DE602006001471D1 - Poliervorrichtung - Google Patents

Poliervorrichtung

Info

Publication number
DE602006001471D1
DE602006001471D1 DE602006001471T DE602006001471T DE602006001471D1 DE 602006001471 D1 DE602006001471 D1 DE 602006001471D1 DE 602006001471 T DE602006001471 T DE 602006001471T DE 602006001471 T DE602006001471 T DE 602006001471T DE 602006001471 D1 DE602006001471 D1 DE 602006001471D1
Authority
DE
Germany
Prior art keywords
polisher
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602006001471T
Other languages
English (en)
Inventor
Tadakazu Miyashita
Harumichi Koyama
Mitsuhiro Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikoshi Machinery Corp
Original Assignee
Fujikoshi Machinery Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikoshi Machinery Corp filed Critical Fujikoshi Machinery Corp
Publication of DE602006001471D1 publication Critical patent/DE602006001471D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H57/00—General details of gearing
    • F16H57/08—General details of gearing of gearings with members having orbital motion
    • F16H57/10—Braking arrangements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/19—Gearing
    • Y10T74/19949—Teeth
    • Y10T74/19963—Spur
    • Y10T74/19972—Spur form
    • Y10T74/19977—Antifriction
    • Y10T74/19981—Roller

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
DE602006001471T 2005-02-04 2006-02-03 Poliervorrichtung Active DE602006001471D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005028506A JP4510659B2 (ja) 2005-02-04 2005-02-04 研磨装置

Publications (1)

Publication Number Publication Date
DE602006001471D1 true DE602006001471D1 (de) 2008-07-31

Family

ID=36264001

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602006001471T Active DE602006001471D1 (de) 2005-02-04 2006-02-03 Poliervorrichtung

Country Status (5)

Country Link
US (1) US7255635B2 (de)
EP (1) EP1688218B1 (de)
JP (1) JP4510659B2 (de)
DE (1) DE602006001471D1 (de)
MY (1) MY142135A (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009038942B4 (de) 2008-10-22 2022-06-23 Peter Wolters Gmbh Vorrichtung zur beidseitigen Bearbeitung von flachen Werkstücken sowie Verfahren zur gleichzeitigen beidseitigen Material abtragenden Bearbeitung mehrerer Halbleiterscheiben
JP5452984B2 (ja) * 2009-06-03 2014-03-26 不二越機械工業株式会社 ウェーハの両面研磨方法
US9683607B1 (en) * 2016-05-12 2017-06-20 Steven Wayne Francis Interlocking drive disc with rolling pin assembly
CN115847276A (zh) * 2022-12-15 2023-03-28 西安奕斯伟材料科技有限公司 一种用于双面抛光设备的销环和双面抛光机

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US594110A (en) * 1897-11-23 Ball-bearing roller-cog wheel
US860536A (en) * 1906-11-24 1907-07-16 Robert W Ellingham Roller-pinion.
US1473907A (en) * 1922-06-16 1923-11-13 Hettrich John Mechanical movement
US2709321A (en) * 1951-03-14 1955-05-31 Norton Co Lapping machine
US2792715A (en) * 1956-04-16 1957-05-21 Wojtowicz John Roller gear wheels
JPS4631876Y1 (de) * 1967-04-24 1971-11-04
JPS494036U (de) * 1972-04-20 1974-01-14
DE2442081C3 (de) * 1974-09-03 1979-11-15 Jmj-Werkzeugmaschinen Gmbh Fuer Feinbearbeitung, 4020 Mettmann Läppmaschine
US4315383A (en) * 1980-05-13 1982-02-16 Spitfire Tool & Machine, Co. Inc. Inner gear drive for abrading machines
JPH01252356A (ja) * 1988-03-31 1989-10-09 Toshiba Mach Co Ltd 両面研磨機
JPH08128Y2 (ja) * 1989-03-30 1996-01-10 東芝機械株式会社 両面研磨機
US5704248A (en) * 1993-06-10 1998-01-06 Knotts; Stephen E. Bearing tooth gear
JPH09239657A (ja) 1996-03-04 1997-09-16 Speedfam Co Ltd 研磨装置
US5944591A (en) * 1998-01-15 1999-08-31 Chen; Alex Y. Sure-seal rolling pin assembly

Also Published As

Publication number Publication date
EP1688218A1 (de) 2006-08-09
US7255635B2 (en) 2007-08-14
MY142135A (en) 2010-09-30
EP1688218B1 (de) 2008-06-18
US20060178094A1 (en) 2006-08-10
JP4510659B2 (ja) 2010-07-28
JP2006212740A (ja) 2006-08-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition