DE68911630D1 - Dünnschichtwiderstand für Dehnungsmesser. - Google Patents

Dünnschichtwiderstand für Dehnungsmesser.

Info

Publication number: DE68911630D1
Authority: DE; Germany
Prior art keywords: thin film; strain gauges; film resistance; resistance; gauges
Prior art date: 1988-09-12
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

DE89116555T

Other languages

English (en)

Other versions

DE68911630T2 (de

Inventor

Hideya Yamadera

Yoshiki Seno

Yasunori Taga

Katsuhiko Ariga

Tadashi Ozaki

Naoki Hara

Haruhiko Inoue

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Denso Corp

Toyota Central R&D Labs Inc

Original Assignee

Toyota Central R&D Labs Inc

NipponDenso Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1988-09-12

Filing date

1989-09-07

Publication date

1994-02-03

1988-09-12 Priority claimed from JP63227740A external-priority patent/JPH0770367B2/ja

1988-12-02 Priority claimed from JP63306318A external-priority patent/JPH0666162B2/ja

1989-09-07 Application filed by Toyota Central R&D Labs Inc, NipponDenso Co Ltd filed Critical Toyota Central R&D Labs Inc

1994-02-03 Publication of DE68911630D1 publication Critical patent/DE68911630D1/de

1994-06-01 Application granted granted Critical

1994-06-01 Publication of DE68911630T2 publication Critical patent/DE68911630T2/de

2009-09-08 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Links

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C10/00—Adjustable resistors
- H01C10/10—Adjustable resistors adjustable by mechanical pressure or force
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges

Landscapes

Engineering & Computer Science (AREA)
Microelectronics & Electronic Packaging (AREA)
Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Non-Adjustable Resistors (AREA)

DE68911630T 1988-09-12 1989-09-07 Dünnschichtwiderstand für Dehnungsmesser. Expired - Fee Related DE68911630T2 (de)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
JP63227740A JPH0770367B2 (ja)	1988-09-12	1988-09-12	歪ゲージ用薄膜抵抗体
JP63306318A JPH0666162B2 (ja)	1988-12-02	1988-12-02	歪ゲージ用薄膜抵抗体

Publications (2)

Publication Number	Publication Date
DE68911630D1 true DE68911630D1 (de)	1994-02-03
DE68911630T2 DE68911630T2 (de)	1994-06-01

Family

ID=26527842

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE68911630T Expired - Fee Related DE68911630T2 (de)	1988-09-12	1989-09-07	Dünnschichtwiderstand für Dehnungsmesser.

Country Status (3)

Country	Link
US (1)	US5001454A (de)
EP (1)	EP0359132B1 (de)
DE (1)	DE68911630T2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5406852A (en) *	1992-03-18	1995-04-18	Matsushita Electric Industrial Co., Ltd.	Pressure sensor having a resistor element on a glass dryer with electrodes connected thereto
US5505093A (en) *	1994-11-21	1996-04-09	Brewer Science, Inc.	Homogeneously conductive polymer films as strain gauges
US6154119A (en) *	1998-06-29	2000-11-28	The Regents Of The University Of California	TI--CR--AL--O thin film resistors
US6420826B1 (en) *	2000-01-03	2002-07-16	The Regents Of The University Of California	Flat panel display using Ti-Cr-Al-O thin film
GB2369889B (en) *	2001-07-13	2004-06-09	John David Barnett	Strain sensing installation
JP3811042B2 (ja) *	2001-10-04	2006-08-16	アルプス電気株式会社	歪みセンサおよびその製造方法
TW200724881A (en) *	2005-12-16	2007-07-01	Kuender & Co Ltd	Circuit board monitoring system
DE102006023724B4 (de) *	2006-05-19	2008-08-07	Trafag Ag	Messzellenanordnung für einen Drucksensor mit Kraftmesselement aus Glas
US10439020B2 (en) *	2017-12-27	2019-10-08	Texas Instruments Incorporated	In-situ plasma treatment for thin film resistors
EP3771895B1 (de) *	2019-07-31	2023-11-01	ABB Schweiz AG	Temperaturkompensierte dehnungsmessermessungen

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS52127257A (en) *	1976-04-19	1977-10-25	Hitachi Ltd	Displacement converter
US4462018A (en) *	1982-11-05	1984-07-24	Gulton Industries, Inc.	Semiconductor strain gauge with integral compensation resistors
DE3403042A1 (de) *	1984-01-30	1985-08-01	Philips Patentverwaltung Gmbh, 2000 Hamburg	Duennfilm-dehnungsmessstreifen-system und verfahren zu seiner herstellung
DE3429649A1 (de) *	1984-08-11	1986-02-20	Vdo Adolf Schindling Ag, 6000 Frankfurt	Elektrischer widerstand
DE3431114A1 (de) *	1984-08-24	1986-03-06	Vdo Adolf Schindling Ag, 6000 Frankfurt	Elektrischer widerstand
JPH0754281B2 (ja) *	1985-05-09	1995-06-07	株式会社東海理化電機製作所	金属薄膜圧力センサーの製造方法

1989
- 1989-09-07 US US07/404,209 patent/US5001454A/en not_active Expired - Fee Related
- 1989-09-07 EP EP89116555A patent/EP0359132B1/de not_active Expired - Lifetime
- 1989-09-07 DE DE68911630T patent/DE68911630T2/de not_active Expired - Fee Related

Also Published As

Publication number	Publication date
EP0359132A3 (en)	1990-09-05
EP0359132B1 (de)	1993-12-22
DE68911630T2 (de)	1994-06-01
EP0359132A2 (de)	1990-03-21
US5001454A (en)	1991-03-19

Legal Events

Date	Code	Title	Description
1995-01-26	8364	No opposition during term of opposition
1995-07-20	8328	Change in the person/name/address of the agent	Free format text: BLUMBACH, KRAMER & PARTNER, 81245 MUENCHEN
1996-03-21	8320	Willingness to grant licences declared (paragraph 23)
1999-11-11	8339	Ceased/non-payment of the annual fee

Publication	Publication Date	Title
DE3889026D1 (de)	1994-05-19	Dickenmessgerät für Schichten.
DE68908476D1 (de)	1993-09-23	Antiblockier-mechanismus.
DE58901978D1 (de)	1992-09-10	Druckmessvorrichtung.
DE68904355D1 (de)	1993-02-25	Feuchtigkeitsmesssystem.
DE68912796D1 (de)	1994-03-17	Einschlagfolie für Nahrungsmittel.
DE59103616D1 (de)	1995-01-12	Dehnungsmessstreifen und Messgrössenaufnehmer mit derartigen Dehnungsmessstreifen.
DE69006673D1 (de)	1994-03-24	Blattdicken-Messapparat.
DE3784063D1 (de)	1993-03-18	Druckmessgeraet.
DE3586238D1 (de)	1992-07-23	Druckmesssystem.
DE3852946D1 (de)	1995-03-16	Immuno-Agglutinationsmessgerät.
DE3879303D1 (de)	1993-04-22	Waegeapparat mit dehnungsmessstreifen.
DE69205604D1 (de)	1995-11-30	Wandler mit Dehnungsmessstreifen.
FI895673A0 (fi)	1989-11-27	Kalander avsedd foer on-line anslutning till en pappersmaskin.
DE68911630D1 (de)	1994-02-03	Dünnschichtwiderstand für Dehnungsmesser.
DE58906457D1 (de)	1994-01-27	Druckmessanordnung.
DE69003763D1 (de)	1993-11-11	Membran-Deformationsmessvorrichtung.
IT8821444A0 (it)	1988-07-21	Estensimetro perfezionato.
DE68916247D1 (de)	1994-07-21	Widerstandsbobine für übungsvorrichtung.
DE68918370D1 (de)	1994-10-27	Dünnes Folienhologramm.
IT8248776A0 (it)	1982-07-08	Dispositivo di supporto flessibileper trasduttori di forza, con conduttori su superfici nel piano neutro di flessione
DE58901612D1 (de)	1992-07-09	Druck- oder kraftmessvorrichtung.
DE59006630D1 (de)	1994-09-01	Dehnungsmessstreifen.
IT1149014B (it)	1986-12-03	Dispositivo di supporto flessibile pre trasduttori di forza, con conduttori su superfici nel piano neutrodi flessione
DE68900525D1 (de)	1992-01-23	Waegevorrichtung mit dehnungsmessstreifen.
DE58900369D1 (de)	1991-11-21	Ringtorsions-kraftmessvorrichtung.