DE60231566D1 - Beidseitiges schleifverfahren und beidseitige schleifmaschine für ein dünnes plattenähnliches arbeitsstück - Google Patents
Beidseitiges schleifverfahren und beidseitige schleifmaschine für ein dünnes plattenähnliches arbeitsstückInfo
- Publication number
- DE60231566D1 DE60231566D1 DE60231566T DE60231566T DE60231566D1 DE 60231566 D1 DE60231566 D1 DE 60231566D1 DE 60231566 T DE60231566 T DE 60231566T DE 60231566 T DE60231566 T DE 60231566T DE 60231566 D1 DE60231566 D1 DE 60231566D1
- Authority
- DE
- Germany
- Prior art keywords
- sided grinding
- workpiece
- thin plate
- grinding machine
- grinding process
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
- B24B9/14—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of optical work, e.g. lenses, prisms
- B24B9/148—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of optical work, e.g. lenses, prisms electrically, e.g. numerically, controlled
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/08—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving liquid or pneumatic means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/10—Single-purpose machines or devices
- B24B7/16—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/10—Single-purpose machines or devices
- B24B7/16—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings
- B24B7/17—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings for simultaneously grinding opposite and parallel end faces, e.g. double disc grinders
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2002/010493 WO2004033148A1 (ja) | 2002-10-09 | 2002-10-09 | 薄肉円板状工作物の両面研削方法および両面研削装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60231566D1 true DE60231566D1 (de) | 2009-04-23 |
Family
ID=32089042
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60231566T Expired - Lifetime DE60231566D1 (de) | 2002-10-09 | 2002-10-09 | Beidseitiges schleifverfahren und beidseitige schleifmaschine für ein dünnes plattenähnliches arbeitsstück |
Country Status (6)
Country | Link |
---|---|
US (1) | US7150674B2 (de) |
EP (1) | EP1616662B1 (de) |
JP (1) | JP4072788B2 (de) |
KR (1) | KR100954534B1 (de) |
DE (1) | DE60231566D1 (de) |
WO (1) | WO2004033148A1 (de) |
Families Citing this family (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4227326B2 (ja) * | 2001-11-28 | 2009-02-18 | Dowaホールディングス株式会社 | 焼結希土類磁石合金からなるリング状薄板の製法 |
JP3993856B2 (ja) * | 2004-01-22 | 2007-10-17 | 光洋機械工業株式会社 | 両頭平面研削装置 |
DE102004053308A1 (de) * | 2004-11-04 | 2006-03-23 | Siltronic Ag | Verfahren und Vorrichtung zum gleichzeitigen Schleifen beider Seiten eines scheibenförmigen Werkstücks sowie damit herstellbare Halbleiterscheibe |
JP4396518B2 (ja) * | 2004-12-28 | 2010-01-13 | トヨタ自動車株式会社 | 姿勢制御装置および精密加工装置 |
JP4752475B2 (ja) * | 2005-12-08 | 2011-08-17 | 信越半導体株式会社 | 半導体ウェーハの両頭研削装置、静圧パッドおよびこれを用いた両頭研削方法 |
US7930058B2 (en) * | 2006-01-30 | 2011-04-19 | Memc Electronic Materials, Inc. | Nanotopography control and optimization using feedback from warp data |
US7601049B2 (en) * | 2006-01-30 | 2009-10-13 | Memc Electronic Materials, Inc. | Double side wafer grinder and methods for assessing workpiece nanotopology |
US7662023B2 (en) * | 2006-01-30 | 2010-02-16 | Memc Electronic Materials, Inc. | Double side wafer grinder and methods for assessing workpiece nanotopology |
JP5518338B2 (ja) * | 2006-01-30 | 2014-06-11 | エムイーエムシー・エレクトロニック・マテリアルズ・インコーポレイテッド | 加工対象物のナノトポロジを評価するためのウェハ両面グラインダ及び方法 |
JP2008012612A (ja) * | 2006-07-04 | 2008-01-24 | Sumitomo Heavy Ind Ltd | 両面加工装置の加工方法 |
JP2008012611A (ja) * | 2006-07-04 | 2008-01-24 | Sumitomo Heavy Ind Ltd | 両面加工装置 |
SM200600026B (it) | 2006-08-03 | 2008-02-06 | Automatismi Brazzale Srl | Macchina, linea automatica e metodo per la lavorazione superificiale di elementi discoidali |
DE102007049810B4 (de) * | 2007-10-17 | 2012-03-22 | Siltronic Ag | Simultanes Doppelseitenschleifen von Halbleiterscheiben |
JP2009246240A (ja) * | 2008-03-31 | 2009-10-22 | Tokyo Seimitsu Co Ltd | 半導体ウェーハ裏面の研削方法及びそれに用いる半導体ウェーハ裏面研削装置 |
JP5463570B2 (ja) * | 2008-10-31 | 2014-04-09 | Sumco Techxiv株式会社 | ウェハ用両頭研削装置および両頭研削方法 |
DE102009024125B4 (de) * | 2009-06-06 | 2023-07-27 | Lapmaster Wolters Gmbh | Verfahren zum Bearbeiten von flachen Werkstücken |
US8712575B2 (en) * | 2010-03-26 | 2014-04-29 | Memc Electronic Materials, Inc. | Hydrostatic pad pressure modulation in a simultaneous double side wafer grinder |
JP5406126B2 (ja) * | 2010-06-09 | 2014-02-05 | 株式会社岡本工作機械製作所 | インゴットブロックの複合面取り加工装置および加工方法 |
CN102229073B (zh) * | 2011-06-24 | 2013-03-27 | 潘旭华 | 一种转子轴的磨削方法 |
CN102275109B (zh) * | 2011-09-02 | 2013-05-01 | 洛阳Lyc轴承有限公司 | 一种用于双端面磨床加工圆锥内圈的支撑方法 |
JP6113960B2 (ja) * | 2012-02-21 | 2017-04-12 | 株式会社荏原製作所 | 基板処理装置および基板処理方法 |
CN103586772B (zh) * | 2012-08-16 | 2016-01-06 | 鸿富锦精密工业(深圳)有限公司 | 压力检测装置 |
CN102909626B (zh) * | 2012-09-18 | 2015-02-25 | 陈政伟 | 平磨机 |
JP6327007B2 (ja) * | 2014-06-24 | 2018-05-23 | 株式会社Sumco | 研削装置および研削方法 |
CN104259942A (zh) * | 2014-09-18 | 2015-01-07 | 洛阳巨优机床有限公司 | 一种双端面磨床修整杆的离合齿调节装置 |
CN104889838B (zh) * | 2015-04-22 | 2018-07-31 | 北京金风科创风电设备有限公司 | 预制混凝土塔段的切削机床及切削方法 |
CN105538072A (zh) * | 2015-12-02 | 2016-05-04 | 无锡威孚马山油泵油嘴有限公司 | 出油阀座的双端面磨加工工艺 |
JP6508109B2 (ja) * | 2016-04-13 | 2019-05-08 | 株式会社Sumco | 工作機械のレベリングマウント調整方法およびそれを用いたワークの研削加工方法 |
CN110216531B (zh) * | 2019-06-28 | 2024-05-24 | 深圳市圆梦精密技术研究院 | 双头超声波加工设备及应用其的双面加工方法 |
CN112259442B (zh) * | 2020-09-11 | 2024-05-24 | 中环领先(徐州)半导体材料有限公司 | 晶圆双面减薄的方法和装置、存储介质 |
CN112816356A (zh) * | 2021-01-18 | 2021-05-18 | 中铁隆昌铁路器材有限公司 | 一种快速打磨砂轮磨削性能试验装置 |
CN114670069B (zh) * | 2022-04-07 | 2023-05-23 | 深圳市合发齿轮机械有限公司 | 一种齿轮端面磨平抛光装置 |
CN114918773A (zh) * | 2022-06-01 | 2022-08-19 | 安徽富乐德长江半导体材料股份有限公司 | 用于再生晶圆边角打磨设备 |
CN115723035B (zh) * | 2022-09-08 | 2024-05-28 | 西安奕斯伟材料科技股份有限公司 | 用于监控研磨装置的加工状态的***、方法及双面研磨装置 |
CN115256081A (zh) * | 2022-10-08 | 2022-11-01 | 徐州晨晓精密机械制造有限公司 | 一种五金件打磨装置 |
CN116079521B (zh) * | 2023-03-24 | 2023-08-18 | 肇庆高峰机械科技有限公司 | 一种双控制方式磨床 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3138205B2 (ja) * | 1996-03-27 | 2001-02-26 | 株式会社不二越 | 高脆性材の両面研削装置 |
US5989108A (en) * | 1996-09-09 | 1999-11-23 | Koyo Machine Industries Co., Ltd. | Double side grinding apparatus for flat disklike work |
US5816895A (en) * | 1997-01-17 | 1998-10-06 | Tokyo Seimitsu Co., Ltd. | Surface grinding method and apparatus |
JPH11198009A (ja) * | 1998-01-13 | 1999-07-27 | Koyo Mach Ind Co Ltd | 薄板円板状ワークの両面研削装置および断面形状測定装置 |
JP3270890B2 (ja) * | 1998-02-26 | 2002-04-02 | 光洋機械工業株式会社 | 研削盤における砥石ティルト装置 |
JP3969956B2 (ja) * | 1999-05-07 | 2007-09-05 | 信越半導体株式会社 | 両面同時研削方法および両面同時研削盤並びに両面同時ラップ方法および両面同時ラップ盤 |
JP2001062718A (ja) * | 1999-08-20 | 2001-03-13 | Super Silicon Kenkyusho:Kk | 両頭研削装置及び砥石位置修正方法 |
WO2001021356A1 (fr) * | 1999-09-24 | 2001-03-29 | Shin-Etsu Handotai Co., Ltd. | Procede et dispositif de meulage des deux faces d'un disque fin |
WO2001082354A1 (fr) * | 2000-04-24 | 2001-11-01 | Sumitomo Mitsubishi Silicon Corporation | Procédé de fabrication d'une plaquette de semi-conducteur |
DE10048881A1 (de) * | 2000-09-29 | 2002-03-07 | Infineon Technologies Ag | Vorrichtung und Verfahren zum planen Verbinden zweier Wafer für ein Dünnschleifen und ein Trennen eines Produkt-Wafers |
-
2002
- 2002-10-09 US US10/530,722 patent/US7150674B2/en not_active Expired - Fee Related
- 2002-10-09 EP EP02777821A patent/EP1616662B1/de not_active Expired - Lifetime
- 2002-10-09 DE DE60231566T patent/DE60231566D1/de not_active Expired - Lifetime
- 2002-10-09 KR KR1020057006088A patent/KR100954534B1/ko active IP Right Grant
- 2002-10-09 WO PCT/JP2002/010493 patent/WO2004033148A1/ja active Application Filing
- 2002-10-09 JP JP2004542785A patent/JP4072788B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP1616662B1 (de) | 2009-03-11 |
JP4072788B2 (ja) | 2008-04-09 |
JPWO2004033148A1 (ja) | 2006-02-09 |
US20060009125A1 (en) | 2006-01-12 |
EP1616662A4 (de) | 2006-11-22 |
EP1616662A1 (de) | 2006-01-18 |
WO2004033148A1 (ja) | 2004-04-22 |
KR100954534B1 (ko) | 2010-04-23 |
KR20050083738A (ko) | 2005-08-26 |
US7150674B2 (en) | 2006-12-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |