DE602006005058D1 - Einen MEMS-Mikromotor umfassendes Antriebsmodul, Verfahren zur Herstellung dieses Moduls und mit diesem Modul ausgerüstete Uhr - Google Patents

Einen MEMS-Mikromotor umfassendes Antriebsmodul, Verfahren zur Herstellung dieses Moduls und mit diesem Modul ausgerüstete Uhr

Info

Publication number
DE602006005058D1
DE602006005058D1 DE602006005058T DE602006005058T DE602006005058D1 DE 602006005058 D1 DE602006005058 D1 DE 602006005058D1 DE 602006005058 T DE602006005058 T DE 602006005058T DE 602006005058 T DE602006005058 T DE 602006005058T DE 602006005058 D1 DE602006005058 D1 DE 602006005058D1
Authority
DE
Germany
Prior art keywords
module
rotor
plate
making
pinion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602006005058T
Other languages
English (en)
Inventor
Lionel Paratte
Andre Zanetta
Pierre-Andre Meister
Yves Petremand
Nicolas Golay
Fabien Blondeau
Wilfried Noell
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ETA SA Manufacture Horlogere Suisse
Original Assignee
ETA SA Manufacture Horlogere Suisse
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ETA SA Manufacture Horlogere Suisse filed Critical ETA SA Manufacture Horlogere Suisse
Publication of DE602006005058D1 publication Critical patent/DE602006005058D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • G—PHYSICS
    • G04—HOROLOGY
    • G04C—ELECTROMECHANICAL CLOCKS OR WATCHES
    • G04C3/00—Electromechanical clocks or watches independent of other time-pieces and in which the movement is maintained by electric means
    • G04C3/08—Electromechanical clocks or watches independent of other time-pieces and in which the movement is maintained by electric means wherein movement is regulated by a mechanical oscillator other than a pendulum or balance, e.g. by a tuning fork, e.g. electrostatically
    • G04C3/12—Electromechanical clocks or watches independent of other time-pieces and in which the movement is maintained by electric means wherein movement is regulated by a mechanical oscillator other than a pendulum or balance, e.g. by a tuning fork, e.g. electrostatically driven by piezoelectric means; driven by magneto-strictive means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49579—Watch or clock making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/15—Intermittent grip type mechanical movement
    • Y10T74/1503—Rotary to intermittent unidirectional motion

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electromechanical Clocks (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
  • Micromachines (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
DE602006005058T 2006-11-13 2006-11-13 Einen MEMS-Mikromotor umfassendes Antriebsmodul, Verfahren zur Herstellung dieses Moduls und mit diesem Modul ausgerüstete Uhr Active DE602006005058D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP06123973A EP1921520B1 (de) 2006-11-13 2006-11-13 Einen MEMS-Mikromotor umfassendes Antriebsmodul, Verfahren zur Herstellung dieses Moduls und mit diesem Modul ausgerüstete Uhr

Publications (1)

Publication Number Publication Date
DE602006005058D1 true DE602006005058D1 (de) 2009-03-19

Family

ID=37845237

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602006005058T Active DE602006005058D1 (de) 2006-11-13 2006-11-13 Einen MEMS-Mikromotor umfassendes Antriebsmodul, Verfahren zur Herstellung dieses Moduls und mit diesem Modul ausgerüstete Uhr

Country Status (9)

Country Link
US (1) US7447119B2 (de)
EP (1) EP1921520B1 (de)
JP (1) JP4971108B2 (de)
KR (1) KR101401200B1 (de)
CN (1) CN101183837B (de)
AT (1) ATE422068T1 (de)
DE (1) DE602006005058D1 (de)
HK (1) HK1120935A1 (de)
SG (1) SG143157A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE495481T1 (de) * 2006-11-13 2011-01-15 Eta Sa Mft Horlogere Suisse Mems-mikromotor und mit diesem mikromotor ausgerüstete uhr
ATE538416T1 (de) * 2008-10-16 2012-01-15 Eta Sa Mft Horlogere Suisse Blockiermechanismus für modul eines uhrwerksantriebs
EP2189854A1 (de) * 2008-11-21 2010-05-26 Nivarox-FAR S.A. Verfahren zur Herstellung eines mikromechanischen Bauteils
CH703475B1 (fr) * 2010-07-30 2015-06-30 Swatch Group Res & Dev Ltd Procédé de réalisation d'une transmission sans contact dans un mouvement d'horlogerie.
EP2735922A1 (de) * 2012-11-23 2014-05-28 ETA SA Manufacture Horlogère Suisse Zeigerantriebsmechanismus einer elektromechanischen Armbanduhr, der mit einer Verriegelung ausgestattet ist

