DE68911630D1 - Dünnschichtwiderstand für Dehnungsmesser. - Google Patents
Dünnschichtwiderstand für Dehnungsmesser.Info
- Publication number
- DE68911630D1 DE68911630D1 DE89116555T DE68911630T DE68911630D1 DE 68911630 D1 DE68911630 D1 DE 68911630D1 DE 89116555 T DE89116555 T DE 89116555T DE 68911630 T DE68911630 T DE 68911630T DE 68911630 D1 DE68911630 D1 DE 68911630D1
- Authority
- DE
- Germany
- Prior art keywords
- thin film
- strain gauges
- film resistance
- resistance
- gauges
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C10/00—Adjustable resistors
- H01C10/10—Adjustable resistors adjustable by mechanical pressure or force
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Non-Adjustable Resistors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63227740A JPH0770367B2 (ja) | 1988-09-12 | 1988-09-12 | 歪ゲージ用薄膜抵抗体 |
JP63306318A JPH0666162B2 (ja) | 1988-12-02 | 1988-12-02 | 歪ゲージ用薄膜抵抗体 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE68911630D1 true DE68911630D1 (de) | 1994-02-03 |
DE68911630T2 DE68911630T2 (de) | 1994-06-01 |
Family
ID=26527842
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE68911630T Expired - Fee Related DE68911630T2 (de) | 1988-09-12 | 1989-09-07 | Dünnschichtwiderstand für Dehnungsmesser. |
Country Status (3)
Country | Link |
---|---|
US (1) | US5001454A (de) |
EP (1) | EP0359132B1 (de) |
DE (1) | DE68911630T2 (de) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5406852A (en) * | 1992-03-18 | 1995-04-18 | Matsushita Electric Industrial Co., Ltd. | Pressure sensor having a resistor element on a glass dryer with electrodes connected thereto |
US5505093A (en) * | 1994-11-21 | 1996-04-09 | Brewer Science, Inc. | Homogeneously conductive polymer films as strain gauges |
US6154119A (en) * | 1998-06-29 | 2000-11-28 | The Regents Of The University Of California | TI--CR--AL--O thin film resistors |
US6420826B1 (en) * | 2000-01-03 | 2002-07-16 | The Regents Of The University Of California | Flat panel display using Ti-Cr-Al-O thin film |
GB2369889B (en) * | 2001-07-13 | 2004-06-09 | John David Barnett | Strain sensing installation |
JP3811042B2 (ja) * | 2001-10-04 | 2006-08-16 | アルプス電気株式会社 | 歪みセンサおよびその製造方法 |
TW200724881A (en) * | 2005-12-16 | 2007-07-01 | Kuender & Co Ltd | Circuit board monitoring system |
DE102006023724B4 (de) * | 2006-05-19 | 2008-08-07 | Trafag Ag | Messzellenanordnung für einen Drucksensor mit Kraftmesselement aus Glas |
US10439020B2 (en) * | 2017-12-27 | 2019-10-08 | Texas Instruments Incorporated | In-situ plasma treatment for thin film resistors |
EP3771895B1 (de) * | 2019-07-31 | 2023-11-01 | ABB Schweiz AG | Temperaturkompensierte dehnungsmessermessungen |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52127257A (en) * | 1976-04-19 | 1977-10-25 | Hitachi Ltd | Displacement converter |
US4462018A (en) * | 1982-11-05 | 1984-07-24 | Gulton Industries, Inc. | Semiconductor strain gauge with integral compensation resistors |
DE3403042A1 (de) * | 1984-01-30 | 1985-08-01 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Duennfilm-dehnungsmessstreifen-system und verfahren zu seiner herstellung |
DE3429649A1 (de) * | 1984-08-11 | 1986-02-20 | Vdo Adolf Schindling Ag, 6000 Frankfurt | Elektrischer widerstand |
DE3431114A1 (de) * | 1984-08-24 | 1986-03-06 | Vdo Adolf Schindling Ag, 6000 Frankfurt | Elektrischer widerstand |
JPH0754281B2 (ja) * | 1985-05-09 | 1995-06-07 | 株式会社東海理化電機製作所 | 金属薄膜圧力センサーの製造方法 |
-
1989
- 1989-09-07 US US07/404,209 patent/US5001454A/en not_active Expired - Fee Related
- 1989-09-07 EP EP89116555A patent/EP0359132B1/de not_active Expired - Lifetime
- 1989-09-07 DE DE68911630T patent/DE68911630T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0359132A3 (en) | 1990-09-05 |
EP0359132B1 (de) | 1993-12-22 |
DE68911630T2 (de) | 1994-06-01 |
EP0359132A2 (de) | 1990-03-21 |
US5001454A (en) | 1991-03-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8328 | Change in the person/name/address of the agent |
Free format text: BLUMBACH, KRAMER & PARTNER, 81245 MUENCHEN |
|
8320 | Willingness to grant licences declared (paragraph 23) | ||
8339 | Ceased/non-payment of the annual fee |