DE60129055D1 - Lichtwellenleiter-Sonde und optisches Nahfeld-Rastermikroskop - Google Patents
Lichtwellenleiter-Sonde und optisches Nahfeld-RastermikroskopInfo
- Publication number
- DE60129055D1 DE60129055D1 DE60129055T DE60129055T DE60129055D1 DE 60129055 D1 DE60129055 D1 DE 60129055D1 DE 60129055 T DE60129055 T DE 60129055T DE 60129055 T DE60129055 T DE 60129055T DE 60129055 D1 DE60129055 D1 DE 60129055D1
- Authority
- DE
- Germany
- Prior art keywords
- fiber optic
- optical scanning
- scanning microscope
- optic probe
- nearfield optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000835 fiber Substances 0.000 title 1
- 230000003287 optical effect Effects 0.000 title 1
- 239000000523 sample Substances 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/02—Multiple-type SPM, i.e. involving more than one SPM techniques
- G01Q60/06—SNOM [Scanning Near-field Optical Microscopy] combined with AFM [Atomic Force Microscopy]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
- G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/241—Light guide terminations
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/862—Near-field probe
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Radiology & Medical Imaging (AREA)
- Nanotechnology (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Optics & Photonics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Biophysics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Optical Integrated Circuits (AREA)
- Micromachines (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Microscoopes, Condenser (AREA)
- Optical Head (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000117967 | 2000-04-19 | ||
JP2000117967 | 2000-04-19 | ||
JP2001078891 | 2001-03-19 | ||
JP2001078891A JP4717235B2 (ja) | 2000-04-19 | 2001-03-19 | 光導波路プローブおよびその製造方法、ならびに走査型近視野顕微鏡 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60129055D1 true DE60129055D1 (de) | 2007-08-02 |
DE60129055T2 DE60129055T2 (de) | 2007-09-27 |
Family
ID=26590389
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60127598T Expired - Fee Related DE60127598T2 (de) | 2000-04-19 | 2001-04-17 | Lichtwellenleiter-Sonde sowie optisches Nahfeld-Rastermikroskop |
DE60113910T Expired - Fee Related DE60113910T2 (de) | 2000-04-19 | 2001-04-17 | Herstellungsverfahren für eine Lichtwellenleiter-Sonde in einem optischen Nahfeld-Rastermikroskop |
DE60129055T Expired - Lifetime DE60129055T2 (de) | 2000-04-19 | 2001-04-17 | Lichtwellenleiter-Sonde und optisches Nahfeld-Rastermikroskop |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60127598T Expired - Fee Related DE60127598T2 (de) | 2000-04-19 | 2001-04-17 | Lichtwellenleiter-Sonde sowie optisches Nahfeld-Rastermikroskop |
DE60113910T Expired - Fee Related DE60113910T2 (de) | 2000-04-19 | 2001-04-17 | Herstellungsverfahren für eine Lichtwellenleiter-Sonde in einem optischen Nahfeld-Rastermikroskop |
Country Status (4)
Country | Link |
---|---|
US (1) | US6744030B2 (de) |
EP (3) | EP1619531B1 (de) |
JP (1) | JP4717235B2 (de) |
DE (3) | DE60127598T2 (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69940577D1 (de) * | 1998-11-09 | 2009-04-23 | Seiko Instr Inc | Nahfeld Abtastkopf und Herstellungsverfahren dafür |
US7218803B1 (en) | 2006-03-24 | 2007-05-15 | Fitel Usa Corp. | Microsphere probe for optical surface microscopy and method of using the same |
US8353061B2 (en) * | 2008-05-02 | 2013-01-08 | Ofs Fitel, Llc | Near-field scanning optical microscopy with nanoscale resolution from microscale probes |
CH704900A1 (de) * | 2011-05-05 | 2012-11-15 | Nemo Devices Ag | Messvorrichtung zur Messung zerebraler Parameter. |
WO2012155919A1 (en) * | 2011-05-16 | 2012-11-22 | Danmarks Tekniske Universitet | A microdevice for emitting electromagnetic radiation |
CH707194A1 (de) | 2012-11-06 | 2014-05-15 | Nemodevices Ag | Messvorrichtung zur Bestimmung zerebraler Parameter. |
JP2016522040A (ja) | 2013-05-22 | 2016-07-28 | ネモデバイシズ アクチェンゲゼルシャフトNemodevices Ag | 人体組織内のパラメータを測定するための測定システムおよび方法 |
US11906946B2 (en) * | 2020-10-08 | 2024-02-20 | National University Of Singapore | System and method for controlling directionality of fast-wet etching of crystalline silicon, c-Si |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2704601B2 (ja) * | 1993-04-12 | 1998-01-26 | セイコーインスツルメンツ株式会社 | 走査型近視野原子間力顕微鏡、及びその顕微鏡に使用されるプローブ、及びそのプローブの製造方法 |
IL106613A0 (en) * | 1993-08-08 | 1993-12-08 | Klony S Lieberman | Device and method for probe microscopy |
JPH07120638A (ja) * | 1993-10-22 | 1995-05-12 | Matsushita Electric Ind Co Ltd | 光接続素子およびその製造方法 |
JP2903211B2 (ja) * | 1996-04-09 | 1999-06-07 | セイコーインスツルメンツ株式会社 | プローブとプローブ製造方法及び走査型プローブ顕微鏡 |
JP3006832B2 (ja) * | 1996-05-14 | 2000-02-07 | 日本電気株式会社 | 発光素子と光導波路の光結合構造 |
US6370306B1 (en) * | 1997-12-15 | 2002-04-09 | Seiko Instruments Inc. | Optical waveguide probe and its manufacturing method |
-
2001
- 2001-03-19 JP JP2001078891A patent/JP4717235B2/ja not_active Expired - Fee Related
- 2001-04-17 DE DE60127598T patent/DE60127598T2/de not_active Expired - Fee Related
- 2001-04-17 DE DE60113910T patent/DE60113910T2/de not_active Expired - Fee Related
- 2001-04-17 EP EP05077281A patent/EP1619531B1/de not_active Expired - Lifetime
- 2001-04-17 DE DE60129055T patent/DE60129055T2/de not_active Expired - Lifetime
- 2001-04-17 EP EP04076243A patent/EP1455213B1/de not_active Expired - Lifetime
- 2001-04-17 EP EP01303515A patent/EP1148371B1/de not_active Expired - Lifetime
- 2001-04-18 US US09/837,836 patent/US6744030B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20010038063A1 (en) | 2001-11-08 |
EP1148371A3 (de) | 2003-05-02 |
EP1455213A1 (de) | 2004-09-08 |
DE60113910T2 (de) | 2006-05-11 |
DE60113910D1 (de) | 2006-02-23 |
EP1148371A2 (de) | 2001-10-24 |
US6744030B2 (en) | 2004-06-01 |
EP1619531A3 (de) | 2006-02-22 |
EP1148371B1 (de) | 2005-10-12 |
EP1619531A2 (de) | 2006-01-25 |
JP2002006159A (ja) | 2002-01-09 |
DE60129055T2 (de) | 2007-09-27 |
DE60127598T2 (de) | 2007-12-20 |
DE60127598D1 (de) | 2007-05-10 |
EP1619531B1 (de) | 2007-03-28 |
JP4717235B2 (ja) | 2011-07-06 |
EP1455213B1 (de) | 2007-06-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |