DE68916207D1 - Diamantbeschichtetes Werkzeug, Substrate dafür und Verfahren zu dessen Herstellung. - Google Patents

Diamantbeschichtetes Werkzeug, Substrate dafür und Verfahren zu dessen Herstellung.

Info

Publication number
DE68916207D1
DE68916207D1 DE68916207T DE68916207T DE68916207D1 DE 68916207 D1 DE68916207 D1 DE 68916207D1 DE 68916207 T DE68916207 T DE 68916207T DE 68916207 T DE68916207 T DE 68916207T DE 68916207 D1 DE68916207 D1 DE 68916207D1
Authority
DE
Germany
Prior art keywords
manufacture
coated tool
diamond coated
substrates therefor
therefor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE68916207T
Other languages
English (en)
Other versions
DE68916207T3 (de
DE68916207T2 (de
Inventor
Kei Nakahara
Keiichi C O Tokyo-Seis Sakurai
Toshihiko C O Tokyo-Se Okamura
Hironori C O Tokyo-S Yoshimura
Hiroyuki C O Chuo-Kenkyush Eto
Noribumi C O Chuo-Kenk Kikuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=26391012&utm_source=***_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE68916207(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from JP63322764A external-priority patent/JP2658324B2/ja
Priority claimed from JP5053489A external-priority patent/JP2653158B2/ja
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Publication of DE68916207D1 publication Critical patent/DE68916207D1/de
Application granted granted Critical
Publication of DE68916207T2 publication Critical patent/DE68916207T2/de
Publication of DE68916207T3 publication Critical patent/DE68916207T3/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0209—Pretreatment of the material to be coated by heating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/028—Physical treatment to alter the texture of the substrate surface, e.g. grinding, polishing
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon
    • C23C14/0611—Diamond
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • C23C16/271—Diamond only using hot filaments
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S76/00—Metal tools and implements, making
    • Y10S76/11—Tungsten and tungsten carbide
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T407/00—Cutters, for shaping
    • Y10T407/27—Cutters, for shaping comprising tool of specific chemical composition
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
DE68916207T 1988-12-21 1989-12-21 Diamantbeschichtetes Werkzeug, Substrate dafür und Verfahren zu dessen Herstellung. Expired - Lifetime DE68916207T3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP63322764A JP2658324B2 (ja) 1988-12-21 1988-12-21 ダイヤモンド被覆炭化タングステン基超硬合金製工具部材
JP5053489A JP2653158B2 (ja) 1989-03-02 1989-03-02 ダイヤモンド被覆炭化タングステン基超硬合金製工具部材

Publications (3)

Publication Number Publication Date
DE68916207D1 true DE68916207D1 (de) 1994-07-21
DE68916207T2 DE68916207T2 (de) 1994-11-17
DE68916207T3 DE68916207T3 (de) 1999-11-25

Family

ID=26391012

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68916207T Expired - Lifetime DE68916207T3 (de) 1988-12-21 1989-12-21 Diamantbeschichtetes Werkzeug, Substrate dafür und Verfahren zu dessen Herstellung.

Country Status (4)

Country Link
US (1) US5068148A (de)
EP (1) EP0374923B2 (de)
DE (1) DE68916207T3 (de)
ES (1) ES2057084T5 (de)

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SE9002136D0 (sv) * 1990-06-15 1990-06-15 Sandvik Ab Cement carbide body for rock drilling, mineral cutting and highway engineering
DE4026607A1 (de) * 1990-08-23 1992-02-27 Kabelmetal Electro Gmbh Verfahren zur erhoehung der standzeit eines werkzeuges zum schaelen von straengen und draehten aus aluminium
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US5236740A (en) * 1991-04-26 1993-08-17 National Center For Manufacturing Sciences Methods for coating adherent diamond films on cemented tungsten carbide substrates
US5786068A (en) * 1991-05-03 1998-07-28 Advanced Refractory Technologies, Inc. Electrically tunable coatings
US5352493A (en) * 1991-05-03 1994-10-04 Veniamin Dorfman Method for forming diamond-like nanocomposite or doped-diamond-like nanocomposite films
US5728465A (en) * 1991-05-03 1998-03-17 Advanced Refractory Technologies, Inc. Diamond-like nanocomposite corrosion resistant coatings
US5718976A (en) * 1991-05-03 1998-02-17 Advanced Refractory Technologies, Inc. Erosion resistant diamond-like nanocomposite coatings for optical components
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US5560839A (en) * 1994-06-27 1996-10-01 Valenite Inc. Methods of preparing cemented metal carbide substrates for deposition of adherent diamond coatings and products made therefrom
US5674620A (en) * 1994-08-11 1997-10-07 Saint-Gobain/Norton Industrial Ceramics Corporation Diamond-coated composite cutting tool and method of making
US5571615A (en) * 1995-05-16 1996-11-05 Xrystallume Ultrasmooth adherent diamond film coated article and method for making same
US5571616A (en) * 1995-05-16 1996-11-05 Crystallume Ultrasmooth adherent diamond film coated article and method for making same
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US5638251A (en) * 1995-10-03 1997-06-10 Advanced Refractory Technologies, Inc. Capacitive thin films using diamond-like nanocomposite materials
US5795648A (en) * 1995-10-03 1998-08-18 Advanced Refractory Technologies, Inc. Method for preserving precision edges using diamond-like nanocomposite film coatings
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US5701578A (en) * 1996-11-20 1997-12-23 Kennametal Inc. Method for making a diamond-coated member
WO1998028462A1 (de) 1996-12-24 1998-07-02 Widia Gmbh Verbundkörper, bestehend aus einem hartmetall-, cermet- oder keramiksubstratkörper und verfahren zu seiner herstellung
US6013980A (en) 1997-05-09 2000-01-11 Advanced Refractory Technologies, Inc. Electrically tunable low secondary electron emission diamond-like coatings and process for depositing coatings
US6344149B1 (en) 1998-11-10 2002-02-05 Kennametal Pc Inc. Polycrystalline diamond member and method of making the same
US6436204B1 (en) 1998-11-20 2002-08-20 Kennametal Pc Inc. Diamond coated cutting tools and method of manufacture
KR100305315B1 (ko) * 1999-04-09 2001-09-13 박호군 다이아몬드 막이 코팅된 절삭공구 및 그 제조방법
US6660329B2 (en) * 2001-09-05 2003-12-09 Kennametal Inc. Method for making diamond coated cutting tool
US7866342B2 (en) 2002-12-18 2011-01-11 Vapor Technologies, Inc. Valve component for faucet
US8555921B2 (en) 2002-12-18 2013-10-15 Vapor Technologies Inc. Faucet component with coating
US8220489B2 (en) 2002-12-18 2012-07-17 Vapor Technologies Inc. Faucet with wear-resistant valve component
US7866343B2 (en) 2002-12-18 2011-01-11 Masco Corporation Of Indiana Faucet
US8197936B2 (en) 2005-01-27 2012-06-12 Smith International, Inc. Cutting structures
US7377341B2 (en) 2005-05-26 2008-05-27 Smith International, Inc. Thermally stable ultra-hard material compact construction
US20070026205A1 (en) 2005-08-01 2007-02-01 Vapor Technologies Inc. Article having patterned decorative coating
US8020643B2 (en) * 2005-09-13 2011-09-20 Smith International, Inc. Ultra-hard constructions with enhanced second phase
US20070169419A1 (en) * 2006-01-26 2007-07-26 Ulterra Drilling Technologies, Inc. Sonochemical leaching of polycrystalline diamond
US8066087B2 (en) * 2006-05-09 2011-11-29 Smith International, Inc. Thermally stable ultra-hard material compact constructions
US8028771B2 (en) * 2007-02-06 2011-10-04 Smith International, Inc. Polycrystalline diamond constructions having improved thermal stability
US7942219B2 (en) 2007-03-21 2011-05-17 Smith International, Inc. Polycrystalline diamond constructions having improved thermal stability
US9297211B2 (en) * 2007-12-17 2016-03-29 Smith International, Inc. Polycrystalline diamond construction with controlled gradient metal content
US8083012B2 (en) 2008-10-03 2011-12-27 Smith International, Inc. Diamond bonded construction with thermally stable region
SE533070C2 (sv) * 2008-11-10 2010-06-22 Seco Tools Ab Sätt att tillverka skärverktyg
GB2480219B (en) 2009-05-06 2014-02-12 Smith International Cutting elements with re-processed thermally stable polycrystalline diamond cutting layers,bits incorporating the same,and methods of making the same
US8771389B2 (en) 2009-05-06 2014-07-08 Smith International, Inc. Methods of making and attaching TSP material for forming cutting elements, cutting elements having such TSP material and bits incorporating such cutting elements
WO2010148313A2 (en) 2009-06-18 2010-12-23 Smith International, Inc. Polycrystalline diamond cutting elements with engineered porosity and method for manufacturing such cutting elements
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CN106811729A (zh) * 2015-12-01 2017-06-09 上海睿锆信息科技有限公司 实施晶态碳沉积加工前的处理工艺

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Also Published As

Publication number Publication date
EP0374923A2 (de) 1990-06-27
ES2057084T3 (es) 1994-10-16
EP0374923B2 (de) 1999-06-23
DE68916207T3 (de) 1999-11-25
EP0374923B1 (de) 1994-06-15
US5068148A (en) 1991-11-26
ES2057084T5 (es) 1999-12-01
EP0374923A3 (en) 1990-09-26
DE68916207T2 (de) 1994-11-17

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