DE602004015107D1 - Drucksensorvorrichtung und verfahren - Google Patents

Drucksensorvorrichtung und verfahren

Info

Publication number
DE602004015107D1
DE602004015107D1 DE602004015107T DE602004015107T DE602004015107D1 DE 602004015107 D1 DE602004015107 D1 DE 602004015107D1 DE 602004015107 T DE602004015107 T DE 602004015107T DE 602004015107 T DE602004015107 T DE 602004015107T DE 602004015107 D1 DE602004015107 D1 DE 602004015107D1
Authority
DE
Germany
Prior art keywords
pressure sensor
sensor device
pressure
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602004015107T
Other languages
English (en)
Inventor
James D Cook
Brian J Marsh
Kundan L Malik
Kenneth E Gail
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell International Inc
Original Assignee
Honeywell International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell International Inc filed Critical Honeywell International Inc
Publication of DE602004015107D1 publication Critical patent/DE602004015107D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
    • G01L9/0025—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element with acoustic surface waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Acoustics & Sound (AREA)
  • Measuring Fluid Pressure (AREA)
DE602004015107T 2003-06-18 2004-06-17 Drucksensorvorrichtung und verfahren Expired - Lifetime DE602004015107D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/465,202 US7082835B2 (en) 2003-06-18 2003-06-18 Pressure sensor apparatus and method
PCT/US2004/019384 WO2004113859A1 (en) 2003-06-18 2004-06-17 Pressure sensor apparatus and method

Publications (1)

Publication Number Publication Date
DE602004015107D1 true DE602004015107D1 (de) 2008-08-28

Family

ID=33517467

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004015107T Expired - Lifetime DE602004015107D1 (de) 2003-06-18 2004-06-17 Drucksensorvorrichtung und verfahren

Country Status (5)

Country Link
US (1) US7082835B2 (de)
EP (1) EP1634047B1 (de)
CN (1) CN100449289C (de)
DE (1) DE602004015107D1 (de)
WO (1) WO2004113859A1 (de)

Families Citing this family (72)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0305461D0 (en) * 2003-03-10 2003-04-16 Transense Technologies Plc Improvements in the construction of saw devices
JP4033213B2 (ja) * 2003-07-03 2008-01-16 エプソントヨコム株式会社 タッチモード式の水晶式圧力センサ、及びその製造方法
US7165298B2 (en) 2004-09-14 2007-01-23 Honeywell International Inc. Method of making a surface acoustic wave device
US20060191351A1 (en) * 2005-02-25 2006-08-31 Meehan Peter G Sealed capacitive sensor
US7377177B1 (en) 2007-04-13 2008-05-27 Honeywell International Inc. Pressure sensor method and apparatus
GB2439344B (en) * 2006-06-23 2011-08-10 Transense Technologies Plc Post assembly automatic adjustment of tpms sensor preload
US20080222884A1 (en) * 2007-03-14 2008-09-18 Honeywell International Inc. Packaging for chip-on-board pressure sensor
US7576470B2 (en) * 2007-04-30 2009-08-18 Honeywell International Inc. Mechanical packaging of surface acoustic wave device for sensing applications
US20090151829A1 (en) * 2007-12-18 2009-06-18 Robert Edward Lionetti Tire with integral sensor mount
US7730772B2 (en) * 2007-12-28 2010-06-08 Honeywell International Inc. Surface acoustic wave sensor and package
US7726184B2 (en) * 2007-12-28 2010-06-01 Honeywell International Inc. Surface acoustic wave sensor and package
GB2462128B (en) * 2008-07-25 2012-05-02 Transense Technologies Plc SAW sensor with adjustable preload
US8384524B2 (en) * 2008-11-26 2013-02-26 Honeywell International Inc. Passive surface acoustic wave sensing system
US8317392B2 (en) * 2008-12-23 2012-11-27 Honeywell International Inc. Surface acoustic wave based micro-sensor apparatus and method for simultaneously monitoring multiple conditions
DE102009000692A1 (de) 2009-02-06 2010-08-12 Wika Alexander Wiegand Gmbh & Co. Kg Messgerät
WO2010138559A2 (en) * 2009-05-26 2010-12-02 Diba Industries, Inc. Pressure-sensor based liquid-level measuring device with reduced capillary effect
WO2011058462A2 (en) 2009-11-11 2011-05-19 Koninklijke Philips Electronics N.V. Wireless identification of a component of a pressure support system
CN101799344B (zh) 2010-04-21 2014-07-09 无锡莱顿电子有限公司 硅压力传感器的封装结构
US8479590B2 (en) 2010-11-18 2013-07-09 Honeywell International Inc. System for monitoring structural assets
US8534130B2 (en) 2011-08-01 2013-09-17 Honeywell International Inc. Joint between a pressure sensor and a pressure port of a sensor assembly
US8934263B2 (en) 2011-08-01 2015-01-13 Honeywell International Inc. Protective cover for pressure sensor assemblies
US8671753B2 (en) 2011-08-01 2014-03-18 Honeywell International Inc. Cable harness for a sensor
US8656786B2 (en) 2011-08-01 2014-02-25 Honeywell International Inc. Interchangeable pressure sensor assembly and methods of assembly
US8459125B2 (en) 2011-08-01 2013-06-11 Honeywell International Inc. Pressure sensor assembly
US8817483B2 (en) 2011-08-01 2014-08-26 Honeywell International Inc. Connector assembly for a sensor
US20130098160A1 (en) 2011-10-25 2013-04-25 Honeywell International Inc. Sensor with fail-safe media seal
CN102384808B (zh) * 2011-11-03 2015-10-07 浙江庆源车业部件有限公司 一种压力变送传感器
US8839815B2 (en) 2011-12-15 2014-09-23 Honeywell International Inc. Gas valve with electronic cycle counter
US9995486B2 (en) 2011-12-15 2018-06-12 Honeywell International Inc. Gas valve with high/low gas pressure detection
US8947242B2 (en) 2011-12-15 2015-02-03 Honeywell International Inc. Gas valve with valve leakage test
US9835265B2 (en) 2011-12-15 2017-12-05 Honeywell International Inc. Valve with actuator diagnostics
US9851103B2 (en) 2011-12-15 2017-12-26 Honeywell International Inc. Gas valve with overpressure diagnostics
US9074770B2 (en) 2011-12-15 2015-07-07 Honeywell International Inc. Gas valve with electronic valve proving system
US9846440B2 (en) 2011-12-15 2017-12-19 Honeywell International Inc. Valve controller configured to estimate fuel comsumption
US9557059B2 (en) 2011-12-15 2017-01-31 Honeywell International Inc Gas valve with communication link
US8899264B2 (en) 2011-12-15 2014-12-02 Honeywell International Inc. Gas valve with electronic proof of closure system
US8905063B2 (en) 2011-12-15 2014-12-09 Honeywell International Inc. Gas valve with fuel rate monitor
CN102589759B (zh) * 2012-02-20 2013-10-23 浙江大学 基于压阻式和电容式组合的仿生柔性触觉传感阵列
CN102680159B (zh) * 2012-05-24 2013-12-04 柯远珍 一种传感器
WO2013192539A1 (en) 2012-06-21 2013-12-27 Nextinput, Inc. Wafer level mems force dies
US9234661B2 (en) 2012-09-15 2016-01-12 Honeywell International Inc. Burner control system
US10422531B2 (en) 2012-09-15 2019-09-24 Honeywell International Inc. System and approach for controlling a combustion chamber
CN103939089B (zh) * 2013-01-17 2017-07-25 中国石油化工股份有限公司 示踪器、包括该示踪器的钻井设备及使用方法
US9076272B2 (en) * 2013-05-28 2015-07-07 Infineon Technologies Ag Wheel speed sensor and interface systems and methods
CN103499024B (zh) * 2013-10-22 2015-11-25 天津七一二通信广播有限公司 一种用于输油管道泄漏检测***的声表面波压力传感器
EP2868970B1 (de) 2013-10-29 2020-04-22 Honeywell Technologies Sarl Regelungsvorrichtung
US20160302729A1 (en) * 2013-12-11 2016-10-20 The Board Of Regents Of The University Of Texas System Devices and methods for parameter measurement
US10024439B2 (en) 2013-12-16 2018-07-17 Honeywell International Inc. Valve over-travel mechanism
WO2015106246A1 (en) * 2014-01-13 2015-07-16 Nextinput, Inc. Miniaturized and ruggedized wafer level mems force sensors
US9410861B2 (en) 2014-03-25 2016-08-09 Honeywell International Inc. Pressure sensor with overpressure protection
US9841122B2 (en) 2014-09-09 2017-12-12 Honeywell International Inc. Gas valve with electronic valve proving system
US9645584B2 (en) 2014-09-17 2017-05-09 Honeywell International Inc. Gas valve with electronic health monitoring
EP3307671B1 (de) 2015-06-10 2022-06-15 Nextinput, Inc. Widerstandsfähiger mems-kraftsensor auf waferebene mit einem toleranzgraben
US10215655B2 (en) 2015-12-31 2019-02-26 Honeywell International Inc. Pressure sensor assembly
US10503181B2 (en) 2016-01-13 2019-12-10 Honeywell International Inc. Pressure regulator
US9945747B1 (en) 2016-10-13 2018-04-17 Honeywell International Inc. Gel filled port pressure sensor for robust media sealing
US10564062B2 (en) 2016-10-19 2020-02-18 Honeywell International Inc. Human-machine interface for gas valve
WO2018148510A1 (en) 2017-02-09 2018-08-16 Nextinput, Inc. Integrated piezoresistive and piezoelectric fusion force sensor
CN110494724B (zh) 2017-02-09 2023-08-01 触控解决方案股份有限公司 集成数字力传感器和相关制造方法
US10481024B2 (en) 2017-04-20 2019-11-19 Honeywell International Inc. Pressure sensor assembly including a cured elastomeric force transmitting member
US10684184B2 (en) 2017-04-20 2020-06-16 Honeywell International Inc. Pressure sensor assembly having a cavity filled with gel or fluid
WO2019018641A1 (en) 2017-07-19 2019-01-24 Nextinput, Inc. STACK OF STRAIN TRANSFER IN A MEMS FORCE SENSOR
WO2019023309A1 (en) 2017-07-25 2019-01-31 Nextinput, Inc. FORCE SENSOR AND INTEGRATED FINGERPRINTS
WO2019023552A1 (en) 2017-07-27 2019-01-31 Nextinput, Inc. PIEZORESISTIVE AND PIEZOELECTRIC FORCE SENSOR ON WAFER AND METHODS OF MANUFACTURING THE SAME
WO2019079420A1 (en) 2017-10-17 2019-04-25 Nextinput, Inc. SHIFT TEMPERATURE COEFFICIENT COMPENSATION FOR FORCE SENSOR AND STRAIN GAUGE
US11385108B2 (en) 2017-11-02 2022-07-12 Nextinput, Inc. Sealed force sensor with etch stop layer
US11874185B2 (en) 2017-11-16 2024-01-16 Nextinput, Inc. Force attenuator for force sensor
US11073281B2 (en) 2017-12-29 2021-07-27 Honeywell International Inc. Closed-loop programming and control of a combustion appliance
US10697815B2 (en) 2018-06-09 2020-06-30 Honeywell International Inc. System and methods for mitigating condensation in a sensor module
DE202019105165U1 (de) * 2018-09-19 2020-01-10 Fluid Management Operations Llc Füllstandsmessung für Dispenser-Behälter
US10962427B2 (en) 2019-01-10 2021-03-30 Nextinput, Inc. Slotted MEMS force sensor
CN111504521B (zh) * 2020-05-07 2021-09-03 腾讯科技（深圳）有限公司 柔性电容阵列及其制备方法、和电容阵列检测***

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4058788A (en) * 1976-04-05 1977-11-15 Bourns, Inc. Differential pressure transducer
US4454440A (en) 1978-12-22 1984-06-12 United Technologies Corporation Surface acoustic wave (SAW) pressure sensor structure
US4586382A (en) * 1982-09-29 1986-05-06 Schlumberger Technology Corporation Surface acoustic wave sensors
EP0195232B1 (de) * 1985-03-20 1991-12-11 Hitachi, Ltd. Piezoresistiver Belastungsfühler
CN87209309U (zh) * 1987-06-20 1988-05-18 北京半导体器件十厂 硅压阻式气压传感器
US4771639A (en) * 1987-09-02 1988-09-20 Yokogawa Electric Corporation Semiconductor pressure sensor
CN1047420A (zh) * 1989-05-18 1990-11-28 清华大学 一种单晶硅压力传感器制造方法及其结构
JP2595829B2 (ja) * 1991-04-22 1997-04-02 株式会社日立製作所 差圧センサ、及び複合機能形差圧センサ
US5447071A (en) * 1992-12-16 1995-09-05 Hanson; Richard A. Direct coupled pressure sensing device
US5471723A (en) 1993-08-20 1995-12-05 Endress + Hauser Gmbh + Co. Methods of manufacturing thin-film absolute pressure sensors
JPH08178778A (ja) * 1994-12-27 1996-07-12 Mitsubishi Electric Corp 半導体圧力検出装置
US5853020A (en) * 1995-06-23 1998-12-29 Widner; Ronald D. Miniature combination valve and pressure transducer and system
EP0757237B1 (de) * 1995-08-01 2002-04-10 Endress + Hauser GmbH + Co. Druckaufnehmer
US5852230A (en) * 1997-04-09 1998-12-22 Savant, Inc. Device to test pumpability of oils at low temperature
JPH11201846A (ja) * 1998-01-12 1999-07-30 Mitsubishi Electric Corp 半導体圧力検出装置
US6229190B1 (en) * 1998-12-18 2001-05-08 Maxim Integrated Products, Inc. Compensated semiconductor pressure sensor
JP2001041838A (ja) 1999-08-03 2001-02-16 Yamatake Corp 圧力センサおよびその製造方法
US6550337B1 (en) 2000-01-19 2003-04-22 Measurement Specialties, Inc. Isolation technique for pressure sensing structure
AU779050B2 (en) 2000-02-02 2005-01-06 Rutgers, The State University Of New Jersey Programmable surface acoustic wave (SAW) filter
US6462698B2 (en) 2000-06-02 2002-10-08 Research In Motion Limited Wireless communication system using surface acoustic wave (SAW) single-phase unidirectional transducer (SPUDT) techniques
US6571638B2 (en) * 2000-06-30 2003-06-03 Sawtek, Inc. Surface-acoustic-wave pressure sensor and associated methods
GB0024813D0 (en) * 2000-10-10 2000-11-22 Transense Technologies Plc Pressure monitoring device incorporating saw device

Also Published As

Publication number Publication date
US7082835B2 (en) 2006-08-01
WO2004113859A1 (en) 2004-12-29
CN1839299A (zh) 2006-09-27
CN100449289C (zh) 2009-01-07
US20040255681A1 (en) 2004-12-23
EP1634047A1 (de) 2006-03-15
EP1634047B1 (de) 2008-07-16

Similar Documents

Publication Publication Date Title
DE602004015107D1 (de) Drucksensorvorrichtung und verfahren
DE602005000535D1 (de) Zylinder-Druckerfassungsvorrichtung und entsprechendes Verfahren
DE60312583D1 (de) Drucksensor und Verfahren zu seiner Herstellung
DE602005014898D1 (de) Flüssigkeitssensor und Verfahren
NO20040640L (no) Anordning og fremgangsmate
DE102004044954B8 (de) Reifenzustandsgrößenerfassungsvorrichtung und Verfahren
HK1088387A1 (en) Device and method enabling fluid characteristic measurement utilizing fluid acceleration
DE602004004911T8 (de) Objektdetektionssystem und objektdetektionsverfahren
DE60321401D1 (de) Demodulationseinrichtung und demodulationsverfahren
ATE546994T1 (de) Steuergerät und verfahren
DK1664746T3 (da) Antioxidantsensor og fremgangsmåde
DK1682351T3 (da) Fremgangsmåde og indretning til kombinationstryk
DE50309503D1 (de) Verfahren und einrichtung zur objektdetektierung
DE602004019244D1 (de) Rauchmeldeverfahren und -vorrichtung
DE60218292D1 (de) Tintendruckablagevorrichtung und verfahren
DE60331729D1 (de) Audiocodierungsverfahren und audiocodierungseinrichtung
DE602004001105D1 (de) Passiver Reifendrucksensor und Verfahren hierzu
DE60309411D1 (de) Pollensensor und Verfahren
EP1658809A4 (de) Messvorrichtung und messverfahren
DE502004011334D1 (de) Reifendrucküberwachungseinrichtung und verfahren zur reifendrucküberwachung
DE60309302D1 (de) Machienensteuerungsvorrichtung und Verfahren
DE602006014688D1 (de) Vorrichtung und verfahren
DE602004016683D1 (de) Einrichtungssteuereinrichtung und einrichtungssteuerverfahren
ATE470005T1 (de) Sensorvorrichtung und verfahren
DE602004017462D1 (de) Verdrängungsüberzugsauftragsvorrichtung und -verfahren

Legal Events

Date Code Title Description
8364 No opposition during term of opposition