DE50004783D1 - Elektrodenanordnung - Google Patents
ElektrodenanordnungInfo
- Publication number
- DE50004783D1 DE50004783D1 DE50004783T DE50004783T DE50004783D1 DE 50004783 D1 DE50004783 D1 DE 50004783D1 DE 50004783 T DE50004783 T DE 50004783T DE 50004783 T DE50004783 T DE 50004783T DE 50004783 D1 DE50004783 D1 DE 50004783D1
- Authority
- DE
- Germany
- Prior art keywords
- electrode assembly
- electrode
- assembly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32055—Arc discharge
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32422—Arrangement for selecting ions or species in the plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE50004783T DE50004783D1 (de) | 1999-11-17 | 2000-11-09 | Elektrodenanordnung |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19955373 | 1999-11-17 | ||
DE10024827A DE10024827B4 (de) | 1999-11-17 | 2000-05-19 | Elektrodenanordnung und ihre Verwendung |
DE50004783T DE50004783D1 (de) | 1999-11-17 | 2000-11-09 | Elektrodenanordnung |
Publications (1)
Publication Number | Publication Date |
---|---|
DE50004783D1 true DE50004783D1 (de) | 2004-01-29 |
Family
ID=7929398
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE10024827A Expired - Fee Related DE10024827B4 (de) | 1999-11-17 | 2000-05-19 | Elektrodenanordnung und ihre Verwendung |
DE50004783T Expired - Lifetime DE50004783D1 (de) | 1999-11-17 | 2000-11-09 | Elektrodenanordnung |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE10024827A Expired - Fee Related DE10024827B4 (de) | 1999-11-17 | 2000-05-19 | Elektrodenanordnung und ihre Verwendung |
Country Status (1)
Country | Link |
---|---|
DE (2) | DE10024827B4 (de) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007049649B4 (de) * | 2007-10-10 | 2011-12-08 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung und Verfahren zur Ausbildung von Beschichtungen auf Substraten innerhalb von Vakuumkammern |
DE102009037326A1 (de) * | 2009-08-14 | 2011-02-17 | Von Ardenne Anlagentechnik Gmbh | Verfahren und Vorrichtung zur langzeitstabilen plasmaaktivierten Vakuumbedampfung |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6251233B1 (en) * | 1998-08-03 | 2001-06-26 | The Coca-Cola Company | Plasma-enhanced vacuum vapor deposition system including systems for evaporation of a solid, producing an electric arc discharge and measuring ionization and evaporation |
AU2522299A (en) * | 1999-02-05 | 2000-08-25 | Applied Films Gmbh & Co. Kg | Device for coating substrates with a vaporized material under low pressure or ina vacuum using a vaporized material source |
-
2000
- 2000-05-19 DE DE10024827A patent/DE10024827B4/de not_active Expired - Fee Related
- 2000-11-09 DE DE50004783T patent/DE50004783D1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE10024827B4 (de) | 2008-03-27 |
DE10024827A1 (de) | 2001-05-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: APPLIED MATERIALS GMBH & CO. KG, 63755 ALZENAU, DE |