DE59400534D1 - Liquid metal ion source for generating cobalt ion beams - Google Patents

Liquid metal ion source for generating cobalt ion beams

Info

Publication number
DE59400534D1
DE59400534D1 DE59400534T DE59400534T DE59400534D1 DE 59400534 D1 DE59400534 D1 DE 59400534D1 DE 59400534 T DE59400534 T DE 59400534T DE 59400534 T DE59400534 T DE 59400534T DE 59400534 D1 DE59400534 D1 DE 59400534D1
Authority
DE
Germany
Prior art keywords
liquid metal
metal ion
ion source
beams
generating cobalt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE59400534T
Other languages
German (de)
Inventor
Jochen Dr Teichert
Evelyn Hesse
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Juelich GmbH
Forschungszentrum Dresden Rossendorf eV
Original Assignee
Forschungszentrum Juelich GmbH
Forschungszentrum Dresden Rossendorf eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Forschungszentrum Juelich GmbH, Forschungszentrum Dresden Rossendorf eV filed Critical Forschungszentrum Juelich GmbH
Application granted granted Critical
Publication of DE59400534D1 publication Critical patent/DE59400534D1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/20—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers
    • H01J27/22—Metal ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H01J2237/0802—Field ionization sources
    • H01J2237/0805—Liquid metal sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
DE59400534T 1993-04-13 1994-04-02 Liquid metal ion source for generating cobalt ion beams Expired - Fee Related DE59400534D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4312028A DE4312028A1 (en) 1993-04-13 1993-04-13 Liquid metal ion source for generating cobalt ion beams

Publications (1)

Publication Number Publication Date
DE59400534D1 true DE59400534D1 (en) 1996-10-02

Family

ID=6485363

Family Applications (2)

Application Number Title Priority Date Filing Date
DE4312028A Withdrawn DE4312028A1 (en) 1993-04-13 1993-04-13 Liquid metal ion source for generating cobalt ion beams
DE59400534T Expired - Fee Related DE59400534D1 (en) 1993-04-13 1994-04-02 Liquid metal ion source for generating cobalt ion beams

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE4312028A Withdrawn DE4312028A1 (en) 1993-04-13 1993-04-13 Liquid metal ion source for generating cobalt ion beams

Country Status (2)

Country Link
EP (1) EP0620582B1 (en)
DE (2) DE4312028A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE602004005442T2 (en) 2004-07-28 2007-12-06 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Emitter for an ion source and method for its production
DE102006059274A1 (en) * 2006-12-13 2008-06-26 Stein, Ralf Method for manufacturing ceramic component, particularly for movement of mechanical clock, involves milling out component from blank by micro milling technique, where component is rotationally symmetric and it is balance-wheel
DE102007027097B4 (en) 2007-06-12 2010-12-30 Forschungszentrum Dresden - Rossendorf E.V. Liquid metal ion source for generating lithium-ion beams

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0622094B2 (en) * 1983-11-28 1994-03-23 株式会社日立製作所 Liquid metal ion source
JPH0685309B2 (en) * 1985-12-13 1994-10-26 株式会社日立製作所 Liquid metal ion source

Also Published As

Publication number Publication date
EP0620582A1 (en) 1994-10-19
DE4312028A1 (en) 1994-10-20
EP0620582B1 (en) 1996-08-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee