DE69223281D1 - Poly(para-t-butyloxycarbonyl-oxystyrol) und Verfahren zu seiner Herstellung - Google Patents

Poly(para-t-butyloxycarbonyl-oxystyrol) und Verfahren zu seiner Herstellung

Info

Publication number
DE69223281D1
DE69223281D1 DE69223281T DE69223281T DE69223281D1 DE 69223281 D1 DE69223281 D1 DE 69223281D1 DE 69223281 T DE69223281 T DE 69223281T DE 69223281 T DE69223281 T DE 69223281T DE 69223281 D1 DE69223281 D1 DE 69223281D1
Authority
DE
Germany
Prior art keywords
oxystyrene
butyloxycarbonyl
para
poly
preparation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69223281T
Other languages
English (en)
Other versions
DE69223281T2 (de
Inventor
Osamu Watanabe
Tohru Nakanishi
Tomoyoshi Furihata
Motoyuki Yamada
Fujio Yagihashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Application granted granted Critical
Publication of DE69223281D1 publication Critical patent/DE69223281D1/de
Publication of DE69223281T2 publication Critical patent/DE69223281T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F12/00—Homopolymers and copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an aromatic carbocyclic ring
    • C08F12/02—Monomers containing only one unsaturated aliphatic radical
    • C08F12/04—Monomers containing only one unsaturated aliphatic radical containing one ring
    • C08F12/14—Monomers containing only one unsaturated aliphatic radical containing one ring substituted by hetero atoms or groups containing heteroatoms
    • C08F12/22—Oxygen

Landscapes

  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Emergency Medicine (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Materials For Photolithography (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
DE69223281T 1991-06-07 1992-05-28 Poly(para-t-butyloxycarbonyl-oxystyrol) und Verfahren zu seiner Herstellung Expired - Lifetime DE69223281T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3163786A JPH04359906A (ja) 1991-06-07 1991-06-07 ポリ（パラ−ｔ−ブトキシカルボニルオキシスチレン）及びその製造方法

Publications (2)

Publication Number Publication Date
DE69223281D1 true DE69223281D1 (de) 1998-01-08
DE69223281T2 DE69223281T2 (de) 1998-05-20

Family

ID=15780683

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69223281T Expired - Lifetime DE69223281T2 (de) 1991-06-07 1992-05-28 Poly(para-t-butyloxycarbonyl-oxystyrol) und Verfahren zu seiner Herstellung

Country Status (4)

Country Link
US (1) US5523370A (de)
EP (1) EP0517428B1 (de)
JP (1) JPH04359906A (de)
DE (1) DE69223281T2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5395871A (en) * 1994-05-06 1995-03-07 Hoechst Celanese Corporation Process of making a stable solution of poly(hydroxystyrene) functionalized with t-butyloxycarbonyl groups
US5700624A (en) * 1995-05-09 1997-12-23 Shipley Company, L.L.C. Positive acid catalyzed resists having an alkali soluble resin with acid labile groups and inert blocking groups
DE825927T1 (de) 1996-04-23 1998-07-16 Horsell, Graphic Industries Ltd., Leeds Warmeempfindliche zusammensetzung und verfahren zur herstellung einer lithographischen druckform damit
KR0183901B1 (ko) * 1996-07-03 1999-04-01 삼성전자 주식회사 레지스트 조성물
US6117610A (en) * 1997-08-08 2000-09-12 Kodak Polychrome Graphics Llc Infrared-sensitive diazonaphthoquinone imaging composition and element containing non-basic IR absorbing material and methods of use
US6090532A (en) * 1997-03-21 2000-07-18 Kodak Polychrome Graphics Llc Positive-working infrared radiation sensitive composition and printing plate and imaging method
US6063544A (en) * 1997-03-21 2000-05-16 Kodak Polychrome Graphics Llc Positive-working printing plate and method of providing a positive image therefrom using laser imaging
WO1999001796A2 (en) 1997-07-05 1999-01-14 Kodak Polychrome Graphics Llc Pattern-forming methods
US5958654A (en) * 1997-08-25 1999-09-28 Lucent Technologies Inc. Lithographic process and energy-sensitive material for use therein
US6060217A (en) * 1997-09-02 2000-05-09 Kodak Polychrome Graphics Llc Thermal lithographic printing plates
US6107425A (en) * 1998-02-06 2000-08-22 Shipley Company, L.L.C. Narrow molecular weight distribution polymers and use of same as resin binders for negative-acting photoresists
KR100576201B1 (ko) 2000-01-17 2006-05-03 신에쓰 가가꾸 고교 가부시끼가이샤 화학 증폭형 레지스트 재료
CN115260348B (zh) * 2022-09-30 2023-08-15 上海八亿时空先进材料有限公司 一种高分子量且窄分布phs树脂及其制备方法与应用

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA603164A (en) * 1960-08-09 J.T. Baker Chemical Company Polymerization of alpha-acyloxystyrenes and alkyl methacrylates
US2531355A (en) * 1946-06-22 1950-11-21 Monsanto Chemicals Para-vinylbenzyl compounds
US2534193A (en) * 1949-04-22 1950-12-12 Monsanto Chemicals Copolymers of styrene and paravinylbenzyl compounds
NL261699A (de) * 1960-02-29
US4491628A (en) * 1982-08-23 1985-01-01 International Business Machines Corporation Positive- and negative-working resist compositions with acid generating photoinitiator and polymer with acid labile groups pendant from polymer backbone
US4810601A (en) * 1984-12-07 1989-03-07 International Business Machines Corporation Top imaged resists
JPS6210005A (ja) * 1985-07-08 1987-01-19 Nippon Shiken Kogyo Kk 抗歯髄等組織刺激性及び抗為害性組成物
US4657845A (en) * 1986-01-14 1987-04-14 International Business Machines Corporation Positive tone oxygen plasma developable photoresist
EP0277721A3 (de) * 1987-01-28 1989-03-15 Hoechst Celanese Corporation Emulsionspolymerisation von 4-Acetoxystyren und Hydrolyse zu Poly(p-vinylphenol)
JP2540199B2 (ja) * 1988-02-25 1996-10-02 アメリカン テレフォン アンド テレグラフ カムパニー デバイスの製造方法
JPH0413707A (ja) * 1990-05-08 1992-01-17 Idemitsu Kosan Co Ltd スチレン系マクロモノマー、その重合体及び該重合体の製造方法
CA2020746A1 (en) * 1990-07-09 1992-01-10 Gary R. Marchand Blanking process for reaction mixture
US5145928A (en) * 1991-01-28 1992-09-08 Hoechst Celanese Corp. Side chain polymers as ultraviolet protecting agents

Also Published As

Publication number Publication date
DE69223281T2 (de) 1998-05-20
US5523370A (en) 1996-06-04
EP0517428B1 (de) 1997-11-26
EP0517428A1 (de) 1992-12-09
JPH04359906A (ja) 1992-12-14

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