DE60203031D1 - Membranventil - Google Patents

Membranventil

Info

Publication number
DE60203031D1
DE60203031D1 DE60203031T DE60203031T DE60203031D1 DE 60203031 D1 DE60203031 D1 DE 60203031D1 DE 60203031 T DE60203031 T DE 60203031T DE 60203031 T DE60203031 T DE 60203031T DE 60203031 D1 DE60203031 D1 DE 60203031D1
Authority
DE
Germany
Prior art keywords
diaphragm valve
diaphragm
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60203031T
Other languages
English (en)
Other versions
DE60203031T2 (de
Inventor
Tomohiro Nakata
Michio Yamaji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Inc filed Critical Fujikin Inc
Publication of DE60203031D1 publication Critical patent/DE60203031D1/de
Application granted granted Critical
Publication of DE60203031T2 publication Critical patent/DE60203031T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/16—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being mechanically actuated, e.g. by screw-spindle or cam

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Fluid-Driven Valves (AREA)
  • Lift Valve (AREA)
  • Details Of Valves (AREA)
  • Valve Housings (AREA)
DE60203031T 2001-07-31 2002-06-26 Membranventil Expired - Fee Related DE60203031T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001231031A JP4700234B2 (ja) 2001-07-31 2001-07-31 ダイヤフラム弁
JP2001231031 2001-07-31

Publications (2)

Publication Number Publication Date
DE60203031D1 true DE60203031D1 (de) 2005-03-31
DE60203031T2 DE60203031T2 (de) 2006-03-02

Family

ID=19063142

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60203031T Expired - Fee Related DE60203031T2 (de) 2001-07-31 2002-06-26 Membranventil

Country Status (6)

Country Link
US (1) US6786471B2 (de)
EP (1) EP1281898B1 (de)
JP (1) JP4700234B2 (de)
KR (1) KR100480759B1 (de)
DE (1) DE60203031T2 (de)
TW (1) TW531620B (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4700234B2 (ja) * 2001-07-31 2011-06-15 株式会社フジキン ダイヤフラム弁
WO2004092622A2 (en) * 2003-04-14 2004-10-28 Swagelok Company Diaphragm valve seat
US7021750B2 (en) 2003-04-29 2006-04-04 Hewlett-Packard Development Company, L.P. Image forming devices and valves that may be used in image forming devices
JP3861206B2 (ja) * 2003-12-08 2006-12-20 株式会社フジキン 流体制御器
US7686280B2 (en) * 2005-12-28 2010-03-30 Circor Instrumentation Technologies, Inc. Removable valve seat member for diaphragm valve
EP2003379A1 (de) * 2007-06-12 2008-12-17 Luxembourg Patent Company S.A. Hochdruckmembranventil mit austauschbarer Sitzanordnung
US20090095935A1 (en) * 2007-10-10 2009-04-16 Wlodarczyk Anthony M Irrigation valve
EP2224066A1 (de) * 2009-02-25 2010-09-01 Studor S.A. Entlüftungsventil
JP5243513B2 (ja) * 2010-10-25 2013-07-24 Ｃｋｄ株式会社 流体制御弁の弁座構造
JP5802532B2 (ja) 2011-12-05 2015-10-28 株式会社フジキン ダイヤフラム弁およびダイヤフラム弁用シートホルダユニット
JP2013119877A (ja) * 2011-12-06 2013-06-17 Fujikin Inc ダイヤフラム弁
KR101229073B1 (ko) * 2012-03-07 2013-02-04 신흥공업(주) 가스토치용 밸브 어셈블리
JP6002448B2 (ja) 2012-05-31 2016-10-05 株式会社フジキン ダイヤフラム弁
JP5933370B2 (ja) * 2012-06-29 2016-06-08 株式会社フジキン ダイヤフラム弁
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
JP7025915B2 (ja) * 2017-12-18 2022-02-25 株式会社キッツエスシーティー ダイヤフラムバルブ
WO2019193978A1 (ja) * 2018-04-06 2019-10-10 株式会社フジキン バルブ装置および流体制御装置、流体制御方法、半導体製造装置及び半導体製造方法
US11236846B1 (en) * 2019-07-11 2022-02-01 Facebook Technologies, Llc Fluidic control: using exhaust as a control mechanism
US20230175598A1 (en) * 2020-03-26 2023-06-08 Fujikin Incorporated Valve device
KR102369516B1 (ko) * 2020-06-19 2022-03-03 박래성 분리형 시트부를 구비한 다이어프램 밸브
WO2022085289A1 (ja) 2020-10-20 2022-04-28 株式会社フジキン ダイヤフラムバルブ
KR20230012754A (ko) 2021-07-16 2023-01-26 디케이락 주식회사 다이어프램 밸브
US11761547B1 (en) * 2022-04-07 2023-09-19 Horiba Stec, Co., Ltd. Valve orifice insert

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4867201A (en) * 1989-03-06 1989-09-19 Harsco Corporation Parallel-motion dual-diaphragm valve
JPH0329515A (ja) * 1989-06-27 1991-02-07 Rohm Co Ltd 矩形波信号発生回路
US5131627A (en) * 1990-10-17 1992-07-21 Nupro Company Diaphragm valve
JPH086828B2 (ja) * 1991-08-09 1996-01-29 株式会社ベンカン メタルダイヤフラム弁
US5215286A (en) * 1992-05-26 1993-06-01 Nupro Company High pressure diaphragm valve
JPH0694142A (ja) * 1992-09-14 1994-04-05 Motoyama Seisakusho:Kk 空気圧作動式メタルダイヤフラム弁
JPH06193747A (ja) * 1992-12-25 1994-07-15 Hitachi Metals Ltd メタルダイアフラム弁
US5442254A (en) 1993-05-04 1995-08-15 Motorola, Inc. Fluorescent device with quantum contained particle screen
JP3280119B2 (ja) * 1993-06-02 2002-04-30 清原 まさ子 ダイヤフラム弁
JP3017398B2 (ja) * 1994-06-29 2000-03-06 株式会社本山製作所 ダイヤフラム弁構造及びガス配管系
JP2977766B2 (ja) * 1996-07-10 1999-11-15 株式会社ベンカン リーク弁
KR100514761B1 (ko) * 1997-02-03 2005-09-15 스와겔로크 컴패니 다이어프램 밸브
JP4700234B2 (ja) * 2001-07-31 2011-06-15 株式会社フジキン ダイヤフラム弁

Also Published As

Publication number Publication date
KR100480759B1 (ko) 2005-04-06
KR20030012811A (ko) 2003-02-12
US20030025099A1 (en) 2003-02-06
US6786471B2 (en) 2004-09-07
EP1281898B1 (de) 2005-02-23
JP2003042314A (ja) 2003-02-13
EP1281898A3 (de) 2003-06-04
TW531620B (en) 2003-05-11
DE60203031T2 (de) 2006-03-02
EP1281898A2 (de) 2003-02-05
JP4700234B2 (ja) 2011-06-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee