DE50305978D1 - HOLDERING FOR HOLDING SEMICONDUCTOR WAFERS IN A CHEMICAL-MECHANICAL POLISHING DEVICE - Google Patents

HOLDERING FOR HOLDING SEMICONDUCTOR WAFERS IN A CHEMICAL-MECHANICAL POLISHING DEVICE

Info

Publication number
DE50305978D1
DE50305978D1 DE50305978T DE50305978T DE50305978D1 DE 50305978 D1 DE50305978 D1 DE 50305978D1 DE 50305978 T DE50305978 T DE 50305978T DE 50305978 T DE50305978 T DE 50305978T DE 50305978 D1 DE50305978 D1 DE 50305978D1
Authority
DE
Germany
Prior art keywords
retaining ring
semiconductor wafers
mechanical polishing
holdering
chemical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE50305978T
Other languages
German (de)
Inventor
Wilfried Ensinger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ensinger Kunststofftechnologie GbR
Original Assignee
Ensinger Kunststofftechnologie GbR
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ensinger Kunststofftechnologie GbR filed Critical Ensinger Kunststofftechnologie GbR
Priority to DE50305978T priority Critical patent/DE50305978D1/en
Application granted granted Critical
Publication of DE50305978D1 publication Critical patent/DE50305978D1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B24B37/30—Work carriers for single side lapping of plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B24B37/30—Work carriers for single side lapping of plane surfaces
    • B24B37/32—Retaining rings

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

A retaining ring to be fitted on a chemical mechanical polishing apparatus for semiconductor wafers is disclosed, the retaining ring being of integral design made of a plastic material, wherein the retaining ring forms on a first front side thereof a bearing surface for supporting the retaining ring on a polishing surface of the polishing apparatus, and includes on the side thereof lying opposite the first front side thereof in axial direction fitting elements for fitting the retaining ring on the polishing apparatus.
DE50305978T 2002-10-02 2003-10-01 HOLDERING FOR HOLDING SEMICONDUCTOR WAFERS IN A CHEMICAL-MECHANICAL POLISHING DEVICE Expired - Fee Related DE50305978D1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE50305978T DE50305978D1 (en) 2002-10-02 2003-10-01 HOLDERING FOR HOLDING SEMICONDUCTOR WAFERS IN A CHEMICAL-MECHANICAL POLISHING DEVICE

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10247180A DE10247180A1 (en) 2002-10-02 2002-10-02 Retaining ring for holding semiconductor wafers in a chemical mechanical polishing device
DE50305978T DE50305978D1 (en) 2002-10-02 2003-10-01 HOLDERING FOR HOLDING SEMICONDUCTOR WAFERS IN A CHEMICAL-MECHANICAL POLISHING DEVICE
PCT/EP2003/010868 WO2004033153A2 (en) 2002-10-02 2003-10-01 Retaining ring for holding semiconductor wafers in a chemical-mechanical polishing device

Publications (1)

Publication Number Publication Date
DE50305978D1 true DE50305978D1 (en) 2007-01-25

Family

ID=32010415

Family Applications (2)

Application Number Title Priority Date Filing Date
DE10247180A Withdrawn DE10247180A1 (en) 2002-10-02 2002-10-02 Retaining ring for holding semiconductor wafers in a chemical mechanical polishing device
DE50305978T Expired - Fee Related DE50305978D1 (en) 2002-10-02 2003-10-01 HOLDERING FOR HOLDING SEMICONDUCTOR WAFERS IN A CHEMICAL-MECHANICAL POLISHING DEVICE

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE10247180A Withdrawn DE10247180A1 (en) 2002-10-02 2002-10-02 Retaining ring for holding semiconductor wafers in a chemical mechanical polishing device

Country Status (11)

Country Link
US (1) US6824458B2 (en)
EP (1) EP1549464B1 (en)
JP (1) JP2006502576A (en)
KR (1) KR20050067147A (en)
CN (1) CN1694782A (en)
AT (1) ATE347971T1 (en)
AU (1) AU2003287956A1 (en)
DE (2) DE10247180A1 (en)
ES (1) ES2279193T3 (en)
TW (1) TW200531790A (en)
WO (1) WO2004033153A2 (en)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040261945A1 (en) * 2002-10-02 2004-12-30 Ensinger Kunststofftechnoligie Gbr Retaining ring for holding semiconductor wafers in a chemical mechanical polishing apparatus
US20040259485A1 (en) * 2002-10-02 2004-12-23 Ensinger Kunstsofftechnoligie Gbr Retaining ring for holding semiconductor wafers in a chemical mechanical polishing apparatus
TWM255104U (en) * 2003-02-05 2005-01-11 Applied Materials Inc Retaining ring with flange for chemical mechanical polishing
DE10311830A1 (en) * 2003-03-14 2004-09-23 Ensinger Kunststofftechnologie Gbr Spacer profile between glass panes in a double glazing structure has an organic and/or inorganic bonding agent matrix containing particles to adsorb water vapor and keep the space dry
US6974371B2 (en) * 2003-04-30 2005-12-13 Applied Materials, Inc. Two part retaining ring
US20050005416A1 (en) * 2003-07-08 2005-01-13 Sather Alvin William Method for hardening the wear portion of a retaining ring
US7485028B2 (en) 2004-03-19 2009-02-03 Saint-Gobain Performance Plastics Corporation Chemical mechanical polishing retaining ring, apparatuses and methods incorporating same
US7086939B2 (en) * 2004-03-19 2006-08-08 Saint-Gobain Performance Plastics Corporation Chemical mechanical polishing retaining ring with integral polymer backing
DE102004017789A1 (en) * 2004-04-02 2005-10-20 Ensinger Kunststofftechnologie Retaining ring for holding semiconductor wafers in a chemical mechanical polishing apparatus
DE102004062799A1 (en) * 2004-12-20 2006-06-29 Ensinger Kunststofftechnologie GbR (vertretungsberechtigter Gesellschafter Wilfried Ensinger, 71154 Nufringen) Plastic material for the production of retaining rings
KR200395968Y1 (en) * 2005-06-16 2005-09-15 주식회사 윌비에스엔티 Retainer ring of chemical mechanical polishing apparatus
US7789736B2 (en) 2006-10-13 2010-09-07 Applied Materials, Inc. Stepped retaining ring
JP2008229790A (en) * 2007-03-22 2008-10-02 Nec Electronics Corp Retainer ring and polishing device
DE102007049811B4 (en) * 2007-10-17 2016-07-28 Peter Wolters Gmbh Rotor disc, method for coating a rotor disc and method for the simultaneous double-sided material removing machining of semiconductor wafers
KR200460150Y1 (en) * 2009-06-15 2012-05-07 시너스(주) retainer ring structure for chemical-mechanical polishing machine
US8740673B2 (en) * 2010-10-05 2014-06-03 Strasbaugh CMP retaining ring with soft retaining ring insert
US9017138B2 (en) 2012-01-25 2015-04-28 Applied Materials, Inc. Retaining ring monitoring and control of pressure
WO2013184349A1 (en) * 2012-06-05 2013-12-12 Applied Materials, Inc. Two-part retaining ring with interlock features
US20150050869A1 (en) * 2013-08-13 2015-02-19 Cnus Co., Ltd. Retainer ring structure for chemical-mechanical polishing machine and method for manufacturing the same
JP6256737B2 (en) * 2013-08-14 2018-01-10 シーエヌユーエス カンパニー，リミテッド Retainer ring structure for chemical mechanical polishing equipment
JP6252734B2 (en) * 2013-08-14 2017-12-27 シーエヌユーエス カンパニー，リミテッド Retainer ring structure for chemical mechanical polishing apparatus and method for manufacturing the same
CN103639888B (en) * 2013-11-29 2016-06-22 上海华力微电子有限公司 Retainer ring and rubbing head
JP6392193B2 (en) * 2015-10-14 2018-09-19 株式会社荏原製作所 Substrate holding device, substrate polishing device, and method of manufacturing substrate holding device
CN111644977A (en) * 2020-07-17 2020-09-11 中国科学院微电子研究所 Polishing retainer ring and polishing head

