DE68918491D1 - Vorrichtung zum Abschälen von Dünnschichten. - Google Patents
Vorrichtung zum Abschälen von Dünnschichten.Info
- Publication number
- DE68918491D1 DE68918491D1 DE68918491T DE68918491T DE68918491D1 DE 68918491 D1 DE68918491 D1 DE 68918491D1 DE 68918491 T DE68918491 T DE 68918491T DE 68918491 T DE68918491 T DE 68918491T DE 68918491 D1 DE68918491 D1 DE 68918491D1
- Authority
- DE
- Germany
- Prior art keywords
- thin film
- base plate
- conveyance
- conveying
- conveyance device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/161—Coating processes; Apparatus therefor using a previously coated surface, e.g. by stamping or by transfer lamination
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B26—HAND CUTTING TOOLS; CUTTING; SEVERING
- B26F—PERFORATING; PUNCHING; CUTTING-OUT; STAMPING-OUT; SEVERING BY MEANS OTHER THAN CUTTING
- B26F3/00—Severing by means other than cutting; Apparatus therefor
- B26F3/004—Severing by means other than cutting; Apparatus therefor by means of a fluid jet
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C63/00—Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor
- B29C63/0004—Component parts, details or accessories; Auxiliary operations
- B29C63/0013—Removing old coatings
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/11—Methods of delaminating, per se; i.e., separating at bonding face
- Y10T156/1126—Using direct fluid current against work during delaminating
- Y10T156/1132—Using vacuum directly against work during delaminating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/19—Delaminating means
- Y10T156/1906—Delaminating means responsive to feed or shape at delamination
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/19—Delaminating means
- Y10T156/1928—Differential fluid pressure delaminating means
- Y10T156/1944—Vacuum delaminating means [e.g., vacuum chamber, etc.]
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Forests & Forestry (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Separation, Sorting, Adjustment, Or Bending Of Sheets To Be Conveyed (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
- Control And Other Processes For Unpacking Of Materials (AREA)
- Folding Of Thin Sheet-Like Materials, Special Discharging Devices, And Others (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63101909A JPH01271356A (ja) | 1988-04-25 | 1988-04-25 | 薄膜剥離装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE68918491D1 true DE68918491D1 (de) | 1994-11-03 |
DE68918491T2 DE68918491T2 (de) | 1995-05-18 |
Family
ID=14313038
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE68918491T Expired - Fee Related DE68918491T2 (de) | 1988-04-25 | 1989-04-25 | Vorrichtung zum Abschälen von Dünnschichten. |
Country Status (6)
Country | Link |
---|---|
US (1) | US5000816A (de) |
EP (1) | EP0339570B1 (de) |
JP (1) | JPH01271356A (de) |
AT (1) | ATE112235T1 (de) |
CA (1) | CA1311642C (de) |
DE (1) | DE68918491T2 (de) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0717309B2 (ja) * | 1989-06-04 | 1995-03-01 | ソマール株式会社 | 薄膜剥離方法 |
EP0452552B1 (de) * | 1990-04-06 | 1995-11-02 | Somar Corporation | Ablöseentwicklungsverfahren und Vorrichtung zur Durchführung |
DE69226642T2 (de) * | 1992-05-29 | 1999-01-07 | Sekisui Kagaku Kogyo K.K., Osaka | Selbsttätige zuführvorrichtung für klebefolien |
DE4221703C2 (de) * | 1992-07-02 | 1996-02-22 | Emco Maier Gmbh | Verfahren und Vorrichtung zum ein- oder beidseitigen Abziehen von Schutzfolien |
US5520776A (en) * | 1994-05-10 | 1996-05-28 | Polaroid Corporation | Method and apparatus for delaminating a laminate |
US5658416A (en) * | 1994-06-17 | 1997-08-19 | Polaroid Corporation | Method and apparatus for peeling a laminate |
SG73538A1 (en) * | 1997-08-04 | 2000-06-20 | Matsushita Electric Ind Co Ltd | Method of heat treating object and apparatus for the same |
US6500298B1 (en) * | 2000-01-14 | 2002-12-31 | Kevin P. Wright | Stripping machine and method |
KR20080071337A (ko) * | 2007-01-30 | 2008-08-04 | 삼성전자주식회사 | 편광판 보호 필름의 제거 장치 및 그 방법 |
US8703521B2 (en) | 2009-06-09 | 2014-04-22 | International Business Machines Corporation | Multijunction photovoltaic cell fabrication |
US8802477B2 (en) | 2009-06-09 | 2014-08-12 | International Business Machines Corporation | Heterojunction III-V photovoltaic cell fabrication |
CN115076065A (zh) * | 2021-03-15 | 2022-09-20 | 富联裕展科技(深圳)有限公司 | 流体导入装置、抽气装置、揭膜方法及流体导入方法 |
AR128067A1 (es) * | 2021-12-23 | 2024-03-20 | Tessenderlo Group Nv | Método de producción de gelatina utilizando un dispositivo de corte |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2790638A (en) * | 1952-05-01 | 1957-04-30 | Burroughs Corp | Air blast strip feeding means |
FR2348131A1 (fr) * | 1976-04-13 | 1977-11-10 | Ibm | Dispositif de transport d'articles sur support fluide |
US4387841A (en) * | 1981-03-20 | 1983-06-14 | E. I. Du Pont De Nemours And Company | Film diversion apparatus |
DE3532553C1 (de) * | 1985-09-12 | 1987-03-12 | Loehr & Herrmann Gmbh | Verfahren und Vorrichtung zum Abziehen der Schutzfolie von einer mit belichtetem Fotoresist beschichteten Leiterplatte |
US4724032A (en) * | 1985-10-02 | 1988-02-09 | Thomas Kay | Sheet separating machine and method |
DE3781908T2 (de) * | 1986-02-05 | 1993-05-13 | Somar Corp | Folientransportvorrichtung. |
JPS62196259A (ja) * | 1986-02-24 | 1987-08-29 | Somar Corp | 剥離薄膜収納容器付薄膜剥離装置 |
JPS62293246A (ja) * | 1986-06-13 | 1987-12-19 | Asahi Chem Ind Co Ltd | カバ−フイルムの剥離方法及びその装置 |
-
1988
- 1988-04-25 JP JP63101909A patent/JPH01271356A/ja active Pending
-
1989
- 1989-04-25 EP EP89107467A patent/EP0339570B1/de not_active Expired - Lifetime
- 1989-04-25 AT AT89107467T patent/ATE112235T1/de not_active IP Right Cessation
- 1989-04-25 DE DE68918491T patent/DE68918491T2/de not_active Expired - Fee Related
- 1989-04-25 CA CA000597733A patent/CA1311642C/en not_active Expired - Fee Related
- 1989-04-25 US US07/342,827 patent/US5000816A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE68918491T2 (de) | 1995-05-18 |
ATE112235T1 (de) | 1994-10-15 |
US5000816A (en) | 1991-03-19 |
EP0339570A3 (en) | 1990-12-05 |
EP0339570B1 (de) | 1994-09-28 |
CA1311642C (en) | 1992-12-22 |
JPH01271356A (ja) | 1989-10-30 |
EP0339570A2 (de) | 1989-11-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |