DE69011188T2 - Kodierer. - Google Patents

Kodierer.

Info

Publication number
DE69011188T2
DE69011188T2 DE69011188T DE69011188T DE69011188T2 DE 69011188 T2 DE69011188 T2 DE 69011188T2 DE 69011188 T DE69011188 T DE 69011188T DE 69011188 T DE69011188 T DE 69011188T DE 69011188 T2 DE69011188 T2 DE 69011188T2
Authority
DE
Germany
Prior art keywords
encoder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69011188T
Other languages
English (en)
Other versions
DE69011188D1 (de
Inventor
Koh Ishizuka
Tetsuharu Nishimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP12004689A external-priority patent/JP2683098B2/ja
Priority claimed from JP1120047A external-priority patent/JP2774568B2/ja
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69011188D1 publication Critical patent/DE69011188D1/de
Application granted granted Critical
Publication of DE69011188T2 publication Critical patent/DE69011188T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B19/00—Driving, starting, stopping record carriers not specifically of filamentary or web form, or of supports therefor; Control thereof; Control of operating function ; Driving both disc and head
    • G11B19/02—Control of operating function, e.g. switching from recording to reproducing
    • G11B19/12—Control of operating function, e.g. switching from recording to reproducing by sensing distinguishing features of or on records, e.g. diameter end mark

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
DE69011188T 1989-05-12 1990-05-11 Kodierer. Expired - Fee Related DE69011188T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP12004689A JP2683098B2 (ja) 1989-05-12 1989-05-12 エンコーダー
JP1120047A JP2774568B2 (ja) 1989-05-12 1989-05-12 ロータリーエンコーダー

Publications (2)

Publication Number Publication Date
DE69011188D1 DE69011188D1 (de) 1994-09-08
DE69011188T2 true DE69011188T2 (de) 1994-12-08

Family

ID=26457689

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69011188T Expired - Fee Related DE69011188T2 (de) 1989-05-12 1990-05-11 Kodierer.

Country Status (3)

Country Link
US (1) US5146085A (de)
EP (1) EP0397202B1 (de)
DE (1) DE69011188T2 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE9116546U1 (de) * 1991-02-21 1993-01-21 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut, De
DE69223916T2 (de) * 1991-10-03 1998-05-28 Canon Kk Optische Kodiereinrichtung
JP3218657B2 (ja) * 1991-12-04 2001-10-15 キヤノン株式会社 ロータリーエンコーダ
US5424829A (en) * 1992-09-02 1995-06-13 Mitutoyo Corporation Apparatus wherein diffracted light does not return to the source
GB2270379B (en) * 1992-09-02 1997-01-22 Mitutoyo Corp Lattice interference-type displacement detection equipment
JP3005131B2 (ja) * 1992-12-28 2000-01-31 キヤノン株式会社 変位検出装置
US5652426A (en) * 1993-04-19 1997-07-29 Ricoh Company, Ltd. Optical encoder having high resolution
JP3196459B2 (ja) * 1993-10-29 2001-08-06 キヤノン株式会社 ロータリーエンコーダ
US5883384A (en) * 1996-04-16 1999-03-16 Canon Kabushiki Kaisha Rotational displacement information detection apparatus
US6188484B1 (en) 1998-10-29 2001-02-13 Maxtor Corporation Method and apparatus for measuring angular displacement of an actuator arm relative to a reference position
US6399940B1 (en) * 1999-05-10 2002-06-04 Fanuc America Corporation Optical rotary position encoder
EP1347271B1 (de) * 2002-03-18 2012-01-11 Mitutoyo Corporation Optischer Verschiebungsfühler mit verringter Empfindlichkeit für Fehlausrichtung
US20030174343A1 (en) * 2002-03-18 2003-09-18 Mitutoyo Corporation Optical displacement sensing device with reduced sensitivity to misalignment
US7101053B2 (en) * 2004-01-15 2006-09-05 Associated Universities, Inc. Multidirectional retroreflectors
JP4722474B2 (ja) * 2004-12-24 2011-07-13 株式会社ミツトヨ 変位検出装置
US7777879B2 (en) * 2007-02-01 2010-08-17 Stmicroelectronics (Research & Development) Ltd. Rotary encoders
US7710556B1 (en) * 2007-05-24 2010-05-04 Kla-Tencor Corporation Inspection system
US7864336B2 (en) * 2008-04-28 2011-01-04 Agilent Technologies, Inc. Compact Littrow encoder
JP5602420B2 (ja) * 2009-12-10 2014-10-08 キヤノン株式会社 変位測定装置、露光装置、及び精密加工機器
US9983298B2 (en) 2015-02-05 2018-05-29 Associated Universities, LLC Fiber optic based laser range finder
TWI721719B (zh) * 2019-12-19 2021-03-11 財團法人工業技術研究院 量測裝置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4629886A (en) * 1983-03-23 1986-12-16 Yokogawa Hokushin Electric Corporation High resolution digital diffraction grating scale encoder
DE3484649D1 (de) * 1983-11-04 1991-07-04 Sony Magnescale Inc Optisches instrument zur messung einer verschiebung.
JPS6165115A (ja) * 1984-09-05 1986-04-03 Canon Inc ロ−タリ−エンコ−ダ−
US4967072A (en) * 1984-09-05 1990-10-30 Canon Kabushiki Kaisha Interferometric rotating condition detection apparatus
JPH0621801B2 (ja) * 1985-07-03 1994-03-23 キヤノン株式会社 ロ−タリ−エンコ−ダ−
JPS6212814A (ja) * 1985-07-10 1987-01-21 Canon Inc ロ−タリ−エンコ−ダ−
DE3700906C2 (de) * 1986-01-14 1995-09-28 Canon Kk Verschlüßler
DE3633574A1 (de) * 1986-10-02 1988-04-14 Heidenhain Gmbh Dr Johannes Lichtelektrische winkelmesseinrichtung
CH672185A5 (de) * 1986-11-19 1989-10-31 Kern & Co Ag
JPS63144206A (ja) * 1986-12-08 1988-06-16 Minolta Camera Co Ltd 物***置の測定方法
JPH073344B2 (ja) * 1987-06-15 1995-01-18 キヤノン株式会社 エンコ−ダ−
JPH0778433B2 (ja) * 1988-07-19 1995-08-23 キヤノン株式会社 ロータリーエンコーダ
JP2586120B2 (ja) * 1988-09-22 1997-02-26 キヤノン株式会社 エンコーダー

Also Published As

Publication number Publication date
EP0397202A2 (de) 1990-11-14
US5146085A (en) 1992-09-08
DE69011188D1 (de) 1994-09-08
EP0397202B1 (de) 1994-08-03
EP0397202A3 (de) 1991-04-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee