DE59902551D1 - Anordnung zur feuchtemessung - Google Patents

Anordnung zur feuchtemessung

Info

Publication number
DE59902551D1
DE59902551D1 DE59902551T DE59902551T DE59902551D1 DE 59902551 D1 DE59902551 D1 DE 59902551D1 DE 59902551 T DE59902551 T DE 59902551T DE 59902551 T DE59902551 T DE 59902551T DE 59902551 D1 DE59902551 D1 DE 59902551D1
Authority
DE
Germany
Prior art keywords
arrangement
humidity measurement
humidity
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE59902551T
Other languages
English (en)
Inventor
Helmut Mitter
Dieter Wagner
Josef Hartl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
E&E Elektronik GmbH
Original Assignee
E&E Elektronik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by E&E Elektronik GmbH filed Critical E&E Elektronik GmbH
Application granted granted Critical
Publication of DE59902551D1 publication Critical patent/DE59902551D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G01N27/225Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
DE59902551T 1998-11-06 1999-10-28 Anordnung zur feuchtemessung Expired - Lifetime DE59902551D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AT0072498U AT3295U1 (de) 1998-11-06 1998-11-06 Anordnung zur feuchtemessung
PCT/EP1999/008165 WO2000028311A1 (de) 1998-11-06 1999-10-28 Anordnung zur feuchtemessung

Publications (1)

Publication Number Publication Date
DE59902551D1 true DE59902551D1 (de) 2002-10-10

Family

ID=3498144

Family Applications (1)

Application Number Title Priority Date Filing Date
DE59902551T Expired - Lifetime DE59902551D1 (de) 1998-11-06 1999-10-28 Anordnung zur feuchtemessung

Country Status (6)

Country Link
US (1) US6483324B1 (de)
EP (1) EP1046030B1 (de)
JP (1) JP4202606B2 (de)
AT (2) AT3295U1 (de)
DE (1) DE59902551D1 (de)
WO (1) WO2000028311A1 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4513161B2 (ja) * 2000-03-31 2010-07-28 東亞合成株式会社 ガスセンサの製造方法及びガスセンサ
JP2002116172A (ja) 2000-10-10 2002-04-19 Ngk Spark Plug Co Ltd 湿度センサ
US7037112B2 (en) * 2002-12-20 2006-05-02 Kimberly-Clark Worldwide, Inc. Virtual arm for measurement of humidity, temperature, and water vapor transmission rate in materials
JP4160851B2 (ja) * 2003-03-31 2008-10-08 富士通株式会社 指紋認識用半導体装置
DE10316933A1 (de) * 2003-04-12 2004-10-21 E+E Elektronik Gmbh Sensorsystem und Verfahren zu dessen Herstellung
JP3994975B2 (ja) * 2004-02-27 2007-10-24 株式会社デンソー 容量式湿度センサ
JP2006010547A (ja) * 2004-06-28 2006-01-12 Denso Corp 湿度センサモジュールおよび湿度センサの実装構造
US7205779B2 (en) * 2005-01-25 2007-04-17 Jennings Thomas A Apparatus and method for monitoring and determining the moisture content in elastomer materials
JP2006344903A (ja) * 2005-06-10 2006-12-21 Fujifilm Holdings Corp 半導体モジュール
US7373819B2 (en) * 2005-09-30 2008-05-20 Honeywell International Inc. Stress sensitive humidity sensor based on a MEMS structure
DE102005062005A1 (de) * 2005-12-22 2007-06-28 Innovative Sensor Technology Ist Ag Vorrichtung zur Bestimmung und/oder Überwachung mindestens einer Prozessgröße
DE102008053909A1 (de) * 2008-10-30 2010-05-27 Novar Gmbh Gasdetektor
US9156600B2 (en) * 2008-11-06 2015-10-13 The Aerospace Corporation Modified polyimides and moisture interactive materials and products including the same
WO2010113712A1 (ja) * 2009-03-31 2010-10-07 アルプス電気株式会社 容量型湿度センサ及びその製造方法
DE102009053022A1 (de) 2009-07-29 2011-05-19 Curtius, Fritz Vorrichtung zur Effizienzdiagnose auf der Basis von Dampf, H2O in lufttechnischen Anlagen
US8413505B2 (en) * 2010-10-27 2013-04-09 Gudeng Precision Industrial Co, Ltd Temperature and humidity measuring device deployed on substrate
JP5483443B2 (ja) * 2010-11-05 2014-05-07 フィガロ技研株式会社 ガスセンサ及びその製造方法
JP5595230B2 (ja) * 2010-11-05 2014-09-24 フィガロ技研株式会社 ガスセンサ
DE102015203680A1 (de) * 2015-03-02 2016-09-08 Siemens Aktiengesellschaft Verfahren zum Herstellen einer elektronischen Schaltung, Baugruppe mit einer elektronischen Schaltung sowie Fertigungsanlage zur Herstellung einer elektronischen Schaltung
CH713645A2 (de) * 2017-01-30 2018-09-28 Signode Ind Group Llc Umreifungsvorrichtung mit einem Betätigungselement der Spanneinrichtung.
CN107389735A (zh) * 2017-05-22 2017-11-24 江苏时瑞电子科技有限公司 一种基于分子筛的湿度传感器的制备方法
EP3646016A1 (de) * 2017-06-28 2020-05-06 E+E Elektronik Ges.m.b.H. Sensorvorrichtung
DE102022201926A1 (de) * 2022-02-24 2023-09-07 Volkswagen Aktiengesellschaft Sensorelement, insbesondere in Form eines SMD-Bauelementes

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH539848A (de) 1972-07-10 1973-07-31 Sina Ag Vorrichtung zum Messen der relativen Feuchte eines gasförmigen Mediums
JPS5431715B2 (de) * 1972-09-20 1979-10-09
GB1464605A (en) * 1973-08-14 1977-02-16 Nippon Sheet Glass Co Ltd Humidity-sensitive sensor
EP0057728B1 (de) * 1980-07-21 1986-05-28 Hitachi, Ltd. Feuchtigkeitsempfindliches element, feuchtigkeitsempfindliches material sowie verfahren zu deren herstellung
US4337658A (en) * 1980-10-14 1982-07-06 Honeywell Inc. Humidity sensor
US4562725A (en) * 1982-07-31 1986-01-07 Shimadzu Corporation Moisture sensor and a process for the production thereof
DE3313150C1 (de) * 1983-04-12 1984-10-04 Endress U. Hauser Gmbh U. Co, 7867 Maulburg Duennschicht-Feuchtsensor zur Messung der absoluten Feuchte und Verfahren zu seiner Herstellung
JPS61235745A (ja) 1985-04-11 1986-10-21 Sharp Corp 湿度センサ−
US4942364A (en) * 1988-02-19 1990-07-17 Asahi Kasei Kogyo Kabushiki Kaisha Moisture and dew-detection sensor
DE3924634A1 (de) 1989-07-26 1991-01-31 Otmar Greisinger Sensor fuer elektrische hygrometer
US5179347A (en) * 1992-04-10 1993-01-12 Irrometer Company, Inc. Electrical sensor for sensing moisture in soils
US5345821A (en) * 1993-01-15 1994-09-13 A.I.R., Inc. Relative humidity sensing apparatus
US5388443A (en) 1993-06-24 1995-02-14 Manaka; Junji Atmosphere sensor and method for manufacturing the sensor
WO1998027411A1 (de) * 1996-12-17 1998-06-25 Laboratorium Für Physikalische Elektronik Institut Für Quantenelektronik Verfahren zum aufbringen eines mikrosystems oder wandlers auf ein substrat und nach diesem verfahren herstellbare vorrichtung

Also Published As

Publication number Publication date
EP1046030A1 (de) 2000-10-25
US6483324B1 (en) 2002-11-19
ATE223573T1 (de) 2002-09-15
EP1046030B1 (de) 2002-09-04
JP4202606B2 (ja) 2008-12-24
AT3295U1 (de) 1999-12-27
WO2000028311A1 (de) 2000-05-18
JP2002529733A (ja) 2002-09-10

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Legal Events

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