DE50200467D1 - SPM sensor and method of making the same - Google Patents

SPM sensor and method of making the same

Info

Publication number
DE50200467D1
DE50200467D1 DE50200467T DE50200467T DE50200467D1 DE 50200467 D1 DE50200467 D1 DE 50200467D1 DE 50200467 T DE50200467 T DE 50200467T DE 50200467 T DE50200467 T DE 50200467T DE 50200467 D1 DE50200467 D1 DE 50200467D1
Authority
DE
Germany
Prior art keywords
making
same
spm sensor
spm
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE50200467T
Other languages
German (de)
Inventor
Stefan Lutter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NanoWorld AG
Original Assignee
NanoWorld AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NanoWorld AG filed Critical NanoWorld AG
Application granted granted Critical
Publication of DE50200467D1 publication Critical patent/DE50200467D1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/16—Probe manufacture
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G01Q70/10—Shape or taper

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Pressure Sensors (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Weting (AREA)
DE50200467T 2002-03-20 2002-03-20 SPM sensor and method of making the same Expired - Lifetime DE50200467D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP02006227A EP1359593B1 (en) 2002-03-20 2002-03-20 SPM sensor and method for its manufacture

Publications (1)

Publication Number Publication Date
DE50200467D1 true DE50200467D1 (en) 2004-06-24

Family

ID=28799633

Family Applications (1)

Application Number Title Priority Date Filing Date
DE50200467T Expired - Lifetime DE50200467D1 (en) 2002-03-20 2002-03-20 SPM sensor and method of making the same

Country Status (5)

Country Link
US (1) US6958124B2 (en)
EP (1) EP1359593B1 (en)
JP (1) JP3813591B2 (en)
DE (1) DE50200467D1 (en)
DK (1) DK1359593T3 (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1347264B1 (en) * 2002-03-20 2004-12-15 Nanoworld AG Method of fabricating a probe for SPM
KR100624434B1 (en) * 2004-09-07 2006-09-19 삼성전자주식회사 Semiconductor probe with resistive tip and methoc of fabricating the same
TWI264542B (en) * 2005-03-22 2006-10-21 Nat Applied Res Laboratories Front-wing probe cantilever of electrical scanning probe microscopy
US7571638B1 (en) 2005-05-10 2009-08-11 Kley Victor B Tool tips with scanning probe microscopy and/or atomic force microscopy applications
US9423693B1 (en) 2005-05-10 2016-08-23 Victor B. Kley In-plane scanning probe microscopy tips and tools for wafers and substrates with diverse designs on one wafer or substrate
DE602005009285D1 (en) * 2005-06-14 2008-10-09 Nat Applied Res Laboratories Bend beam with front wings for the conductive probe of an electric scanning probe microscope.
US7784107B2 (en) * 2006-06-02 2010-08-24 Victor B. Kley High speed measurement, analysis and imaging systems and methods for length scales from meter to sub-nanometer
CN101501785A (en) * 2006-06-02 2009-08-05 维克托·B·克利 High-speed measurement, analysis and imaging systems and methods for length scales from meter to sub-nanometer
US8062535B2 (en) 2007-01-31 2011-11-22 Chung Hoon Lee Video rate-enabling probes for atomic force microscopy
EP2104111A1 (en) 2008-03-20 2009-09-23 Nanoworld AG SPM-probe with shortened cantilever
US8828243B2 (en) 2010-09-02 2014-09-09 Applied Nanostructures, Inc. Scanning probe having integrated silicon tip with cantilever
US8307461B2 (en) 2011-01-20 2012-11-06 Primenano, Inc. Fabrication of a microcantilever microwave probe
EP2502876B1 (en) * 2011-03-24 2014-11-19 NanoWorld AG Micromechanical device with a cantilever and an integrated electrical device
US9778572B1 (en) 2013-03-15 2017-10-03 Victor B. Kley In-plane scanning probe microscopy tips and tools for wafers and substrates with diverse designs on one wafer or substrate

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0413042B1 (en) * 1989-08-16 1992-12-16 International Business Machines Corporation Method of producing micromechanical sensors for the afm/stm profilometry and micromechanical afm/stm sensor head
US5580827A (en) * 1989-10-10 1996-12-03 The Board Of Trustees Of The Leland Stanford Junior University Casting sharpened microminiature tips
EP0468071B1 (en) 1990-07-25 1994-09-14 International Business Machines Corporation Method of producing micromechanical sensors for the AFM/STM/MFM profilometry and micromechanical AFM/STM/MFM sensor head
US5923033A (en) * 1994-09-14 1999-07-13 Olympus Optical Co., Ltd. Integrated SPM sensor having a photodetector mounted on a probe on a free end of a supported cantilever
US5466948A (en) * 1994-10-11 1995-11-14 John M. Baker Monolithic silicon opto-coupler using enhanced silicon based LEDS
US5948972A (en) * 1994-12-22 1999-09-07 Kla-Tencor Corporation Dual stage instrument for scanning a specimen
EP0726444B1 (en) * 1995-02-10 2001-10-31 Bruker Analytik Gmbh Magnetic resonance method and apparatus for detecting an atomic structure of a sample along a surface thereof
JPH08262040A (en) 1995-03-17 1996-10-11 Olympus Optical Co Ltd Afm cantilever
JPH08313541A (en) * 1995-05-16 1996-11-29 Olympus Optical Co Ltd Cantilever for scanning probe microscope and its manufacture
US6000280A (en) * 1995-07-20 1999-12-14 Cornell Research Foundation, Inc. Drive electrodes for microfabricated torsional cantilevers
JPH09105755A (en) * 1995-10-11 1997-04-22 Olympus Optical Co Ltd Afm cantilever and its manufacture
US5744799A (en) 1996-05-20 1998-04-28 Ohara; Tetsuo Apparatus for and method of real-time nanometer-scale position measurement of the sensor of a scanning tunneling microscope or other sensor scanning atomic or other undulating surfaces
JP3883699B2 (en) * 1997-11-20 2007-02-21 エスアイアイ・ナノテクノロジー株式会社 Self-sensing SPM probe and SPM device
US6666075B2 (en) * 1999-02-05 2003-12-23 Xidex Corporation System and method of multi-dimensional force sensing for scanning probe microscopy
EP1197726A1 (en) * 2000-10-04 2002-04-17 Eidgenössische Technische Hochschule Zürich Multipurpose Sensor and cantilever for it
US6888135B2 (en) * 2000-10-18 2005-05-03 Nec Corporation Scanning probe microscope with probe formed by single conductive material
EP1347264B1 (en) * 2002-03-20 2004-12-15 Nanoworld AG Method of fabricating a probe for SPM
DE50201728D1 (en) * 2002-05-03 2005-01-13 Nanoworld Ag Neuchatel SPM sensor and method for its production

Also Published As

Publication number Publication date
EP1359593A1 (en) 2003-11-05
DK1359593T3 (en) 2004-08-09
EP1359593B1 (en) 2004-05-19
JP2003302328A (en) 2003-10-24
US20040046119A1 (en) 2004-03-11
JP3813591B2 (en) 2006-08-23
US6958124B2 (en) 2005-10-25

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