DE69216463T2 - Thermischer Photodetektor und Verfahren zur Herstellung desselben - Google Patents

Thermischer Photodetektor und Verfahren zur Herstellung desselben

Info

Publication number
DE69216463T2
DE69216463T2 DE69216463T DE69216463T DE69216463T2 DE 69216463 T2 DE69216463 T2 DE 69216463T2 DE 69216463 T DE69216463 T DE 69216463T DE 69216463 T DE69216463 T DE 69216463T DE 69216463 T2 DE69216463 T2 DE 69216463T2
Authority
DE
Germany
Prior art keywords
manufacturing
same
thermal photodetector
photodetector
thermal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69216463T
Other languages
English (en)
Other versions
DE69216463D1 (de
Inventor
Jun-Ichi Kita
Hiroyuki Kishihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Application granted granted Critical
Publication of DE69216463D1 publication Critical patent/DE69216463D1/de
Publication of DE69216463T2 publication Critical patent/DE69216463T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/34—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using capacitors, e.g. pyroelectric capacitors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N15/00—Thermoelectric devices without a junction of dissimilar materials; Thermomagnetic devices, e.g. using the Nernst-Ettingshausen effect
    • H10N15/10—Thermoelectric devices using thermal change of the dielectric constant, e.g. working above and below the Curie point
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • G01J5/061—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity by controlling the temperature of the apparatus or parts thereof, e.g. using cooling means or thermostats

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
  • Optical Head (AREA)
  • Light Receiving Elements (AREA)
DE69216463T 1991-04-22 1992-04-22 Thermischer Photodetektor und Verfahren zur Herstellung desselben Expired - Fee Related DE69216463T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3090416A JP2560560B2 (ja) 1991-04-22 1991-04-22 熱型光検出器およびその支持台の製造方法

Publications (2)

Publication Number Publication Date
DE69216463D1 DE69216463D1 (de) 1997-02-20
DE69216463T2 true DE69216463T2 (de) 1997-06-05

Family

ID=13997994

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69216463T Expired - Fee Related DE69216463T2 (de) 1991-04-22 1992-04-22 Thermischer Photodetektor und Verfahren zur Herstellung desselben

Country Status (6)

Country Link
US (1) US5231289A (de)
EP (1) EP0510920B1 (de)
JP (1) JP2560560B2 (de)
CN (1) CN1028184C (de)
CA (1) CA2066379C (de)
DE (1) DE69216463T2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5763885A (en) * 1995-12-19 1998-06-09 Loral Infrared & Imaging Systems, Inc. Method and apparatus for thermal gradient stabilization of microbolometer focal plane arrays
DE10320357B4 (de) * 2003-05-07 2010-05-12 Perkinelmer Optoelectronics Gmbh & Co.Kg Strahlungssensor, Wafer, Sensorarray und Sensormodul
GB2429592A (en) * 2005-08-27 2007-02-28 Hewlett Packard Development Co Data transfer by IR laser detected by thermal variations
KR20140022765A (ko) * 2010-10-25 2014-02-25 엔이씨 도낀 가부시끼가이샤 초전 센서 어레이 및 초전형 적외선 검출 장치
EP2690358A4 (de) * 2011-03-24 2014-09-17 Olympus Corp Leuchtsystem
CN102364370B (zh) * 2011-10-31 2013-08-28 北京空间机电研究所 一种高隔热效率小热应力影响的低温光学***支撑装置
WO2013125734A1 (en) * 2012-02-24 2013-08-29 Nec Corporation Bolometer and manufacturing method thereof
FR3119888B1 (fr) * 2021-02-18 2023-11-17 Elichens Dispositif pyroelectrique comprenant un substrat a couche superficielle pyroelectrique et procede de realisation
CN116571985B (zh) * 2023-07-14 2023-09-29 深圳市鼎合丰科技有限公司 一种igbt插件自动装夹装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4147562A (en) * 1977-07-05 1979-04-03 Honeywell Inc. Pyroelectric detector
US4480979A (en) * 1978-05-18 1984-11-06 A.A.R.C. (Management) Pty. Limited Stretch forming hollow articles
JPS56133634A (en) * 1980-03-25 1981-10-19 Toshiba Corp Pyroelectric detector
US4463262A (en) * 1981-09-21 1984-07-31 The United States Of America As Represented By The Secretary Of The Air Force Thick film radiation detector
JPS60133329A (ja) * 1983-12-22 1985-07-16 Fuji Xerox Co Ltd 非接触式温度検出装置
JPS60171425A (ja) * 1984-02-17 1985-09-04 Matsushita Electric Ind Co Ltd 焦電形熱検出素子
JPS61193030A (ja) * 1985-02-22 1986-08-27 Tdk Corp 赤外線検出器
GB8628610D0 (en) * 1986-11-29 1987-01-07 Emi Plc Thorn Temperature sensing arrangement
JPS6413525A (en) * 1987-07-08 1989-01-18 Fuji Photo Film Co Ltd Liquid crystal display element
GB2215513B (en) * 1988-03-02 1991-02-06 Philips Electronic Associated Pyroelectric infra-red detectors and their method of manufacture
JPH01227931A (ja) * 1988-03-09 1989-09-12 Matsushita Electric Ind Co Ltd 放射照度計
GB8900688D0 (en) * 1989-01-12 1989-07-05 Thorn Emi Electronics Ltd Thermal imaging device
JPH02221823A (ja) * 1989-02-22 1990-09-04 Hitachi Ltd 光度計
US5041723A (en) * 1989-09-30 1991-08-20 Horiba, Ltd. Infrared ray detector with multiple optical filters
US5081358A (en) * 1990-02-23 1992-01-14 Shimadzu Corporation Detector of fourier transform infrared spectrometer

Also Published As

Publication number Publication date
EP0510920A2 (de) 1992-10-28
US5231289A (en) 1993-07-27
CN1066329A (zh) 1992-11-18
EP0510920A3 (en) 1993-05-19
DE69216463D1 (de) 1997-02-20
CN1028184C (zh) 1995-04-12
EP0510920B1 (de) 1997-01-08
JP2560560B2 (ja) 1996-12-04
CA2066379C (en) 1999-10-12
JPH04320934A (ja) 1992-11-11
CA2066379A1 (en) 1992-10-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee