DE69014758D1 - Verfahren zur Herstellung eines dünnen supraleitenden Films. - Google Patents

Verfahren zur Herstellung eines dünnen supraleitenden Films.

Info

Publication number
DE69014758D1
DE69014758D1 DE69014758T DE69014758T DE69014758D1 DE 69014758 D1 DE69014758 D1 DE 69014758D1 DE 69014758 T DE69014758 T DE 69014758T DE 69014758 T DE69014758 T DE 69014758T DE 69014758 D1 DE69014758 D1 DE 69014758D1
Authority
DE
Germany
Prior art keywords
producing
superconducting film
thin superconducting
thin
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69014758T
Other languages
English (en)
Other versions
DE69014758T2 (de
Inventor
Keizo Harada
Hideo Itozaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Application granted granted Critical
Publication of DE69014758D1 publication Critical patent/DE69014758D1/de
Publication of DE69014758T2 publication Critical patent/DE69014758T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
    • H10N60/0381—Processes for depositing or forming copper oxide superconductor layers by evaporation, e.g. MBE

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Inorganic Insulating Materials (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
DE69014758T 1989-07-31 1990-07-31 Verfahren zur Herstellung eines dünnen supraleitenden Films. Expired - Fee Related DE69014758T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1198647A JPH0365501A (ja) 1989-07-31 1989-07-31 酸化物薄膜の作製方法

Publications (2)

Publication Number Publication Date
DE69014758D1 true DE69014758D1 (de) 1995-01-19
DE69014758T2 DE69014758T2 (de) 1995-06-22

Family

ID=16394694

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69014758T Expired - Fee Related DE69014758T2 (de) 1989-07-31 1990-07-31 Verfahren zur Herstellung eines dünnen supraleitenden Films.

Country Status (5)

Country Link
EP (1) EP0412007B1 (de)
JP (1) JPH0365501A (de)
CA (1) CA2022358C (de)
DE (1) DE69014758T2 (de)
HK (1) HK164795A (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5342826A (en) * 1991-10-02 1994-08-30 International Superconductivity Technology Center Bi-Sr-Ca-Cu-O superconducting thin film
CA2093729C (en) 1992-04-10 2001-01-02 Takao Nakamura Process for preparing superconducting thin film formed of oxide superconductor material
KR100396251B1 (ko) * 2001-05-04 2003-09-02 이만택 모발처리용 로트

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0817253B2 (ja) * 1987-09-16 1996-02-21 株式会社半導体エネルギー研究所 酸化物超伝導膜形成方法
JPH01104763A (ja) * 1987-10-16 1989-04-21 Canon Inc 金属化合物薄膜の製造方法
JPH0829943B2 (ja) * 1988-05-13 1996-03-27 沖電気工業株式会社 超伝導体薄膜の形成方法

Also Published As

Publication number Publication date
EP0412007B1 (de) 1994-12-07
DE69014758T2 (de) 1995-06-22
JPH0365501A (ja) 1991-03-20
EP0412007A2 (de) 1991-02-06
EP0412007A3 (en) 1991-04-10
HK164795A (en) 1995-10-27
CA2022358A1 (en) 1991-02-01
CA2022358C (en) 1998-10-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee