DE68921518D1 - Vorrichtung zur Detektion eines photoakustischen Signals. - Google Patents

Vorrichtung zur Detektion eines photoakustischen Signals.

Info

Publication number
DE68921518D1
DE68921518D1 DE68921518T DE68921518T DE68921518D1 DE 68921518 D1 DE68921518 D1 DE 68921518D1 DE 68921518 T DE68921518 T DE 68921518T DE 68921518 T DE68921518 T DE 68921518T DE 68921518 D1 DE68921518 D1 DE 68921518D1
Authority
DE
Germany
Prior art keywords
detection
photoacoustic signal
photoacoustic
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68921518T
Other languages
English (en)
Other versions
DE68921518T2 (de
Inventor
Toshihiko Nakata
Yukio Kembo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of DE68921518D1 publication Critical patent/DE68921518D1/de
Application granted granted Critical
Publication of DE68921518T2 publication Critical patent/DE68921518T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G01N2021/1706—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/178—Methods for obtaining spatial resolution of the property being measured
    • G01N2021/1782—In-depth resolution

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
DE68921518T 1988-07-27 1989-07-27 Vorrichtung zur Detektion eines photoakustischen Signals. Expired - Fee Related DE68921518T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63185597A JP2718705B2 (ja) 1988-07-27 1988-07-27 光音響信号検出方法及びその装置

Publications (2)

Publication Number Publication Date
DE68921518D1 true DE68921518D1 (de) 1995-04-13
DE68921518T2 DE68921518T2 (de) 1995-07-20

Family

ID=16173586

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68921518T Expired - Fee Related DE68921518T2 (de) 1988-07-27 1989-07-27 Vorrichtung zur Detektion eines photoakustischen Signals.

Country Status (4)

Country Link
US (1) US5083869A (de)
EP (1) EP0352789B1 (de)
JP (1) JP2718705B2 (de)
DE (1) DE68921518T2 (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5136172A (en) * 1989-08-16 1992-08-04 Hitachi, Ltd. Method and apparatus for detecting photoacoustic signal
EP0459392B1 (de) * 1990-05-30 1999-08-18 Hitachi, Ltd. Verfahren und Vorrichtung zur Behandlung eines sehr kleinen Bereichs einer Probe
JPH04357440A (ja) * 1990-08-20 1992-12-10 Shiseido Co Ltd 光音響セルおよび光音響測定装置
US5377006A (en) * 1991-05-20 1994-12-27 Hitachi, Ltd. Method and apparatus for detecting photoacoustic signal
US5479259A (en) * 1991-05-20 1995-12-26 Hitachi, Ltd. Method and apparatus for detecting photoacoustic signal
US5285260A (en) * 1992-07-06 1994-02-08 General Electric Company Spectroscopic imaging system with ultrasonic detection of absorption of modulated electromagnetic radiation
US5285261A (en) * 1992-07-06 1994-02-08 General Electric Company Dual interferometer spectroscopic imaging system
JPH07311182A (ja) * 1994-03-25 1995-11-28 Kobe Steel Ltd 光熱変位計測による試料評価方法
US5638396A (en) * 1994-09-19 1997-06-10 Textron Systems Corporation Laser ultrasonics-based material analysis system and method
US6321601B1 (en) 1996-08-06 2001-11-27 Brown University Research Foundation Optical method for the characterization of laterally-patterned samples in integrated circuits
US6175416B1 (en) 1996-08-06 2001-01-16 Brown University Research Foundation Optical stress generator and detector
US5748318A (en) * 1996-01-23 1998-05-05 Brown University Research Foundation Optical stress generator and detector
US5724138A (en) * 1996-04-18 1998-03-03 Textron Systems Corporation Wavelet analysis for laser ultrasonic measurement of material properties
US5844684A (en) * 1997-02-28 1998-12-01 Brown University Research Foundation Optical method for determining the mechanical properties of a material
JPH11188670A (ja) * 1997-12-26 1999-07-13 Daihen Corp ２アーム方式の搬送用ロボット装置
JPH11188671A (ja) * 1997-12-26 1999-07-13 Daihen Corp ２アーム方式の搬送用ロボット装置
US6552803B1 (en) 1998-02-24 2003-04-22 Kla-Tencor Corporation Detection of film thickness through induced acoustic pulse-echos
US6317216B1 (en) 1999-12-13 2001-11-13 Brown University Research Foundation Optical method for the determination of grain orientation in films
US6768543B1 (en) * 2001-11-01 2004-07-27 Arun Ananth Aiyer Wafer inspection apparatus with unique illumination methodology and method of operation
GB2393246A (en) 2002-09-21 2004-03-24 Sonoptix Ltd Transducer sensor
IES20030396A2 (en) * 2003-05-23 2004-11-17 Univ Dublin City A method and apparatus for analysis of semiconductor materials using photoacoustic spectroscopy techniques
DE502004002547D1 (de) * 2004-06-22 2007-02-15 Polytec Gmbh Vorrichtung zum optischen Vermessen eines Objektes
US7397596B2 (en) * 2004-07-28 2008-07-08 Ler Technologies, Inc. Surface and subsurface detection sensor
US20060184042A1 (en) * 2005-01-22 2006-08-17 The Texas A&M University System Method, system and apparatus for dark-field reflection-mode photoacoustic tomography
JP5809749B2 (ja) * 2012-06-04 2015-11-11 株式会社アドバンテスト 光音響波測定装置、方法、プログラム、記録媒体
WO2014087624A1 (ja) 2012-12-05 2014-06-12 パナソニック株式会社 画像生成装置及び画像生成方法
JP2016002372A (ja) * 2014-06-18 2016-01-12 キヤノン株式会社 被検体情報取得装置
CN104677830A (zh) * 2015-03-03 2015-06-03 北京理工大学 分光瞳共焦-光声显微成像装置与方法
DE102017114023A1 (de) 2017-06-23 2018-12-27 SmarAct Holding GmbH Verfahren und Detektor zur mit Interferometrie korrelierten Bildaufnahme

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1547403A1 (de) * 1967-01-25 1969-12-18 Leitz Ernst Gmbh Auswerteverfahren fuer Interferometer
FR2222666B1 (de) * 1973-03-19 1976-11-05 Thomson Brandt
DE2457253C2 (de) * 1974-12-04 1982-09-02 Krautkrämer, GmbH, 5000 Köln Optisches interferometrisches Verfahren und Vorrichtung zur berührungslosen Messung der durch Ultraschallwellen verursachten Oberflächenauslenkung eines Prüflings
JPS542704A (en) * 1977-06-08 1979-01-10 Mitsubishi Electric Corp Optical information reproducer
US4243327A (en) * 1979-01-31 1981-01-06 Nasa Double-beam optical method and apparatus for measuring thermal diffusivity and other molecular dynamic processes in utilizing the transient thermal lens effect
US4350410A (en) * 1980-10-08 1982-09-21 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Multiprism collimator
JPS5890164A (ja) * 1981-11-25 1983-05-28 Nippon Steel Corp レ−ザ光による超音波発受信方法および装置
US4679946A (en) * 1984-05-21 1987-07-14 Therma-Wave, Inc. Evaluating both thickness and compositional variables in a thin film sample
EP0200301A1 (de) * 1985-03-01 1986-11-05 Therma-Wave Inc. Verfahren und Vorrichtung zum Auswerten von Eigenschaften der Oberfläche und des Inneren eines Halbleiters
US4633715A (en) * 1985-05-08 1987-01-06 Canadian Patents And Development Limited - Societe Canadienne Des Brevets Et D'exploitation Limitee Laser heterodyne interferometric method and system for measuring ultrasonic displacements
JPS6330758A (ja) * 1986-07-25 1988-02-09 Agency Of Ind Science & Technol 表面欠陥検出方法

Also Published As

Publication number Publication date
EP0352789A3 (de) 1991-05-15
US5083869A (en) 1992-01-28
EP0352789B1 (de) 1995-03-08
DE68921518T2 (de) 1995-07-20
EP0352789A2 (de) 1990-01-31
JPH0236338A (ja) 1990-02-06
JP2718705B2 (ja) 1998-02-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee