DE3777310D1 - Verfahren zur messung der temperatur eines koerpers durch optische detektion und modulierte erwaermung. - Google Patents

Verfahren zur messung der temperatur eines koerpers durch optische detektion und modulierte erwaermung.

Info

Publication number
DE3777310D1
DE3777310D1 DE8787401843T DE3777310T DE3777310D1 DE 3777310 D1 DE3777310 D1 DE 3777310D1 DE 8787401843 T DE8787401843 T DE 8787401843T DE 3777310 T DE3777310 T DE 3777310T DE 3777310 D1 DE3777310 D1 DE 3777310D1
Authority
DE
Germany
Prior art keywords
temperature
modulated
measuring
optical detection
warming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8787401843T
Other languages
English (en)
Inventor
Olivier Berthet
Jean-Jacques Greffet
Yves Denayrolles
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ECOLE CENTRALE DES ARTS ET MAN
Electricite de France SA
Original Assignee
ECOLE CENTRALE DES ARTS ET MAN
Electricite de France SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ECOLE CENTRALE DES ARTS ET MAN, Electricite de France SA filed Critical ECOLE CENTRALE DES ARTS ET MAN
Application granted granted Critical
Publication of DE3777310D1 publication Critical patent/DE3777310D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0803—Arrangements for time-dependent attenuation of radiation signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0044—Furnaces, ovens, kilns
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0803—Arrangements for time-dependent attenuation of radiation signals
    • G01J5/0804—Shutters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0803—Arrangements for time-dependent attenuation of radiation signals
    • G01J5/0805—Means for chopping radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0896—Optical arrangements using a light source, e.g. for illuminating a surface
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/60—Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature
    • G01J5/602—Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature using selective, monochromatic or bandpass filtering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/80—Calibration
    • G01J5/802—Calibration by correcting for emissivity

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Radiation Pyrometers (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
DE8787401843T 1986-08-08 1987-08-07 Verfahren zur messung der temperatur eines koerpers durch optische detektion und modulierte erwaermung. Expired - Lifetime DE3777310D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8611542A FR2602590B1 (fr) 1986-08-08 1986-08-08 Procede de mesure de la temperature d'un corps par detection optique et echauffement module

Publications (1)

Publication Number Publication Date
DE3777310D1 true DE3777310D1 (de) 1992-04-16

Family

ID=9338170

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787401843T Expired - Lifetime DE3777310D1 (de) 1986-08-08 1987-08-07 Verfahren zur messung der temperatur eines koerpers durch optische detektion und modulierte erwaermung.

Country Status (7)

Country Link
US (1) US4799788A (de)
EP (1) EP0262996B1 (de)
AT (1) ATE73544T1 (de)
CA (1) CA1289379C (de)
DE (1) DE3777310D1 (de)
ES (1) ES2029482T3 (de)
FR (1) FR2602590B1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5167452A (en) * 1988-02-17 1992-12-01 Itt Corporation Transmission method to determine and control the temperature of wafers or thin layers with special application to semiconductors
US5098199A (en) * 1988-02-17 1992-03-24 Itt Corporation Reflectance method to determine and control the temperature of thin layers or wafers and their surfaces with special application to semiconductors
US5029117A (en) * 1989-04-24 1991-07-02 Tektronix, Inc. Method and apparatus for active pyrometry
US4985858A (en) * 1989-05-23 1991-01-15 Advanced Fuel Research, Inc. Method and apparatus for temperature determination
US5310260A (en) * 1990-04-10 1994-05-10 Luxtron Corporation Non-contact optical techniques for measuring surface conditions
US5769540A (en) * 1990-04-10 1998-06-23 Luxtron Corporation Non-contact optical techniques for measuring surface conditions
US5239488A (en) * 1990-04-23 1993-08-24 On-Line Technologies, Inc. Apparatus and method for determining high temperature surface emissivity through reflectance and radiance measurements
NL9100018A (nl) * 1991-01-08 1992-08-03 Imec Inter Uni Micro Electr Werkwijze en inrichting voor het meten van de temperatuur van een voorwerp, alsmede verwarmingswerkwijze.
GB9124797D0 (en) * 1991-11-22 1992-01-15 Secretary Trade Ind Brit Temperature measuring apparatus
US5316385A (en) * 1993-03-30 1994-05-31 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Correction-free pyrometry in radiant wall furnaces
GB2300476A (en) * 1995-04-12 1996-11-06 Otter Controls Ltd Pyrometer with laser emissivity measurement
JP2002303553A (ja) * 2001-04-04 2002-10-18 Noritake Co Ltd 温度分布測定方法および装置
US20220034719A1 (en) * 2016-08-12 2022-02-03 Thermowand Technologies, Inc. Temperature Measurement by Infrared Analysis

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH537009A (de) * 1971-10-11 1973-05-15 Bbc Brown Boveri & Cie Verfahren zur berührungslosen Messung der Oberflächentemperatur an einem Objekt
CH557528A (de) * 1973-04-30 1974-12-31 Bbc Brown Boveri & Cie Vorrichtung zur beruehrungslosen temperaturmessung an der oberflaeche duenner, langegestreckter objekte.
JPS6049246B2 (ja) * 1980-03-04 1985-10-31 秀夫 高田 赤外線による温度測定方法における測定値補償方法
US4708493A (en) * 1986-05-19 1987-11-24 Quantum Logic Corporation Apparatus for remote measurement of temperatures

Also Published As

Publication number Publication date
ES2029482T3 (es) 1992-08-16
ATE73544T1 (de) 1992-03-15
US4799788A (en) 1989-01-24
FR2602590B1 (fr) 1989-11-10
EP0262996B1 (de) 1992-03-11
CA1289379C (fr) 1991-09-24
FR2602590A1 (fr) 1988-02-12
EP0262996A1 (de) 1988-04-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee