DE68903683D1 - Dichtungsstruktur eines moduls. - Google Patents

Dichtungsstruktur eines moduls.

Info

Publication number
DE68903683D1
DE68903683D1 DE8989305218T DE68903683T DE68903683D1 DE 68903683 D1 DE68903683 D1 DE 68903683D1 DE 8989305218 T DE8989305218 T DE 8989305218T DE 68903683 T DE68903683 T DE 68903683T DE 68903683 D1 DE68903683 D1 DE 68903683D1
Authority
DE
Germany
Prior art keywords
module
sealing structure
sealing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8989305218T
Other languages
English (en)
Other versions
DE68903683T2 (de
Inventor
Kiyotaka Seyama
Kyoichiro Kawano
Kiyokazu Moriizumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Publication of DE68903683D1 publication Critical patent/DE68903683D1/de
Application granted granted Critical
Publication of DE68903683T2 publication Critical patent/DE68903683T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/02—Containers; Seals
    • H01L23/10—Containers; Seals characterised by the material or arrangement of seals between parts, e.g. between cap and base of the container or between leads and walls of the container
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/16—Fillings or auxiliary members in containers or encapsulations, e.g. centering rings
    • H01L23/18—Fillings characterised by the material, its physical or chemical properties, or its arrangement within the complete device
    • H01L23/20—Fillings characterised by the material, its physical or chemical properties, or its arrangement within the complete device gaseous at the normal operating temperature of the device
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
    • H01L23/433—Auxiliary members in containers characterised by their shape, e.g. pistons
    • H01L23/4332—Bellows
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161—Disposition
    • H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321—Disposition
    • H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73251—Location after the connecting process on different surfaces
    • H01L2224/73253—Bump and layer connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/095—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
    • H01L2924/097—Glass-ceramics, e.g. devitrified glass
    • H01L2924/09701—Low temperature co-fired ceramic [LTCC]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/153—Connection portion
    • H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15312—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a pin array, e.g. PGA

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
DE8989305218T 1988-05-24 1989-05-23 Dichtungsstruktur eines moduls. Expired - Fee Related DE68903683T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63125023A JPH0812890B2 (ja) 1988-05-24 1988-05-24 モジュール封止方法

Publications (2)

Publication Number Publication Date
DE68903683D1 true DE68903683D1 (de) 1993-01-14
DE68903683T2 DE68903683T2 (de) 1993-04-01

Family

ID=14899943

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8989305218T Expired - Fee Related DE68903683T2 (de) 1988-05-24 1989-05-23 Dichtungsstruktur eines moduls.

Country Status (6)

Country Link
US (1) US4949219A (de)
EP (1) EP0343936B1 (de)
JP (1) JPH0812890B2 (de)
AU (1) AU606524B2 (de)
CA (1) CA1298667C (de)
DE (1) DE68903683T2 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5006924A (en) * 1989-12-29 1991-04-09 International Business Machines Corporation Heat sink for utilization with high density integrated circuit substrates
JPH0770844B2 (ja) * 1990-06-18 1995-07-31 富士通株式会社 通信機用キャビネット
US5161087A (en) * 1990-10-15 1992-11-03 International Business Machines Corporation Pivotal heat sink assembly
JPH04206555A (ja) * 1990-11-30 1992-07-28 Hitachi Ltd 電子機器の冷却装置
JP2927010B2 (ja) * 1991-03-01 1999-07-28 株式会社日立製作所 半導体パッケージ
US5268814A (en) * 1992-05-20 1993-12-07 International Business Machines Corporation Module packaging
JP3067399B2 (ja) * 1992-07-03 2000-07-17 株式会社日立製作所 半導体冷却装置
US5760333A (en) * 1992-08-06 1998-06-02 Pfu Limited Heat-generating element cooling device
US6140571A (en) * 1992-08-06 2000-10-31 Pfu Limited Heat-generating element cooling device
DE69329946T2 (de) * 1992-08-06 2001-07-05 Pfu Ltd Kühler für eine wärmeerzeugungsvorrichtung
US5578869A (en) * 1994-03-29 1996-11-26 Olin Corporation Components for housing an integrated circuit device
JP3058047B2 (ja) * 1995-04-04 2000-07-04 株式会社日立製作所 マルチチップモジュールの封止冷却構造
US6392431B1 (en) 1996-10-23 2002-05-21 Aetrium, Inc. Flexibly suspended heat exchange head for a DUT
JP2001223460A (ja) * 2000-02-08 2001-08-17 Fujitsu Ltd 実装回路基板及びその製造方法
US7385821B1 (en) * 2001-12-06 2008-06-10 Apple Inc. Cooling method for ICS
US20130027885A1 (en) * 2011-07-25 2013-01-31 International Business Machines Corporation Heat spreader for multi-chip modules
CN103002722B (zh) * 2012-12-18 2015-03-25 武汉光迅科技股份有限公司 一种功率设备的热控制装置
CN111406314B (zh) * 2018-06-27 2023-09-22 富士电机株式会社 冷却装置、半导体模块以及车辆
JP7244747B2 (ja) * 2019-02-28 2023-03-23 富士通株式会社 液浸槽及び液浸冷却装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4138692A (en) * 1977-09-12 1979-02-06 International Business Machines Corporation Gas encapsulated cooling module
JPS5941857A (ja) * 1982-08-31 1984-03-08 Mitsubishi Electric Corp 半導体モジユ−ル装置
US4561011A (en) * 1982-10-05 1985-12-24 Mitsubishi Denki Kabushiki Kaisha Dimensionally stable semiconductor device
CA1227886A (en) * 1984-01-26 1987-10-06 Haruhiko Yamamoto Liquid-cooling module system for electronic circuit components
JPS61222242A (ja) * 1985-03-28 1986-10-02 Fujitsu Ltd 冷却装置
US4833567A (en) * 1986-05-30 1989-05-23 Digital Equipment Corporation Integral heat pipe module
FR2632070B1 (fr) * 1988-05-26 1990-11-23 Bendix Electronics Sa Circuit de commande de l'alimentation d'une charge electrique, a dispositif de detection d'un court-circuit de la charge

Also Published As

Publication number Publication date
JPH0812890B2 (ja) 1996-02-07
EP0343936A3 (en) 1990-04-18
EP0343936B1 (de) 1992-12-02
EP0343936A2 (de) 1989-11-29
AU3510089A (en) 1989-11-30
US4949219A (en) 1990-08-14
CA1298667C (en) 1992-04-07
DE68903683T2 (de) 1993-04-01
AU606524B2 (en) 1991-02-07
JPH01295450A (ja) 1989-11-29

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee