DE60034523D1 - Piezoelectric / electrostrictive device - Google Patents
Piezoelectric / electrostrictive deviceInfo
- Publication number
- DE60034523D1 DE60034523D1 DE60034523T DE60034523T DE60034523D1 DE 60034523 D1 DE60034523 D1 DE 60034523D1 DE 60034523 T DE60034523 T DE 60034523T DE 60034523 T DE60034523 T DE 60034523T DE 60034523 D1 DE60034523 D1 DE 60034523D1
- Authority
- DE
- Germany
- Prior art keywords
- piezoelectric
- electrostrictive device
- electrostrictive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
- H10N30/2043—Cantilevers, i.e. having one fixed end connected at their free ends, e.g. parallelogram type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28152299 | 1999-10-01 | ||
JP30784499 | 1999-10-28 | ||
JP32619599 | 1999-11-16 | ||
JP37196799 | 1999-12-27 | ||
JP2000204758A JP3466550B2 (en) | 1999-10-01 | 2000-07-06 | Piezoelectric / electrostrictive device |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60034523D1 true DE60034523D1 (en) | 2007-06-06 |
Family
ID=27530690
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60034523T Expired - Lifetime DE60034523D1 (en) | 1999-10-01 | 2000-09-29 | Piezoelectric / electrostrictive device |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP1089351B1 (en) |
JP (1) | JP3466550B2 (en) |
DE (1) | DE60034523D1 (en) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3845543B2 (en) | 1999-10-01 | 2006-11-15 | 日本碍子株式会社 | Piezoelectric / electrostrictive device and manufacturing method thereof |
JP3845544B2 (en) | 1999-10-01 | 2006-11-15 | 日本碍子株式会社 | Piezoelectric / electrostrictive device and manufacturing method thereof |
JP4058223B2 (en) | 1999-10-01 | 2008-03-05 | 日本碍子株式会社 | Piezoelectric / electrostrictive device and manufacturing method thereof |
US7164221B1 (en) | 1999-10-01 | 2007-01-16 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device and method of manufacturing same |
US6657364B1 (en) | 1999-10-01 | 2003-12-02 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device |
EP1833102A3 (en) | 1999-10-01 | 2009-04-08 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device |
US6525448B1 (en) | 1999-10-01 | 2003-02-25 | Ngk Insulators Ltd | Piezoelectric/electrostrictive device |
JP3436735B2 (en) | 1999-10-01 | 2003-08-18 | 日本碍子株式会社 | Piezoelectric / electrostrictive device and manufacturing method thereof |
US6404109B1 (en) | 1999-10-01 | 2002-06-11 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device having increased strength |
US6915547B2 (en) | 1999-10-01 | 2005-07-12 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device and method of manufacturing same |
JP3436727B2 (en) * | 1999-10-01 | 2003-08-18 | 日本碍子株式会社 | Piezoelectric / electrostrictive device and manufacturing method thereof |
JP4015820B2 (en) | 2001-04-11 | 2007-11-28 | 日本碍子株式会社 | Wiring board and manufacturing method thereof |
DE10146704A1 (en) * | 2001-09-21 | 2003-04-10 | Elliptec Resonant Actuator Ag | Piezomotors with piezo elements, manufactured using the ceramic capacitor process |
WO2012128275A1 (en) * | 2011-03-23 | 2012-09-27 | 日本碍子株式会社 | Liquid transport actuator and method for manufacturing same |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1126834A (en) * | 1997-07-04 | 1999-01-29 | Toshio Fukuda | Pzt thin-film bimorph parallel plate structure and its manufacture |
-
2000
- 2000-07-06 JP JP2000204758A patent/JP3466550B2/en not_active Expired - Fee Related
- 2000-09-29 EP EP20000308606 patent/EP1089351B1/en not_active Expired - Lifetime
- 2000-09-29 DE DE60034523T patent/DE60034523D1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP1089351B1 (en) | 2007-04-25 |
JP2001250996A (en) | 2001-09-14 |
EP1089351A2 (en) | 2001-04-04 |
JP3466550B2 (en) | 2003-11-10 |
EP1089351A3 (en) | 2004-01-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8332 | No legal effect for de |