DE68918663D1 - Process for manufacturing an inkjet printhead. - Google Patents

Process for manufacturing an inkjet printhead.

Info

Publication number
DE68918663D1
DE68918663D1 DE68918663T DE68918663T DE68918663D1 DE 68918663 D1 DE68918663 D1 DE 68918663D1 DE 68918663 T DE68918663 T DE 68918663T DE 68918663 T DE68918663 T DE 68918663T DE 68918663 D1 DE68918663 D1 DE 68918663D1
Authority
DE
Germany
Prior art keywords
manufacturing
inkjet printhead
printhead
inkjet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68918663T
Other languages
German (de)
Other versions
DE68918663T2 (en
Inventor
Takashi Watanabe
Kazuaki Masuda
Akira Goto
Hiroshi Kono
Takashi Kanzaki
Toshio Kashino
Akio Saito
Koyo Midorikawa
Toru Okumura
Masami Ikeda
Nobuyuki Kuwabara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP63275800A external-priority patent/JP2771557B2/en
Priority claimed from JP27579488A external-priority patent/JPH02121843A/en
Priority claimed from JP27579788A external-priority patent/JPH02121842A/en
Priority claimed from JP1007403A external-priority patent/JP2763563B2/en
Priority claimed from JP741089A external-priority patent/JP2633943B2/en
Priority claimed from JP1007470A external-priority patent/JP2831368B2/en
Priority claimed from JP740989A external-priority patent/JPH02187345A/en
Priority claimed from JP918489A external-priority patent/JPH02188257A/en
Priority claimed from JP918189A external-priority patent/JPH02188255A/en
Priority claimed from JP1018079A external-priority patent/JP2764418B2/en
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE68918663D1 publication Critical patent/DE68918663D1/en
Publication of DE68918663T2 publication Critical patent/DE68918663T2/en
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14024—Assembling head parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/1433—Structure of nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1606—Coating the nozzle area or the ink chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14379—Edge shooter

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE1989618663 1988-10-31 1989-10-30 Process for manufacturing an inkjet printhead. Expired - Fee Related DE68918663T2 (en)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
JP63275800A JP2771557B2 (en) 1988-10-31 1988-10-31 Method of manufacturing ink jet recording head
JP27579788A JPH02121842A (en) 1988-10-31 1988-10-31 Ink jet recording head and manufacture thereof
JP27579488A JPH02121843A (en) 1988-10-31 1988-10-31 Liquid injection recording head and manufacture thereof
JP741089A JP2633943B2 (en) 1989-01-13 1989-01-13 Ink jet recording head and method of manufacturing the head
JP1007403A JP2763563B2 (en) 1989-01-13 1989-01-13 Method of manufacturing ink jet recording head
JP1007470A JP2831368B2 (en) 1989-01-13 1989-01-13 Method of manufacturing ejection port forming member for ink jet recording head
JP740989A JPH02187345A (en) 1989-01-13 1989-01-13 Ink jet recording head and its manufacture
JP918489A JPH02188257A (en) 1989-01-18 1989-01-18 Production of ink jet head
JP918189A JPH02188255A (en) 1989-01-18 1989-01-18 Production of discharge port plate
JP1018079A JP2764418B2 (en) 1989-01-28 1989-01-28 Method of manufacturing ink jet recording head and ink jet recording head manufactured by the method

Publications (2)

Publication Number Publication Date
DE68918663D1 true DE68918663D1 (en) 1994-11-10
DE68918663T2 DE68918663T2 (en) 1995-03-16

Family

ID=27579561

Family Applications (2)

Application Number Title Priority Date Filing Date
DE1989618663 Expired - Fee Related DE68918663T2 (en) 1988-10-31 1989-10-30 Process for manufacturing an inkjet printhead.
DE1989629489 Expired - Lifetime DE68929489T2 (en) 1988-10-31 1989-10-30 Ink jet head and its manufacturing method, orifice plate for this head and manufacturing method, and ink jet device provided with it

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE1989629489 Expired - Lifetime DE68929489T2 (en) 1988-10-31 1989-10-30 Ink jet head and its manufacturing method, orifice plate for this head and manufacturing method, and ink jet device provided with it

Country Status (3)

Country Link
EP (3) EP0937579B1 (en)
DE (2) DE68918663T2 (en)
ES (2) ES2207908T3 (en)

Families Citing this family (45)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3032021B2 (en) * 1990-02-02 2000-04-10 キヤノン株式会社 Ink jet recording device
GB9010289D0 (en) * 1990-05-08 1990-06-27 Xaar Ltd Drop-on-demand printing apparatus and method of manufacture
CN1067632C (en) * 1990-07-20 2001-06-27 佳能株式会社 Recording apparatus with ink jet recording head
DE69130314T2 (en) * 1990-07-21 1999-04-08 Canon Kk Manufacturing method of an ink jet recording head and ink jet recording head
DE69111936T2 (en) * 1990-08-16 1996-04-11 Hewlett Packard Co Photo-ablated components for inkjet printheads.
US5291226A (en) * 1990-08-16 1994-03-01 Hewlett-Packard Company Nozzle member including ink flow channels
US5469199A (en) * 1990-08-16 1995-11-21 Hewlett-Packard Company Wide inkjet printhead
US5305015A (en) * 1990-08-16 1994-04-19 Hewlett-Packard Company Laser ablated nozzle member for inkjet printhead
US5442384A (en) * 1990-08-16 1995-08-15 Hewlett-Packard Company Integrated nozzle member and tab circuit for inkjet printhead
EP0495663B1 (en) * 1991-01-18 1997-04-23 Canon Kabushiki Kaisha Liquid jet unit with orifices and recording apparatus using the same
DE69210858T2 (en) * 1991-02-21 1996-11-28 Hewlett Packard Co Photo-removal method of at least one stepped opening which penetrates a polymeric material and a nozzle plate which has a stepped opening
JP3278186B2 (en) * 1991-03-08 2002-04-30 キヤノン株式会社 Inkjet recording head
JP3179834B2 (en) * 1991-07-19 2001-06-25 株式会社リコー Liquid flight recorder
ATE163158T1 (en) * 1991-10-22 1998-02-15 Canon Kk METHOD FOR PRODUCING AN INK JET RECORDING HEAD
GB9202434D0 (en) * 1992-02-05 1992-03-18 Xaar Ltd Method of and apparatus for forming nozzles
US5278584A (en) * 1992-04-02 1994-01-11 Hewlett-Packard Company Ink delivery system for an inkjet printhead
US5420627A (en) * 1992-04-02 1995-05-30 Hewlett-Packard Company Inkjet printhead
US5450113A (en) * 1992-04-02 1995-09-12 Hewlett-Packard Company Inkjet printhead with improved seal arrangement
US5300959A (en) * 1992-04-02 1994-04-05 Hewlett-Packard Company Efficient conductor routing for inkjet printhead
US5297331A (en) * 1992-04-03 1994-03-29 Hewlett-Packard Company Method for aligning a substrate with respect to orifices in an inkjet printhead
US5703631A (en) * 1992-05-05 1997-12-30 Compaq Computer Corporation Method of forming an orifice array for a high density ink jet printhead
US5378137A (en) * 1993-05-10 1995-01-03 Hewlett-Packard Company Mask design for forming tapered inkjet nozzles
US5350616A (en) * 1993-06-16 1994-09-27 Hewlett-Packard Company Composite orifice plate for ink jet printer and method for the manufacture thereof
SG85076A1 (en) * 1994-09-13 2001-12-19 Xaar Ltd Removal of material from inkjet printheads
GB9418412D0 (en) * 1994-09-13 1994-11-02 Xaar Ltd Removal of material from inkjet printheads
US5852460A (en) * 1995-03-06 1998-12-22 Hewlett-Packard Company Inkjet print cartridge design to decrease deformation of the printhead when adhesively sealing the printhead to the print cartridge
US5736998A (en) * 1995-03-06 1998-04-07 Hewlett-Packard Company Inkjet cartridge design for facilitating the adhesive sealing of a printhead to an ink reservoir
JPH0952365A (en) * 1995-06-08 1997-02-25 Canon Inc Ink jet recording head and manufacture thereof, and ink jet recording apparatus
US6561623B1 (en) * 1995-08-31 2003-05-13 Canon Kabushiki Kaisha Method for producing ink jet recording head and ink jet recording head produced by same
DE69724330T2 (en) * 1996-06-07 2004-06-03 Canon K.K. Liquid ejecting head and apparatus and manufacturing method
JP3461249B2 (en) 1996-08-30 2003-10-27 キヤノン株式会社 Inkjet recording head
US6259463B1 (en) 1997-10-30 2001-07-10 Hewlett-Packard Company Multi-drop merge on media printing system
US6193347B1 (en) 1997-02-06 2001-02-27 Hewlett-Packard Company Hybrid multi-drop/multi-pass printing system
US6193345B1 (en) 1997-10-30 2001-02-27 Hewlett-Packard Company Apparatus for generating high frequency ink ejection and ink chamber refill
US6234613B1 (en) * 1997-10-30 2001-05-22 Hewlett-Packard Company Apparatus for generating small volume, high velocity ink droplets in an inkjet printer
US6361145B1 (en) * 1998-01-27 2002-03-26 Canon Kabushiki Kaisha Ink jet recording head, method of producing same, and ink jet recording apparatus
EP1000744B1 (en) * 1998-10-27 2010-10-13 Canon Kabushiki Kaisha Ink jet recording head, ink jet recording cartridge, and recording apparatus
US6261742B1 (en) 1999-02-01 2001-07-17 Hewlett-Packard Company Method for manufacturing a printhead with re-entrant nozzles
EP1065058A3 (en) * 1999-06-30 2003-04-09 Canon Kabushiki Kaisha Method for manufacturing ink jet recording head, ink jet recording head manufactured by such method, and laser working method
US6747244B1 (en) 1999-11-30 2004-06-08 Canon Kabushiki Kaisha Laser working apparatus, laser working method, method for producing ink jet recording head utilizing such laser working apparatus or method, and ink jet recording head formed by such producing method
SE0003293D0 (en) * 2000-09-15 2000-09-15 Aamic Ab Dispensing nozzle
US7043838B2 (en) 2004-06-30 2006-05-16 Lexmark International, Inc. Process for manufacturing a micro-fluid ejection device
US7311386B2 (en) 2004-06-30 2007-12-25 Lexmark Interntional, Inc. Die attach methods and apparatus for micro-fluid ejection device
KR100580654B1 (en) 2004-10-29 2006-05-16 삼성전자주식회사 Nozzle plate, inkjet printhead having the same and manufacturing method of nozzle plate
JP5404331B2 (en) * 2008-12-17 2014-01-29 キヤノン株式会社 Ink jet recording head, recording element substrate, method for manufacturing ink jet recording head, and method for manufacturing recording element substrate

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CA1127227A (en) 1977-10-03 1982-07-06 Ichiro Endo Liquid jet recording process and apparatus therefor
US4330787A (en) * 1978-10-31 1982-05-18 Canon Kabushiki Kaisha Liquid jet recording device
US4345262A (en) 1979-02-19 1982-08-17 Canon Kabushiki Kaisha Ink jet recording method
US4463359A (en) 1979-04-02 1984-07-31 Canon Kabushiki Kaisha Droplet generating method and apparatus thereof
US4313124A (en) 1979-05-18 1982-01-26 Canon Kabushiki Kaisha Liquid jet recording process and liquid jet recording head
JPS57107848A (en) * 1980-12-26 1982-07-05 Ricoh Co Ltd Ink jet nozzle plate
US4374707A (en) * 1981-03-19 1983-02-22 Xerox Corporation Orifice plate for ink jet printing machines
US4558333A (en) 1981-07-09 1985-12-10 Canon Kabushiki Kaisha Liquid jet recording head
JPS58217368A (en) * 1982-06-11 1983-12-17 Ricoh Co Ltd Manufacture of nozzle structure of liquid jetting device
JPS59123670A (en) 1982-12-28 1984-07-17 Canon Inc Ink jet head
JPS6132761A (en) * 1984-07-25 1986-02-15 Nec Corp Jet head
GB8722085D0 (en) * 1987-09-19 1987-10-28 Cambridge Consultants Ink jet nozzle manufacture
CA1329341C (en) * 1988-10-19 1994-05-10 Rosemary Bridget Albinson Method of forming adherent fluorosilane layer on a substrate and ink jet recording head containing such a layer

Also Published As

Publication number Publication date
ES2060789T3 (en) 1994-12-01
EP0937579B1 (en) 2003-10-08
DE68918663T2 (en) 1995-03-16
EP0367541B1 (en) 1994-10-05
DE68929489T2 (en) 2004-08-19
EP0602021A3 (en) 1994-08-31
EP0602021A2 (en) 1994-06-15
EP0937579A3 (en) 1999-11-03
EP0937579A2 (en) 1999-08-25
EP0367541A3 (en) 1990-11-14
ES2207908T3 (en) 2004-06-01
DE68929489D1 (en) 2003-11-13
EP0367541A2 (en) 1990-05-09

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