DE60030268D1 - accelerometer - Google Patents
accelerometerInfo
- Publication number
- DE60030268D1 DE60030268D1 DE60030268T DE60030268T DE60030268D1 DE 60030268 D1 DE60030268 D1 DE 60030268D1 DE 60030268 T DE60030268 T DE 60030268T DE 60030268 T DE60030268 T DE 60030268T DE 60030268 D1 DE60030268 D1 DE 60030268D1
- Authority
- DE
- Germany
- Prior art keywords
- accelerometer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
- G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/003—Details of instruments used for damping
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
- Geophysics And Detection Of Objects (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP00305807A EP1172657B1 (en) | 2000-07-10 | 2000-07-10 | Accelerometer |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60030268D1 true DE60030268D1 (en) | 2006-10-05 |
DE60030268T2 DE60030268T2 (en) | 2007-03-29 |
Family
ID=8173112
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60030268T Expired - Lifetime DE60030268T2 (en) | 2000-07-10 | 2000-07-10 | accelerometer |
Country Status (7)
Country | Link |
---|---|
US (1) | US6705167B2 (en) |
EP (1) | EP1172657B1 (en) |
JP (1) | JP2002107375A (en) |
KR (1) | KR20020005957A (en) |
CN (1) | CN1201151C (en) |
BR (1) | BR0102762A (en) |
DE (1) | DE60030268T2 (en) |
Families Citing this family (44)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10227662B4 (en) * | 2002-06-20 | 2006-09-21 | Eads Deutschland Gmbh | Micromechanical component for acceleration or yaw rate sensors and sensor |
US6845670B1 (en) * | 2003-07-08 | 2005-01-25 | Freescale Semiconductor, Inc. | Single proof mass, 3 axis MEMS transducer |
WO2005069016A1 (en) * | 2004-01-07 | 2005-07-28 | Northrop Grumman Corporation | Coplanar proofmasses employable to sense acceleration along three axes |
US7447565B2 (en) * | 2004-05-06 | 2008-11-04 | John Cerwin | Electronic alignment system |
NO321281B1 (en) * | 2004-09-15 | 2006-04-18 | Sintef | Infrared source |
KR101064285B1 (en) * | 2005-04-15 | 2011-09-14 | 매그나칩 반도체 유한회사 | Single-axis acceleration detection element and sensor using the same |
US7258011B2 (en) * | 2005-11-21 | 2007-08-21 | Invensense Inc. | Multiple axis accelerometer |
DE102007007016B4 (en) * | 2006-02-08 | 2016-01-14 | Continental Teves Ag & Co. Ohg | tire module |
DE102007010782B4 (en) * | 2006-03-02 | 2016-02-04 | Continental Teves Ag & Co. Ohg | Tire module with piezoelectric transducer |
DE102007010780B4 (en) * | 2006-03-02 | 2016-01-28 | Continental Teves Ag & Co. Ohg | Tire module with piezoelectric transducer |
FR2899889B1 (en) * | 2006-04-12 | 2008-07-04 | Commissariat Energie Atomique | INERTIAL MICROELECTRONIC DEVICE WITH LIQUID INTEGRATOR |
WO2007141944A1 (en) * | 2006-06-08 | 2007-12-13 | Murata Manufacturing Co., Ltd. | Acceleration sensor |
JP2008008820A (en) * | 2006-06-30 | 2008-01-17 | Hitachi Ltd | Inertia sensor and its manufacturing method |
DE102006048381A1 (en) * | 2006-10-12 | 2008-04-17 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Sensor for detecting accelerations |
US8026714B2 (en) * | 2008-03-06 | 2011-09-27 | Symphony Acoustics, Inc. | Accelerometer with enhanced DC stability |
JP2010156610A (en) * | 2008-12-26 | 2010-07-15 | Kyocera Corp | Acceleration sensor element and acceleration sensor |
TW201034932A (en) * | 2009-03-31 | 2010-10-01 | Domintech Co Ltd | Capacitor type three-axis accelerometer for microelectromechanical systems (MEMS) |
JP5652775B2 (en) | 2009-05-29 | 2015-01-14 | トレックス・セミコンダクター株式会社 | Acceleration sensor element and acceleration sensor having the same |
CN101858929B (en) * | 2010-05-21 | 2012-09-05 | 中国科学院上海微***与信息技术研究所 | Capacitive micro-acceleration sensor with symmetrically combined elastic beam structure and production method thereof |
CN102608355B (en) * | 2011-11-23 | 2017-03-15 | 中国计量学院 | Resonance dynamic balance tunnel current formula 3-axis acceleration sensor and manufacture method |
CN102608356B (en) * | 2011-12-06 | 2018-09-21 | 中国计量学院 | A kind of double-shaft micromechanical resonant accelerometer structure and production method |
KR101299730B1 (en) * | 2012-05-31 | 2013-08-22 | 삼성전기주식회사 | Sensor |
CN103675346B (en) | 2012-09-21 | 2018-03-06 | 中国科学院地质与地球物理研究所 | A kind of accelerometer and its manufacturing process |
JP6339669B2 (en) | 2013-07-08 | 2018-06-06 | モーション・エンジン・インコーポレーテッド | MEMS device and method of manufacturing |
US10273147B2 (en) | 2013-07-08 | 2019-04-30 | Motion Engine Inc. | MEMS components and method of wafer-level manufacturing thereof |
EP3028007A4 (en) | 2013-08-02 | 2017-07-12 | Motion Engine Inc. | Mems motion sensor and method of manufacturing |
US9778042B2 (en) * | 2013-12-13 | 2017-10-03 | Intel Corporation | Opto-mechanical inertial sensor |
JP6590812B2 (en) | 2014-01-09 | 2019-10-16 | モーション・エンジン・インコーポレーテッド | Integrated MEMS system |
WO2015154173A1 (en) | 2014-04-10 | 2015-10-15 | Motion Engine Inc. | Mems pressure sensor |
US11674803B2 (en) | 2014-06-02 | 2023-06-13 | Motion Engine, Inc. | Multi-mass MEMS motion sensor |
CN106461394A (en) | 2014-06-26 | 2017-02-22 | 路梅戴尼科技公司 | System and methods for determining rotation from nonlinear periodic signals |
TWI616656B (en) * | 2014-12-01 | 2018-03-01 | 村田製作所股份有限公司 | A mems sensor and a semiconductor package |
WO2016090467A1 (en) | 2014-12-09 | 2016-06-16 | Motion Engine Inc. | 3d mems magnetometer and associated methods |
CA3220839A1 (en) | 2015-01-15 | 2016-07-21 | Motion Engine Inc. | 3d mems device with hermetic cavity |
US9989553B2 (en) | 2015-05-20 | 2018-06-05 | Lumedyne Technologies Incorporated | Extracting inertial information from nonlinear periodic signals |
CN105021846B (en) * | 2015-07-06 | 2018-04-17 | 西安交通大学 | A kind of six axis one type micro acceleration sensors and preparation method thereof |
CN105182003B (en) * | 2015-07-14 | 2018-02-13 | 重庆大学 | Torsional pendulum type differential capacitance accelerometer and preparation method with buffer structure |
CN105137117B (en) * | 2015-09-10 | 2017-12-26 | 重庆大学 | A kind of MEMS current vortexs accelerometer and preparation method |
BR112018008393B1 (en) | 2015-10-30 | 2023-03-07 | Ion Geophysical Corporation | MULTI-AXIS ACCELERATION SENSOR, MULTI-AXIS ACCELERATION SENSOR APPARATUS, METHOD OF ASSEMBLING A MULTI-AXIS ACCELERATION SENSOR, AND MULTI-AXIS ACCELEROMETER |
US10234477B2 (en) | 2016-07-27 | 2019-03-19 | Google Llc | Composite vibratory in-plane accelerometer |
EP3850373A1 (en) | 2018-09-13 | 2021-07-21 | ION Geophysical Corporation | Multi-axis, single mass accelerometer |
CN110308308B (en) * | 2019-06-27 | 2021-07-13 | 深迪半导体(绍兴)有限公司 | In-plane translational accelerometer with compensation electrode |
CN111308126A (en) * | 2019-12-10 | 2020-06-19 | 电子科技大学 | Capacitive triaxial accelerometer with mass block increased and manufacturing method thereof |
US11892467B2 (en) | 2020-12-18 | 2024-02-06 | Analog Devices, Inc. | Accelerometer with translational motion of masses |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3717036A (en) * | 1970-04-06 | 1973-02-20 | Lacoste & Romberg | Force measuring device |
US4398417A (en) * | 1981-08-13 | 1983-08-16 | Rockwell International Corporation | Three-axis accelerometer having flexure bearing with overload protection |
US4872342A (en) * | 1986-06-27 | 1989-10-10 | Sundstrand Data Control, Inc. | Translational accelerometer and accelerometer assembly method |
US5081867A (en) * | 1988-09-30 | 1992-01-21 | Nec Corporation | Semiconductor sensor |
JP3010725B2 (en) * | 1990-11-01 | 2000-02-21 | 日産自動車株式会社 | Semiconductor acceleration sensor |
JP2765316B2 (en) * | 1991-11-21 | 1998-06-11 | 日本電気株式会社 | Capacitive three-axis acceleration sensor |
JP2654602B2 (en) * | 1992-12-25 | 1997-09-17 | 日本電気株式会社 | Semiconductor dynamic quantity sensor |
US5594170A (en) * | 1994-06-15 | 1997-01-14 | Alliedsignal Inc. | Kip cancellation in a pendulous silicon accelerometer |
DE69509312T2 (en) * | 1994-06-29 | 1999-11-04 | New Sd Inc | Accelerometer and process for its manufacture |
DE19547642A1 (en) * | 1994-12-20 | 1996-06-27 | Zexel Corp | Multi-axis acceleration sensor for motor vehicle system |
JPH08211091A (en) * | 1995-02-07 | 1996-08-20 | Mitsubishi Electric Corp | Semiconductor acceleration detecting device |
-
2000
- 2000-07-10 DE DE60030268T patent/DE60030268T2/en not_active Expired - Lifetime
- 2000-07-10 EP EP00305807A patent/EP1172657B1/en not_active Expired - Lifetime
-
2001
- 2001-05-22 US US09/863,665 patent/US6705167B2/en not_active Expired - Lifetime
- 2001-06-12 KR KR1020010032962A patent/KR20020005957A/en not_active Application Discontinuation
- 2001-07-06 BR BR0102762-0A patent/BR0102762A/en not_active Application Discontinuation
- 2001-07-09 JP JP2001207561A patent/JP2002107375A/en active Pending
- 2001-07-10 CN CNB011224800A patent/CN1201151C/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20020002864A1 (en) | 2002-01-10 |
EP1172657B1 (en) | 2006-08-23 |
CN1201151C (en) | 2005-05-11 |
EP1172657A1 (en) | 2002-01-16 |
JP2002107375A (en) | 2002-04-10 |
US6705167B2 (en) | 2004-03-16 |
CN1333147A (en) | 2002-01-30 |
KR20020005957A (en) | 2002-01-18 |
DE60030268T2 (en) | 2007-03-29 |
BR0102762A (en) | 2002-02-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
R082 | Change of representative |
Ref document number: 1172657 Country of ref document: EP Representative=s name: HOEFER & PARTNER, 81543 MUENCHEN, DE |