DE3772467D1 - Belichtungssystem. - Google Patents

Belichtungssystem.

Info

Publication number: DE3772467D1
Authority: DE; Germany
Prior art keywords: exposure system; exposure
Prior art date: 1986-06-13
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

DE8787108468T

Other languages

English (en)

Inventor

Shinichi Nagata

Atsushi Kikkawa

Kenji Endo

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Dainippon Screen Manufacturing Co Ltd

Original Assignee

Dainippon Screen Manufacturing Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1986-06-13

Filing date

1987-06-11

Publication date

1991-10-02

1987-06-11 Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd

1991-10-02 Application granted granted Critical

1991-10-02 Publication of DE3772467D1 publication Critical patent/DE3772467D1/de

2007-06-12 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Links

Classifications

- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/702—Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/30—Collimators

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Optics & Photonics (AREA)
Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Non-Portable Lighting Devices Or Systems Thereof (AREA)
Lenses (AREA)

DE8787108468T 1986-06-13 1987-06-11 Belichtungssystem. Expired - Lifetime DE3772467D1 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP13847986		1986-06-13

Publications (1)

Publication Number	Publication Date
DE3772467D1 true DE3772467D1 (de)	1991-10-02

Family

ID=15223033

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE8787108468T Expired - Lifetime DE3772467D1 (de)	1986-06-13	1987-06-11	Belichtungssystem.

Country Status (4)

Country	Link
US (1)	US5005959A (de)
EP (1)	EP0250975B1 (de)
KR (1)	KR910001504B1 (de)
DE (1)	DE3772467D1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP0405563B1 (de) *	1989-06-29	1996-03-13	Dainippon Screen Mfg. Co., Ltd.	Beleuchtungssystem
DE9014406U1 (de) *	1990-10-17	1990-12-20	Kempf, Georg-Ulrich, 2057 Wentorf	Vorrichtung zum Vergrößern von transparenten Vorlagen im Durchlichtverfahren
US5713660A (en) *	1993-11-10	1998-02-03	Nikon Corporation	Illumination optical apparatus
CN103309172A (zh) *	2013-05-30	2013-09-18	京东方科技集团股份有限公司	曝光设备和曝光方法
JP6370626B2 (ja) *	2014-07-24	2018-08-08	オリンパス株式会社	照明光学系、照明装置、及び照明光学素子
KR101936467B1 (ko) *	2016-10-04	2019-01-11	인하대학교 산학협력단	비구면 렌즈

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US801766A (en) *	1904-11-05	1905-10-10	Corning Glass Works	Lens.
US1393573A (en) *	1920-10-21	1921-10-11	John A Ritter	Headlamp
US1986065A (en) *	1931-12-02	1935-01-01	Maillet Antoine Andre	Optical system having multiple foci and a single source of light
US2003804A (en) *	1932-07-21	1935-06-04	Gen Motors Corp	Lens
US3064125A (en) *	1957-09-30	1962-11-13	Corning Glass Works	Luminair
US3619023A (en) *	1969-03-04	1971-11-09	Trw Inc	Optical element for generating contour stripes
US3761184A (en) *	1972-02-07	1973-09-25	Itek Corp	Wide angle, narrow bandwidth laser detection system
US3988066A (en) *	1974-01-12	1976-10-26	Canon Kabushiki Kaisha	Light exposure apparatus for printing
US4023888A (en) *	1975-09-12	1977-05-17	Minnesota Mining And Manufacturing Company	Flashing retroreflecting device
DE2803277A1 (de) *	1978-01-26	1979-08-02	Bosch Gmbh Robert	Vorrichtung zur belichtung einer auf eine oberflaeche eines substrats aufgebrachten fotolackschicht
JPS6038681B2 (ja) *	1978-09-27	1985-09-02	キヤノン株式会社	紫外用多層膜
US4321594A (en) *	1979-11-01	1982-03-23	American District Telegraph Company	Passive infrared detector
US4389115A (en) *	1981-08-06	1983-06-21	Richter Thomas A	Optical system
CA1191728A (en) *	1982-02-08	1985-08-13	Marvin Waddington, Jr.	Imaging system utilizing a fresnel lens
JPS59101831A (ja) *	1982-12-01	1984-06-12	Canon Inc	半導体焼付露光装置
JPS60102737A (ja) *	1983-11-10	1985-06-06	Canon Inc	シヤツタ−装置
US4770525A (en) *	1986-03-24	1988-09-13	Casio Computer Co., Ltd.	Liquid crystal projector

1987
- 1987-06-11 EP EP87108468A patent/EP0250975B1/de not_active Expired - Lifetime
- 1987-06-11 DE DE8787108468T patent/DE3772467D1/de not_active Expired - Lifetime
- 1987-06-12 KR KR1019870005975A patent/KR910001504B1/ko not_active IP Right Cessation
1989
- 1989-05-24 US US07/357,642 patent/US5005959A/en not_active Expired - Fee Related

Also Published As

Publication number	Publication date
KR880000804A (ko)	1988-03-29
EP0250975A3 (en)	1988-03-23
EP0250975A2 (de)	1988-01-07
KR910001504B1 (ko)	1991-03-09
EP0250975B1 (de)	1991-08-28
US5005959A (en)	1991-04-09

Legal Events

Date	Code	Title	Description
1992-09-24	8364	No opposition during term of opposition
2000-09-07	8339	Ceased/non-payment of the annual fee

Publication	Publication Date	Title
DE68917210D1 (de)	1994-09-08	Belichtungssystem.
DE3789989D1 (de)	1994-07-14	Bilderzeugungssystem.
DE3750174D1 (de)	1994-08-11	Belichtungseinrichtung.
DE3779150D1 (de)	1992-06-25	Multiprozessorsystem.
DE3750938D1 (de)	1995-02-16	Multiprozessorsystem.
FI882221A0 (fi)	1988-05-11	Nytt system foer administrering av liposomer till daeggdjur.
DK724788A (da)	1989-07-01	Fotohaerdeligt, ionomert cementsystem
FI883560A0 (fi)	1988-07-29	System foer att bestaemma en fysikalisk storhets extremvaerde.
DE3751555D1 (de)	1995-11-16	Photoempfindliche Zusammensetzung.
NO912941D0 (no)	1991-07-29	Lineaermotor-fremdriftssystem.
DE3788103D1 (de)	1993-12-16	Lichtempfindliche Zusammensetzung.
FI862627A0 (fi)	1986-06-19	System foer reglerande av en krans hastighet.
DE3884824D1 (de)	1993-11-18	Objekt-Positionierungssystem.
DE3786866D1 (de)	1993-09-09	Lithographisches geraet.
DE3751598D1 (de)	1995-12-21	Bilderzeugungsverfahren.
ATE74920T1 (de)	1992-05-15	Substituierte indolochinoxaline.
DE3765851D1 (de)	1990-12-06	Maskenanordnung.
DE3776010D1 (de)	1992-02-27	Kopiersystem.
DE3764006D1 (de)	1990-09-06	Substituierte aminoxypropanoate.
DE3787252D1 (de)	1993-10-07	Ortungssystem.
DE3785938D1 (de)	1993-07-01	Optisches system.
DE68925604D1 (de)	1996-03-21	S.O.R.-Belichtungssystem
ES2023141B3 (es)	1992-01-01	Algunas 3-benzoil-4-oxolactamas.
NO880055D0 (no)	1988-01-07	Lokaliseringssystem.
DE3772467D1 (de)	1991-10-02	Belichtungssystem.