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4212137A (en) * 1978-07-20 1980-07-15 Norton Company Segmental grinding wheel and composite abrading segments therefor
JPH0385480U (en) * 1989-12-19 1991-08-29
JPH071328A (en) * 1992-11-27 1995-01-06 Toshiba Corp Polishing device and method
US6024630A (en) 1995-06-09 2000-02-15 Applied Materials, Inc. Fluid-pressure regulated wafer polishing head
US5643061A (en) * 1995-07-20 1997-07-01 Integrated Process Equipment Corporation Pneumatic polishing head for CMP apparatus
US5695392A (en) 1995-08-09 1997-12-09 Speedfam Corporation Polishing device with improved handling of fluid polishing media
JP3072962B2 (en) * 1995-11-30 2000-08-07 ロデール・ニッタ株式会社 Workpiece holder for polishing and method of manufacturing the same
JPH10100066A (en) * 1996-09-30 1998-04-21 Toshiba Corp Polishing device
US6183354B1 (en) 1996-11-08 2001-02-06 Applied Materials, Inc. Carrier head with a flexible membrane for a chemical mechanical polishing system
US6030280A (en) 1997-07-23 2000-02-29 Speedfam Corporation Apparatus for holding workpieces during lapping, honing, and polishing
US6068548A (en) 1997-12-17 2000-05-30 Intel Corporation Mechanically stabilized retaining ring for chemical mechanical polishing
US5993302A (en) 1997-12-31 1999-11-30 Applied Materials, Inc. Carrier head with a removable retaining ring for a chemical mechanical polishing apparatus
JP2917992B1 (en) * 1998-04-10 1999-07-12 日本電気株式会社 Polishing equipment
US6390904B1 (en) * 1998-05-21 2002-05-21 Applied Materials, Inc. Retainers and non-abrasive liners used in chemical mechanical polishing
US6251215B1 (en) * 1998-06-03 2001-06-26 Applied Materials, Inc. Carrier head with a multilayer retaining ring for chemical mechanical polishing
DE19827308A1 (en) 1998-06-19 1999-12-30 Philipps Hans Joachim Adjustable fastening element for uprights for balustrades and railings
JP2000084836A (en) * 1998-09-08 2000-03-28 Speedfam-Ipec Co Ltd Carrier and polishing device
US6439984B1 (en) 1998-09-16 2002-08-27 Entegris, Inc. Molded non-abrasive substrate carrier for use in polishing operations
US6390908B1 (en) * 1999-07-01 2002-05-21 Applied Materials, Inc. Determining when to replace a retaining ring used in substrate polishing operations
US6186880B1 (en) 1999-09-29 2001-02-13 Semiconductor Equipment Technology Recyclable retaining ring assembly for a chemical mechanical polishing apparatus
JP2001121411A (en) 1999-10-29 2001-05-08 Applied Materials Inc Wafer polisher
US6264540B1 (en) * 2000-03-30 2001-07-24 Speedfam-Ipec Corporation Method and apparatus for disposable bladder carrier assembly
KR100335569B1 (en) * 2000-05-18 2002-05-08 윤종용 Polishing head of chemical and mechanical apparatus for polishing wafer
US6354927B1 (en) * 2000-05-23 2002-03-12 Speedfam-Ipec Corporation Micro-adjustable wafer retaining apparatus
US6471566B1 (en) * 2000-09-18 2002-10-29 Lam Research Corporation Sacrificial retaining ring CMP system and methods for implementing the same
JP3627143B2 (en) 2000-10-23 2005-03-09 株式会社東京精密 Wafer polishing equipment
JP4548936B2 (en) * 2000-12-28 2010-09-22 株式会社クレハ Workpiece holding ring for polishing equipment

Also Published As

Publication number Publication date
EP1549464A2 (en) 2005-07-06
CN1694782A (en) 2005-11-09
EP1549464B1 (en) 2006-12-13
AU2003287956A8 (en) 2004-05-04
US6824458B2 (en) 2004-11-30
DE10247180A1 (en) 2004-04-15
KR20050067147A (en) 2005-06-30
ATE347971T1 (en) 2007-01-15
TW200531790A (en) 2005-10-01
AU2003287956A1 (en) 2004-05-04
WO2004033153A2 (en) 2004-04-22
ES2279193T3 (en) 2007-08-16
US20040067723A1 (en) 2004-04-08
WO2004033153A3 (en) 2004-07-01
JP2006502576A (en) 2006-01-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee