DE60316096D1 - Verfahren zur Herstellung von dreidimensionalen Polyimid-Wellenleitern. - Google Patents

Verfahren zur Herstellung von dreidimensionalen Polyimid-Wellenleitern.

Info

Publication number
DE60316096D1
DE60316096D1 DE60316096T DE60316096T DE60316096D1 DE 60316096 D1 DE60316096 D1 DE 60316096D1 DE 60316096 T DE60316096 T DE 60316096T DE 60316096 T DE60316096 T DE 60316096T DE 60316096 D1 DE60316096 D1 DE 60316096D1
Authority
DE
Germany
Prior art keywords
making
waveguides
dimensional polyimide
polyimide waveguides
dimensional
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60316096T
Other languages
English (en)
Other versions
DE60316096T2 (de
Inventor
Kazunori Mune
Ryuusuke Naitou
Amane Mochizuki
Atsushi Hino
Mika Horiike
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
Original Assignee
Nitto Denko Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Denko Corp filed Critical Nitto Denko Corp
Application granted granted Critical
Publication of DE60316096D1 publication Critical patent/DE60316096D1/de
Publication of DE60316096T2 publication Critical patent/DE60316096T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/04—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
    • G02B1/045—Light guides
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/04—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
    • G02B1/045—Light guides
    • G02B1/046—Light guides characterised by the core material
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12002—Three-dimensional structures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1221—Basic optical elements, e.g. light-guiding paths made from organic materials

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Optical Integrated Circuits (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
DE60316096T 2002-11-25 2003-11-25 Verfahren zur Herstellung von dreidimensionalen Polyimid-Wellenleitern. Expired - Fee Related DE60316096T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002341565A JP3987787B2 (ja) 2002-11-25 2002-11-25 三次元ポリイミド光導波路の製造方法
JP2002341565 2002-11-25

Publications (2)

Publication Number Publication Date
DE60316096D1 true DE60316096D1 (de) 2007-10-18
DE60316096T2 DE60316096T2 (de) 2008-01-03

Family

ID=32212167

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60316096T Expired - Fee Related DE60316096T2 (de) 2002-11-25 2003-11-25 Verfahren zur Herstellung von dreidimensionalen Polyimid-Wellenleitern.

Country Status (6)

Country Link
US (1) US7085469B2 (de)
EP (1) EP1422541B1 (de)
JP (1) JP3987787B2 (de)
KR (1) KR100798218B1 (de)
CN (1) CN1300611C (de)
DE (1) DE60316096T2 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7037637B2 (en) * 2002-07-17 2006-05-02 Nitto Denko Corporation Photosensitive polyimide resin precursor composition, optical polyimide obtained from the composition, optical waveguide using the polyimide, and process for producing the optical waveguide
FR2871582B1 (fr) * 2004-06-11 2006-08-25 Univ Louis Pasteur Etablisseme Procede de fabrication d'un bloc optique a circuit optique integre par photopolymerisation localisee d'une matrice organique par absorption a deux photons et bloc optique ainsi obtenu
EP1851837B1 (de) * 2004-12-20 2015-03-04 Imra America, Inc. Gepulste laserquelle mit justierbarem gitter-kompressor
KR100705758B1 (ko) * 2005-04-19 2007-04-10 한국과학기술원 유기―무기 혼성물질을 이용한 플렉서블 필름 광도파로 및그 제조방법
US20080001320A1 (en) 2006-06-28 2008-01-03 Knox Wayne H Optical Material and Method for Modifying the Refractive Index
US7789910B2 (en) * 2006-06-28 2010-09-07 Bausch & Lomb Incorporated Optical material and method for modifying the refractive index
WO2009070438A1 (en) * 2007-11-30 2009-06-04 Bausch & Lomb Incorporated Optical material and method for modifying the refractive index
US9060847B2 (en) * 2008-05-19 2015-06-23 University Of Rochester Optical hydrogel material with photosensitizer and method for modifying the refractive index
TWI394992B (zh) * 2008-12-02 2013-05-01 Univ Nat Central Fabrication device and method for producing high molecular optical waveguide element
WO2011089592A1 (en) * 2010-01-20 2011-07-28 Moshe Finarov A method of laser processing
DE102011017329A1 (de) * 2011-04-16 2012-10-18 Technische Universität Berlin Verfahren zum Herstellen eines Lichtwellenleiters in einem Polymer
US9144491B2 (en) 2011-06-02 2015-09-29 University Of Rochester Method for modifying the refractive index of an optical material
JP6038787B2 (ja) * 2011-06-27 2016-12-07 学校法人慶應義塾 光導波路の製造方法
WO2015060822A1 (en) * 2013-10-22 2015-04-30 Empire Technology Development Llc Thermally printed optic circuits

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1992000185A1 (en) 1990-06-22 1992-01-09 Martin Russell Harris Optical waveguides
US5851736A (en) * 1991-03-05 1998-12-22 Nitto Denko Corporation Heat-resistant photoresist composition, photosensitive substrate, and process for forming heat-resistant positive or negative pattern
JPH06337320A (ja) 1993-05-27 1994-12-06 Agency Of Ind Science & Technol 光導波路作製法および装置
EP1315006A1 (de) * 1994-06-22 2003-05-28 Fujitsu Limited Verfahren zur Herstellung von Wellenleitersystemen, dessen Verwendung in optischem Bauelement und Koppler sowie optisches Netzwerk und optische Leiterplatte
CN1090200C (zh) * 1996-02-13 2002-09-04 日东电工株式会社 电路基片,形成电路的支承基片及其生产方法
CN1106788C (zh) * 1996-02-13 2003-04-23 日东电工株式会社 电路基片
US6177225B1 (en) * 1998-10-01 2001-01-23 Arch Specialty Chemicals, Inc. Photosensitive resin compositions
JP2000112126A (ja) * 1998-10-01 2000-04-21 Nitto Denko Corp ネガ型フォトレジスト組成物
US20010021293A1 (en) * 2000-02-22 2001-09-13 Hikaru Kouta Method for modifying refractive index in optical wave-guide device
EP1292852B1 (de) * 2000-06-15 2005-11-09 3M Innovative Properties Company Mikroherstellungsverfahren für organische optische bauteile
JP2002014246A (ja) 2000-06-27 2002-01-18 Matsushita Electric Works Ltd 光導波路及びその製造方法
JP2002148804A (ja) 2000-11-08 2002-05-22 Nitto Denko Corp 感光性樹脂組成物および回路基板
JP4799764B2 (ja) * 2001-05-31 2011-10-26 日東電工株式会社 光導波路用感光性ポリイミド前駆体組成物およびその光導波路用感光性ポリイミド組成物ならびにそれを用いた光導波路
US7037637B2 (en) * 2002-07-17 2006-05-02 Nitto Denko Corporation Photosensitive polyimide resin precursor composition, optical polyimide obtained from the composition, optical waveguide using the polyimide, and process for producing the optical waveguide

Also Published As

Publication number Publication date
DE60316096T2 (de) 2008-01-03
US20040131324A1 (en) 2004-07-08
EP1422541A2 (de) 2004-05-26
CN1300611C (zh) 2007-02-14
US7085469B2 (en) 2006-08-01
JP2004177529A (ja) 2004-06-24
CN1503016A (zh) 2004-06-09
EP1422541B1 (de) 2007-09-05
JP3987787B2 (ja) 2007-10-10
KR20040045371A (ko) 2004-06-01
EP1422541A3 (de) 2004-07-14
KR100798218B1 (ko) 2008-01-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee