DE60035341D1 - Polierkörper, poliermaschine, poliermaschinenjustierverfahren, dicken- oder endpunkt-messverfahren für die polierte schicht, herstellungsverfahren eines halbleiterbauelementes - Google Patents
Polierkörper, poliermaschine, poliermaschinenjustierverfahren, dicken- oder endpunkt-messverfahren für die polierte schicht, herstellungsverfahren eines halbleiterbauelementesInfo
- Publication number
- DE60035341D1 DE60035341D1 DE60035341T DE60035341T DE60035341D1 DE 60035341 D1 DE60035341 D1 DE 60035341D1 DE 60035341 T DE60035341 T DE 60035341T DE 60035341 T DE60035341 T DE 60035341T DE 60035341 D1 DE60035341 D1 DE 60035341D1
- Authority
- DE
- Germany
- Prior art keywords
- polishing machine
- polishing
- thickness
- semiconductor component
- final point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005498 polishing Methods 0.000 title 3
- 238000000034 method Methods 0.000 title 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/205—Lapping pads for working plane surfaces provided with a window for inspecting the surface of the work being lapped
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/005—Control means for lapping machines or devices
- B24B37/013—Devices or means for detecting lapping completion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
- B24B49/04—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent involving measurement of the workpiece at the place of grinding during grinding operation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9107799 | 1999-03-31 | ||
JP34505899A JP3374814B2 (ja) | 1999-12-03 | 1999-12-03 | 研磨体、平坦化装置、半導体デバイス製造方法、および半導体デバイス |
JP2000011126A JP3367496B2 (ja) | 2000-01-20 | 2000-01-20 | 研磨体、平坦化装置、半導体デバイス製造方法、および半導体デバイス |
JP2000025323 | 2000-02-02 | ||
PCT/JP2000/001545 WO2000060650A1 (fr) | 1999-03-31 | 2000-03-14 | Corps de polissage, dispositif de polissage, procede de reglage du dispositif de polissage, dispositif de mesure de l'epaisseur du film poli ou du point terminal de polissage, procede de fabrication d'un dispositif a semi-conducteur |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60035341D1 true DE60035341D1 (de) | 2007-08-09 |
Family
ID=27467869
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60035341T Expired - Lifetime DE60035341D1 (de) | 1999-03-31 | 2000-03-14 | Polierkörper, poliermaschine, poliermaschinenjustierverfahren, dicken- oder endpunkt-messverfahren für die polierte schicht, herstellungsverfahren eines halbleiterbauelementes |
Country Status (7)
Country | Link |
---|---|
US (1) | US6458014B1 (de) |
EP (1) | EP1176630B1 (de) |
KR (1) | KR100435246B1 (de) |
CN (1) | CN1150601C (de) |
DE (1) | DE60035341D1 (de) |
TW (1) | TW484181B (de) |
WO (1) | WO2000060650A1 (de) |
Families Citing this family (79)
Publication number | Priority date | Publication date | Assignee | Title |
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US6994607B2 (en) * | 2001-12-28 | 2006-02-07 | Applied Materials, Inc. | Polishing pad with window |
US6213845B1 (en) * | 1999-04-26 | 2001-04-10 | Micron Technology, Inc. | Apparatus for in-situ optical endpointing on web-format planarizing machines in mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies and methods for making and using same |
US6924641B1 (en) * | 2000-05-19 | 2005-08-02 | Applied Materials, Inc. | Method and apparatus for monitoring a metal layer during chemical mechanical polishing |
US7374477B2 (en) * | 2002-02-06 | 2008-05-20 | Applied Materials, Inc. | Polishing pads useful for endpoint detection in chemical mechanical polishing |
US8485862B2 (en) | 2000-05-19 | 2013-07-16 | Applied Materials, Inc. | Polishing pad for endpoint detection and related methods |
US6685537B1 (en) * | 2000-06-05 | 2004-02-03 | Speedfam-Ipec Corporation | Polishing pad window for a chemical mechanical polishing tool |
JP2002001647A (ja) * | 2000-06-19 | 2002-01-08 | Rodel Nitta Co | 研磨パッド |
JP3844973B2 (ja) * | 2001-03-16 | 2006-11-15 | 大日本スクリーン製造株式会社 | 基板の研磨終点検出 |
US6608495B2 (en) | 2001-03-19 | 2003-08-19 | Applied Materials, Inc. | Eddy-optic sensor for object inspection |
US6641470B1 (en) * | 2001-03-30 | 2003-11-04 | Lam Research Corporation | Apparatus for accurate endpoint detection in supported polishing pads |
US6966816B2 (en) * | 2001-05-02 | 2005-11-22 | Applied Materials, Inc. | Integrated endpoint detection system with optical and eddy current monitoring |
JP4131632B2 (ja) | 2001-06-15 | 2008-08-13 | 株式会社荏原製作所 | ポリッシング装置及び研磨パッド |
JP4570286B2 (ja) * | 2001-07-03 | 2010-10-27 | ニッタ・ハース株式会社 | 研磨パッド |
US6811466B1 (en) * | 2001-12-28 | 2004-11-02 | Applied Materials, Inc. | System and method for in-line metal profile measurement |
US6884146B2 (en) * | 2002-02-04 | 2005-04-26 | Kla-Tencor Technologies Corp. | Systems and methods for characterizing a polishing process |
EP1475827A4 (de) * | 2002-08-30 | 2006-05-24 | Toray Industries | Polierstück, polierplattenlochabdeckung, poliervorrichtung, polierverfahren und verfahren zur herstellung eines halbleiterbauelements |
US8845852B2 (en) | 2002-11-27 | 2014-09-30 | Toyo Tire & Rubber Co., Ltd. | Polishing pad and method of producing semiconductor device |
US6676483B1 (en) * | 2003-02-03 | 2004-01-13 | Rodel Holdings, Inc. | Anti-scattering layer for polishing pad windows |
US7704125B2 (en) | 2003-03-24 | 2010-04-27 | Nexplanar Corporation | Customized polishing pads for CMP and methods of fabrication and use thereof |
US8864859B2 (en) | 2003-03-25 | 2014-10-21 | Nexplanar Corporation | Customized polishing pads for CMP and methods of fabrication and use thereof |
US9278424B2 (en) | 2003-03-25 | 2016-03-08 | Nexplanar Corporation | Customized polishing pads for CMP and methods of fabrication and use thereof |
EP1466699A1 (de) * | 2003-04-09 | 2004-10-13 | JSR Corporation | Polierkissen, Verfahren und Metallgiessform zur Herstellung desselben und Halbleiterscheibepolierverfahren |
US20040209066A1 (en) * | 2003-04-17 | 2004-10-21 | Swisher Robert G. | Polishing pad with window for planarization |
KR100541545B1 (ko) | 2003-06-16 | 2006-01-11 | 삼성전자주식회사 | 화학기계적 연마 장비의 연마 테이블 |
US6884156B2 (en) * | 2003-06-17 | 2005-04-26 | Cabot Microelectronics Corporation | Multi-layer polishing pad material for CMP |
CN100352605C (zh) * | 2003-07-17 | 2007-12-05 | Jsr株式会社 | 化学机械抛光垫以及化学机械抛光方法 |
US7195539B2 (en) * | 2003-09-19 | 2007-03-27 | Cabot Microelectronics Coporation | Polishing pad with recessed window |
US7264536B2 (en) * | 2003-09-23 | 2007-09-04 | Applied Materials, Inc. | Polishing pad with window |
US8066552B2 (en) | 2003-10-03 | 2011-11-29 | Applied Materials, Inc. | Multi-layer polishing pad for low-pressure polishing |
US7258602B2 (en) * | 2003-10-22 | 2007-08-21 | Iv Technologies Co., Ltd. | Polishing pad having grooved window therein and method of forming the same |
US20090020433A1 (en) * | 2003-12-31 | 2009-01-22 | Microfabrica Inc. | Electrochemical Fabrication Methods for Producing Multilayer Structures Including the use of Diamond Machining in the Planarization of Deposits of Material |
WO2005065430A2 (en) * | 2003-12-31 | 2005-07-21 | Microfabrica Inc. | Electrochemical fabrication methods for producing multilayer structures including the use of diamond machining in the planarization of deposits of material |
US7204742B2 (en) | 2004-03-25 | 2007-04-17 | Cabot Microelectronics Corporation | Polishing pad comprising hydrophobic region and endpoint detection port |
US20060019417A1 (en) * | 2004-07-26 | 2006-01-26 | Atsushi Shigeta | Substrate processing method and substrate processing apparatus |
KR101172324B1 (ko) * | 2004-12-10 | 2012-08-14 | 도요 고무 고교 가부시키가이샤 | 연마 패드 및 연마 패드의 제조 방법 |
TWI385050B (zh) * | 2005-02-18 | 2013-02-11 | Nexplanar Corp | 用於cmp之特製拋光墊及其製造方法及其用途 |
US7226339B2 (en) * | 2005-08-22 | 2007-06-05 | Applied Materials, Inc. | Spectrum based endpointing for chemical mechanical polishing |
KR101423579B1 (ko) * | 2005-08-22 | 2014-07-25 | 어플라이드 머티어리얼스, 인코포레이티드 | 화학적 기계적 폴리싱의 스펙트럼 기반 모니터링을 위한 장치 및 방법 |
US20070212548A1 (en) * | 2006-03-10 | 2007-09-13 | Exatec Llc | Glazing system with high glass transition temperature decorative ink |
US7942724B2 (en) * | 2006-07-03 | 2011-05-17 | Applied Materials, Inc. | Polishing pad with window having multiple portions |
JP4931133B2 (ja) * | 2007-03-15 | 2012-05-16 | 東洋ゴム工業株式会社 | 研磨パッド |
WO2008154185A2 (en) * | 2007-06-08 | 2008-12-18 | Applied Materials, Inc. | Thin polishing pad with window and molding process |
US8337278B2 (en) | 2007-09-24 | 2012-12-25 | Applied Materials, Inc. | Wafer edge characterization by successive radius measurements |
TWI409868B (zh) * | 2008-01-30 | 2013-09-21 | Iv Technologies Co Ltd | 研磨方法、研磨墊及研磨系統 |
US20090305610A1 (en) * | 2008-06-06 | 2009-12-10 | Applied Materials, Inc. | Multiple window pad assembly |
CN102089121B (zh) * | 2008-07-31 | 2015-04-08 | 信越半导体股份有限公司 | 芯片的研磨方法及双面研磨装置 |
TWI381904B (zh) * | 2009-12-03 | 2013-01-11 | Nat Univ Chung Cheng | The method of detecting the grinding characteristics and service life of the polishing pad |
US9017140B2 (en) | 2010-01-13 | 2015-04-28 | Nexplanar Corporation | CMP pad with local area transparency |
US9156124B2 (en) | 2010-07-08 | 2015-10-13 | Nexplanar Corporation | Soft polishing pad for polishing a semiconductor substrate |
TW201223702A (en) * | 2010-08-06 | 2012-06-16 | Applied Materials Inc | Techniques for matching measured spectra to reference spectra for in-situ optical monitoring |
US8657653B2 (en) | 2010-09-30 | 2014-02-25 | Nexplanar Corporation | Homogeneous polishing pad for eddy current end-point detection |
US8628384B2 (en) * | 2010-09-30 | 2014-01-14 | Nexplanar Corporation | Polishing pad for eddy current end-point detection |
US20120100781A1 (en) * | 2010-10-20 | 2012-04-26 | Jimin Zhang | Multiple matching reference spectra for in-situ optical monitoring |
US8367429B2 (en) * | 2011-03-10 | 2013-02-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | Adaptive endpoint method for pad life effect on chemical mechanical polishing |
CN102922415B (zh) * | 2011-08-10 | 2015-05-13 | 无锡华润上华科技有限公司 | 延长研磨垫使用周期的化学机械研磨方法 |
US9393669B2 (en) * | 2011-10-21 | 2016-07-19 | Strasbaugh | Systems and methods of processing substrates |
JP5907081B2 (ja) * | 2012-02-02 | 2016-04-20 | 信越化学工業株式会社 | 合成石英ガラス基板の製造方法 |
US9168630B2 (en) * | 2012-04-23 | 2015-10-27 | Applied Materials, Inc. | User-input functions for data sequences in polishing endpoint detection |
US9597769B2 (en) * | 2012-06-04 | 2017-03-21 | Nexplanar Corporation | Polishing pad with polishing surface layer having an aperture or opening above a transparent foundation layer |
US9610669B2 (en) | 2012-10-01 | 2017-04-04 | Strasbaugh | Methods and systems for use in grind spindle alignment |
US9457446B2 (en) | 2012-10-01 | 2016-10-04 | Strasbaugh | Methods and systems for use in grind shape control adaptation |
JP2014113644A (ja) | 2012-12-06 | 2014-06-26 | Toyo Tire & Rubber Co Ltd | 研磨パッド |
US20140256231A1 (en) * | 2013-03-07 | 2014-09-11 | Dow Global Technologies Llc | Multilayer Chemical Mechanical Polishing Pad With Broad Spectrum, Endpoint Detection Window |
US9446497B2 (en) * | 2013-03-07 | 2016-09-20 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Broad spectrum, endpoint detection monophase olefin copolymer window with specific composition in multilayer chemical mechanical polishing pad |
US9108290B2 (en) * | 2013-03-07 | 2015-08-18 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Multilayer chemical mechanical polishing pad |
JP6170356B2 (ja) * | 2013-07-01 | 2017-07-26 | 株式会社荏原製作所 | 研磨装置、研磨パッドの配置方法、及び研磨パッド |
US9216489B2 (en) * | 2014-03-28 | 2015-12-22 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Chemical mechanical polishing pad with endpoint detection window |
EP2955478B1 (de) * | 2014-06-13 | 2019-08-21 | Mitutoyo Corporation | Berechnung der Höhenkarte eines Körpers aus durchsichtigem Material mit geneigter oder gekrümmter Oberfläche |
US9475168B2 (en) | 2015-03-26 | 2016-10-25 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Polishing pad window |
US10213894B2 (en) | 2016-02-26 | 2019-02-26 | Applied Materials, Inc. | Method of placing window in thin polishing pad |
JP6602725B2 (ja) * | 2016-05-24 | 2019-11-06 | スピードファム株式会社 | ワークの板厚計測用窓構造 |
TWI593511B (zh) * | 2016-06-08 | 2017-08-01 | 智勝科技股份有限公司 | 研磨墊及研磨方法 |
BR112020006842A2 (pt) | 2017-10-04 | 2020-10-06 | Saint-Gobain Abrasives, Inc. | artigo abrasivo e método para formação do mesmo |
KR102080840B1 (ko) * | 2018-03-29 | 2020-02-24 | 에스케이씨 주식회사 | 누수 방지된 연마패드 및 이의 제조방법 |
CN109202693B (zh) | 2017-10-16 | 2021-10-12 | Skc索密思株式会社 | 防泄漏抛光垫及其制造方法 |
JP7041638B2 (ja) * | 2019-01-10 | 2022-03-24 | 株式会社荏原製作所 | 研磨装置 |
US20200361052A1 (en) * | 2019-05-16 | 2020-11-19 | Micron Technology, Inc. | Planarization endpoint determination |
CN113319736B (zh) * | 2021-07-12 | 2022-06-07 | 北京烁科精微电子装备有限公司 | 研磨盘窗口盖、研磨盘及研磨机 |
CN116276619B (zh) * | 2023-04-17 | 2023-09-29 | 华海清科股份有限公司 | 一种数据补偿方法和化学机械抛光设备 |
Family Cites Families (18)
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JP3326443B2 (ja) * | 1993-08-10 | 2002-09-24 | 株式会社ニコン | ウエハ研磨方法及びその装置 |
US5433651A (en) * | 1993-12-22 | 1995-07-18 | International Business Machines Corporation | In-situ endpoint detection and process monitoring method and apparatus for chemical-mechanical polishing |
JP3313505B2 (ja) | 1994-04-14 | 2002-08-12 | 株式会社日立製作所 | 研磨加工法 |
US5893796A (en) * | 1995-03-28 | 1999-04-13 | Applied Materials, Inc. | Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus |
DE69632490T2 (de) * | 1995-03-28 | 2005-05-12 | Applied Materials, Inc., Santa Clara | Verfahren und Vorrichtung zur In-Situ-Kontrolle und Bestimmung des Endes von chemisch-mechanischen Planiervorgängen |
US5964643A (en) * | 1995-03-28 | 1999-10-12 | Applied Materials, Inc. | Apparatus and method for in-situ monitoring of chemical mechanical polishing operations |
US5605760A (en) * | 1995-08-21 | 1997-02-25 | Rodel, Inc. | Polishing pads |
JPH10125634A (ja) * | 1996-10-19 | 1998-05-15 | Nikon Corp | 研磨装置 |
US6074287A (en) * | 1996-04-12 | 2000-06-13 | Nikon Corporation | Semiconductor wafer polishing apparatus |
US6108091A (en) * | 1997-05-28 | 2000-08-22 | Lam Research Corporation | Method and apparatus for in-situ monitoring of thickness during chemical-mechanical polishing |
US6146248A (en) * | 1997-05-28 | 2000-11-14 | Lam Research Corporation | Method and apparatus for in-situ end-point detection and optimization of a chemical-mechanical polishing process using a linear polisher |
JPH1114305A (ja) * | 1997-06-26 | 1999-01-22 | Mitsutoyo Corp | 加工用のインプロセス光干渉式測定装置およびその測定装置を備えた加工装置、およびインプロセス光測定に適した加工工具 |
US6068539A (en) * | 1998-03-10 | 2000-05-30 | Lam Research Corporation | Wafer polishing device with movable window |
US6106662A (en) * | 1998-06-08 | 2000-08-22 | Speedfam-Ipec Corporation | Method and apparatus for endpoint detection for chemical mechanical polishing |
US6213845B1 (en) * | 1999-04-26 | 2001-04-10 | Micron Technology, Inc. | Apparatus for in-situ optical endpointing on web-format planarizing machines in mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies and methods for making and using same |
US6146242A (en) * | 1999-06-11 | 2000-11-14 | Strasbaugh, Inc. | Optical view port for chemical mechanical planarization endpoint detection |
US6273792B1 (en) * | 1999-08-11 | 2001-08-14 | Speedfam-Ipec Corporation | Method and apparatus for in-situ measurement of workpiece displacement during chemical mechanical polishing |
US6309276B1 (en) * | 2000-02-01 | 2001-10-30 | Applied Materials, Inc. | Endpoint monitoring with polishing rate change |
-
2000
- 2000-03-14 KR KR10-2001-7008191A patent/KR100435246B1/ko not_active IP Right Cessation
- 2000-03-14 EP EP00908067A patent/EP1176630B1/de not_active Expired - Lifetime
- 2000-03-14 CN CNB00802085XA patent/CN1150601C/zh not_active Expired - Fee Related
- 2000-03-14 WO PCT/JP2000/001545 patent/WO2000060650A1/ja active IP Right Grant
- 2000-03-14 DE DE60035341T patent/DE60035341D1/de not_active Expired - Lifetime
- 2000-03-23 TW TW089105309A patent/TW484181B/zh not_active IP Right Cessation
-
2001
- 2001-05-02 US US09/846,339 patent/US6458014B1/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20020042243A1 (en) | 2002-04-11 |
EP1176630B1 (de) | 2007-06-27 |
KR100435246B1 (ko) | 2004-06-11 |
EP1176630A1 (de) | 2002-01-30 |
TW484181B (en) | 2002-04-21 |
US6458014B1 (en) | 2002-10-01 |
CN1150601C (zh) | 2004-05-19 |
CN1322374A (zh) | 2001-11-14 |
EP1176630A4 (de) | 2005-11-30 |
KR20010089717A (ko) | 2001-10-08 |
WO2000060650A1 (fr) | 2000-10-12 |
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