DE602005016225D1 - Elektromechanisches stellglied mit grossem frequenzbereich - Google Patents

Elektromechanisches stellglied mit grossem frequenzbereich

Info

Publication number
DE602005016225D1
DE602005016225D1 DE602005016225T DE602005016225T DE602005016225D1 DE 602005016225 D1 DE602005016225 D1 DE 602005016225D1 DE 602005016225 T DE602005016225 T DE 602005016225T DE 602005016225 T DE602005016225 T DE 602005016225T DE 602005016225 D1 DE602005016225 D1 DE 602005016225D1
Authority
DE
Germany
Prior art keywords
actuator
backing
actuator backing
electromechanical actuator
frequency range
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005016225T
Other languages
English (en)
Inventor
Stefan Johansson
Mats Bexell
Anders Jansson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Piezomotor Uppsala AB
Original Assignee
Piezomotor Uppsala AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Piezomotor Uppsala AB filed Critical Piezomotor Uppsala AB
Publication of DE602005016225D1 publication Critical patent/DE602005016225D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/009—Thermal details, e.g. cooling means
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04—Constructional details
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/08—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using travelling waves, i.e. Rayleigh surface waves
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2023—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having polygonal or rectangular shape
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Micromachines (AREA)
DE602005016225T 2004-02-17 2005-02-16 Elektromechanisches stellglied mit grossem frequenzbereich Active DE602005016225D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/778,348 US7067958B2 (en) 2004-02-17 2004-02-17 Wide frequency range electromechanical actuator
PCT/SE2005/000205 WO2005078815A1 (en) 2004-02-17 2005-02-16 Wide frequency range electromechanical actuator

Publications (1)

Publication Number Publication Date
DE602005016225D1 true DE602005016225D1 (de) 2009-10-08

Family

ID=34838158

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005016225T Active DE602005016225D1 (de) 2004-02-17 2005-02-16 Elektromechanisches stellglied mit grossem frequenzbereich

Country Status (7)

Country Link
US (1) US7067958B2 (de)
EP (1) EP1726049B1 (de)
JP (1) JP4955406B2 (de)
KR (1) KR20070004629A (de)
AT (1) ATE441216T1 (de)
DE (1) DE602005016225D1 (de)
WO (1) WO2005078815A1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4697929B2 (ja) * 2003-11-13 2011-06-08 キヤノン株式会社 積層圧電素子及び振動波駆動装置
US20070055182A1 (en) * 2005-07-20 2007-03-08 Ust, Inc. Thermally enhanced ultrasound transducer method
US7378779B2 (en) * 2005-07-20 2008-05-27 Ust, Inc. Thermally enhanced piezoelectric composite system and method
US8237335B2 (en) * 2005-07-20 2012-08-07 Ust, Inc. Thermally enhanced ultrasound transducer means
US8446071B2 (en) * 2005-07-20 2013-05-21 Ust, Inc. Thermally enhanced ultrasound transducer system
US7405510B2 (en) * 2005-07-20 2008-07-29 Ust, Inc. Thermally enhanced piezoelectric element
US7420321B2 (en) * 2006-03-03 2008-09-02 Piezomotor Uppsala Ab Heat efficient micromotor
US7355325B2 (en) * 2006-06-15 2008-04-08 Piezomotor Uppsala Ab Wide frequency range electromechanical actuator
KR100857095B1 (ko) 2006-10-18 2008-09-05 현대자동차주식회사 압전소자를 이용한 리니어 액츄에이터
US8022596B2 (en) 2008-12-12 2011-09-20 Piezomotor Uppsala Ab Guided electromechanical motor
US8228602B2 (en) * 2009-03-25 2012-07-24 Dublin City University Of Collins Avenue Super critical angle fluorescence scanning system
WO2011059369A1 (en) 2009-11-11 2011-05-19 Piezomotor Uppsala Ab Provision of a normal force to electromechanical motor
WO2011147467A1 (en) 2010-05-28 2011-12-01 Piezomotor Uppsala Ab Rotating load bearer
WO2012041370A1 (en) 2010-09-29 2012-04-05 Piezomotor Uppsala Ab Electromechanical actuator
DE112011104734T5 (de) 2011-01-18 2013-10-10 Piezomotors Uppsala Ab Betätigung von elektromechanischen Aktuatorvorrichtungen
EP2937913A1 (de) 2014-04-25 2015-10-28 Physik Instrumente (PI) GmbH & Co. Kg Piezoelektrischer Aktor für einen Ultraschallmotor
DE102014221001A1 (de) * 2014-10-16 2016-04-21 Picofine GmbH Antriebsvorrichtung und -verfahren zur linearen und/oder rotatorischen Positionierung

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02197272A (ja) * 1989-01-25 1990-08-03 Canon Inc 大出力型振動波モータ
GB2183929B (en) * 1985-08-05 1989-11-15 Canon Kk Vibration wave motor
US5345137A (en) * 1991-04-08 1994-09-06 Olympus Optical Co., Ltd. Two-dimensionally driving ultrasonic motor
JPH052594U (ja) * 1991-06-21 1993-01-14 オムロン株式会社 超音波モータ
JPH05168253A (ja) * 1991-12-16 1993-07-02 Nec Corp 移動機構
JP2905643B2 (ja) * 1992-05-29 1999-06-14 住友重機械工業株式会社 圧電リニアアクチュエータ
DE4408618B4 (de) 1994-03-15 2004-04-22 Physik Instrumente (Pi) Gmbh & Co Verstellantrieb aus Bimorphelementen
DE19605214A1 (de) * 1995-02-23 1996-08-29 Bosch Gmbh Robert Ultraschallantriebselement
WO1997036365A1 (en) * 1996-03-26 1997-10-02 Stefan Johansson An actuator motor and a method for fabrication of such an actuator
JP3792790B2 (ja) * 1996-07-23 2006-07-05 キヤノン株式会社 振動波モータ
US6313566B1 (en) 1997-07-08 2001-11-06 John Cunningham Piezoelectric motor
JPH1189257A (ja) * 1997-09-08 1999-03-30 Alps Electric Co Ltd 振動型アクチュエータ
JPH11206156A (ja) * 1997-11-14 1999-07-30 Canon Inc 振動型モータのための制御装置
JP3133302B2 (ja) * 1999-06-29 2001-02-05 新日本製鐵株式会社 黒色低熱膨張セラミックス焼結体及びその製造方法
JP2001355574A (ja) * 2000-06-13 2001-12-26 Matsushita Electric Ind Co Ltd 圧電ポンプ及び該圧電ポンプを用いた冷却装置
US6337532B1 (en) * 2000-08-11 2002-01-08 Piezomotor Uppsala Ab Fine walking actuator
JP3964193B2 (ja) * 2000-12-22 2007-08-22 日本碍子株式会社 マトリクス型アクチュエータ
US6864620B2 (en) * 2000-12-22 2005-03-08 Ngk Insulators, Ltd. Matrix type actuator
DE10148267B4 (de) 2001-06-08 2005-11-24 Physik Instrumente (Pi) Gmbh & Co. Kg Piezolinearantrieb mit einer Gruppe von Piezostapelaktoren sowie Verfahren zum Betreiben eines solchen Antriebes
JP2003243282A (ja) * 2002-02-14 2003-08-29 Nikon Corp ステージ装置及び露光装置
JP4567440B2 (ja) 2002-05-06 2010-10-20 エプコス アクチエンゲゼルシャフト ピエゾアクチュエータおよびピエゾアクチュエータの製造方法

Also Published As

Publication number Publication date
US7067958B2 (en) 2006-06-27
EP1726049A1 (de) 2006-11-29
JP4955406B2 (ja) 2012-06-20
KR20070004629A (ko) 2007-01-09
JP2007527689A (ja) 2007-09-27
EP1726049B1 (de) 2009-08-26
US20050179343A1 (en) 2005-08-18
WO2005078815A1 (en) 2005-08-25
ATE441216T1 (de) 2009-09-15

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