DE602004010360D1 - Drahtsägevorrichtung - Google Patents

Drahtsägevorrichtung

Info

Publication number
DE602004010360D1
DE602004010360D1 DE200460010360 DE602004010360T DE602004010360D1 DE 602004010360 D1 DE602004010360 D1 DE 602004010360D1 DE 200460010360 DE200460010360 DE 200460010360 DE 602004010360 T DE602004010360 T DE 602004010360T DE 602004010360 D1 DE602004010360 D1 DE 602004010360D1
Authority
DE
Germany
Prior art keywords
wire sawing
sawing
wire
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE200460010360
Other languages
English (en)
Other versions
DE602004010360T2 (de
Inventor
Andreas Muller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Switzerland SARL
Original Assignee
HCT Shaping Systems SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HCT Shaping Systems SA filed Critical HCT Shaping Systems SA
Publication of DE602004010360D1 publication Critical patent/DE602004010360D1/de
Application granted granted Critical
Publication of DE602004010360T2 publication Critical patent/DE602004010360T2/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D57/00—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
    • B23D57/003—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts
    • B23D57/0046—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts of devices for feeding, conveying or clamping work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
DE200460010360 2003-12-17 2004-12-07 Drahtsägevorrichtung Active DE602004010360T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH21722003 2003-12-17
CH21722003A CH698391B1 (fr) 2003-12-17 2003-12-17 Dispositif de sciage par fil.

Publications (2)

Publication Number Publication Date
DE602004010360D1 true DE602004010360D1 (de) 2008-01-10
DE602004010360T2 DE602004010360T2 (de) 2008-10-16

Family

ID=34596924

Family Applications (1)

Application Number Title Priority Date Filing Date
DE200460010360 Active DE602004010360T2 (de) 2003-12-17 2004-12-07 Drahtsägevorrichtung

Country Status (4)

Country Link
EP (1) EP1555101B1 (de)
CH (1) CH698391B1 (de)
DE (1) DE602004010360T2 (de)
ES (1) ES2295762T3 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2308871B1 (es) * 2005-08-03 2009-10-26 Antonio Diaz Gonzalez Bastidor con separadores para soporte de conjuntos de laminas producidos en el corte de bloques.
DE602008005407D1 (de) * 2008-04-23 2011-04-21 Applied Materials Switzerland Sa Montierscheibe für eine Drahtsägevorrichtung, Drahtsägevorrichtung damit, und Drahtsägeverfahren, das mit der Vorrichtung durchgeführt wird
DE102009023119A1 (de) 2009-05-22 2010-11-25 Gebr. Schmid Gmbh & Co. Träger für Siliziumblock
EP2477777A1 (de) * 2009-09-18 2012-07-25 Applied Materials, Inc. Werkstückauflagevorrichtung für eine drahtsäge, distanzstück für die auflage und sägeverfahren damit
CN102363326A (zh) * 2011-06-27 2012-02-29 镇江市港南电子有限公司 一种硅片切割机
CN102328353A (zh) * 2011-08-12 2012-01-25 无锡尚品太阳能电力科技有限公司 单晶硅棒的切方工艺
CN104191533A (zh) * 2014-09-04 2014-12-10 无锡尚品太阳能电力科技有限公司 一种硅片往复切割工艺
CN106938503A (zh) * 2017-03-17 2017-07-11 浙江好亚能源股份有限公司 晶棒切片方法
FR3068276B1 (fr) * 2017-07-03 2019-08-30 Commissariat A L'energie Atomique Et Aux Energies Alternatives Support a la decoupe par fil a abrasifs lies comportant un assemblage de materiaux differents

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61125767A (ja) * 1984-11-20 1986-06-13 Sumitomo Metal Ind Ltd ワイヤソ−のウエハ取出方法
JPS61182761A (ja) * 1985-02-07 1986-08-15 Sumitomo Metal Ind Ltd ワイヤソーにおけるウェハ列の一括取出方法
EP0396711A1 (de) * 1988-11-03 1990-11-14 Trimex Silicon E.U.R.L. Abrasive spalteinheit
JP2757086B2 (ja) * 1992-02-13 1998-05-25 信越半導体株式会社 ウエーハ切り離し方法及びワイヤーソー装置
EP0716910B1 (de) * 1994-12-15 2002-03-27 Sharp Kabushiki Kaisha Drahtgittersäge und Sägeverfahren
JPH10328999A (ja) * 1997-05-26 1998-12-15 Tokyo Seimitsu Co Ltd スライスベース切断装置付きワイヤソー
WO2000037216A1 (fr) * 1998-12-18 2000-06-29 Tokyo Seimitsu Co., Ltd. Scie a fils metalliques pourvue d'un dispositif de coupe pour trancher les pastilles

Also Published As

Publication number Publication date
EP1555101B1 (de) 2007-11-28
CH698391B1 (fr) 2009-07-31
EP1555101A1 (de) 2005-07-20
DE602004010360T2 (de) 2008-10-16
ES2295762T3 (es) 2008-04-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: APPLIED MATERIALS SWITZERLAND SA, CHESEAUX-SUR, CH