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3672153A (en) * 1970-08-03 1972-06-27 Bulova Watch Co Inc Miniaturized battery-operated tuning-fork timepiece
JPS4993280U (de) * 1972-12-06 1974-08-13
JPS54143271A (en) * 1978-04-28 1979-11-08 Citizen Watch Co Ltd Assembling structure of rotor for converter
JPS5415781A (en) * 1978-07-20 1979-02-05 Matsushita Electric Works Ltd Crystal watch
JP3019324B2 (ja) * 1988-06-17 2000-03-13 セイコーエプソン株式会社 アナログ電子時計用ｉｃ及びアナログ電子時計
JPH078149B2 (ja) 1989-06-16 1995-01-30 松下電器産業株式会社 静電型マイクロモータの駆動力伝達装置
JP3060639B2 (ja) * 1991-09-05 2000-07-10 日本電気株式会社 微小可動機械の製造方法
US5631514A (en) * 1994-06-09 1997-05-20 The United States Of America As Represented By The United States Department Of Energy Microfabricated microengine for use as a mechanical drive and power source in the microdomain and fabrication process
JP2697763B2 (ja) 1994-09-28 1998-01-14 セイコークロック株式会社 粘性カップリング歯車装置
US6069419A (en) * 1998-06-16 2000-05-30 Tabib-Azar; Massood Micro-actuator assembly
US5959376A (en) * 1998-09-10 1999-09-28 Sandia Corporation Microelectromechanical reciprocating-tooth indexing apparatus
US6329737B1 (en) * 1998-12-15 2001-12-11 Iolon, Inc. Rotary electrostatic microactuator
EP2568595A3 (de) * 1998-12-21 2013-05-15 Seiko Epson Corporation Piezoelektrischer Aktor, Uhrwerk und tragbares Gerät
US6137206A (en) * 1999-03-23 2000-10-24 Cronos Integrated Microsystems, Inc. Microelectromechanical rotary structures
US6211599B1 (en) * 1999-08-03 2001-04-03 Sandia Corporation Microelectromechanical ratcheting apparatus
US6402969B1 (en) * 2000-08-15 2002-06-11 Sandia Corporation Surface—micromachined rotatable member having a low-contact-area hub
US6402939B1 (en) * 2000-09-28 2002-06-11 Sulphco, Inc. Oxidative desulfurization of fossil fuels with ultrasound
JP2004072993A (ja) 2002-06-14 2004-03-04 Seiko Epson Corp 圧電アクチュエータ、これを備えた動力伝達装置、液体吐出装置および時計
SG112865A1 (en) * 2002-12-10 2005-07-28 Sony Corp Mems based motor
CH695395A5 (fr) 2003-02-06 2006-04-28 Eta Sa Mft Horlogere Suisse Spiral de résonateur balancier-spiral.
FR2852111B1 (fr) 2003-03-05 2005-06-24 Univ Franche Comte Dispositif d'horloge utilisant la technologie mems
JP2004279251A (ja) 2003-03-17 2004-10-07 Citizen Watch Co Ltd 携帯からくり時計
US7238429B2 (en) * 2003-09-23 2007-07-03 Iowa State University Research Foundation, Inc. Ultra-hard low friction coating based on A1MgB14 for reduced wear of MEMS and other tribological components and system
FR2874907B1 (fr) * 2004-09-03 2006-11-24 Silmach Soc Par Actions Simpli Dispositif d'entrainement, notamment pour mecanisme horloger
FR2883277B1 (fr) 2005-03-18 2007-05-11 Silmach Soc Par Actions Simpli Procede et dispositif pour deplacer un element a entrainer utilisant un element actionneur forme par gravure dans un materiau semi-conducteur
US7411322B2 (en) * 2005-12-06 2008-08-12 Lucent Technologies Inc. Micromachined reluctance motor

Also Published As

Publication number Publication date
SG143157A1 (en) 2008-06-27
KR101401200B1 (ko) 2014-05-28
JP4971108B2 (ja) 2012-07-11
US7447119B2 (en) 2008-11-04
EP1921520A1 (de) 2008-05-14
ATE422068T1 (de) 2009-02-15
JP2008122390A (ja) 2008-05-29
EP1921520B1 (de) 2009-01-28
CN101183837B (zh) 2011-04-06
HK1120935A1 (en) 2009-04-09
CN101183837A (zh) 2008-05-21
KR20080043236A (ko) 2008-05-16
US20080111445A1 (en) 2008-05-15

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