DE60232249D1 - Magnetfeldsensor mit einem mikroelektromechanischen system - Google Patents

Magnetfeldsensor mit einem mikroelektromechanischen system

Info

Publication number
DE60232249D1
DE60232249D1 DE60232249T DE60232249T DE60232249D1 DE 60232249 D1 DE60232249 D1 DE 60232249D1 DE 60232249 T DE60232249 T DE 60232249T DE 60232249 T DE60232249 T DE 60232249T DE 60232249 D1 DE60232249 D1 DE 60232249D1
Authority
DE
Germany
Prior art keywords
magnetic field
field sensor
microelectromechanical system
microelectromechanical
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60232249T
Other languages
English (en)
Inventor
Robert J Kretschmann
Richard D Harris
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rockwell Automation Technologies Inc
Original Assignee
Rockwell Automation Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rockwell Automation Technologies Inc filed Critical Rockwell Automation Technologies Inc
Application granted granted Critical
Publication of DE60232249D1 publication Critical patent/DE60232249D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/028—Electrodynamic magnetometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/028—Electrodynamic magnetometers
    • G01R33/0286—Electrodynamic magnetometers comprising microelectromechanical systems [MEMS]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
    • G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
    • G01R15/20—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using galvano-magnetic devices, e.g. Hall-effect devices, i.e. measuring a magnetic field via the interaction between a current and a magnetic field, e.g. magneto resistive or Hall effect devices

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Micromachines (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
DE60232249T 2001-07-30 2002-07-23 Magnetfeldsensor mit einem mikroelektromechanischen system Expired - Lifetime DE60232249D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US30871401P 2001-07-30 2001-07-30
US09/964,789 US6664786B2 (en) 2001-07-30 2001-09-27 Magnetic field sensor using microelectromechanical system
PCT/US2002/023400 WO2003012459A1 (en) 2001-07-30 2002-07-23 Magnetic field sensor using microelectromechanical system

Publications (1)

Publication Number Publication Date
DE60232249D1 true DE60232249D1 (de) 2009-06-18

Family

ID=26976408

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60232249T Expired - Lifetime DE60232249D1 (de) 2001-07-30 2002-07-23 Magnetfeldsensor mit einem mikroelektromechanischen system

Country Status (4)

Country Link
US (1) US6664786B2 (de)
EP (1) EP1419395B1 (de)
DE (1) DE60232249D1 (de)
WO (1) WO2003012459A1 (de)

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Also Published As

Publication number Publication date
EP1419395B1 (de) 2009-05-06
EP1419395A1 (de) 2004-05-19
WO2003012459A1 (en) 2003-02-13
US20030020472A1 (en) 2003-01-30
US6664786B2 (en) 2003-12-16
EP1419395A4 (de) 2008-01-23

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