DE69124884D1 - Verfahren und Vorrichtung zur inversen Photoemissionspektroskopie - Google Patents
Verfahren und Vorrichtung zur inversen PhotoemissionspektroskopieInfo
- Publication number
- DE69124884D1 DE69124884D1 DE69124884T DE69124884T DE69124884D1 DE 69124884 D1 DE69124884 D1 DE 69124884D1 DE 69124884 T DE69124884 T DE 69124884T DE 69124884 T DE69124884 T DE 69124884T DE 69124884 D1 DE69124884 D1 DE 69124884D1
- Authority
- DE
- Germany
- Prior art keywords
- photoemission spectroscopy
- inverse photoemission
- inverse
- spectroscopy
- photoemission
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/24485—Energy spectrometers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/25—Tubes for localised analysis using electron or ion beams
- H01J2237/2505—Tubes for localised analysis using electron or ion beams characterised by their application
- H01J2237/2516—Secondary particles mass or energy spectrometry
Landscapes
- General Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Spectrometry And Color Measurement (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2240508A JP2982262B2 (ja) | 1990-09-10 | 1990-09-10 | 逆光電子分光装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69124884D1 true DE69124884D1 (de) | 1997-04-10 |
DE69124884T2 DE69124884T2 (de) | 1997-10-02 |
Family
ID=17060564
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69124884T Expired - Fee Related DE69124884T2 (de) | 1990-09-10 | 1991-09-06 | Verfahren und Vorrichtung zur inversen Photoemissionspektroskopie |
Country Status (4)
Country | Link |
---|---|
US (1) | US5120965A (de) |
EP (1) | EP0475305B1 (de) |
JP (1) | JP2982262B2 (de) |
DE (1) | DE69124884T2 (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2636113B2 (ja) * | 1992-03-26 | 1997-07-30 | 広島大学長 | 帯域フィルター型逆光電子分光検出装置 |
JP2535771B2 (ja) * | 1994-03-24 | 1996-09-18 | 広島大学長 | 逆光電子分光用帯域幅可変光検出器 |
JP2535772B2 (ja) * | 1994-03-24 | 1996-09-18 | 広島大学長 | 逆光電子分光用狭帯域高感度光検出器 |
US7671993B2 (en) * | 2007-01-25 | 2010-03-02 | Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. | Methods and apparatus for estimating the intensity of one spectrum of light in a mixed light, in response to the sensed intensities of one or more other spectrums of light in the mixed light |
CN109916507B (zh) * | 2017-12-13 | 2021-06-11 | 中国科学院大连化学物理研究所 | 基于离子成像的真空紫外光横向分布在线测量装置及方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1173155A (en) * | 1966-09-08 | 1969-12-03 | Atomic Energy Authority Uk | Improvements in or relating to Ion Chambers |
FR2506019A1 (fr) * | 1981-05-14 | 1982-11-19 | Commissariat Energie Atomique | Dispositif pour determiner la densite des etats electroniques inoccupes d'un materiau situes au-dessus du niveau de fermi |
US4393512A (en) * | 1981-07-07 | 1983-07-12 | The United States Of America As Represented By The United States Department Of Energy | Hyper-filter-fluorescer spectrometer for x-rays above 120 keV |
US4945552A (en) * | 1987-12-04 | 1990-07-31 | Hitachi, Ltd. | Imaging system for obtaining X-ray energy subtraction images |
DE3741675A1 (de) * | 1987-12-09 | 1989-06-22 | Kernforschungsanlage Juelich | Detektor fuer bremsstrahlungs-isochromaten-spektroskopie |
JP2535771B2 (ja) | 1994-03-24 | 1996-09-18 | 広島大学長 | 逆光電子分光用帯域幅可変光検出器 |
JP2535772B2 (ja) | 1994-03-24 | 1996-09-18 | 広島大学長 | 逆光電子分光用狭帯域高感度光検出器 |
-
1990
- 1990-09-10 JP JP2240508A patent/JP2982262B2/ja not_active Expired - Lifetime
-
1991
- 1991-09-06 EP EP91115123A patent/EP0475305B1/de not_active Expired - Lifetime
- 1991-09-06 DE DE69124884T patent/DE69124884T2/de not_active Expired - Fee Related
- 1991-09-09 US US07/756,659 patent/US5120965A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE69124884T2 (de) | 1997-10-02 |
EP0475305A3 (en) | 1992-10-21 |
JPH04118531A (ja) | 1992-04-20 |
EP0475305A2 (de) | 1992-03-18 |
US5120965A (en) | 1992-06-09 |
JP2982262B2 (ja) | 1999-11-22 |
EP0475305B1 (de) | 1997-03-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |