DE602005009746D1 - Resonatormesseinrichtung und verfahren damit - Google Patents
Resonatormesseinrichtung und verfahren damitInfo
- Publication number
- DE602005009746D1 DE602005009746D1 DE602005009746T DE602005009746T DE602005009746D1 DE 602005009746 D1 DE602005009746 D1 DE 602005009746D1 DE 602005009746 T DE602005009746 T DE 602005009746T DE 602005009746 T DE602005009746 T DE 602005009746T DE 602005009746 D1 DE602005009746 D1 DE 602005009746D1
- Authority
- DE
- Germany
- Prior art keywords
- measuring device
- method therefor
- resonator measuring
- resonator
- therefor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
- G01L9/0019—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a semiconductive element
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/16—Vacuum gauges by measuring variation of frictional resistance of gases
- G01L21/22—Vacuum gauges by measuring variation of frictional resistance of gases using resonance effects of a vibrating body; Vacuum gauges of the Klumb type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
- G01L27/007—Malfunction diagnosis, i.e. diagnosing a sensor defect
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/028—Material parameters
- G01N2291/02872—Pressure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/028—Material parameters
- G01N2291/02881—Temperature
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Biomedical Technology (AREA)
- Measuring Fluid Pressure (AREA)
- Measurement Of Resistance Or Impedance (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Testing Electric Properties And Detecting Electric Faults (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0413965A FR2888929A1 (fr) | 2004-12-27 | 2004-12-27 | Dispositif et procede permettant la detection de defaut d'un dispositif de mesure de pression d'air |
FR0500591A FR2888930B1 (fr) | 2004-12-27 | 2005-01-20 | Dispositfi de mesure a resonateur et procede mettant en oeuvre le dispositif |
PCT/EP2005/056961 WO2006069937A1 (fr) | 2004-12-27 | 2005-12-20 | Dispositif de mesure a resonateur et procede mettant en oeuvre le dispositif |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602005009746D1 true DE602005009746D1 (de) | 2008-10-23 |
Family
ID=35961314
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602005009746T Active DE602005009746D1 (de) | 2004-12-27 | 2005-12-20 | Resonatormesseinrichtung und verfahren damit |
Country Status (6)
Country | Link |
---|---|
US (1) | US7798005B2 (de) |
EP (1) | EP1831663B1 (de) |
DE (1) | DE602005009746D1 (de) |
FR (1) | FR2888930B1 (de) |
NO (1) | NO20073953L (de) |
WO (1) | WO2006069937A1 (de) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8516895B2 (en) * | 2009-10-08 | 2013-08-27 | GM Global Technology Operations LLC | In-cylinder pressure sensor diagnostic systems and methods |
US20110133755A1 (en) * | 2009-12-08 | 2011-06-09 | Delphi Technologies, Inc. | System and Method of Occupant Detection with a Resonant Frequency |
EP2458377B1 (de) | 2010-11-29 | 2019-07-31 | Air Products And Chemicals, Inc. | Verfahren und Vorrichtung zum Messen des Molekulargewichts eines Gases |
PL2458357T5 (pl) * | 2010-11-29 | 2018-03-30 | Air Products And Chemicals, Inc. | Sposób i urządzenie do mierzenia ciśnienia gazu |
PL2458348T3 (pl) | 2010-11-29 | 2014-01-31 | Air Prod & Chem | Sposób i urządzenie do mierzenia masowego natężenia przepływu |
FR2977676B1 (fr) | 2011-07-08 | 2013-08-02 | Thales Sa | Micro-systeme vibrant a boucle de controle automatique de gain, a controle integre du facteur de qualite |
ES2905838T3 (es) | 2012-05-24 | 2022-04-12 | Air Prod & Chem | Método y aparato para medir el caudal másico de un gas |
PL2667176T3 (pl) | 2012-05-24 | 2015-07-31 | Air Prod & Chem | Urządzenie do mierzenia rzeczywistej zawartości butli z gazem pod ciśnieniem |
PL2667162T3 (pl) | 2012-05-24 | 2016-03-31 | Air Prod & Chem | Sposób oraz urządzenie do mierzenia właściwości fizycznych płynów dwufazowych |
PL2667276T3 (pl) | 2012-05-24 | 2018-04-30 | Air Products And Chemicals, Inc. | Sposób i urządzenie do dostarczania mieszaniny gazu |
EP2667160B1 (de) | 2012-05-24 | 2020-11-18 | Air Products And Chemicals, Inc. | Verfahren und Vorrichtung zur Regelung der Massendurchflussrate eines Gases |
ES2663244T3 (es) | 2012-05-24 | 2018-04-11 | Air Products And Chemicals, Inc. | Método y aparato para proporcionar una mezcla de gases |
JP2015525348A (ja) * | 2012-06-14 | 2015-09-03 | ホアウェイ・デバイス・カンパニー・リミテッド | モバイルデバイスのための気圧の較正方法、較正デバイスおよびモバイルデバイス |
FR2992418B1 (fr) | 2012-06-22 | 2014-08-01 | Thales Sa | Capteur a element vibrant dans une cavite, a detection integree d anomalies |
EP3462155B1 (de) * | 2012-09-25 | 2020-04-29 | ams International AG | Mems-resonator-drucksensor |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5009108A (en) | 1988-09-16 | 1991-04-23 | Yokogawa Electric Corporation | Vibrating type transducer |
US5165289A (en) * | 1990-07-10 | 1992-11-24 | Johnson Service Company | Resonant mechanical sensor |
FR2687783B1 (fr) * | 1992-02-20 | 1994-05-20 | Sextant Avionique | Micro-capteur de pression. |
WO1995002173A1 (fr) | 1993-07-06 | 1995-01-19 | Seiko Epson Corporation | Procede et dispositif de mesure de pression a l'aide d'un oscillateur a cristal |
US5458000A (en) * | 1993-07-20 | 1995-10-17 | Honeywell Inc. | Static pressure compensation of resonant integrated microbeam sensors |
FI101018B (sv) * | 1996-12-13 | 1998-03-31 | Balzers And Leybold Instrument | Förfarande och anordning för elektronisk kompensation av missvisning t ill följd av resonans hos en kapacitiv tryckgivare |
US6085594A (en) | 1998-09-04 | 2000-07-11 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | High resolution and large dynamic range resonant pressure sensor based on Q-factor measurement |
US6584845B1 (en) * | 1999-02-10 | 2003-07-01 | California Institute Of Technology | Inertial sensor and method of use |
US6367786B1 (en) * | 1999-06-07 | 2002-04-09 | California Institute Of Technology | Micromachined double resonator |
FR2834055B1 (fr) | 2001-12-20 | 2004-02-13 | Thales Sa | Capteur inertiel micro-usine pour la mesure de mouvements de rotation |
FR2848298B1 (fr) | 2002-12-10 | 2005-03-11 | Thales Sa | Accelerometre a poutre vibrante |
ITTO20050316A1 (it) * | 2005-05-10 | 2006-11-11 | Varian Spa | Sensore di pressione |
US7444878B1 (en) * | 2006-10-30 | 2008-11-04 | Northrop Grumman Systems Corporation | Resonant frequency pressure sensor |
-
2005
- 2005-01-20 FR FR0500591A patent/FR2888930B1/fr active Active
- 2005-12-20 EP EP05823948A patent/EP1831663B1/de active Active
- 2005-12-20 DE DE602005009746T patent/DE602005009746D1/de active Active
- 2005-12-20 US US11/722,954 patent/US7798005B2/en active Active
- 2005-12-20 WO PCT/EP2005/056961 patent/WO2006069937A1/fr active IP Right Grant
-
2007
- 2007-07-27 NO NO20073953A patent/NO20073953L/no not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
WO2006069937A1 (fr) | 2006-07-06 |
NO20073953L (no) | 2007-07-27 |
US7798005B2 (en) | 2010-09-21 |
US20080184804A1 (en) | 2008-08-07 |
FR2888930A1 (fr) | 2007-01-26 |
FR2888930B1 (fr) | 2007-08-31 |
EP1831663A1 (de) | 2007-09-12 |
EP1831663B1 (de) | 2008-09-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |