DE69223083T2 - Positivarbeitende Resistzusammensetzung - Google Patents

Positivarbeitende Resistzusammensetzung

Info

Publication number
DE69223083T2
DE69223083T2 DE1992623083 DE69223083T DE69223083T2 DE 69223083 T2 DE69223083 T2 DE 69223083T2 DE 1992623083 DE1992623083 DE 1992623083 DE 69223083 T DE69223083 T DE 69223083T DE 69223083 T2 DE69223083 T2 DE 69223083T2
Authority
DE
Germany
Prior art keywords
resist composition
positive working
working resist
positive
composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE1992623083
Other languages
English (en)
Other versions
DE69223083D1 (de
Inventor
Yasunori Uetani
Yasunori Doi
Kazuhiko Hashimoto
Haruyoshi Osaki
Ryotaro Hanawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Chemical Co Ltd
Original Assignee
Sumitomo Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP03316500A external-priority patent/JP3064595B2/ja
Application filed by Sumitomo Chemical Co Ltd filed Critical Sumitomo Chemical Co Ltd
Publication of DE69223083D1 publication Critical patent/DE69223083D1/de
Application granted granted Critical
Publication of DE69223083T2 publication Critical patent/DE69223083T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0048—Photosensitive materials characterised by the solvents or agents facilitating spreading, e.g. tensio-active agents
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/0226—Quinonediazides characterised by the non-macromolecular additives

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Materials For Photolithography (AREA)
DE1992623083 1991-04-26 1992-04-24 Positivarbeitende Resistzusammensetzung Expired - Fee Related DE69223083T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP9726391 1991-04-26
JP03316500A JP3064595B2 (ja) 1991-04-26 1991-11-29 ポジ型レジスト組成物

Publications (2)

Publication Number Publication Date
DE69223083D1 DE69223083D1 (de) 1997-12-18
DE69223083T2 true DE69223083T2 (de) 1998-07-02

Family

ID=26438446

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1992623083 Expired - Fee Related DE69223083T2 (de) 1991-04-26 1992-04-24 Positivarbeitende Resistzusammensetzung

Country Status (4)

Country Link
EP (1) EP0510671B1 (de)
CA (1) CA2067042A1 (de)
DE (1) DE69223083T2 (de)
MX (1) MX9201930A (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3427562B2 (ja) * 1995-05-09 2003-07-22 住友化学工業株式会社 ポジ型レジスト組成物
JP3488332B2 (ja) * 1996-02-02 2004-01-19 東京応化工業株式会社 ポジ型ホトレジスト塗布液
TWI234051B (en) 1998-10-14 2005-06-11 Clariant Int Ltd A mixed solvent system for positive photoresists
JP2002148784A (ja) 2000-11-07 2002-05-22 Tokyo Ohka Kogyo Co Ltd 化学増幅型ポジ型レジスト塗布液及びそれを用いたレジストパターン形成方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4845008A (en) * 1986-02-20 1989-07-04 Fuji Photo Film Co., Ltd. Light-sensitive positive working, o-guinone diazide presensitized plate with mixed solvent
KR920001450B1 (ko) * 1986-12-23 1992-02-14 쉬플리 캄파니 인코포레이티드 감광성 내식막의 제조방법, 감광성 내식막 조성물 및 이의 제조방법
JP2629356B2 (ja) * 1988-06-13 1997-07-09 住友化学工業株式会社 ポジ型レジスト組成物
EP0704718B1 (de) * 1989-12-01 2002-03-20 Tosoh Corporation Positiv arbeitende lichtempfindliche Zusammensetzungen zur Herstellung von Linsen
CA2031564A1 (en) * 1989-12-18 1991-06-19 Leonard E. Bogan, Jr. Method of preparing high glass transition temperature novolak resin for use in high resolution photoresist compositions

Also Published As

Publication number Publication date
EP0510671A1 (de) 1992-10-28
EP0510671B1 (de) 1997-11-12
DE69223083D1 (de) 1997-12-18
MX9201930A (es) 1992-11-01
CA2067042A1 (en) 1992-10-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee