DE602004024224D1 - Dünnfilm-körper-oberflächenwellenfilter des leitertyps - Google Patents

Dünnfilm-körper-oberflächenwellenfilter des leitertyps

Info

Publication number
DE602004024224D1
DE602004024224D1 DE602004024224T DE602004024224T DE602004024224D1 DE 602004024224 D1 DE602004024224 D1 DE 602004024224D1 DE 602004024224 T DE602004024224 T DE 602004024224T DE 602004024224 T DE602004024224 T DE 602004024224T DE 602004024224 D1 DE602004024224 D1 DE 602004024224D1
Authority
DE
Germany
Prior art keywords
resonators
series
thin film
body surface
wave filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602004024224T
Other languages
English (en)
Inventor
Robert F Milsom
Hans Peter Loebl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NXP BV
Original Assignee
NXP BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NXP BV filed Critical NXP BV
Publication of DE602004024224D1 publication Critical patent/DE602004024224D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/564—Monolithic crystal filters implemented with thin-film techniques
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/566—Electric coupling means therefor
    • H03H9/568—Electric coupling means therefor consisting of a ladder configuration

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
DE602004024224T 2003-10-06 2004-09-24 Dünnfilm-körper-oberflächenwellenfilter des leitertyps Active DE602004024224D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP03103695 2003-10-06
PCT/IB2004/051851 WO2005034349A1 (en) 2003-10-06 2004-09-24 Ladder-type thin-film bulk acoustic wave filter

Publications (1)

Publication Number Publication Date
DE602004024224D1 true DE602004024224D1 (de) 2009-12-31

Family

ID=34400560

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004024224T Active DE602004024224D1 (de) 2003-10-06 2004-09-24 Dünnfilm-körper-oberflächenwellenfilter des leitertyps

Country Status (8)

Country Link
US (1) US7474174B2 (de)
EP (1) EP1673860B1 (de)
JP (1) JP4719683B2 (de)
KR (1) KR101323447B1 (de)
CN (1) CN100492902C (de)
AT (1) ATE449457T1 (de)
DE (1) DE602004024224D1 (de)
WO (1) WO2005034349A1 (de)

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US10979024B2 (en) 2016-03-11 2021-04-13 Akoustis, Inc. 5.2 GHz Wi-Fi coexistence acoustic wave resonator RF filter circuit
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US10979025B2 (en) 2016-03-11 2021-04-13 Akoustis, Inc. 5G band n79 acoustic wave resonator RF filter circuit
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US11184079B2 (en) 2016-03-11 2021-11-23 Akoustis, Inc. Front end module for 5.5 GHz Wi-Fi acoustic wave resonator RF filter circuit
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US11411169B2 (en) 2017-10-16 2022-08-09 Akoustis, Inc. Methods of forming group III piezoelectric thin films via removal of portions of first sputtered material
US11356071B2 (en) 2016-03-11 2022-06-07 Akoustis, Inc. Piezoelectric acoustic resonator with improved TCF manufactured with piezoelectric thin film transfer process
US10673513B2 (en) 2016-03-11 2020-06-02 Akoustis, Inc. Front end module for 5.2 GHz Wi-Fi acoustic wave resonator RF filter circuit
US11677372B2 (en) 2016-03-11 2023-06-13 Akoustis, Inc. Piezoelectric acoustic resonator with dielectric protective layer manufactured with piezoelectric thin film transfer process
US10217930B1 (en) 2016-03-11 2019-02-26 Akoustis, Inc. Method of manufacture for single crystal acoustic resonator devices using micro-vias
US11316496B2 (en) 2016-03-11 2022-04-26 Akoustis, Inc. Method and structure for high performance resonance circuit with single crystal piezoelectric capacitor dielectric material
US11689186B2 (en) 2016-03-11 2023-06-27 Akoustis, Inc. 5.5 GHz Wi-Fi 5G coexistence acoustic wave resonator RF filter circuit
US11063576B2 (en) 2016-03-11 2021-07-13 Akoustis, Inc. Front end module for 5.6 GHz Wi-Fi acoustic wave resonator RF filter circuit
US10355659B2 (en) 2016-03-11 2019-07-16 Akoustis, Inc. Piezoelectric acoustic resonator manufactured with piezoelectric thin film transfer process
US11070184B2 (en) 2016-03-11 2021-07-20 Akoustis, Inc. Piezoelectric acoustic resonator manufactured with piezoelectric thin film transfer process
US11418169B2 (en) 2016-03-11 2022-08-16 Akoustis, Inc. 5G n41 2.6 GHz band acoustic wave resonator RF filter circuit
US11177868B2 (en) 2016-03-11 2021-11-16 Akoustis, Inc. Front end module for 6.5 GHz Wi-Fi acoustic wave resonator RF filter circuit
US10523180B2 (en) 2016-03-11 2019-12-31 Akoustis, Inc. Method and structure for single crystal acoustic resonator devices using thermal recrystallization
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US10979026B2 (en) 2016-03-11 2021-04-13 Akoustis, Inc. 5.5 GHz Wi-fi 5G coexistence acoustic wave resonator RF filter circuit
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Also Published As

Publication number Publication date
EP1673860A1 (de) 2006-06-28
US20070120624A1 (en) 2007-05-31
US7474174B2 (en) 2009-01-06
CN1864328A (zh) 2006-11-15
CN100492902C (zh) 2009-05-27
WO2005034349A1 (en) 2005-04-14
JP4719683B2 (ja) 2011-07-06
KR101323447B1 (ko) 2013-10-29
JP2007507958A (ja) 2007-03-29
EP1673860B1 (de) 2009-11-18
ATE449457T1 (de) 2009-12-15
KR20060120007A (ko) 2006-11-24

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