DE69017213D1 - Beschleunigungsmesser mit feedback. - Google Patents
Beschleunigungsmesser mit feedback.Info
- Publication number
- DE69017213D1 DE69017213D1 DE69017213T DE69017213T DE69017213D1 DE 69017213 D1 DE69017213 D1 DE 69017213D1 DE 69017213 T DE69017213 T DE 69017213T DE 69017213 T DE69017213 T DE 69017213T DE 69017213 D1 DE69017213 D1 DE 69017213D1
- Authority
- DE
- Germany
- Prior art keywords
- accelerometer
- feedback
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
- F16F15/06—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs
- F16F15/073—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs using only leaf springs
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
- G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Aviation & Aerospace Engineering (AREA)
- Mechanical Engineering (AREA)
- Pressure Sensors (AREA)
- Other Liquid Machine Or Engine Such As Wave Power Use (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/370,256 US4932261A (en) | 1988-06-20 | 1989-06-22 | Micro-machined accelerometer with tilt compensation |
PCT/US1990/003059 WO1990015997A1 (en) | 1989-06-22 | 1990-05-25 | Micro-machined accelerometer with tilt compensation |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69017213D1 true DE69017213D1 (de) | 1995-03-30 |
DE69017213T2 DE69017213T2 (de) | 1995-09-21 |
Family
ID=23458876
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69017213T Expired - Lifetime DE69017213T2 (de) | 1989-06-22 | 1990-05-25 | Beschleunigungsmesser mit feedback. |
Country Status (6)
Country | Link |
---|---|
US (1) | US4932261A (de) |
EP (1) | EP0479913B1 (de) |
CA (1) | CA2064213C (de) |
DE (1) | DE69017213T2 (de) |
HK (1) | HK1004761A1 (de) |
WO (1) | WO1990015997A1 (de) |
Families Citing this family (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5092173A (en) * | 1989-12-29 | 1992-03-03 | Honeywell Inc. | Secondary accelerometer pickoff |
US5142921A (en) * | 1990-10-29 | 1992-09-01 | Litton Systems, Inc. | Force balance instrument with electrostatic charge control |
US5357803A (en) * | 1992-04-08 | 1994-10-25 | Rochester Institute Of Technology | Micromachined microaccelerometer for measuring acceleration along three axes |
US6109114A (en) * | 1993-08-16 | 2000-08-29 | California Institute Of Technology | Caging, calibration, characterization and compensation of microstructural transducers |
US5732289A (en) * | 1993-12-28 | 1998-03-24 | Nikon Corporation | Detecting apparatus |
US5497660A (en) * | 1994-05-31 | 1996-03-12 | Litton Systems, Inc. | Digital force balanced instrument |
US5473946A (en) * | 1994-09-09 | 1995-12-12 | Litton Systems, Inc. | Accelerometer using pulse-on-demand control |
US6516284B2 (en) * | 1994-11-21 | 2003-02-04 | Phatrat Technology, Inc. | Speedometer for a moving sportsman |
US7386401B2 (en) | 1994-11-21 | 2008-06-10 | Phatrat Technology, Llc | Helmet that reports impact information, and associated methods |
US5511420A (en) * | 1994-12-01 | 1996-04-30 | Analog Devices, Inc. | Electric field attraction minimization circuit |
JP3216455B2 (ja) * | 1994-12-22 | 2001-10-09 | 株式会社村田製作所 | 容量型静電サーボ加速度センサ |
JP3433401B2 (ja) * | 1995-05-18 | 2003-08-04 | アイシン精機株式会社 | 静電容量型加速度センサ |
JPH10132848A (ja) * | 1996-10-31 | 1998-05-22 | Akebono Brake Ind Co Ltd | 半導体加速度センサー |
GB9812006D0 (en) | 1998-06-05 | 1998-07-29 | Concept Systems Limited | Sensor apparatus |
AU3517600A (en) | 1999-03-17 | 2000-10-04 | Input/Output, Inc. | Calibration of sensors |
US6216789B1 (en) | 1999-07-19 | 2001-04-17 | Schlumberger Technology Corporation | Heave compensated wireline logging winch system and method of use |
US6386032B1 (en) | 1999-08-26 | 2002-05-14 | Analog Devices Imi, Inc. | Micro-machined accelerometer with improved transfer characteristics |
US6868726B2 (en) * | 2000-01-20 | 2005-03-22 | Analog Devices Imi, Inc. | Position sensing with improved linearity |
