DE69224568D1 - Multiprozessorvorrichtung - Google Patents
MultiprozessorvorrichtungInfo
- Publication number
- DE69224568D1 DE69224568D1 DE69224568T DE69224568T DE69224568D1 DE 69224568 D1 DE69224568 D1 DE 69224568D1 DE 69224568 T DE69224568 T DE 69224568T DE 69224568 T DE69224568 T DE 69224568T DE 69224568 D1 DE69224568 D1 DE 69224568D1
- Authority
- DE
- Germany
- Prior art keywords
- multiprocessor device
- multiprocessor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/4184—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by fault tolerance, reliability of production system
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/41845—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by system universality, reconfigurability, modularity
-
- G—PHYSICS
- G08—SIGNALLING
- G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
- G08B21/00—Alarms responsive to a single specified undesired or abnormal condition and not otherwise provided for
- G08B21/18—Status alarms
- G08B21/182—Level alarms, e.g. alarms responsive to variables exceeding a threshold
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/31—From computer integrated manufacturing till monitoring
- G05B2219/31361—Verify if right controllers are connected to carrier, conveyor controller
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/31—From computer integrated manufacturing till monitoring
- G05B2219/31362—Verify correct configuration of system
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/35—Nc in input of data, input till input file format
- G05B2219/35291—Record history, log, journal, audit of machine operation
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/45—Nc applications
- G05B2219/45026—Circuit board, pcb
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/139—Associated with semiconductor wafer handling including wafer charging or discharging means for vacuum chamber
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/14—Wafer cassette transporting
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Automation & Control Theory (AREA)
- General Engineering & Computer Science (AREA)
- Quality & Reliability (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Business, Economics & Management (AREA)
- Emergency Management (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Hardware Redundancy (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Control By Computers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25289291A JP3309997B2 (ja) | 1991-09-05 | 1991-09-05 | 複合処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69224568D1 true DE69224568D1 (de) | 1998-04-09 |
DE69224568T2 DE69224568T2 (de) | 1998-11-05 |
Family
ID=17243622
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69224568T Expired - Fee Related DE69224568T2 (de) | 1991-09-05 | 1992-08-03 | Multiprozessorvorrichtung |
Country Status (5)
Country | Link |
---|---|
US (2) | US5448470A (de) |
EP (1) | EP0530973B1 (de) |
JP (1) | JP3309997B2 (de) |
KR (1) | KR0144660B1 (de) |
DE (1) | DE69224568T2 (de) |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3309997B2 (ja) * | 1991-09-05 | 2002-07-29 | 株式会社日立製作所 | 複合処理装置 |
US5591299A (en) * | 1995-04-28 | 1997-01-07 | Advanced Micro Devices, Inc. | System for providing integrated monitoring, control and diagnostics functions for semiconductor spray process tools |
US5666486A (en) * | 1995-06-23 | 1997-09-09 | Data General Corporation | Multiprocessor cluster membership manager framework |
JPH0936198A (ja) * | 1995-07-19 | 1997-02-07 | Hitachi Ltd | 真空処理装置およびそれを用いた半導体製造ライン |
US5863170A (en) * | 1996-04-16 | 1999-01-26 | Gasonics International | Modular process system |
US5855465A (en) * | 1996-04-16 | 1999-01-05 | Gasonics International | Semiconductor wafer processing carousel |
US6176667B1 (en) * | 1996-04-30 | 2001-01-23 | Applied Materials, Inc. | Multideck wafer processing system |
EP0915507B1 (de) * | 1996-06-07 | 2008-03-12 | Tokyo Electron Limited | Kontrollevorrichtung für behandlungsstation |
US5659467A (en) * | 1996-06-26 | 1997-08-19 | Texas Instruments Incorporated | Multiple model supervisor control system and method of operation |
TW466622B (en) * | 1996-09-11 | 2001-12-01 | Hitachi Ltd | Operating method of vacuum processing device and vacuum processing device |
DE19718137A1 (de) * | 1997-04-30 | 1998-11-05 | Lemuth Gmbh | Verfahren und Vorrichtung zur Steuerung von Lasergeräten |
US6086676A (en) * | 1997-07-11 | 2000-07-11 | Applied Materials, Inc. | Programmable electrical interlock system for a vacuum processing system |
US6078847A (en) * | 1997-11-24 | 2000-06-20 | Hewlett-Packard Company | Self-organizing materials handling systems |
US6292708B1 (en) * | 1998-06-11 | 2001-09-18 | Speedfam-Ipec Corporation | Distributed control system for a semiconductor wafer processing machine |
US6272400B1 (en) * | 1998-07-13 | 2001-08-07 | Helix Technology Corporation | Vacuum network controller |
DE29813589U1 (de) * | 1998-07-30 | 1999-12-16 | Kuka Schweissanlagen Gmbh | Flexibles Fertigungssystem |
US6267545B1 (en) * | 1999-03-29 | 2001-07-31 | Lam Research Corporation | Semiconductor processing platform architecture having processing module isolation capabilities |
US7213061B1 (en) | 1999-04-29 | 2007-05-01 | Amx Llc | Internet control system and method |
KR100303322B1 (ko) * | 1999-05-20 | 2001-09-26 | 박종섭 | 반도체 라인 관리를 위한 통합 자동화 시스템 및 그 방법 |
US6615088B1 (en) | 1999-06-09 | 2003-09-02 | Amx Corporation | System and method of device interface configuration for a control system |
NL1015480C2 (nl) * | 1999-06-22 | 2002-08-22 | Hyundai Electronics Ind | Halfgeleider fabriekautomatiseringssysteem en werkwijze voor de verwerking van ten minste een halfgeleiderwafelcassette. |
US6424880B1 (en) * | 1999-09-10 | 2002-07-23 | Applied Materials, Inc. | Multi-computer chamber control system, method and medium |
JP4884594B2 (ja) * | 2001-03-22 | 2012-02-29 | 東京エレクトロン株式会社 | 半導体製造装置及び制御方法 |
US7152011B2 (en) * | 2004-08-25 | 2006-12-19 | Lam Research Corporation | Smart component-based management techniques in a substrate processing system |
US8118535B2 (en) * | 2005-05-18 | 2012-02-21 | International Business Machines Corporation | Pod swapping internal to tool run time |
EP1934720B1 (de) | 2005-09-07 | 2018-02-14 | Open Invention Network LLC | Verfahren und computerprogramm zur einrichtungskonfiguration |
WO2010073322A1 (ja) * | 2008-12-24 | 2010-07-01 | キヤノンアネルバ株式会社 | 真空処理装置のデータ収集システム |
US8432603B2 (en) | 2009-03-31 | 2013-04-30 | View, Inc. | Electrochromic devices |
KR102095605B1 (ko) | 2011-12-12 | 2020-04-16 | 뷰, 인크. | 박막 디바이스 및 제조 |
CN108415397A (zh) * | 2018-05-31 | 2018-08-17 | 陈佳康 | 一种无线自动化控制加工装置 |
US11600507B2 (en) * | 2020-09-09 | 2023-03-07 | Applied Materials, Inc. | Pedestal assembly for a substrate processing chamber |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59175948A (ja) * | 1983-03-23 | 1984-10-05 | Toyoda Mach Works Ltd | トランスフアマシン用加工制御装置 |
US5097421A (en) * | 1984-12-24 | 1992-03-17 | Asyst Technologies, Inc. | Intelligent waxer carrier |
DE3534465A1 (de) * | 1985-09-27 | 1987-04-09 | Kloeckner Moeller Elektrizit | Verbundsystem speicherprogrammierbarer steuerungen |
US4974166A (en) * | 1987-05-18 | 1990-11-27 | Asyst Technologies, Inc. | Processing systems with intelligent article tracking |
US5164905A (en) * | 1987-08-12 | 1992-11-17 | Hitachi, Ltd. | Production system with order of processing determination |
EP0346801B1 (de) * | 1988-06-17 | 1996-12-27 | Siemens Aktiengesellschaft | Verfahren und Anordnung zur Ausführung eines Programms in einem heterogenen Mehrrechnersystem |
US4992950A (en) * | 1988-12-30 | 1991-02-12 | Pitney Bowes Inc. | Multiple processing station message communication |
JPH0357063A (ja) * | 1989-07-25 | 1991-03-12 | Matsushita Electric Ind Co Ltd | マルチプロセッサシステムおよびマルチプロセッサの処理割当方法 |
EP0434986A3 (en) * | 1989-12-22 | 1993-06-16 | Siemens Aktiengesellschaft | Method for putting into operation a module connected to an electronic control system |
US5255197A (en) * | 1990-07-06 | 1993-10-19 | Honda Giken Kogyo Kabushiki Kaisha | Line production management system |
JP3309997B2 (ja) * | 1991-09-05 | 2002-07-29 | 株式会社日立製作所 | 複合処理装置 |
-
1991
- 1991-09-05 JP JP25289291A patent/JP3309997B2/ja not_active Expired - Lifetime
-
1992
- 1992-08-03 EP EP92307052A patent/EP0530973B1/de not_active Expired - Lifetime
- 1992-08-03 DE DE69224568T patent/DE69224568T2/de not_active Expired - Fee Related
- 1992-08-22 KR KR1019920015097A patent/KR0144660B1/ko not_active IP Right Cessation
- 1992-09-08 US US07/941,905 patent/US5448470A/en not_active Expired - Fee Related
-
1995
- 1995-06-05 US US08/461,523 patent/US5663884A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0530973B1 (de) | 1998-03-04 |
US5663884A (en) | 1997-09-02 |
US5448470A (en) | 1995-09-05 |
JPH0567669A (ja) | 1993-03-19 |
KR930006874A (ko) | 1993-04-22 |
DE69224568T2 (de) | 1998-11-05 |
EP0530973A1 (de) | 1993-03-10 |
JP3309997B2 (ja) | 2002-07-29 |
KR0144660B1 (ko) | 1998-08-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |