DE69121664D1 - Verfahren zur Herstellung von dünnen Glasschichten durch Sol-Gel-Verfahren - Google Patents
Verfahren zur Herstellung von dünnen Glasschichten durch Sol-Gel-VerfahrenInfo
- Publication number
- DE69121664D1 DE69121664D1 DE69121664T DE69121664T DE69121664D1 DE 69121664 D1 DE69121664 D1 DE 69121664D1 DE 69121664 T DE69121664 T DE 69121664T DE 69121664 T DE69121664 T DE 69121664T DE 69121664 D1 DE69121664 D1 DE 69121664D1
- Authority
- DE
- Germany
- Prior art keywords
- sol
- glass
- production
- thin layers
- gel processes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/02—Surface treatment of glass, not in the form of fibres or filaments, by coating with glass
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C1/00—Ingredients generally applicable to manufacture of glasses, glazes, or vitreous enamels
- C03C1/006—Ingredients generally applicable to manufacture of glasses, glazes, or vitreous enamels to produce glass through wet route
- C03C1/008—Ingredients generally applicable to manufacture of glasses, glazes, or vitreous enamels to produce glass through wet route for the production of films or coatings
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
- C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
- C23C18/1204—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
- C23C18/1208—Oxides, e.g. ceramics
- C23C18/1212—Zeolites, glasses
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
- C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
- C23C18/125—Process of deposition of the inorganic material
- C23C18/1254—Sol or sol-gel processing
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
- C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
- C23C18/125—Process of deposition of the inorganic material
- C23C18/1275—Process of deposition of the inorganic material performed under inert atmosphere
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- Physics & Mathematics (AREA)
- Metallurgy (AREA)
- Inorganic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Dispersion Chemistry (AREA)
- Ceramic Engineering (AREA)
- Surface Treatment Of Glass (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2285882A JPH04160020A (ja) | 1990-10-25 | 1990-10-25 | 薄膜の作製方法 |
JP3148611A JPH05805A (ja) | 1991-06-20 | 1991-06-20 | ゾルゲル法による薄膜の作製方法 |
JP3148610A JPH054839A (ja) | 1991-06-20 | 1991-06-20 | ゾルゲル法による薄膜の作製方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69121664D1 true DE69121664D1 (de) | 1996-10-02 |
DE69121664T2 DE69121664T2 (de) | 1997-02-13 |
Family
ID=27319585
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69121664T Expired - Fee Related DE69121664T2 (de) | 1990-10-25 | 1991-10-25 | Verfahren zur Herstellung von dünnen Glasschichten durch Sol-Gel-Verfahren |
Country Status (5)
Country | Link |
---|---|
US (1) | US5368887A (de) |
EP (1) | EP0482659B1 (de) |
AU (1) | AU644229B2 (de) |
CA (1) | CA2053985A1 (de) |
DE (1) | DE69121664T2 (de) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5702630A (en) * | 1992-07-16 | 1997-12-30 | Nippon Oil Company, Ltd. | Fluid having both magnetic and electrorheological characteristics |
GB9300261D0 (en) * | 1993-01-08 | 1993-03-03 | British Tech Group | Sol-gel composition for producing glassy coatings |
US5504042A (en) * | 1994-06-23 | 1996-04-02 | Texas Instruments Incorporated | Porous dielectric material with improved pore surface properties for electronics applications |
CA2153848C (en) * | 1994-07-18 | 2003-05-13 | Motoyuki Tanaka | Oxide thin film having quartz crystal structure and process for producing the same |
US5635120A (en) | 1994-07-21 | 1997-06-03 | Caterpillar Inc. | Process for forming a mullite-zirconia engine part |
US5585136A (en) * | 1995-03-22 | 1996-12-17 | Queen's University At Kingston | Method for producing thick ceramic films by a sol gel coating process |
US5736425A (en) * | 1995-11-16 | 1998-04-07 | Texas Instruments Incorporated | Glycol-based method for forming a thin-film nanoporous dielectric |
US6037277A (en) * | 1995-11-16 | 2000-03-14 | Texas Instruments Incorporated | Limited-volume apparatus and method for forming thin film aerogels on semiconductor substrates |
US6130152A (en) | 1995-11-16 | 2000-10-10 | Texas Instruments Incorporated | Aerogel thin film formation from multi-solvent systems |
US5807607A (en) | 1995-11-16 | 1998-09-15 | Texas Instruments Incorporated | Polyol-based method for forming thin film aerogels on semiconductor substrates |