AU2002231472B2 (en) * | 2001-02-23 | 2007-01-25 | Curtin University Of Technology | Vibration measurement apparatus |
EP1370877A4 (de) * | 2001-02-23 | 2007-01-03 | Water Corp | Vibrationsmessvorrichtung |
US20030081501A1 (en) * | 2001-09-07 | 2003-05-01 | Input/Output, Inc. | Reservoir evaluation apparatus and method |
US7000903B2 (en) * | 2003-03-24 | 2006-02-21 | Oceaneering International, Inc. | Wireline subsea metering head and method of use |
US7656746B2 (en) * | 2005-04-08 | 2010-02-02 | Westerngeco L.L.C. | Rational motion compensated seabed seismic sensors and methods of use in seabed seismic data acquisition |
US7788977B2 (en) * | 2005-06-01 | 2010-09-07 | Citizen Holdings Co., Ltd. | Physical quantity sensor |
US7665361B2 (en) * | 2007-01-25 | 2010-02-23 | Freescale Semiconductor, Inc. | Method and apparatus for closed loop offset cancellation |
US7923623B1 (en) | 2007-10-17 | 2011-04-12 | David Beaty | Electric instrument music control device with multi-axis position sensors |
US9047850B1 (en) | 2007-10-17 | 2015-06-02 | David Wiley Beaty | Electric instrument music control device with magnetic displacement sensors |
US8338689B1 (en) | 2008-10-17 | 2012-12-25 | Telonics Pro Audio LLC | Electric instrument music control device with multi-axis position sensors |
US8322216B2 (en) * | 2009-09-22 | 2012-12-04 | Duli Yu | Micromachined accelerometer with monolithic electrodes and method of making the same |
US20120090393A1 (en) * | 2010-06-18 | 2012-04-19 | Baolab Microsystems Sl | Unstable electrostatic spring accelerometer |
US9046547B2 (en) * | 2012-08-13 | 2015-06-02 | Pgs Geophysical As | Accelerometer having multiple feedback systems operating on a given proof mass |
US20140260618A1 (en) * | 2013-03-14 | 2014-09-18 | Agency For Science Technology And Research (A*Star) | Force feedback electrodes in mems accelerometer |
US20140260617A1 (en) * | 2013-03-14 | 2014-09-18 | Agency For Science Technology And Research (A*Star) | Fully differential capacitive architecture for mems accelerometer |
RU2626071C1 (ru) * | 2016-06-03 | 2017-07-21 | Федеральное государственное унитарное предприятие "Научно-производственный центр автоматики и приборостроения имени академика Н.А. Пилюгина" (ФГУП "НПЦАП") | Способ обеспечения линейности масштабного коэффициента маятникового акселерометра компенсационного типа |
RU2627970C1 (ru) * | 2016-11-14 | 2017-08-14 | Федеральное государственное унитарное предприятие "Научно-производственный центр автоматики и приборостроения имени академика Н.А. Пилюгина" (ФГУП "НПЦАП") | Способ обеспечения линейности масштабного коэффициента маятникового широкодиапазонного акселерометра компенсационного типа |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2326233C2 (de) * | 1973-05-23 | 1986-02-06 | Hans-Werner Dr.-Ing. 6382 Friedrichsdorf Fischer | Verfahren zur Linearisierung der selbsttätigen elektrostatischen Kraftkompensation |
GB2158243B (en) * | 1984-05-05 | 1986-10-22 | Ferranti Plc | Accelerometer system |
-
1989
- 1989-06-22 US US07/370,256 patent/US4932261A/en not_active Expired - Lifetime
-
1990
- 1990-05-25 WO PCT/US1990/003059 patent/WO1990015997A1/en active IP Right Grant
- 1990-05-25 CA CA002064213A patent/CA2064213C/en not_active Expired - Lifetime
- 1990-05-25 EP EP90911205A patent/EP0479913B1/de not_active Expired - Lifetime
- 1990-05-25 DE DE69017213T patent/DE69017213T2/de not_active Expired - Lifetime
-
1998
- 1998-05-06 HK HK98103898A patent/HK1004761A1/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
CA2064213A1 (en) | 1990-12-23 |
EP0479913A1 (de) | 1992-04-15 |
CA2064213C (en) | 1997-03-25 |
WO1990015997A1 (en) | 1990-12-27 |
DE69017213T2 (de) | 1995-09-21 |
EP0479913A4 (en) | 1992-12-02 |
EP0479913B1 (de) | 1995-02-22 |
HK1004761A1 (en) | 1998-12-04 |
US4932261A (en) | 1990-06-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |