DE60319585D1 - VACUUM PUMP - Google Patents

VACUUM PUMP

Info

Publication number
DE60319585D1
DE60319585D1 DE60319585T DE60319585T DE60319585D1 DE 60319585 D1 DE60319585 D1 DE 60319585D1 DE 60319585 T DE60319585 T DE 60319585T DE 60319585 T DE60319585 T DE 60319585T DE 60319585 D1 DE60319585 D1 DE 60319585D1
Authority
DE
Germany
Prior art keywords
pumping mechanism
drive shaft
vacuum pump
molecular
regenerative
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60319585T
Other languages
German (de)
Other versions
DE60319585T2 (en
Inventor
Nigel Paul Schofield
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9949817&utm_source=***_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE60319585(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Edwards Ltd filed Critical Edwards Ltd
Publication of DE60319585D1 publication Critical patent/DE60319585D1/en
Application granted granted Critical
Publication of DE60319585T2 publication Critical patent/DE60319585T2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Electrophonic Musical Instruments (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

A vacuum pumping arrangement comprises a drive shaft, a motor for driving said drive shaft, a molecular pumping mechanism and a regenerative pumping mechanism. The drive shaft is arranged for simultaneously driving the molecular pumping mechanism and the regenerative pumping mechanism. The drive shaft is supported by a lubricant free bearing associated with the molecular pumping mechanism.
DE60319585T 2002-12-17 2003-12-09 VACUUM PUMP Expired - Lifetime DE60319585T2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB0229356.1A GB0229356D0 (en) 2002-12-17 2002-12-17 Vacuum pumping arrangement
GB0229356 2002-12-17
PCT/GB2003/005375 WO2004055376A2 (en) 2002-12-17 2003-12-09 Vacuum pumping arrangement

Publications (2)

Publication Number Publication Date
DE60319585D1 true DE60319585D1 (en) 2008-04-17
DE60319585T2 DE60319585T2 (en) 2009-03-26

Family

ID=9949817

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60319585T Expired - Lifetime DE60319585T2 (en) 2002-12-17 2003-12-09 VACUUM PUMP

Country Status (9)

Country Link
US (1) US20060140794A1 (en)
EP (1) EP1576292B1 (en)
JP (1) JP2006509952A (en)
AT (1) ATE388328T1 (en)
AU (1) AU2003295101A1 (en)
DE (1) DE60319585T2 (en)
GB (1) GB0229356D0 (en)
TW (1) TW200417690A (en)
WO (1) WO2004055376A2 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0409139D0 (en) * 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
DE102008024764A1 (en) * 2008-05-23 2009-11-26 Oerlikon Leybold Vacuum Gmbh Multi-stage vacuum pump
DE102008035891A1 (en) * 2008-07-31 2010-02-04 Oerlikon Leybold Vacuum Gmbh vacuum pump
DE102009021620B4 (en) 2009-05-16 2021-07-29 Pfeiffer Vacuum Gmbh Vacuum pump
DE102009021642B4 (en) 2009-05-16 2021-07-22 Pfeiffer Vacuum Gmbh Vacuum pump
DE102009055888A1 (en) * 2009-11-26 2011-06-01 Oerlikon Leybold Vacuum Gmbh vacuum pump
DE102010019940B4 (en) 2010-05-08 2021-09-23 Pfeiffer Vacuum Gmbh Vacuum pumping stage
JP5763660B2 (en) * 2010-09-28 2015-08-12 エドワーズ株式会社 Exhaust pump
DE102011112691A1 (en) * 2011-09-05 2013-03-07 Pfeiffer Vacuum Gmbh vacuum pump
DE102012003680A1 (en) * 2012-02-23 2013-08-29 Pfeiffer Vacuum Gmbh vacuum pump
DE202015007985U1 (en) * 2015-11-19 2017-02-21 Leybold Gmbh Device for storing kinetic energy
US11519419B2 (en) * 2020-04-15 2022-12-06 Kin-Chung Ray Chiu Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2349033C3 (en) * 1973-09-29 1984-08-30 Leybold-Heraeus Gmbh, 5000 Koeln Turbo molecular pump
JPH0646036B2 (en) * 1982-11-19 1994-06-15 セイコー電子工業株式会社 Axial flow molecular pump
US4767265A (en) * 1983-10-07 1988-08-30 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
DE4427154A1 (en) * 1994-08-01 1996-02-08 Balzers Pfeiffer Gmbh Friction pump with magnetic bearings
GB9609281D0 (en) * 1996-05-03 1996-07-10 Boc Group Plc Improved vacuum pumps
GB9810872D0 (en) * 1998-05-20 1998-07-22 Boc Group Plc Improved vacuum pump
FR2783883B1 (en) * 1998-09-10 2000-11-10 Cit Alcatel METHOD AND DEVICE FOR AVOIDING DEPOSITS IN A TURBOMOLECULAR PUMP WITH MAGNETIC OR GAS BEARING
DE19913593B4 (en) * 1999-03-24 2004-09-23 Ilmvac Gmbh Controlled pumping station
DE19915983A1 (en) * 1999-04-09 2000-10-12 Pfeiffer Vacuum Gmbh Vacuum pump with gas storage
DE19929519A1 (en) * 1999-06-28 2001-01-04 Pfeiffer Vacuum Gmbh Method for operating a multi-chamber vacuum system
DE10043783A1 (en) * 2000-09-06 2002-03-14 Leybold Vakuum Gmbh Method and device for regulating the vacuum in a chamber
EP1234982B1 (en) * 2001-02-22 2003-12-03 VARIAN S.p.A. Vacuum pump
GB0114417D0 (en) * 2001-06-13 2001-08-08 Boc Group Plc Lubricating systems for regenerative vacuum pumps
FR2859250B1 (en) * 2003-08-29 2005-11-11 Cit Alcatel VACUUM PUMP

Also Published As

Publication number Publication date
EP1576292B1 (en) 2008-03-05
EP1576292A2 (en) 2005-09-21
TW200417690A (en) 2004-09-16
WO2004055376A3 (en) 2004-08-05
US20060140794A1 (en) 2006-06-29
JP2006509952A (en) 2006-03-23
AU2003295101A1 (en) 2004-07-09
WO2004055376A2 (en) 2004-07-01
GB0229356D0 (en) 2003-01-22
DE60319585T2 (en) 2009-03-26
ATE388328T1 (en) 2008-03-15

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Legal Events

Date Code Title Description
8363 Opposition against the patent