DE602006001278D1 - Messinstrument für Oberflächenprofile - Google Patents

Messinstrument für Oberflächenprofile

Info

Publication number
DE602006001278D1
DE602006001278D1 DE602006001278T DE602006001278T DE602006001278D1 DE 602006001278 D1 DE602006001278 D1 DE 602006001278D1 DE 602006001278 T DE602006001278 T DE 602006001278T DE 602006001278 T DE602006001278 T DE 602006001278T DE 602006001278 D1 DE602006001278 D1 DE 602006001278D1
Authority
DE
Germany
Prior art keywords
measuring instrument
surface profiles
profiles
instrument
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602006001278T
Other languages
English (en)
Inventor
Sadayuki Matsumiya
Shiro Igasaki
Masaoki Yamagata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Publication of DE602006001278D1 publication Critical patent/DE602006001278D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
    • G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
    • G01B7/012—Contact-making feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
    • G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
DE602006001278T 2005-09-01 2006-08-22 Messinstrument für Oberflächenprofile Active DE602006001278D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005254016A JP4909548B2 (ja) 2005-09-01 2005-09-01 表面形状測定装置

Publications (1)

Publication Number Publication Date
DE602006001278D1 true DE602006001278D1 (de) 2008-07-03

Family

ID=37309227

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602006001278T Active DE602006001278D1 (de) 2005-09-01 2006-08-22 Messinstrument für Oberflächenprofile

Country Status (5)

Country Link
US (1) US7318285B2 (de)
EP (1) EP1760422B1 (de)
JP (1) JP4909548B2 (de)
CN (1) CN1924521B (de)
DE (1) DE602006001278D1 (de)

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JP4568621B2 (ja) * 2005-02-28 2010-10-27 株式会社ミツトヨ 表面性状測定機の真直度補正方法および表面性状測定機
JP2007309684A (ja) * 2006-05-16 2007-11-29 Mitsutoyo Corp 測定制御装置、表面性状測定装置、および、測定制御方法
US7814779B2 (en) 2006-06-06 2010-10-19 Mitutoyo Corporation Surface texture measuring instrument
JP5189806B2 (ja) * 2006-09-07 2013-04-24 株式会社ミツトヨ 表面形状測定装置
JP5199582B2 (ja) * 2007-02-14 2013-05-15 株式会社ミツトヨ 接触式プローブの倣い制御方法及び接触式測定機
EP1978328B1 (de) * 2007-04-03 2015-02-18 Hexagon Metrology AB Oszillierende Rastersonde mit konstanter Kontaktkraft
GB0707921D0 (en) 2007-04-24 2007-05-30 Renishaw Plc Apparatus and method for surface measurement
KR100868029B1 (ko) * 2007-07-10 2008-11-11 한국과학기술연구원 질감 측정 장치 및 그 방법
JP4918427B2 (ja) * 2007-08-01 2012-04-18 株式会社ミツトヨ 共振センサの測定位置検出方法及び装置
CN101413789B (zh) * 2007-10-18 2010-09-29 鸿富锦精密工业（深圳）有限公司 表面轮廓检测装置及其检测方法
GB0722477D0 (en) 2007-11-15 2007-12-27 Secretary Trade Ind Brit Microprobe
JP5435918B2 (ja) * 2008-09-30 2014-03-05 株式会社トプコン 玉型形状測定方法及びその装置
DE102008049751A1 (de) * 2008-10-01 2010-04-08 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zum Vermessen eines Werkstücks, Kalibrierverfahren sowie Koordinatenmessgerät
JP5100612B2 (ja) * 2008-10-29 2012-12-19 住友重機械工業株式会社 真直度測定方法及び真直度測定装置
WO2010049693A2 (en) 2008-10-29 2010-05-06 Renishaw Plc Measurement method
JP5439157B2 (ja) * 2009-12-22 2014-03-12 三菱重工業株式会社 歯車測定方法
JP5557620B2 (ja) * 2010-06-29 2014-07-23 株式会社ミツトヨ 形状測定装置
US20130162806A1 (en) * 2011-12-23 2013-06-27 Mitutoyo Corporation Enhanced edge focus tool
GB201205563D0 (en) 2012-03-29 2012-05-09 Sec Dep For Business Innovation & Skills The Coordinate measurement system and method
US9720088B2 (en) 2012-03-29 2017-08-01 The Secretary Of State For Business, Innovation & Skills Measurement device, system and method
JP6030339B2 (ja) * 2012-05-17 2016-11-24 株式会社ミツトヨ 形状測定装置
CN102944163B (zh) * 2012-11-12 2015-02-25 沈阳黎明航空发动机(集团)有限责任公司 一种测量任意轴剖面环形燕尾槽轮廓度的装置及方法
CN103994845B (zh) * 2013-02-19 2019-09-10 精工爱普生株式会社 力检测装置、机械手、以及移动体
JP6168946B2 (ja) * 2013-09-24 2017-07-26 株式会社ミツトヨ 送り機構、形状測定機
JP6393156B2 (ja) * 2014-11-06 2018-09-19 株式会社ミツトヨ 形状測定装置、及び形状測定方法
CN104344802A (zh) * 2014-11-18 2015-02-11 刘杰波 表面轮廓的测量方法
CN104897099B (zh) * 2015-06-19 2018-09-04 四川大学 一种用于微形貌检测的测量力可控的触针式位移传感器
JP6630535B2 (ja) * 2015-10-22 2020-01-15 株式会社ミツトヨ 形状測定装置の制御方法
CN105241341B (zh) * 2015-11-10 2019-02-15 长春捷柯汽车工艺装备有限公司 一种乘用车焊合件智能检测台及其使用方法
JP6613162B2 (ja) * 2016-02-10 2019-11-27 株式会社ミツトヨ 三次元座標測定機用プローブヘッド及び接触検出方法
JP6774240B2 (ja) * 2016-07-14 2020-10-21 株式会社ミツトヨ 形状測定装置の制御方法
CN106524980A (zh) * 2016-10-19 2017-03-22 北京海普瑞森科技发展有限公司 一种测量仪的控制方法、装置和***
JP6777589B2 (ja) * 2017-05-24 2020-10-28 株式会社ミツトヨ 表面性状測定装置
CN108917682B (zh) * 2018-05-21 2020-08-04 项大清 金刚石锯片参数检测装置
CN108693024B (zh) * 2018-05-21 2020-09-18 项大清 一种金刚石锯片参数检测装置
CN109084722B (zh) * 2018-06-20 2019-08-13 华中科技大学 一种自适应采样的复杂曲面接触式测量方法
JP7236952B2 (ja) * 2019-07-29 2023-03-10 株式会社ミツトヨ 形状測定装置、及び形状測定方法
CN111812442A (zh) * 2020-07-31 2020-10-23 宁波中车时代传感技术有限公司 连接器插针缩针检测装置及检测方法
CN112255701B (zh) * 2020-10-09 2024-05-24 中国石油天然气集团有限公司 多触点井下落物成像方法及装置、电子设备和存储介质

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Publication number Priority date Publication date Assignee Title
US5152072A (en) * 1988-02-18 1992-10-06 Renishaw Plc Surface-sensing device
DE4331069A1 (de) * 1993-09-13 1995-03-16 Zeiss Carl Fa Koordinatenmeßgerät mit einem Taster in Form eines Festkörperschwingers
US5952589A (en) * 1996-01-11 1999-09-14 Systems, Machines, Automation Components Corporation Soft landing method for probe assembly
JP3401444B2 (ja) * 1998-12-15 2003-04-28 株式会社ミツトヨ 微細形状測定装置
JP2000199710A (ja) * 1999-01-06 2000-07-18 Mitsutoyo Corp タッチ信号プロ―ブの接触部位検出構造
GB2348706B (en) * 1999-04-02 2003-09-24 Mitutoyo Corp Movement control mechanism of contact-type vibrating probe
JP2000321001A (ja) * 1999-05-11 2000-11-24 Mitsutoyo Corp 接触子の定圧力機構
DE10035714B4 (de) * 1999-07-23 2011-06-09 Mitutoyo Corp. Oberflächengestalt-Messverfahren
JP2001264050A (ja) * 2000-03-14 2001-09-26 Mitsutoyo Corp 微細形状測定装置
JP3961258B2 (ja) * 2001-10-10 2007-08-22 株式会社ミツトヨ タッチセンサ、および微細形状測定装置用プローブ
JP3818928B2 (ja) 2002-02-14 2006-09-06 株式会社ミツトヨ 表面形状測定方法および表面形状測定装置
JP2003294434A (ja) 2002-03-29 2003-10-15 Ricoh Co Ltd 接触式プローブ
JP4009152B2 (ja) * 2002-07-09 2007-11-14 株式会社ミツトヨ 表面形状測定装置および表面形状測定方法
JP2004061322A (ja) 2002-07-29 2004-02-26 Mitsutoyo Corp 表面形状測定装置
US6901677B2 (en) * 2003-05-05 2005-06-07 University Of North Carolina At Charlotte Method and apparatus using a closed loop controlled actuator for surface profilometry
JP2005037197A (ja) 2003-07-18 2005-02-10 Ricoh Co Ltd 接触式表面形状測定装置及び測定方法
JP4330388B2 (ja) * 2003-07-28 2009-09-16 株式会社ミツトヨ 倣いプローブ
US7376261B2 (en) * 2003-11-25 2008-05-20 Mitutoyo Corporation Surface scan measuring device and method of forming compensation table for scanning probe
JP4436665B2 (ja) * 2003-12-24 2010-03-24 パナソニック株式会社 測定用プローブ及び形状測定方法

Also Published As

Publication number Publication date
US20070056176A1 (en) 2007-03-15
CN1924521B (zh) 2010-06-09
US7318285B2 (en) 2008-01-15
EP1760422B1 (de) 2008-05-21
JP2007064891A (ja) 2007-03-15
CN1924521A (zh) 2007-03-07
JP4909548B2 (ja) 2012-04-04
EP1760422A1 (de) 2007-03-07

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Legal Events

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