DE602004024224D1 - Dünnfilm-körper-oberflächenwellenfilter des leitertyps - Google Patents
Dünnfilm-körper-oberflächenwellenfilter des leitertypsInfo
- Publication number
- DE602004024224D1 DE602004024224D1 DE602004024224T DE602004024224T DE602004024224D1 DE 602004024224 D1 DE602004024224 D1 DE 602004024224D1 DE 602004024224 T DE602004024224 T DE 602004024224T DE 602004024224 T DE602004024224 T DE 602004024224T DE 602004024224 D1 DE602004024224 D1 DE 602004024224D1
- Authority
- DE
- Germany
- Prior art keywords
- resonators
- series
- thin film
- body surface
- wave filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000010409 thin film Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/56—Monolithic crystal filters
- H03H9/564—Monolithic crystal filters implemented with thin-film techniques
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/56—Monolithic crystal filters
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/56—Monolithic crystal filters
- H03H9/566—Electric coupling means therefor
- H03H9/568—Electric coupling means therefor consisting of a ladder configuration
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP03103695 | 2003-10-06 | ||
PCT/IB2004/051851 WO2005034349A1 (en) | 2003-10-06 | 2004-09-24 | Ladder-type thin-film bulk acoustic wave filter |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602004024224D1 true DE602004024224D1 (de) | 2009-12-31 |
Family
ID=34400560
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602004024224T Active DE602004024224D1 (de) | 2003-10-06 | 2004-09-24 | Dünnfilm-körper-oberflächenwellenfilter des leitertyps |
Country Status (8)
Country | Link |
---|---|
US (1) | US7474174B2 (de) |
EP (1) | EP1673860B1 (de) |
JP (1) | JP4719683B2 (de) |
KR (1) | KR101323447B1 (de) |
CN (1) | CN100492902C (de) |
AT (1) | ATE449457T1 (de) |
DE (1) | DE602004024224D1 (de) |
WO (1) | WO2005034349A1 (de) |
Families Citing this family (68)
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---|---|---|---|---|
US7466213B2 (en) * | 2003-10-06 | 2008-12-16 | Nxp B.V. | Resonator structure and method of producing it |
JP4877966B2 (ja) * | 2006-03-08 | 2012-02-15 | 日本碍子株式会社 | 圧電薄膜デバイス |
US7639103B2 (en) * | 2006-06-26 | 2009-12-29 | Panasonic Corporation | Piezoelectric filter, antenna duplexer, and communications apparatus employing piezoelectric resonator |
DE112007002969B4 (de) * | 2007-01-24 | 2017-12-21 | Murata Mfg. Co., Ltd. | Piezoelektrischer Resonator und piezoelektrisches Filter |
US7786826B2 (en) * | 2007-10-12 | 2010-08-31 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Apparatus with acoustically coupled BAW resonators and a method for matching impedances |
WO2009066380A1 (ja) * | 2007-11-21 | 2009-05-28 | Fujitsu Limited | フィルタ、それを用いたデュプレクサおよびそのデュプレクサを用いた通信機 |
FI20106063A (fi) | 2010-10-14 | 2012-06-08 | Valtion Teknillinen | Akustisesti kytketty laajakaistainen ohutkalvo-BAW-suodatin |
CN102055431A (zh) * | 2010-11-16 | 2011-05-11 | 深圳市晶峰晶体科技有限公司 | 一种甚低频小体积特种石英晶体滤波器及其实现方法 |
US9473106B2 (en) * | 2011-06-21 | 2016-10-18 | Georgia Tech Research Corporation | Thin-film bulk acoustic wave delay line |
FI124732B (en) * | 2011-11-11 | 2014-12-31 | Teknologian Tutkimuskeskus Vtt | Laterally connected bulk wave filter with improved passband characteristics |
US8954008B2 (en) | 2013-01-29 | 2015-02-10 | Medtronic, Inc. | Medical device communication system and method |
CN110912529B (zh) * | 2014-06-06 | 2023-07-18 | 阿库斯蒂斯有限公司 | 单片滤波器梯形网络及其制造方法 |
US9537465B1 (en) | 2014-06-06 | 2017-01-03 | Akoustis, Inc. | Acoustic resonator device with single crystal piezo material and capacitor on a bulk substrate |
US9571061B2 (en) | 2014-06-06 | 2017-02-14 | Akoustis, Inc. | Integrated circuit configured with two or more single crystal acoustic resonator devices |
JP2016195305A (ja) * | 2015-03-31 | 2016-11-17 | 太陽誘電株式会社 | 弾性波フィルタ、分波器、およびモジュール |
CN105427570A (zh) * | 2015-12-29 | 2016-03-23 | 中电科技德清华莹电子有限公司 | 一种通用电抗型传感元件用无源无线遥测接口芯片 |
US11394451B2 (en) | 2016-03-11 | 2022-07-19 | Akoustis, Inc. | Front end module for 6.1 GHz Wi-Fi acoustic wave resonator RF filter circuit |
US20210257993A1 (en) | 2016-03-11 | 2021-08-19 | Akoustis, Inc. | Acoustic wave resonator rf filter circuit device |
US11581866B2 (en) | 2016-03-11 | 2023-02-14 | Akoustis, Inc. | RF acoustic wave resonators integrated with high electron mobility transistors including a shared piezoelectric/buffer layer and methods of forming the same |
US11736177B2 (en) | 2016-03-11 | 2023-08-22 | Akoustis Inc. | Front end modules for 5.6 GHz and 6.6 GHz Wi-Fi acoustic wave resonator RF filter circuits |
US10979024B2 (en) | 2016-03-11 | 2021-04-13 | Akoustis, Inc. | 5.2 GHz Wi-Fi coexistence acoustic wave resonator RF filter circuit |
US10615773B2 (en) | 2017-09-11 | 2020-04-07 | Akoustis, Inc. | Wireless communication infrastructure system configured with a single crystal piezo resonator and filter structure |
US11558023B2 (en) | 2016-03-11 | 2023-01-17 | Akoustis, Inc. | Method for fabricating an acoustic resonator device |
US10979023B2 (en) | 2016-03-11 | 2021-04-13 | Akoustis, Inc. | 5.9 GHz c-V2X and DSRC acoustic wave resonator RF filter circuit |
US10979022B2 (en) | 2016-03-11 | 2021-04-13 | Akoustis, Inc. | 5.2 GHz Wi-Fi acoustic wave resonator RF filter circuit |
US10985732B2 (en) | 2016-03-11 | 2021-04-20 | Akoustis, Inc. | 5.6 GHz Wi-Fi acoustic wave resonator RF filter circuit |
US11424728B2 (en) | 2016-03-11 | 2022-08-23 | Akoustis, Inc. | Piezoelectric acoustic resonator manufactured with piezoelectric thin film transfer process |
US10979025B2 (en) | 2016-03-11 | 2021-04-13 | Akoustis, Inc. | 5G band n79 acoustic wave resonator RF filter circuit |
US11411168B2 (en) | 2017-10-16 | 2022-08-09 | Akoustis, Inc. | Methods of forming group III piezoelectric thin films via sputtering |
US10110190B2 (en) | 2016-11-02 | 2018-10-23 | Akoustis, Inc. | Structure and method of manufacture for acoustic resonator or filter devices using improved fabrication conditions and perimeter structure modifications |
US10581398B2 (en) | 2016-03-11 | 2020-03-03 | Akoustis, Inc. | Method of manufacture for single crystal acoustic resonator devices using micro-vias |
US11476825B2 (en) | 2016-03-11 | 2022-10-18 | Akoustis, Inc. | 5.5 GHz Wi-Fi coexistence acoustic wave resonator RF filter circuit |
US11451213B2 (en) | 2016-03-11 | 2022-09-20 | Akoustis, Inc. | 5G n79 Wi-Fi acoustic triplexer circuit |
US11184079B2 (en) | 2016-03-11 | 2021-11-23 | Akoustis, Inc. | Front end module for 5.5 GHz Wi-Fi acoustic wave resonator RF filter circuit |
US11832521B2 (en) | 2017-10-16 | 2023-11-28 | Akoustis, Inc. | Methods of forming group III-nitride single crystal piezoelectric thin films using ordered deposition and stress neutral template layers |
US11411169B2 (en) | 2017-10-16 | 2022-08-09 | Akoustis, Inc. | Methods of forming group III piezoelectric thin films via removal of portions of first sputtered material |
US11356071B2 (en) | 2016-03-11 | 2022-06-07 | Akoustis, Inc. | Piezoelectric acoustic resonator with improved TCF manufactured with piezoelectric thin film transfer process |
US10673513B2 (en) | 2016-03-11 | 2020-06-02 | Akoustis, Inc. | Front end module for 5.2 GHz Wi-Fi acoustic wave resonator RF filter circuit |
US11677372B2 (en) | 2016-03-11 | 2023-06-13 | Akoustis, Inc. | Piezoelectric acoustic resonator with dielectric protective layer manufactured with piezoelectric thin film transfer process |
US10217930B1 (en) | 2016-03-11 | 2019-02-26 | Akoustis, Inc. | Method of manufacture for single crystal acoustic resonator devices using micro-vias |
US11316496B2 (en) | 2016-03-11 | 2022-04-26 | Akoustis, Inc. | Method and structure for high performance resonance circuit with single crystal piezoelectric capacitor dielectric material |
US11689186B2 (en) | 2016-03-11 | 2023-06-27 | Akoustis, Inc. | 5.5 GHz Wi-Fi 5G coexistence acoustic wave resonator RF filter circuit |
US11063576B2 (en) | 2016-03-11 | 2021-07-13 | Akoustis, Inc. | Front end module for 5.6 GHz Wi-Fi acoustic wave resonator RF filter circuit |
US10355659B2 (en) | 2016-03-11 | 2019-07-16 | Akoustis, Inc. | Piezoelectric acoustic resonator manufactured with piezoelectric thin film transfer process |
US11070184B2 (en) | 2016-03-11 | 2021-07-20 | Akoustis, Inc. | Piezoelectric acoustic resonator manufactured with piezoelectric thin film transfer process |
US11418169B2 (en) | 2016-03-11 | 2022-08-16 | Akoustis, Inc. | 5G n41 2.6 GHz band acoustic wave resonator RF filter circuit |
US11177868B2 (en) | 2016-03-11 | 2021-11-16 | Akoustis, Inc. | Front end module for 6.5 GHz Wi-Fi acoustic wave resonator RF filter circuit |
US10523180B2 (en) | 2016-03-11 | 2019-12-31 | Akoustis, Inc. | Method and structure for single crystal acoustic resonator devices using thermal recrystallization |
US11683021B2 (en) | 2016-03-11 | 2023-06-20 | Akoustis, Inc. | 4.5G 3.55-3.7 GHz band bulk acoustic wave resonator RF filter circuit |
US10979026B2 (en) | 2016-03-11 | 2021-04-13 | Akoustis, Inc. | 5.5 GHz Wi-fi 5G coexistence acoustic wave resonator RF filter circuit |
US11895920B2 (en) | 2016-08-15 | 2024-02-06 | Akoustis, Inc. | Methods of forming group III piezoelectric thin films via removal of portions of first sputtered material |
JP6508430B2 (ja) * | 2016-09-28 | 2019-05-08 | 株式会社村田製作所 | ラダー型フィルタ |
US10431580B1 (en) | 2017-01-12 | 2019-10-01 | Akoustis, Inc. | Monolithic single chip integrated radio frequency front end module configured with single crystal acoustic filter devices |
US11856858B2 (en) | 2017-10-16 | 2023-12-26 | Akoustis, Inc. | Methods of forming doped crystalline piezoelectric thin films via MOCVD and related doped crystalline piezoelectric thin films |
CN111226393B (zh) * | 2017-10-24 | 2023-10-24 | Rf360新加坡私人有限公司 | Rf滤波器和设计rf滤波器的方法 |
JP7205497B2 (ja) * | 2018-02-02 | 2023-01-17 | 株式会社大真空 | 圧電フィルタ |
US11557716B2 (en) | 2018-02-20 | 2023-01-17 | Akoustis, Inc. | Method and structure of single crystal electronic devices with enhanced strain interface regions by impurity introduction |
WO2020046995A1 (en) | 2018-08-27 | 2020-03-05 | Akoustis, Inc. | High power bulk acoustic wave resonator filter devices |
CN111342808B (zh) * | 2018-12-18 | 2023-08-15 | 天津大学 | 基于元素掺杂缩小有效面积的谐振器、滤波器和电子设备 |
US11618968B2 (en) | 2020-02-07 | 2023-04-04 | Akoustis, Inc. | Apparatus including horizontal flow reactor with a central injector column having separate conduits for low-vapor pressure metalorganic precursors and other precursors for formation of piezoelectric layers on wafers |
KR20210123566A (ko) | 2020-04-03 | 2021-10-14 | 삼성전기주식회사 | 체적 음향 공진기 및 탄성파 필터 장치 |
US11496108B2 (en) | 2020-08-17 | 2022-11-08 | Akoustis, Inc. | RF BAW resonator filter architecture for 6.5GHz Wi-Fi 6E coexistence and other ultra-wideband applications |
CN112187212B (zh) * | 2020-09-18 | 2021-12-07 | 杭州星阖科技有限公司 | 一种声学谐振器组件及滤波器 |
US11901880B2 (en) | 2021-01-18 | 2024-02-13 | Akoustis, Inc. | 5 and 6 GHz Wi-Fi coexistence acoustic wave resonator RF diplexer circuit |
CN112511131B (zh) * | 2021-02-05 | 2021-05-25 | 成都频岢微电子有限公司 | 一种具有高隔离度和高通频带低频侧高陡峭度的双工器 |
CN113612464B (zh) * | 2021-06-30 | 2023-06-09 | 中国电子科技集团公司第十三研究所 | 阶梯型结构压电滤波器 |
CN113644895B (zh) * | 2021-06-30 | 2024-02-23 | 中国电子科技集团公司第十三研究所 | 薄膜体声波谐振器滤波器及滤波器组件 |
KR20230049010A (ko) | 2021-10-05 | 2023-04-12 | 삼성전기주식회사 | 체적 음향 공진기 필터 및 체적 음향 공진기 패키지 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
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US5231327A (en) * | 1990-12-14 | 1993-07-27 | Tfr Technologies, Inc. | Optimized piezoelectric resonator-based networks |
US5260675A (en) * | 1991-04-12 | 1993-11-09 | Ngk Spark Plug Co., Ltd. | Ladder-type electric filter device |
US5942958A (en) * | 1998-07-27 | 1999-08-24 | Tfr Technologies, Inc. | Symmetrical piezoelectric resonator filter |
US6262637B1 (en) * | 1999-06-02 | 2001-07-17 | Agilent Technologies, Inc. | Duplexer incorporating thin-film bulk acoustic resonators (FBARs) |
US6323744B1 (en) * | 2000-02-04 | 2001-11-27 | Agere Systems Guardian Corp. | Grounding of TFR ladder filters |
KR20010000084A (ko) * | 2000-02-22 | 2001-01-05 | 안병엽 | 수평형 공진기 및 그 제조 방법 |
GB0014630D0 (en) * | 2000-06-16 | 2000-08-09 | Koninkl Philips Electronics Nv | Bulk accoustic wave filter |
GB0014963D0 (en) * | 2000-06-20 | 2000-08-09 | Koninkl Philips Electronics Nv | A bulk acoustic wave device |
DE10058339A1 (de) * | 2000-11-24 | 2002-06-06 | Infineon Technologies Ag | Bulk-Acoustic-Wave-Filter |
JP2003023337A (ja) * | 2001-07-06 | 2003-01-24 | Murata Mfg Co Ltd | 圧電共振子およびフィルタ |
JP3954395B2 (ja) * | 2001-10-26 | 2007-08-08 | 富士通株式会社 | 圧電薄膜共振子、フィルタ、および圧電薄膜共振子の製造方法 |
JP2003283292A (ja) * | 2002-01-15 | 2003-10-03 | Murata Mfg Co Ltd | 圧電共振子およびそれを用いたフィルタ・デュプレクサ・通信装置 |
-
2004
- 2004-09-24 KR KR1020067006587A patent/KR101323447B1/ko not_active IP Right Cessation
- 2004-09-24 DE DE602004024224T patent/DE602004024224D1/de active Active
- 2004-09-24 JP JP2006530915A patent/JP4719683B2/ja active Active
- 2004-09-24 CN CNB2004800291463A patent/CN100492902C/zh not_active Expired - Fee Related
- 2004-09-24 US US10/574,434 patent/US7474174B2/en active Active
- 2004-09-24 WO PCT/IB2004/051851 patent/WO2005034349A1/en active Application Filing
- 2004-09-24 EP EP04770075A patent/EP1673860B1/de not_active Not-in-force
- 2004-09-24 AT AT04770075T patent/ATE449457T1/de not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP1673860A1 (de) | 2006-06-28 |
US20070120624A1 (en) | 2007-05-31 |
US7474174B2 (en) | 2009-01-06 |
CN1864328A (zh) | 2006-11-15 |
CN100492902C (zh) | 2009-05-27 |
WO2005034349A1 (en) | 2005-04-14 |
JP4719683B2 (ja) | 2011-07-06 |
KR101323447B1 (ko) | 2013-10-29 |
JP2007507958A (ja) | 2007-03-29 |
EP1673860B1 (de) | 2009-11-18 |
ATE449457T1 (de) | 2009-12-15 |
KR20060120007A (ko) | 2006-11-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |