DE68921518D1 - Vorrichtung zur Detektion eines photoakustischen Signals. - Google Patents
Vorrichtung zur Detektion eines photoakustischen Signals.Info
- Publication number
- DE68921518D1 DE68921518D1 DE68921518T DE68921518T DE68921518D1 DE 68921518 D1 DE68921518 D1 DE 68921518D1 DE 68921518 T DE68921518 T DE 68921518T DE 68921518 T DE68921518 T DE 68921518T DE 68921518 D1 DE68921518 D1 DE 68921518D1
- Authority
- DE
- Germany
- Prior art keywords
- detection
- photoacoustic signal
- photoacoustic
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
- G01N2021/1706—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in solids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N2021/178—Methods for obtaining spatial resolution of the property being measured
- G01N2021/1782—In-depth resolution
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63185597A JP2718705B2 (ja) | 1988-07-27 | 1988-07-27 | 光音響信号検出方法及びその装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE68921518D1 true DE68921518D1 (de) | 1995-04-13 |
DE68921518T2 DE68921518T2 (de) | 1995-07-20 |
Family
ID=16173586
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE68921518T Expired - Fee Related DE68921518T2 (de) | 1988-07-27 | 1989-07-27 | Vorrichtung zur Detektion eines photoakustischen Signals. |
Country Status (4)
Country | Link |
---|---|
US (1) | US5083869A (de) |
EP (1) | EP0352789B1 (de) |
JP (1) | JP2718705B2 (de) |
DE (1) | DE68921518T2 (de) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5136172A (en) * | 1989-08-16 | 1992-08-04 | Hitachi, Ltd. | Method and apparatus for detecting photoacoustic signal |
EP0459392B1 (de) * | 1990-05-30 | 1999-08-18 | Hitachi, Ltd. | Verfahren und Vorrichtung zur Behandlung eines sehr kleinen Bereichs einer Probe |
JPH04357440A (ja) * | 1990-08-20 | 1992-12-10 | Shiseido Co Ltd | 光音響セルおよび光音響測定装置 |
US5377006A (en) * | 1991-05-20 | 1994-12-27 | Hitachi, Ltd. | Method and apparatus for detecting photoacoustic signal |
US5479259A (en) * | 1991-05-20 | 1995-12-26 | Hitachi, Ltd. | Method and apparatus for detecting photoacoustic signal |
US5285260A (en) * | 1992-07-06 | 1994-02-08 | General Electric Company | Spectroscopic imaging system with ultrasonic detection of absorption of modulated electromagnetic radiation |
US5285261A (en) * | 1992-07-06 | 1994-02-08 | General Electric Company | Dual interferometer spectroscopic imaging system |
JPH07311182A (ja) * | 1994-03-25 | 1995-11-28 | Kobe Steel Ltd | 光熱変位計測による試料評価方法 |
US5638396A (en) * | 1994-09-19 | 1997-06-10 | Textron Systems Corporation | Laser ultrasonics-based material analysis system and method |
US6321601B1 (en) | 1996-08-06 | 2001-11-27 | Brown University Research Foundation | Optical method for the characterization of laterally-patterned samples in integrated circuits |
US6175416B1 (en) | 1996-08-06 | 2001-01-16 | Brown University Research Foundation | Optical stress generator and detector |
US5748318A (en) * | 1996-01-23 | 1998-05-05 | Brown University Research Foundation | Optical stress generator and detector |
US5724138A (en) * | 1996-04-18 | 1998-03-03 | Textron Systems Corporation | Wavelet analysis for laser ultrasonic measurement of material properties |
US5844684A (en) * | 1997-02-28 | 1998-12-01 | Brown University Research Foundation | Optical method for determining the mechanical properties of a material |
JPH11188670A (ja) * | 1997-12-26 | 1999-07-13 | Daihen Corp | 2アーム方式の搬送用ロボット装置 |
JPH11188671A (ja) * | 1997-12-26 | 1999-07-13 | Daihen Corp | 2アーム方式の搬送用ロボット装置 |
US6552803B1 (en) | 1998-02-24 | 2003-04-22 | Kla-Tencor Corporation | Detection of film thickness through induced acoustic pulse-echos |
US6317216B1 (en) | 1999-12-13 | 2001-11-13 | Brown University Research Foundation | Optical method for the determination of grain orientation in films |
US6768543B1 (en) * | 2001-11-01 | 2004-07-27 | Arun Ananth Aiyer | Wafer inspection apparatus with unique illumination methodology and method of operation |
GB2393246A (en) | 2002-09-21 | 2004-03-24 | Sonoptix Ltd | Transducer sensor |
IES20030396A2 (en) * | 2003-05-23 | 2004-11-17 | Univ Dublin City | A method and apparatus for analysis of semiconductor materials using photoacoustic spectroscopy techniques |
DE502004002547D1 (de) * | 2004-06-22 | 2007-02-15 | Polytec Gmbh | Vorrichtung zum optischen Vermessen eines Objektes |
US7397596B2 (en) * | 2004-07-28 | 2008-07-08 | Ler Technologies, Inc. | Surface and subsurface detection sensor |
US20060184042A1 (en) * | 2005-01-22 | 2006-08-17 | The Texas A&M University System | Method, system and apparatus for dark-field reflection-mode photoacoustic tomography |
JP5809749B2 (ja) * | 2012-06-04 | 2015-11-11 | 株式会社アドバンテスト | 光音響波測定装置、方法、プログラム、記録媒体 |
WO2014087624A1 (ja) | 2012-12-05 | 2014-06-12 | パナソニック株式会社 | 画像生成装置及び画像生成方法 |
JP2016002372A (ja) * | 2014-06-18 | 2016-01-12 | キヤノン株式会社 | 被検体情報取得装置 |
CN104677830A (zh) * | 2015-03-03 | 2015-06-03 | 北京理工大学 | 分光瞳共焦-光声显微成像装置与方法 |
DE102017114023A1 (de) | 2017-06-23 | 2018-12-27 | SmarAct Holding GmbH | Verfahren und Detektor zur mit Interferometrie korrelierten Bildaufnahme |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1547403A1 (de) * | 1967-01-25 | 1969-12-18 | Leitz Ernst Gmbh | Auswerteverfahren fuer Interferometer |
FR2222666B1 (de) * | 1973-03-19 | 1976-11-05 | Thomson Brandt | |
DE2457253C2 (de) * | 1974-12-04 | 1982-09-02 | Krautkrämer, GmbH, 5000 Köln | Optisches interferometrisches Verfahren und Vorrichtung zur berührungslosen Messung der durch Ultraschallwellen verursachten Oberflächenauslenkung eines Prüflings |
JPS542704A (en) * | 1977-06-08 | 1979-01-10 | Mitsubishi Electric Corp | Optical information reproducer |
US4243327A (en) * | 1979-01-31 | 1981-01-06 | Nasa | Double-beam optical method and apparatus for measuring thermal diffusivity and other molecular dynamic processes in utilizing the transient thermal lens effect |
US4350410A (en) * | 1980-10-08 | 1982-09-21 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Multiprism collimator |
JPS5890164A (ja) * | 1981-11-25 | 1983-05-28 | Nippon Steel Corp | レ−ザ光による超音波発受信方法および装置 |
US4679946A (en) * | 1984-05-21 | 1987-07-14 | Therma-Wave, Inc. | Evaluating both thickness and compositional variables in a thin film sample |
EP0200301A1 (de) * | 1985-03-01 | 1986-11-05 | Therma-Wave Inc. | Verfahren und Vorrichtung zum Auswerten von Eigenschaften der Oberfläche und des Inneren eines Halbleiters |
US4633715A (en) * | 1985-05-08 | 1987-01-06 | Canadian Patents And Development Limited - Societe Canadienne Des Brevets Et D'exploitation Limitee | Laser heterodyne interferometric method and system for measuring ultrasonic displacements |
JPS6330758A (ja) * | 1986-07-25 | 1988-02-09 | Agency Of Ind Science & Technol | 表面欠陥検出方法 |
-
1988
- 1988-07-27 JP JP63185597A patent/JP2718705B2/ja not_active Expired - Lifetime
-
1989
- 1989-07-24 US US07/384,541 patent/US5083869A/en not_active Expired - Lifetime
- 1989-07-27 EP EP89113875A patent/EP0352789B1/de not_active Expired - Lifetime
- 1989-07-27 DE DE68921518T patent/DE68921518T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0352789A3 (de) | 1991-05-15 |
US5083869A (en) | 1992-01-28 |
EP0352789B1 (de) | 1995-03-08 |
DE68921518T2 (de) | 1995-07-20 |
EP0352789A2 (de) | 1990-01-31 |
JPH0236338A (ja) | 1990-02-06 |
JP2718705B2 (ja) | 1998-02-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |