508000A (ja) 1996-08-27
CA2126343A1 (en) 1993-07-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee