DE3879295D1 - Maschine-einheit mit einer statische elektrizitaet benutzenden haltevorrichtung. - Google Patents

Maschine-einheit mit einer statische elektrizitaet benutzenden haltevorrichtung.

Info

Publication number
DE3879295D1
DE3879295D1 DE8888105806T DE3879295T DE3879295D1 DE 3879295 D1 DE3879295 D1 DE 3879295D1 DE 8888105806 T DE8888105806 T DE 8888105806T DE 3879295 T DE3879295 T DE 3879295T DE 3879295 D1 DE3879295 D1 DE 3879295D1
Authority
DE
Germany
Prior art keywords
holding device
static electricity
machine unit
machine
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8888105806T
Other languages
English (en)
Other versions
DE3879295T2 (de
Inventor
Keiji Kasahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ABISARE KAKEGAWA KK
Original Assignee
ABISARE KAKEGAWA KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP62089848A external-priority patent/JPS63257481A/ja
Priority claimed from JP63-58904A external-priority patent/JPH012947A/ja
Application filed by ABISARE KAKEGAWA KK filed Critical ABISARE KAKEGAWA KK
Publication of DE3879295D1 publication Critical patent/DE3879295D1/de
Application granted granted Critical
Publication of DE3879295T2 publication Critical patent/DE3879295T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/15—Devices for holding work using magnetic or electric force acting directly on the work
    • B23Q3/154—Stationary devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/15—Devices for holding work using magnetic or electric force acting directly on the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • B25B11/002—Magnetic work holders
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T279/00—Chucks or sockets
    • Y10T279/23—Chucks or sockets with magnetic or electrostatic means

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
DE8888105806T 1987-04-14 1988-04-12 Maschine-einheit mit einer statische elektrizitaet benutzenden haltevorrichtung. Expired - Fee Related DE3879295T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP62089848A JPS63257481A (ja) 1987-04-14 1987-04-14 静電保持装置
JP63-58904A JPH012947A (ja) 1988-03-12 静電保持手段を備えた機械設備

Publications (2)

Publication Number Publication Date
DE3879295D1 true DE3879295D1 (de) 1993-04-22
DE3879295T2 DE3879295T2 (de) 1993-07-01

Family

ID=26399918

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8888105806T Expired - Fee Related DE3879295T2 (de) 1987-04-14 1988-04-12 Maschine-einheit mit einer statische elektrizitaet benutzenden haltevorrichtung.

Country Status (4)

Country Link
US (1) US4864461A (de)
EP (1) EP0297227B1 (de)
CA (1) CA1329638C (de)
DE (1) DE3879295T2 (de)

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2232147B (en) * 1989-05-12 1993-12-22 Ricoh Kk Device for transporting sheet members or similar members
US5121170A (en) * 1989-05-12 1992-06-09 Ricoh Company, Ltd. Device for transporting sheet members using an alternating voltage
JPH02307551A (ja) * 1989-05-20 1990-12-20 Abisare:Kk 静電吸着シート
US5173834A (en) * 1989-06-02 1992-12-22 Roland Dg Corporation Electrostatic attraction apparatus
US5090643A (en) * 1990-03-15 1992-02-25 Spears Morton F Force generating system
US5673750A (en) * 1990-05-19 1997-10-07 Hitachi, Ltd. Vacuum processing method and apparatus
US5452177A (en) * 1990-06-08 1995-09-19 Varian Associates, Inc. Electrostatic wafer clamp
KR0165898B1 (ko) * 1990-07-02 1999-02-01 미다 가쓰시게 진공처리방법 및 장치
JP3159727B2 (ja) * 1990-10-11 2001-04-23 株式会社リコー 給紙装置
US5224693A (en) * 1991-10-22 1993-07-06 Ricoh Company, Ltd. Multistage paper feeding/conveying apparatus and method that uses electro static forces
US5325120A (en) * 1991-11-15 1994-06-28 Kuehnle Manfred R Electrostatic reproduction apparatus having a dielectric ink-phobic imaging member and field-emission write head
US5774153A (en) * 1991-11-15 1998-06-30 Heidelberger Druckmaschinen Aktiengesellschaft Digital precision positioning system
US5213349A (en) * 1991-12-18 1993-05-25 Elliott Joe C Electrostatic chuck
US5211760A (en) * 1992-04-15 1993-05-18 Xerox Corporation Paper cleaner subsystem
JPH0640583A (ja) * 1992-07-23 1994-02-15 Ricoh Co Ltd 画像形成装置用給紙分離装置
US5600530A (en) * 1992-08-04 1997-02-04 The Morgan Crucible Company Plc Electrostatic chuck
US5459560A (en) * 1992-09-30 1995-10-17 T/R Systems, Inc. Buried electrode drum for an electrophotographic print engine with controlled resistivity layer
US5444597A (en) * 1993-01-15 1995-08-22 Blake; Julian G. Wafer release method and apparatus
US5436790A (en) * 1993-01-15 1995-07-25 Eaton Corporation Wafer sensing and clamping monitor
US5350428A (en) * 1993-06-17 1994-09-27 Vlsi Technology, Inc. Electrostatic apparatus and method for removing particles from semiconductor wafers
DE69429221T2 (de) * 1993-07-28 2002-06-27 Canon Kk Tintenstrahlaufzeichnungsgerät und Tintenstrahlaufzeichnungsverfahren
JP2718626B2 (ja) * 1993-11-16 1998-02-25 キヤノン株式会社 シート材搬送装置
US5593151A (en) * 1994-12-19 1997-01-14 Xerox Corporation Self biasing electrostatic paper transport
DE19614717A1 (de) * 1995-12-18 1997-06-19 Heidelberger Druckmasch Ag Verfahren und Vorrichtungen zum Halten von Substraten auf einem Transportband einer Druckmaschine
EP0782968B1 (de) 1995-12-18 2001-10-17 Heidelberger Druckmaschinen Aktiengesellschaft Verfahren und Vorrichtungen zum Halten von Substraten auf einem Transportband einer Druckmaschine
US5818682A (en) * 1996-08-13 1998-10-06 Applied Materials, Inc. Method and apparatus for optimizing a dechucking period used to dechuck a workpiece from an electrostatic chuck
US5864459A (en) * 1996-08-14 1999-01-26 Virginia Tech Intellectual Properties, Inc. Process for providing a glass dielectric layer on an electrically conductive substrate and electrostatic chucks made by the process
DE19818741A1 (de) * 1997-06-26 1999-01-07 Heidelberger Druckmasch Ag Einrichtung zum Fördern von Bogen in einer drucktechnischen Maschine
US6309064B1 (en) * 1997-11-20 2001-10-30 Canon Kabushiki Kaisha Printing apparatus
WO2001032114A1 (en) * 1999-11-02 2001-05-10 Wizcare Ltd. Skin-gripper
JP2002284384A (ja) * 2001-03-28 2002-10-03 Canon Inc 搬送ベルト、該搬送ベルトの製造方法、および前記搬送ベルトを備えた画像形成装置
EP1403083B1 (de) * 2002-09-26 2008-11-19 Canon Kabushiki Kaisha Förderband, welches in der Lage ist Gegenstände anzuziehen, Bilderzeugungsvorrichtung mit solch einem Förderband und Methode zu Herstellung solch eines Förderbandes
US20040066601A1 (en) * 2002-10-04 2004-04-08 Varian Semiconductor Equipment Associates, Inc. Electrode configuration for retaining cooling gas on electrostatic wafer clamp
KR100545169B1 (ko) * 2003-09-03 2006-01-24 동부아남반도체 주식회사 반도체 제조 설비의 정전척 및 이를 이용한 웨이퍼 척킹방법
CN1655022A (zh) * 2004-02-14 2005-08-17 鸿富锦精密工业（深圳）有限公司 基板贴合装置
US7137496B2 (en) * 2004-03-24 2006-11-21 China Patent Investment Limited Parallel field electrode configurations for electrorheological fluid applications
DE102004049329A1 (de) * 2004-10-09 2006-04-20 Windmöller & Hölscher Kg Vorrichtung und Verfahren zum Transport von Materialbahnen und zum Festlegen derselben auf einer Gegenlage
DE102005053072B4 (de) * 2005-11-04 2008-12-11 Universität Bremen Vorrichtung zum elektrostatischen Aufnehmen und Ablegen eines Flächengebildes
US7981221B2 (en) 2008-02-21 2011-07-19 Micron Technology, Inc. Rheological fluids for particle removal
EP2128064B1 (de) * 2008-05-29 2013-04-03 Simco Nederland B.V. Verfahren und Vorrichtung zum Zusammenhalten eines elektrisch nicht leitfähigen Objektstapels und Elektrodeneinheit dafür
CN203889500U (zh) * 2012-05-02 2014-10-22 Sri国际公司 电粘附抓取***
DE102012109073A1 (de) * 2012-09-26 2014-03-27 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum Betrieb einer Greifvorrichtung sowie elektrostatische Greifvorrichtung

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2897424A (en) * 1953-11-10 1959-07-28 Robert W Waring Electrostatic apparatus
US3253200A (en) * 1961-08-30 1966-05-24 Union Oil Co Electro-viscous fluid chuck
GB1043298A (en) * 1963-08-16 1966-09-21 F L Moseley Company Electrostatic paper holding arrangements
GB1352715A (en) * 1971-07-26 1974-05-08 Addressograph Multigraph Electrostatic holding device
GB1443215A (en) * 1973-11-07 1976-07-21 Mullard Ltd Electrostatically clamping a semiconductor wafer during device manufacture
US3916270A (en) * 1974-05-02 1975-10-28 Tektronix Inc Electrostatic holddown apparatus
US4016456A (en) * 1975-09-05 1977-04-05 The United States Of America As Represented By The Secretary Of The Navy Multielectrode grid for aligning polarized particles such as asbestos
US4184188A (en) * 1978-01-16 1980-01-15 Veeco Instruments Inc. Substrate clamping technique in IC fabrication processes
JPS5520830A (en) * 1978-07-31 1980-02-14 Tomoma Tani Lockkup device
SU776977A1 (ru) * 1978-10-23 1980-11-07 Московский Полиграфический Институт Электростатическое листоподающее устройство
JPS5758872A (en) * 1980-09-25 1982-04-08 Nozaki Kamaboko Kk Preparation of corn beef paste
JPS6059104B2 (ja) * 1982-02-03 1985-12-23 株式会社東芝 静電チヤツク板
EP0100201B1 (de) * 1982-07-22 1988-06-08 National Research Development Corporation Von einem elektroviskosen Fluidum betätigte Vorrichtungen
US4526357A (en) * 1983-01-03 1985-07-02 Coulter Systems Corporation Electro-static sheet feeding method and apparatus
JPS63257481A (ja) * 1987-04-14 1988-10-25 Abisare:Kk 静電保持装置

Also Published As

Publication number Publication date
EP0297227A2 (de) 1989-01-04
CA1329638C (en) 1994-05-17
EP0297227B1 (de) 1993-03-17
DE3879295T2 (de) 1993-07-01
EP0297227A3 (en) 1989-05-03
US4864461A (en) 1989-09-05

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee