DE69003951D1 - Herstellung von vielschichtfilmen durch sputtern. - Google Patents
Herstellung von vielschichtfilmen durch sputtern.Info
- Publication number
- DE69003951D1 DE69003951D1 DE91900447T DE69003951T DE69003951D1 DE 69003951 D1 DE69003951 D1 DE 69003951D1 DE 91900447 T DE91900447 T DE 91900447T DE 69003951 T DE69003951 T DE 69003951T DE 69003951 D1 DE69003951 D1 DE 69003951D1
- Authority
- DE
- Germany
- Prior art keywords
- sputtering
- manufacture
- multilayer films
- multilayer
- films
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
- G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
- G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
- G11B11/10582—Record carriers characterised by the selection of the material or by the structure or form
- G11B11/10586—Record carriers characterised by the selection of the material or by the structure or form characterised by the selection of the material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
- H01F10/325—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the spacer being noble metal
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
- H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
- H01F10/3286—Spin-exchange coupled multilayers having at least one layer with perpendicular magnetic anisotropy
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Nanotechnology (AREA)
- Manufacturing & Machinery (AREA)
- Thin Magnetic Films (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/441,499 US5068022A (en) | 1989-11-27 | 1989-11-27 | Process for sputtering multilayers for magneto-optical recording |
PCT/US1990/006767 WO1991008578A1 (en) | 1989-11-27 | 1990-11-27 | Process for sputtering multilayers for magneto-optical recording |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69003951D1 true DE69003951D1 (de) | 1993-11-18 |
DE69003951T2 DE69003951T2 (de) | 1994-04-14 |
Family
ID=23753116
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE91900447T Expired - Lifetime DE69003951T2 (de) | 1989-11-27 | 1990-11-27 | Herstellung von vielschichtfilmen durch sputtern. |
Country Status (7)
Country | Link |
---|---|
US (1) | US5068022A (de) |
EP (1) | EP0502950B1 (de) |
JP (1) | JP3042878B2 (de) |
KR (1) | KR970004574B1 (de) |
CN (1) | CN1054450A (de) |
DE (1) | DE69003951T2 (de) |
WO (1) | WO1991008578A1 (de) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5082749A (en) * | 1990-03-15 | 1992-01-21 | E. I. Du Pont De Nemours And Company | Platinum or palladium/cobalt multilayer on a zinc oxide or indium oxide layer for magneto-optical recording |
EP0459413B1 (de) * | 1990-05-29 | 1996-02-28 | Oki Electric Industry Company, Limited | Verfahren zur Herstellung magnetischer Aufzeichnungsträger |
US5281554A (en) * | 1991-02-08 | 1994-01-25 | Sharp Kabushiki Kaisha | Method for producing a semiconductor device having a tantalum thin film |
US5633092A (en) * | 1991-12-10 | 1997-05-27 | British Technology Group Ltd. | Magnetostrictive material |
EP1160782A3 (de) * | 1991-12-27 | 2004-09-22 | Honeywell International Inc. | Mehrschichtiger magnetooptischer Aufzeichnungsträger sowie Herstellungsverfahren |
DE4215664C1 (de) * | 1992-05-13 | 1993-11-25 | Mtu Muenchen Gmbh | Verfahren zum Aufbringen von metallischen Zwischenschichten und seine Anwendung |
EP0576376B1 (de) * | 1992-06-26 | 1998-05-06 | Eastman Kodak Company | Kobalt-Platin magnetischer Film und Herstellungsverfahren |
GB9216074D0 (en) * | 1992-07-28 | 1992-09-09 | Johnson Matthey Plc | Magneto-optical recording materials system |
US5505835A (en) * | 1993-02-22 | 1996-04-09 | Matsushita Electric Industrial Co., Ltd. | Method for fabricating optical information storage medium |
US5750228A (en) * | 1993-02-22 | 1998-05-12 | Matsushita Electric Industrial Co., Ltd. | Optical information storage medium |
US5693200A (en) * | 1995-08-25 | 1997-12-02 | Eastman Kodak Company | Forming a high performance Co/Pt disk |
US5875169A (en) * | 1997-06-12 | 1999-02-23 | Eastman Kodak Company | Magneto-optic data storage device having multiple data storage levels |
US6328856B1 (en) * | 1999-08-04 | 2001-12-11 | Seagate Technology Llc | Method and apparatus for multilayer film deposition utilizing rotating multiple magnetron cathode device |
US6893542B1 (en) | 1999-09-10 | 2005-05-17 | Seagate Technology Llc | Sputtered multilayer magnetic recording media with ultra-high coercivity |
AU4262201A (en) * | 2000-03-29 | 2001-10-08 | Trikon Holdings Limited | Method of depositing metal films |
JP2009080897A (ja) * | 2007-09-26 | 2009-04-16 | Hoya Corp | 垂直磁気記録ディスクの製造方法および垂直磁気記録ディスク |
US10566522B2 (en) | 2012-05-22 | 2020-02-18 | SK Hynix Inc. | Platinum and cobalt/copper-based multilayer thin film having low saturation magnetization and fabrication method thereof |
KR101287370B1 (ko) | 2012-05-22 | 2013-07-19 | 고려대학교 산학협력단 | 반전구조를 갖는 코발트(Co) 및 플래티늄(Pt) 기반의 다층박막 및 이의 제조방법 |
CN105948535A (zh) * | 2016-04-28 | 2016-09-21 | 信义节能玻璃(芜湖)有限公司 | 超低辐射镀膜玻璃及其制备方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3399129A (en) * | 1965-11-15 | 1968-08-27 | Ibm | Sputer deposition of nickel-iron-manganese ferromagnetic films |
JPS58122622A (ja) * | 1982-01-18 | 1983-07-21 | Hitachi Ltd | 磁気記録媒体に有機保護膜を形成する方法 |
JPH0766507B2 (ja) * | 1984-02-16 | 1995-07-19 | コニカ株式会社 | 磁気記録媒体 |
US4587176A (en) * | 1985-01-14 | 1986-05-06 | E. I. Du Pont De Nemours And Company | Layered coherent structures for magnetic recording |
JPS61242321A (ja) * | 1985-04-19 | 1986-10-28 | Sony Corp | 磁気記録媒体 |
DE3866314D1 (de) * | 1987-08-26 | 1992-01-02 | Sony Corp | Magnetooptischer aufzeichnungstraeger. |
-
1989
- 1989-11-27 US US07/441,499 patent/US5068022A/en not_active Expired - Lifetime
-
1990
- 1990-11-27 CN CN90109852A patent/CN1054450A/zh active Pending
- 1990-11-27 EP EP91900447A patent/EP0502950B1/de not_active Expired - Lifetime
- 1990-11-27 DE DE91900447T patent/DE69003951T2/de not_active Expired - Lifetime
- 1990-11-27 KR KR1019920701122A patent/KR970004574B1/ko not_active IP Right Cessation
- 1990-11-27 JP JP03501076A patent/JP3042878B2/ja not_active Expired - Lifetime
- 1990-11-27 WO PCT/US1990/006767 patent/WO1991008578A1/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
EP0502950A1 (de) | 1992-09-16 |
EP0502950B1 (de) | 1993-10-13 |
JPH05504993A (ja) | 1993-07-29 |
US5068022A (en) | 1991-11-26 |
DE69003951T2 (de) | 1994-04-14 |
WO1991008578A1 (en) | 1991-06-13 |
KR920704323A (ko) | 1992-12-19 |
CN1054450A (zh) | 1991-09-11 |
KR970004574B1 (ko) | 1997-03-29 |
JP3042878B2 (ja) | 2000-05-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |