DE60207622D1 - Tintenstrahlkopf, Herstellungsmethode dafür und Tintenstrahlaufzeichnungsgerät - Google Patents

Tintenstrahlkopf, Herstellungsmethode dafür und Tintenstrahlaufzeichnungsgerät

Info

Publication number
DE60207622D1
DE60207622D1 DE60207622T DE60207622T DE60207622D1 DE 60207622 D1 DE60207622 D1 DE 60207622D1 DE 60207622 T DE60207622 T DE 60207622T DE 60207622 T DE60207622 T DE 60207622T DE 60207622 D1 DE60207622 D1 DE 60207622D1
Authority
DE
Germany
Prior art keywords
flow path
ink jet
forming member
path forming
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60207622T
Other languages
English (en)
Other versions
DE60207622T2 (de
Inventor
Kenji Yabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE60207622D1 publication Critical patent/DE60207622D1/de
Application granted granted Critical
Publication of DE60207622T2 publication Critical patent/DE60207622T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14403—Structure thereof only for on-demand ink jet heads including a filter

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE60207622T 2001-02-23 2002-02-21 Tintenstrahlkopf, Herstellungsmethode dafür und Tintenstrahlaufzeichnungsgerät Expired - Lifetime DE60207622T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001048665 2001-02-23
JP2001048665A JP3728210B2 (ja) 2001-02-23 2001-02-23 インクジェットヘッドおよびその製造方法、インクジェット記録装置

Publications (2)

Publication Number Publication Date
DE60207622D1 true DE60207622D1 (de) 2006-01-05
DE60207622T2 DE60207622T2 (de) 2006-07-20

Family

ID=18909896

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60207622T Expired - Lifetime DE60207622T2 (de) 2001-02-23 2002-02-21 Tintenstrahlkopf, Herstellungsmethode dafür und Tintenstrahlaufzeichnungsgerät

Country Status (9)

Country Link
US (1) US6676241B2 (de)
EP (1) EP1234671B1 (de)
JP (1) JP3728210B2 (de)
KR (1) KR100460244B1 (de)
CN (1) CN1189323C (de)
AT (1) ATE311294T1 (de)
AU (1) AU784872B2 (de)
CA (1) CA2372371C (de)
DE (1) DE60207622T2 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004001490A (ja) 2002-04-23 2004-01-08 Canon Inc インクジェットヘッド
JP3891561B2 (ja) 2002-07-24 2007-03-14 キヤノン株式会社 インクジェット記録ヘッド
ITTO20020876A1 (it) * 2002-10-10 2004-04-11 Olivetti I Jet Spa Dispositivo di stampa a getto di inchiostro in parallelo
US7699449B2 (en) * 2003-06-20 2010-04-20 Seiko Epson Corporation Liquid injection apparatus and method for driving the same
KR100765315B1 (ko) * 2004-07-23 2007-10-09 삼성전자주식회사 기판과 일체로 이루어진 필터링 부재를 구비하는 잉크젯헤드 및 그 제조방법.
JP4241605B2 (ja) * 2004-12-21 2009-03-18 ソニー株式会社 液体吐出ヘッドの製造方法
JP2006297683A (ja) * 2005-04-19 2006-11-02 Sony Corp 液体吐出ヘッド及び液体吐出ヘッドの製造方法
JP4656641B2 (ja) * 2005-06-02 2011-03-23 キヤノン株式会社 記録ヘッドおよび記録装置
US7983150B2 (en) * 2006-01-18 2011-07-19 Corrigent Systems Ltd. VPLS failure protection in ring networks
JP4856982B2 (ja) * 2006-03-02 2012-01-18 キヤノン株式会社 インクジェット記録ヘッド
US7695111B2 (en) 2006-03-08 2010-04-13 Canon Kabushiki Kaisha Liquid discharge head and manufacturing method therefor
JP5006663B2 (ja) * 2006-03-08 2012-08-22 キヤノン株式会社 液体吐出ヘッド
US7585052B2 (en) * 2006-07-28 2009-09-08 Hewlett-Packard Development Company, L.P. Topography layer
US7699441B2 (en) * 2006-12-12 2010-04-20 Eastman Kodak Company Liquid drop ejector having improved liquid chamber
KR20090062012A (ko) * 2007-12-12 2009-06-17 삼성전자주식회사 잉크젯 헤드 및 그 제조방법
US8435805B2 (en) * 2010-09-06 2013-05-07 Canon Kabushiki Kaisha Method of manufacturing a substrate for liquid ejection head
JP6083986B2 (ja) * 2012-04-27 2017-02-22 キヤノン株式会社 液体吐出ヘッド
EP2828081B1 (de) * 2012-07-24 2019-10-09 Hewlett-Packard Company, L.P. Flüssigkeitsausstossvorrichtung mit partikeltoleranter dünnfilmverlängerung
JP6478763B2 (ja) 2015-03-30 2019-03-06 キヤノン株式会社 液体吐出ヘッド
CN109641454B (zh) * 2016-10-14 2021-12-28 惠普发展公司，有限责任合伙企业 流体喷射装置
JP7091169B2 (ja) * 2018-07-03 2022-06-27 キヤノン株式会社 液体吐出ヘッドとその製造方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0645242B2 (ja) 1984-12-28 1994-06-15 キヤノン株式会社 液体噴射記録ヘツドの製造方法
EP0317171A3 (de) * 1987-11-13 1990-07-18 Hewlett-Packard Company Integrales Dünnschicht-Injektionssystem für einen thermischen Tintenspritzdruckkopf und Arbeitsmethoden
US5095321A (en) * 1988-10-31 1992-03-10 Canon Kabushiki Kaisha Liquid jet recording head joined by a biasing member
JP2683435B2 (ja) * 1989-12-14 1997-11-26 キヤノン株式会社 インクジェットノズル製造用接着剤
JP2697937B2 (ja) 1989-12-15 1998-01-19 キヤノン株式会社 活性エネルギー線硬化性樹脂組成物
US5187500A (en) * 1990-09-05 1993-02-16 Hewlett-Packard Company Control of energy to thermal inkjet heating elements
US6183067B1 (en) 1997-01-21 2001-02-06 Agilent Technologies Inkjet printhead and fabrication method for integrating an actuator and firing chamber
US6155674A (en) 1997-03-04 2000-12-05 Hewlett-Packard Company Structure to effect adhesion between substrate and ink barrier in ink jet printhead
US6045214A (en) * 1997-03-28 2000-04-04 Lexmark International, Inc. Ink jet printer nozzle plate having improved flow feature design and method of making nozzle plates
US6286939B1 (en) * 1997-09-26 2001-09-11 Hewlett-Packard Company Method of treating a metal surface to increase polymer adhesion
DE69923033T2 (de) * 1998-06-03 2005-12-01 Canon K.K. Tintenstrahlkopf, Tintenstrahlkopfträgerschicht, und Verfahren zur Herstellung des Kopfes

Also Published As

Publication number Publication date
EP1234671B1 (de) 2005-11-30
CN1189323C (zh) 2005-02-16
ATE311294T1 (de) 2005-12-15
AU1681602A (en) 2002-08-29
US20020122101A1 (en) 2002-09-05
CA2372371C (en) 2006-01-03
AU784872B2 (en) 2006-07-13
CA2372371A1 (en) 2002-08-23
EP1234671A1 (de) 2002-08-28
KR100460244B1 (ko) 2004-12-08
JP3728210B2 (ja) 2005-12-21
JP2002248771A (ja) 2002-09-03
US6676241B2 (en) 2004-01-13
CN1383985A (zh) 2002-12-11
DE60207622T2 (de) 2006-07-20
KR20020069172A (ko) 2002-08-29

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Legal Events

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