DE602005009746D1 - Resonatormesseinrichtung und verfahren damit - Google Patents

Resonatormesseinrichtung und verfahren damit

Info

Publication number
DE602005009746D1
DE602005009746D1 DE602005009746T DE602005009746T DE602005009746D1 DE 602005009746 D1 DE602005009746 D1 DE 602005009746D1 DE 602005009746 T DE602005009746 T DE 602005009746T DE 602005009746 T DE602005009746 T DE 602005009746T DE 602005009746 D1 DE602005009746 D1 DE 602005009746D1
Authority
DE
Germany
Prior art keywords
measuring device
method therefor
resonator measuring
resonator
therefor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005009746T
Other languages
English (en)
Inventor
Bertrand Leverrier
Olivier Lefort
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thales SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from FR0413965A external-priority patent/FR2888929A1/fr
Application filed by Thales SA filed Critical Thales SA
Publication of DE602005009746D1 publication Critical patent/DE602005009746D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0019—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a semiconductive element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/16—Vacuum gauges by measuring variation of frictional resistance of gases
    • G01L21/22—Vacuum gauges by measuring variation of frictional resistance of gases using resonance effects of a vibrating body; Vacuum gauges of the Klumb type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
    • G01L27/007—Malfunction diagnosis, i.e. diagnosing a sensor defect
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02872—Pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02881—Temperature

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Biomedical Technology (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
DE602005009746T 2004-12-27 2005-12-20 Resonatormesseinrichtung und verfahren damit Active DE602005009746D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0413965A FR2888929A1 (fr) 2004-12-27 2004-12-27 Dispositif et procede permettant la detection de defaut d'un dispositif de mesure de pression d'air
FR0500591A FR2888930B1 (fr) 2004-12-27 2005-01-20 Dispositfi de mesure a resonateur et procede mettant en oeuvre le dispositif
PCT/EP2005/056961 WO2006069937A1 (fr) 2004-12-27 2005-12-20 Dispositif de mesure a resonateur et procede mettant en oeuvre le dispositif

Publications (1)

Publication Number Publication Date
DE602005009746D1 true DE602005009746D1 (de) 2008-10-23

Family

ID=35961314

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005009746T Active DE602005009746D1 (de) 2004-12-27 2005-12-20 Resonatormesseinrichtung und verfahren damit

Country Status (6)

Country Link
US (1) US7798005B2 (de)
EP (1) EP1831663B1 (de)
DE (1) DE602005009746D1 (de)
FR (1) FR2888930B1 (de)
NO (1) NO20073953L (de)
WO (1) WO2006069937A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8516895B2 (en) * 2009-10-08 2013-08-27 GM Global Technology Operations LLC In-cylinder pressure sensor diagnostic systems and methods
US20110133755A1 (en) * 2009-12-08 2011-06-09 Delphi Technologies, Inc. System and Method of Occupant Detection with a Resonant Frequency
EP2458377B1 (de) 2010-11-29 2019-07-31 Air Products And Chemicals, Inc. Verfahren und Vorrichtung zum Messen des Molekulargewichts eines Gases
PL2458357T5 (pl) * 2010-11-29 2018-03-30 Air Products And Chemicals, Inc. Sposób i urządzenie do mierzenia ciśnienia gazu
PL2458348T3 (pl) 2010-11-29 2014-01-31 Air Prod & Chem Sposób i urządzenie do mierzenia masowego natężenia przepływu
FR2977676B1 (fr) 2011-07-08 2013-08-02 Thales Sa Micro-systeme vibrant a boucle de controle automatique de gain, a controle integre du facteur de qualite
ES2905838T3 (es) 2012-05-24 2022-04-12 Air Prod & Chem Método y aparato para medir el caudal másico de un gas
PL2667176T3 (pl) 2012-05-24 2015-07-31 Air Prod & Chem Urządzenie do mierzenia rzeczywistej zawartości butli z gazem pod ciśnieniem
PL2667162T3 (pl) 2012-05-24 2016-03-31 Air Prod & Chem Sposób oraz urządzenie do mierzenia właściwości fizycznych płynów dwufazowych
PL2667276T3 (pl) 2012-05-24 2018-04-30 Air Products And Chemicals, Inc. Sposób i urządzenie do dostarczania mieszaniny gazu
EP2667160B1 (de) 2012-05-24 2020-11-18 Air Products And Chemicals, Inc. Verfahren und Vorrichtung zur Regelung der Massendurchflussrate eines Gases
ES2663244T3 (es) 2012-05-24 2018-04-11 Air Products And Chemicals, Inc. Método y aparato para proporcionar una mezcla de gases
JP2015525348A (ja) * 2012-06-14 2015-09-03 ホアウェイ・デバイス・カンパニー・リミテッド モバイルデバイスのための気圧の較正方法、較正デバイスおよびモバイルデバイス
FR2992418B1 (fr) 2012-06-22 2014-08-01 Thales Sa Capteur a element vibrant dans une cavite, a detection integree d anomalies
EP3462155B1 (de) * 2012-09-25 2020-04-29 ams International AG Mems-resonator-drucksensor

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5009108A (en) 1988-09-16 1991-04-23 Yokogawa Electric Corporation Vibrating type transducer
US5165289A (en) * 1990-07-10 1992-11-24 Johnson Service Company Resonant mechanical sensor
FR2687783B1 (fr) * 1992-02-20 1994-05-20 Sextant Avionique Micro-capteur de pression.
WO1995002173A1 (fr) 1993-07-06 1995-01-19 Seiko Epson Corporation Procede et dispositif de mesure de pression a l'aide d'un oscillateur a cristal
US5458000A (en) * 1993-07-20 1995-10-17 Honeywell Inc. Static pressure compensation of resonant integrated microbeam sensors
FI101018B (sv) * 1996-12-13 1998-03-31 Balzers And Leybold Instrument Förfarande och anordning för elektronisk kompensation av missvisning t ill följd av resonans hos en kapacitiv tryckgivare
US6085594A (en) 1998-09-04 2000-07-11 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration High resolution and large dynamic range resonant pressure sensor based on Q-factor measurement
US6584845B1 (en) * 1999-02-10 2003-07-01 California Institute Of Technology Inertial sensor and method of use
US6367786B1 (en) * 1999-06-07 2002-04-09 California Institute Of Technology Micromachined double resonator
FR2834055B1 (fr) 2001-12-20 2004-02-13 Thales Sa Capteur inertiel micro-usine pour la mesure de mouvements de rotation
FR2848298B1 (fr) 2002-12-10 2005-03-11 Thales Sa Accelerometre a poutre vibrante
ITTO20050316A1 (it) * 2005-05-10 2006-11-11 Varian Spa Sensore di pressione
US7444878B1 (en) * 2006-10-30 2008-11-04 Northrop Grumman Systems Corporation Resonant frequency pressure sensor

Also Published As

Publication number Publication date
WO2006069937A1 (fr) 2006-07-06
NO20073953L (no) 2007-07-27
US7798005B2 (en) 2010-09-21
US20080184804A1 (en) 2008-08-07
FR2888930A1 (fr) 2007-01-26
FR2888930B1 (fr) 2007-08-31
EP1831663A1 (de) 2007-09-12
EP1831663B1 (de) 2008-09-10

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