DE69124884D1 - Verfahren und Vorrichtung zur inversen Photoemissionspektroskopie - Google Patents

Verfahren und Vorrichtung zur inversen Photoemissionspektroskopie

Info

Publication number
DE69124884D1
DE69124884D1 DE69124884T DE69124884T DE69124884D1 DE 69124884 D1 DE69124884 D1 DE 69124884D1 DE 69124884 T DE69124884 T DE 69124884T DE 69124884 T DE69124884 T DE 69124884T DE 69124884 D1 DE69124884 D1 DE 69124884D1
Authority
DE
Germany
Prior art keywords
photoemission spectroscopy
inverse photoemission
inverse
spectroscopy
photoemission
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69124884T
Other languages
English (en)
Other versions
DE69124884T2 (de
Inventor
Shigemasa Suga
Hirohumi Namatame
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Application granted granted Critical
Publication of DE69124884D1 publication Critical patent/DE69124884D1/de
Publication of DE69124884T2 publication Critical patent/DE69124884T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24485—Energy spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/25—Tubes for localised analysis using electron or ion beams
    • H01J2237/2505—Tubes for localised analysis using electron or ion beams characterised by their application
    • H01J2237/2516—Secondary particles mass or energy spectrometry

Landscapes

  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE69124884T 1990-09-10 1991-09-06 Verfahren und Vorrichtung zur inversen Photoemissionspektroskopie Expired - Fee Related DE69124884T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2240508A JP2982262B2 (ja) 1990-09-10 1990-09-10 逆光電子分光装置

Publications (2)

Publication Number Publication Date
DE69124884D1 true DE69124884D1 (de) 1997-04-10
DE69124884T2 DE69124884T2 (de) 1997-10-02

Family

ID=17060564

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69124884T Expired - Fee Related DE69124884T2 (de) 1990-09-10 1991-09-06 Verfahren und Vorrichtung zur inversen Photoemissionspektroskopie

Country Status (4)

Country Link
US (1) US5120965A (de)
EP (1) EP0475305B1 (de)
JP (1) JP2982262B2 (de)
DE (1) DE69124884T2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2636113B2 (ja) * 1992-03-26 1997-07-30 広島大学長 帯域フィルター型逆光電子分光検出装置
JP2535771B2 (ja) * 1994-03-24 1996-09-18 広島大学長 逆光電子分光用帯域幅可変光検出器
JP2535772B2 (ja) * 1994-03-24 1996-09-18 広島大学長 逆光電子分光用狭帯域高感度光検出器
US7671993B2 (en) * 2007-01-25 2010-03-02 Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. Methods and apparatus for estimating the intensity of one spectrum of light in a mixed light, in response to the sensed intensities of one or more other spectrums of light in the mixed light
CN109916507B (zh) * 2017-12-13 2021-06-11 中国科学院大连化学物理研究所 基于离子成像的真空紫外光横向分布在线测量装置及方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1173155A (en) * 1966-09-08 1969-12-03 Atomic Energy Authority Uk Improvements in or relating to Ion Chambers
FR2506019A1 (fr) * 1981-05-14 1982-11-19 Commissariat Energie Atomique Dispositif pour determiner la densite des etats electroniques inoccupes d'un materiau situes au-dessus du niveau de fermi
US4393512A (en) * 1981-07-07 1983-07-12 The United States Of America As Represented By The United States Department Of Energy Hyper-filter-fluorescer spectrometer for x-rays above 120 keV
US4945552A (en) * 1987-12-04 1990-07-31 Hitachi, Ltd. Imaging system for obtaining X-ray energy subtraction images
DE3741675A1 (de) * 1987-12-09 1989-06-22 Kernforschungsanlage Juelich Detektor fuer bremsstrahlungs-isochromaten-spektroskopie
JP2535771B2 (ja) 1994-03-24 1996-09-18 広島大学長 逆光電子分光用帯域幅可変光検出器
JP2535772B2 (ja) 1994-03-24 1996-09-18 広島大学長 逆光電子分光用狭帯域高感度光検出器

Also Published As

Publication number Publication date
DE69124884T2 (de) 1997-10-02
EP0475305A3 (en) 1992-10-21
JPH04118531A (ja) 1992-04-20
EP0475305A2 (de) 1992-03-18
US5120965A (en) 1992-06-09
JP2982262B2 (ja) 1999-11-22
EP0475305B1 (de) 1997-03-05

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee