DE69104128D1 - Spannen eines Werkstücks. - Google Patents
Spannen eines Werkstücks.Info
- Publication number
- DE69104128D1 DE69104128D1 DE69104128T DE69104128T DE69104128D1 DE 69104128 D1 DE69104128 D1 DE 69104128D1 DE 69104128 T DE69104128 T DE 69104128T DE 69104128 T DE69104128 T DE 69104128T DE 69104128 D1 DE69104128 D1 DE 69104128D1
- Authority
- DE
- Germany
- Prior art keywords
- workpiece
- clamping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US53547090A | 1990-06-08 | 1990-06-08 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69104128D1 true DE69104128D1 (de) | 1994-10-27 |
DE69104128T2 DE69104128T2 (de) | 1995-01-19 |
Family
ID=24134383
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE1991604128 Expired - Fee Related DE69104128T2 (de) | 1990-06-08 | 1991-06-06 | Spannen eines Werkstücks. |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP0460954B1 (de) |
DE (1) | DE69104128T2 (de) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5315473A (en) * | 1992-01-21 | 1994-05-24 | Applied Materials, Inc. | Isolated electrostatic chuck and excitation method |
US5436790A (en) * | 1993-01-15 | 1995-07-25 | Eaton Corporation | Wafer sensing and clamping monitor |
US5444597A (en) * | 1993-01-15 | 1995-08-22 | Blake; Julian G. | Wafer release method and apparatus |
DE102015002773A1 (de) | 2014-03-08 | 2015-09-10 | Jan Bremer | Elektrostatische Greifvorrichtung |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1118627A (en) * | 1964-12-09 | 1968-07-03 | Gen Electric Co Ltd | Improvements in or relating to electrostatic clutch arrangements |
US4184188A (en) * | 1978-01-16 | 1980-01-15 | Veeco Instruments Inc. | Substrate clamping technique in IC fabrication processes |
JPS6059104B2 (ja) * | 1982-02-03 | 1985-12-23 | 株式会社東芝 | 静電チヤツク板 |
US5103367A (en) * | 1987-05-06 | 1992-04-07 | Unisearch Limited | Electrostatic chuck using A.C. field excitation |
-
1991
- 1991-06-06 EP EP19910305123 patent/EP0460954B1/de not_active Expired - Lifetime
- 1991-06-06 DE DE1991604128 patent/DE69104128T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0460954A1 (de) | 1991-12-11 |
DE69104128T2 (de) | 1995-01-19 |
EP0460954B1 (de) | 1994-09-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.(N. |
|
8339 | Ceased/non-payment of the annual fee |