US5753305A (en) * | 1995-11-16 | 1998-05-19 | Texas Instruments Incorporated | Rapid aging technique for aerogel thin films |
US6063714A (en) * | 1995-11-16 | 2000-05-16 | Texas Instruments Incorporated | Nanoporous dielectric thin film surface modification |
US6319852B1 (en) | 1995-11-16 | 2001-11-20 | Texas Instruments Incorporated | Nanoporous dielectric thin film formation using a post-deposition catalyst |
US6380105B1 (en) | 1996-11-14 | 2002-04-30 | Texas Instruments Incorporated | Low volatility solvent-based method for forming thin film nanoporous aerogels on semiconductor substrates |
US6319551B1 (en) * | 1995-12-19 | 2001-11-20 | William M. Risen, Jr. | Methods and compositions for forming silica, germanosilicate and metal silicate films, patterns and multilayers |
AU2657497A (en) * | 1995-12-19 | 1997-07-28 | William M. Risen Jr. | Methods and compositions for joining waveguide structures and the resulting joined products |
US5976625A (en) * | 1997-04-11 | 1999-11-02 | Lucent Technologies Inc. | Process for forming patterned dielectric oxide films |
US6158245A (en) * | 1997-07-29 | 2000-12-12 | Physical Optics Corporation | High efficiency monolithic glass light shaping diffuser and method of making |
US6446467B1 (en) * | 1997-07-29 | 2002-09-10 | Physical Optics Corporation | Monolithic glass light shaping diffuser and method for its production |
US5944866A (en) * | 1997-09-26 | 1999-08-31 | Lucent Technologies Inc. | Fabrication including sol-gel processing |
WO2000013221A1 (en) * | 1998-08-27 | 2000-03-09 | Alliedsignal Inc. | Process for optimizing mechanical strength of nanoporous silica |
AUPQ469699A0 (en) * | 1999-12-16 | 2000-01-20 | Australian National University, The | Device incorporating sol-gel based films |
JP4030243B2 (ja) * | 1999-12-20 | 2008-01-09 | 日本電気株式会社 | 強誘電体薄膜形成用溶液及び強誘電体薄膜形成方法 |
GB0011964D0 (en) | 2000-05-18 | 2000-07-05 | Suyal N | Thick glass films with controlled refractive indices and their applications |
US20040018301A1 (en) * | 2002-07-26 | 2004-01-29 | Ackerman John F. | Process for improved inorganic polymerization |
US8445066B2 (en) * | 2009-12-18 | 2013-05-21 | 3M Innovative Properties Company | Systems and methods for making monolithic gel bodies |
US9586810B2 (en) | 2010-07-30 | 2017-03-07 | Sony Corporation | Polymeric substrate having an etched-glass-like surface and a microfluidic chip made of said polymeric substrate |
US9963786B2 (en) * | 2013-03-15 | 2018-05-08 | Henkel Ag & Co. Kgaa | Inorganic composite coatings comprising novel functionalized acrylics |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5777044A (en) * | 1980-10-30 | 1982-05-14 | Central Glass Co Ltd | Manufacture of glass from metallic alcoholate |
USRE32107E (en) * | 1982-12-23 | 1986-04-08 | Dow Corning Corporation | Carbon-containing monolithic glasses and ceramics prepared by a sol-gel process |
JPS6027615A (ja) * | 1983-07-22 | 1985-02-12 | Hitachi Ltd | 光学ガラスの製造方法 |
JPS6054929A (ja) * | 1983-09-01 | 1985-03-29 | Seiko Epson Corp | 石英ガラスの製造法 |
JPS6126525A (ja) * | 1984-07-16 | 1986-02-05 | Seiko Epson Corp | 石英ガラスの製造方法 |
JPS6140825A (ja) * | 1984-07-31 | 1986-02-27 | Seiko Epson Corp | 石英ガラスの製造方法 |
JPS6191024A (ja) * | 1984-10-05 | 1986-05-09 | Seiko Epson Corp | 円筒状シリカ系ガラスの製造方法 |
JPS6197137A (ja) * | 1984-10-15 | 1986-05-15 | Hitachi Cable Ltd | 光学ガラス体の製造方法 |
US4652467A (en) * | 1985-02-25 | 1987-03-24 | The United States Of America As Represented By The United States Department Of Energy | Inorganic-polymer-derived dielectric films |
US4614673A (en) * | 1985-06-21 | 1986-09-30 | The Boeing Company | Method for forming a ceramic coating |
US4636440A (en) * | 1985-10-28 | 1987-01-13 | Manville Corporation | Novel process for coating substrates with glass-like films and coated substrates |
US4767433A (en) * | 1986-05-22 | 1988-08-30 | Asahi Glass Company Ltd. | Spherical silica glass powder particles and process for their production |
US4851270A (en) * | 1987-04-17 | 1989-07-25 | Hoechst Celanese Corporation | Inorganic-organic composite compositons exhibiting nonlinear optical response |
FR2621030B1 (fr) * | 1987-09-29 | 1990-11-16 | Centre Nat Rech Scient | Procede de preparation d'oxydes metalliques |
US4965091A (en) * | 1987-10-01 | 1990-10-23 | At&T Bell Laboratories | Sol gel method for forming thin luminescent films |
US4847162A (en) * | 1987-12-28 | 1989-07-11 | Dow Corning Corporation | Multilayer ceramics coatings from the ceramification of hydrogen silsequioxane resin in the presence of ammonia |
EP0328715B1 (de) * | 1988-02-19 | 1992-08-05 | Tohru Yamamoto | Katalysator für das ein Metallalkoxid verwendendes Sol-Gel-Verfahren und das Oxid verwendende Sol-Gel-Verfahren |
US4842888A (en) * | 1988-04-07 | 1989-06-27 | Dow Corning Corporation | Ceramic coatings from the pyrolysis in ammonia of mixtures of silicate esters and other metal oxide precursors |
US4898691A (en) * | 1988-05-16 | 1990-02-06 | Hoechst Celanese Corporation | Organic nonlinear optical media |
US4988800A (en) * | 1988-05-31 | 1991-01-29 | Akzo America Inc. | Preparation of rare earth alkoxides using catalyst |
JPH0764644B2 (ja) * | 1988-06-30 | 1995-07-12 | 日本特殊陶業株式会社 | 可塑性を有するゲル状薄板成形体の製造方法 |
US4957725A (en) * | 1988-07-05 | 1990-09-18 | The Johns Hopkins University | Vanadium dioxide formed by the sol-gel process |
US5049338A (en) * | 1989-01-04 | 1991-09-17 | Ppg Industries, Inc. | Method of promoting sol gel siliceous-containing reactions |
JPH02293333A (ja) * | 1989-04-28 | 1990-12-04 | Hoya Corp | ガラスの製造方法 |
US4948843A (en) * | 1989-05-30 | 1990-08-14 | Eastman Kodak Company | Dye polymer/sol-gel composites |
US5262201A (en) * | 1990-06-04 | 1993-11-16 | Dow Corning Corporation | Low temperature process for converting silica precursor coatings to ceramic silica coatings by exposure to ammonium hydroxide or an environment to which water vapor and ammonia vapor have been added |
US5116637A (en) * | 1990-06-04 | 1992-05-26 | Dow Corning Corporation | Amine catalysts for the low temperature conversion of silica precursors to silica |
-
1991
- 1991-10-22 CA CA002053985A patent/CA2053985A1/en not_active Abandoned
- 1991-10-25 AU AU86724/91A patent/AU644229B2/en not_active Ceased
- 1991-10-25 DE DE69121664T patent/DE69121664T2/de not_active Expired - Fee Related
- 1991-10-25 EP EP91118230A patent/EP0482659B1/de not_active Expired - Lifetime
-
1993
- 1993-04-23 US US08/051,285 patent/US5368887A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CA2053985A1 (en) | 1992-04-26 |
EP0482659A1 (de) | 1992-04-29 |
AU8672491A (en) | 1992-04-30 |
US5368887A (en) | 1994-11-29 |
AU644229B2 (en) | 1993-12-02 |
DE69121664T2 (de) | 1997-02-13 |
EP0482659B1 (de) | 1996-08-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69121664D1 (de) | Verfahren zur Herstellung von dünnen Glasschichten durch Sol-Gel-Verfahren | |
DE69322545D1 (de) | Verfahren zur Herstellung von Endlosfasern durch mechanisches Ziehen | |
DE69215791D1 (de) | Verfahren zur Herstellung von Quarzglas | |
DE3856483D1 (de) | Verfahren zur Herstellung von Dünnschichten | |
DE69010857D1 (de) | Verfahren zur Herstellung dünner Schichten von hoher Reinheit. | |
DE69220901D1 (de) | Verfahren zur Herstellung eines wärmebehandelten beschichteten Glases | |
DE69502689D1 (de) | Verfahren zur Herstellung von Polarisierendem Glas | |
DE3889275D1 (de) | Sol-Gel-Verfahren zur Herstellung von dünnen lumineszierenden Filmen. | |
DE69309634D1 (de) | Verfahren zur Herstellung von Siliciumdioxidschichten | |
DE69431573D1 (de) | Verfahren zur Herstellung von Schichten | |
DE69217890D1 (de) | Verfahren zur Herstellung ultradünner anorganischer Membranen | |
DE69004292D1 (de) | Verfahren zur Herstellung infrarot polarisierender Gläser. | |
AT379129B (de) | Verfahren zur herstellung von ueberzogenen glasfasern | |
DE3774754D1 (de) | Verfahren und vorrichtung zur herstellung von glasgarnen durch mechanisches ziehen und erhaltene gegenstaende. | |
DE69122936D1 (de) | Verfahren zur Herstellung von Sialsäure | |
DE69125588D1 (de) | Verfahren zur Herstellung von Substraten mit dielektrischer Trennung | |
DE69219652D1 (de) | Verfahren zur Herstellung eines Glassubstrat für Scheibe | |
DE59201700D1 (de) | Verfahren zur Herstellung von Organo(poly)siloxanen. | |
DE3773306D1 (de) | Verfahren zur herstellung von glas. | |
DE69320423D1 (de) | Verfahren zur Herstellung von Polykarbonat | |
DE69504563D1 (de) | Verfahren zur Herstellung von Dünnschichten | |
DE69324717D1 (de) | Verfahren zur Herstellung von Dünnfilm-Strukturen | |
DE69018715D1 (de) | Verfahren zur Reparatur von mit Glas beschichteten Geräten durch Sol-Gel-Verfahren. | |
DE69030225D1 (de) | Verfahren zur Herstellung von BiMOS-Schaltungen mit hoher Leistung | |
DE3771963D1 (de) | Verfahren zur herstellung von glas. |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |